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4760407 | Arimoto et al. | Jul 1988 | |
4878066 | Shiraishi | Oct 1989 | |
5006704 | Mochizuki et al. | Apr 1991 | |
5006705 | Saito et al. | Apr 1991 |
Entry |
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"Piezodriven 50-.mu.M Range Stage with Subnanometer Resolution", Rev. Sci. Instrum., vol. 49, No. 12, Dec., 1978. |