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Monitoring and controlling tubes by information coming from the object and/or discharge
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H01J37/32935
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/32935
Monitoring and controlling tubes by information coming from the object and/or discharge
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Patents Grants
last 30 patents
Information
Patent Grant
Glow plasma stabilization
Patent number
12,362,140
Issue date
Jul 15, 2025
Servomex Group Limited
Bahram Alizadeh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for measuring magnetic fields in PVD system
Patent number
12,360,179
Issue date
Jul 15, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Wen-Hao Cheng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System, method, and apparatus for controlling ion energy distributi...
Patent number
12,354,836
Issue date
Jul 8, 2025
Advanced Energy Industries, Inc.
Victor Brouk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing device, substrate processing system, control m...
Patent number
12,354,841
Issue date
Jul 8, 2025
Tokyo Electron Limited
Hiroshi Tsujimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
End point detection method and apparatus for anisotropic etching us...
Patent number
12,347,663
Issue date
Jul 1, 2025
SanDisk Technologies, Inc.
Shoichi Murakami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF impedance matching network
Patent number
12,334,306
Issue date
Jun 17, 2025
ASM America, Inc.
Imran Ahmed Bhutta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generation quality monitoring using multi-channel sensor data
Patent number
12,327,714
Issue date
Jun 10, 2025
Applied Materials, Inc.
Jeremy Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-state RF pulsing to control mask shape and breaking selectivi...
Patent number
12,322,571
Issue date
Jun 3, 2025
Lam Research Corporation
Nikhil Dole
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF immune sensor probe for monitoring a temperature of an electrost...
Patent number
12,308,265
Issue date
May 20, 2025
Lam Research Corporation
Siyuan Tian
G01 - MEASURING TESTING
Information
Patent Grant
Throughput improvement with interval conditioning purging
Patent number
12,291,777
Issue date
May 6, 2025
Lam Research Corporation
Chun-Hao Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cylindrical cavity with impedance shifting by irises in a power-sup...
Patent number
12,288,675
Issue date
Apr 29, 2025
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate transfer position adju...
Patent number
12,288,678
Issue date
Apr 29, 2025
Tokyo Electron Limited
Joji Takayoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for filtering radio frequencies from a signal o...
Patent number
12,283,451
Issue date
Apr 22, 2025
Lam Research Corporation
Vince Burkhart
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma viewport
Patent number
12,272,534
Issue date
Apr 8, 2025
Lam Researh Corporation
Bin Luo
G02 - OPTICS
Information
Patent Grant
Substrate test apparatus and method for measuring dechucking force...
Patent number
12,261,072
Issue date
Mar 25, 2025
Semes Co., Ltd.
Jong Ho Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protection system for switches in direct drive circuits of substrat...
Patent number
12,261,029
Issue date
Mar 25, 2025
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor process apparatus and plasma ignition method
Patent number
12,261,022
Issue date
Mar 25, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jing Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for depositing a layer
Patent number
12,255,053
Issue date
Mar 18, 2025
ASM IP Holding B.V.
Daniele Piumi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Diagnostic method and system for measuring potential and electric f...
Patent number
12,255,056
Issue date
Mar 18, 2025
Southwest Jiaotong University
Yuhong Xu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Apparatus to control ion energy
Patent number
12,255,048
Issue date
Mar 18, 2025
Advanced Energy Industries, Inc.
Victor Brouk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Carbon based depositions used for critical dimension control during...
Patent number
12,249,514
Issue date
Mar 11, 2025
Lam Research Corporation
Jon Henri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for transmission and detection of free radicals
Patent number
12,247,920
Issue date
Mar 11, 2025
Wisconsin Alumni Research Foundation
J. Leon Shohet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Plasma measurement method
Patent number
12,237,157
Issue date
Feb 25, 2025
Tokyo Electron Limited
Eiki Kamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma reactor having array of coaxial multiple pins and processing...
Patent number
12,230,481
Issue date
Feb 18, 2025
HANGZHOU CITY UNIVERSITY
Qi Qiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radio frequency (RF) system with embedded RF signal pickups
Patent number
12,224,164
Issue date
Feb 11, 2025
Tokyo Electron Limited
Chelsea Dubose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Performing radio frequency matching control using a model-based dig...
Patent number
12,211,670
Issue date
Jan 28, 2025
Applied Materials, Inc.
Tao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Recipe updating method
Patent number
12,211,678
Issue date
Jan 28, 2025
Tokyo Electron Limited
Masafumi Urakawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cover with a sensor system for a configurable measuring system for...
Patent number
12,183,561
Issue date
Dec 31, 2024
SOLERAS ADVANCED COATINGS BV
Ivan Van De Putte
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming position misalignment correction method and film formi...
Patent number
12,180,580
Issue date
Dec 31, 2024
Tokyo Electron Limited
Atsushi Takeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Terminal device and RF power supply device
Patent number
12,175,569
Issue date
Dec 24, 2024
Hitachi Kokusai Electric Inc.
Naoto Takahashi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
PULSING CONTROL MATCH NETWORK AND GENERATOR
Publication number
20250232955
Publication date
Jul 17, 2025
COMET TECHNOLOGIES USA, INC.
Stephen E. SAVAS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND WAFER PR...
Publication number
20250233023
Publication date
Jul 17, 2025
Samsung Electronics Co., Ltd.
Jewon Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND POWER SUPPLY SYSTEM
Publication number
20250232954
Publication date
Jul 17, 2025
TOKYO ELECTRON LIMITED
Mitsuhiro IWANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
Publication number
20250232967
Publication date
Jul 17, 2025
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA VIEWPORT
Publication number
20250226191
Publication date
Jul 10, 2025
LAM RESEARCH CORPORATION
Bin Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20250218743
Publication date
Jul 3, 2025
SEMES CO., LTD.
In Ho KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REAL-TIME MEASUREMENT OF MICROWAVE RESONATORS AS PLASMA DIAGNOSTICS...
Publication number
20250218751
Publication date
Jul 3, 2025
Applied Materials, Inc.
DAVID PETERSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fast Frequency Tracking Control for Radiofrequency Power Amplifiers...
Publication number
20250218726
Publication date
Jul 3, 2025
LAM RESEARCH CORPORATION
Sanghyeon Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
Publication number
20250218746
Publication date
Jul 3, 2025
SEMES CO., LTD.
In Hee KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND CONTROL METHOD
Publication number
20250210308
Publication date
Jun 26, 2025
TOKYO ELECTRON LIMITED
Takamitsu TAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20250210331
Publication date
Jun 26, 2025
TOKYO ELECTRON LIMITED
Takumi IMAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
Publication number
20250201526
Publication date
Jun 19, 2025
ASM IP HOLDING B.V.
Daniele Piumi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20250191880
Publication date
Jun 12, 2025
TOKYO ELECTRON LIMITED
Yohei YAMAZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED VOLTAGE WAVEFORM BIASING OF PLASMA
Publication number
20250191884
Publication date
Jun 12, 2025
Applied Materials, Inc.
Shreeram Jyoti DASH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CARBON BASED DEPOSITIONS USED FOR CRITICAL DIMENSION CONTROL DURING...
Publication number
20250191926
Publication date
Jun 12, 2025
LAM RESEARCH CORPORATION
Jon HENRI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROGRAMMABLE PRECISION ETCHING
Publication number
20250183019
Publication date
Jun 5, 2025
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF PLASMA SHEATH WITH BIAS SUPPLIES
Publication number
20250166970
Publication date
May 22, 2025
Advanced Energy Industries, Inc.
Denis Shaw
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MONITORING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20250157799
Publication date
May 15, 2025
TOKYO ELECTRON LIMITED
Mohd Fairuz BIN BUDIMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20250149316
Publication date
May 8, 2025
TOKYO ELECTRON LIMITED
Naoki MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD TO MEASURE ION PROPERTIES IN A PLASMA SYSTEM
Publication number
20250132138
Publication date
Apr 24, 2025
TOKYO ELECTRON LIMITED
Zhiying Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA MODULATION APPARATUS FOR SUBSTRATE PROCESSING SYSTEM
Publication number
20250132131
Publication date
Apr 24, 2025
ASM IP HOLDING B.V.
Akshay Gunaji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS INCLUDING PARTIALL...
Publication number
20250125130
Publication date
Apr 17, 2025
TOKYO ELECTRON LIMITED
Sho KUMAKURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma Discharge Monitoring Method
Publication number
20250118531
Publication date
Apr 10, 2025
UCL Business LTD
M. Emre SENER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR CENTRAL FREQUENCY TUNING
Publication number
20250118534
Publication date
Apr 10, 2025
LAM RESEARCH CORPORATION
Ranadeep Bhowmick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Processing Apparatus and Method for Measuring Resonance Freq...
Publication number
20250095973
Publication date
Mar 20, 2025
TOKYO ELECTRON LIMITED
Kazushi KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED VOLTAGE-ASSISTED PLASMA STRIKE
Publication number
20250087461
Publication date
Mar 13, 2025
Applied Materials, Inc.
Shreeram Jyoti DASH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIO-FREQUENCY (RF) MATCHING NETWORK AND TUNING TECHNIQUE
Publication number
20250087462
Publication date
Mar 13, 2025
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODEL REFERENCE ADAPTIVE CONTROL WITH SIGNUM PROJECTION TENSOR OPER...
Publication number
20250087473
Publication date
Mar 13, 2025
Advanced Energy Industries, Inc.
Chad S. Samuels
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT INCL...
Publication number
20250085320
Publication date
Mar 13, 2025
Hyo Seong SEONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EARLY WARNING SYSTEMS AND METHODS FOR DETERMINING CAPACITOR FAILURES
Publication number
20250079140
Publication date
Mar 6, 2025
LAM RESEARCH CORPORATION
Sunil Kapoor
H01 - BASIC ELECTRIC ELEMENTS