Number | Name | Date | Kind |
---|---|---|---|
4198261 | Busta et al. | Apr 1980 | |
4208240 | Latos | Jun 1980 | |
4328068 | Curtis | May 1982 |
Entry |
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Hirobe, et al., "End Point Detection in Plasma Etching by Optical Emission Spectroscopy", Journal of the Electrochemical Society, Jan. 1980, pp. 234-235. |
Johnson, "Optical Methods Detect End Point in Plasma Etching", International Research and Development, Oct. 1980, pp. 181-186. |