The goverment has rights in this invention pursuant to Contract No. F29601-82-C-0103 under Subcontract 04-427856-UPT which was awarded by the Department of the Air Force.
Number | Name | Date | Kind |
---|---|---|---|
4057316 | Hacman et al. | Nov 1977 | |
4072782 | Kramer et al. | Feb 1978 | |
4114978 | Bostick et al. | Sep 1978 | |
4340646 | Ohno et al. | Jul 1982 | |
4498728 | Thoni et al. | Feb 1985 | |
4645290 | Walsh | Feb 1987 | |
4662653 | Greenaway | May 1987 |
Number | Date | Country |
---|---|---|
4948835 | Dec 1974 | JPX |
54-121754 | Sep 1979 | JPX |
Entry |
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"Sputtering," McGraw-Hill Encyclopedia of Science and Technology, New York, McGraw-Hill, (1982, vol. 13, p. 18 (Q121-M3 1982) 12/82. |