OPTICAL DEFLECTING DEVICE, OPTICAL DEFLECTING DEVICE MANUFACTURING METHOD, AND OPTICAL PROJECTING DEVICE

Abstract

Bearing portions having an approximately arc shape are provided on a lower surface of a plate-shaped member. In the bearing portions, stoppers of a regulating member are embedded. With the engagement of the lower surface of the plate-shaped member and the apex of a pivot member and the engagement of an inner surface of the bearing portions and a lower surface of the stoppers, the plate-shaped member is rotatably supported with the apex of the pivot member as a center. With a side surface of the regulating member 109 facing a side surface of the bearing portions, the position of the plate-shaped member in a rotation axis direction is regulated.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1D are drawings of the structure of an optical deflecting device according to a first embodiment of the present invention;

FIG. 2 is a drawing for explaining a rotational supporting structure of a plate-shaped member;

FIGS. 3A and 3B are drawings for explaining an optical deflecting device manufacturing method according to the first embodiment;

FIG. 4 is a drawing for explaining continuation of the manufacturing method shown in FIG. 3B;

FIG. 5 is a drawing for explaining continuation of the manufacturing method shown in FIG. 4;

FIG. 6 is a drawing for explaining continuation of the manufacturing method shown in FIG. 5;

FIG. 7 is a drawing for explaining continuation of the manufacturing method shown in FIG. 6;

FIG. 8 is a drawing for explaining continuation of the manufacturing method shown in FIG. 7;

FIG. 9 is a drawing for explaining continuation of the manufacturing method shown in FIG. 8;

FIG. 10 is a drawing for explaining continuation of the manufacturing method shown in FIG. 9;

FIG. 11 is a drawing for explaining continuation of the manufacturing method shown in FIG. 10;

FIG. 12 is a drawing for explaining continuation of the manufacturing method shown in FIG. 11;

FIGS. 13A to 13D are drawings of the structure of an optical deflecting device according to a second embodiment of the present invention;

FIGS. 14A and 14B are drawings for explaining an optical deflecting device manufacturing method according to the second embodiment;

FIG. 15 is a drawing for explaining continuation of the manufacturing method shown in FIG. 14B;

FIG. 16 is a drawing for explaining continuation of the manufacturing method shown in FIG. 15;

FIG. 17 is a drawing for explaining continuation of the manufacturing method shown in FIG. 16;

FIG. 18 is a drawing for explaining continuation of the manufacturing method shown in FIG. 17;

FIG. 19 is a drawing for explaining continuation of the manufacturing method shown in FIG. 18;

FIG. 20 is a drawing for explaining continuation of the manufacturing method shown in FIG. 19;

FIG. 21 is a drawing for explaining continuation of the manufacturing method shown in FIG. 20;

FIG. 22 is a drawing for explaining continuation of the manufacturing method shown in FIG. 21;

FIG. 23 is a drawing for explaining continuation of the manufacturing method shown in FIG. 22;

FIGS. 24A to 24D are drawings of the structure of an optical deflecting device according to a third embodiment of the present invention;

FIGS. 25A and 25B are drawings for explaining an optical deflecting device according to the third embodiment;

FIG. 26 is a drawing for explaining continuation of the manufacturing method shown in FIG. 25B;

FIG. 27 is a drawing for explaining continuation of the manufacturing method shown in FIG. 26;

FIG. 28 is a drawing for explaining continuation of the manufacturing method shown in FIG. 27;

FIG. 29 is a drawing for explaining continuation of the manufacturing method shown in FIG. 28;

FIG. 30 is a drawing for explaining continuation of the manufacturing method shown in FIG. 29;

FIG. 31 is a drawing for explaining continuation of the manufacturing method shown in FIG. 30;

FIG. 32 is a drawing for explaining continuation of the manufacturing method shown in FIG. 31;

FIG. 33 is a drawing for explaining continuation of the manufacturing method shown in FIG. 32;

FIG. 34 is a drawing for explaining continuation of the manufacturing method shown in FIG. 33; and

FIG. 35 is a schematic drawing of an optical projecting device according to a fourth embodiment of the present invention.

Claims

1. An optical deflecting device comprising: a substrate;a pivot member formed on the substrate;a regulating member formed on the substrate;a plate-shaped member having an upper surface as a light reflecting surface; anda group of electrodes formed on the substrate, whereinthe plate-shaped member has a loop-shaped bearing portion on a lower surface side,the regulating member has a stopper protruding in approximately parallel to the substrate and embedded inside the bearing portion,with an engagement of the lower surface of the plate-shaped member and an apex of the pivot member and an engagement of an inner surface of the bearing portion and a lower surface of the stopper, the plate-shaped member is rotatably supported with the apex of the pivot member as a center, and a position of the plate-shaped member in a rotation axis direction is regulated by a side surface of the regulating member facing a side surface of the bearing portion, andwith an electrostatic force generated between the group of electrodes and the plate-shaped member, the plate-shaped member is rotated with the apex of the pivot member as the center, thereby changing a reflecting direction of a light beam incident to the light reflecting surface of the plate-shaped member.

2. The optical deflecting device according to claim 1, wherein the bearing portion and the stopper have an approximately arc-shaped cross section.

3. The optical deflecting device according to claim 1, wherein the inner surface of the bearing portion and the surface of the stopper engaging the inner surface of the bearing portion have an approximately equal radius of curvature.

4. The optical deflecting device according to claim 1, wherein the plate-shaped member is formed of film-laminated layers, and a lower layer of the layers and the bearing portion are conductors.

5. The optical deflecting device according to claim 1, wherein the plate-shaped member is formed of film-laminated layers, and a lower layer of the layers and the bearing portion are insulators.

6. The optical deflecting device according to claim 4, wherein the regulating member and the stopper are conductors.

7. A method of manufacturing the optical deflecting device according to claim 1, the method comprising: after planarizing a photoresist serving as a sacrifice layer, forming a concave surface corresponding to the bearing portion through etching process;next forming a film made of a material serving as the lower layer of the plate-shaped member;next forming and patterning a sacrifice layer along the concave surface; andnext forming a film serving as the stopper of the regulating member.

8. An optical projecting device comprising: an optical deflecting device including a substrate;a pivot member formed on the substrate;a regulating member formed on the substrate;a plate-shaped member having an upper surface as a light reflecting surface; anda group of electrodes formed on the substrate, whereinthe plate-shaped member has a loop-shaped bearing portion on a lower surface side,the regulating member has a stopper protruding in approximately parallel to the substrate and embedded inside the bearing portion,with an engagement of the lower surface of the plate-shaped member and an apex of the pivot member and an engagement of an inner surface of the bearing portion and a lower surface of the stopper, the plate-shaped member is rotatably supported with the apex of the pivot member as a center, and a position of the plate-shaped member in a rotation axis direction is regulated by a side surface of the regulating member facing a side surface of the bearing portion, andwith an electrostatic force generated between the group of electrodes and the plate-shaped member, the plate-shaped member is rotated with the apex of the pivot member as the center, thereby changing a reflecting direction of a light beam incident to the light reflecting surface of the plate-shaped member;a light source that light up a light reflecting surface of a plate-shaped member of the optical deflecting device; andan optical system that projects light reflected from the light reflecting surface when the plate-shaped member of the optical deflecting device is tilted in a first tilting direction, and shields light reflected from the light reflecting surface and prevents the light from being projected outside when the plate-shaped member is tilted in a second tilting direction.