1. Field of the Invention
The present invention relates to an optical module and a method for fabricating the optical module, and more particularly, to an optical module which can be produced by an easy process and at low cost, and a method for fabricating the optical module.
2. Description of the Prior Art
The advent of the Internet allows one to access and manipulate huge quantities of information in real time. Though copper wire, optical fiber, wireless means and the like are used to send and receive information, the optical fiber is especially superior for transmitting huge volumes of information at high speed. Thus, it is expected that the optical fiber will be extended into every household in the future.
However, when connecting terminal devices by optical fibers, it is necessary to provide a so-called optical module between the optical fiber and each terminal device, since terminal devices do not use optical signals but electric signals for information processing. The optical module transforms the optical signals received from the optical fiber into electric signals and provides the electric signals to the terminal device, and further transforms the electric signals received from the terminal device into the optical signals and supplies the optical signals to the optical fiber. Various types of optical modules have been proposed in the art.
As shown in
However, the optical module 10 of the type shown in
The optical module 20 shown in
That is, light of the transmission wavelength (for example, about 1.3 μm) emitted from the laser diode 25 propagates through an optical waveguide consisting of the cladding layer 22 and the core region 23b, after which it is supplied to the optical waveguide consisting of the cladding layer 22 and the core region 23a through the WDM filter 24, and enters an optical fiber that is not illustrated. Moreover, light of the reception wavelength (for example, about 1.55 μm) supplied from the optical fiber (not shown) propagates through the optical waveguide consisting of the cladding layer 22 and core region 23a, after which it is supplied to the optical waveguide which consisting of the cladding layer 22 and core region 23c through the WDM filter 24, and enters the photo-diode 26. The output of the laser diode 25 is monitored by the monitoring photo-diode 27, and the output of the laser diode 25 can therefore be optimized.
The optical module 20 of the type described above is smaller than the optical module 10 of the type shown in
It is therefore an object of the present invention to provide an improved optical module and a method for fabricating the optical module.
Another object of the present invention is to provide an optical module and a method for fabricating the optical module that can realize low cost.
A further object of the present invention is to provide an optical module that can be fabricated by an easy process and a method for fabricating the optical module.
According to one embodiment, an optical module comprises a die pad, at least two platform bodies including a first platform body and a second platform body mounted on the die pad, an optical fiber fixed on the first platform body, and a light emitter mounted on the second platform body and adapted for generating optical signals to be transmitted through the optical fiber.
According to the present invention, since at least the first platform body on which the optical fiber is mounted and the second platform body on which the light emitter is mounted can be separately fabricated, it is possible to easily design the platform bodies. Further, in the case of mounting the first platform body and the second platform body separately, since heat generated in the light emitter is not easily transmitted to the first platform body, it is possible to improve the reliability of the optical module and it is possible to control of temperature at each step during fabrication of the optical module. For example, if the first platform body is mounted after first mounting the second platform body and fixing the light emitter and the like, it is possible to fabricate components on the first platform body free from the influence of heat applied when the light emitter and the like are fixed. Furthermore, if the first platform body is mounted after first mounting the second platform body on the die pad and performing a screening test, it is not necessary to perform needless processing on a product in process that has an initial failure, and it is therefore possible to reduce manufacturing cost.
Here, the first platform body and the second platform body may be disposed on the die pad in parallel with each other or the first platform body may be placed on the second platform body. In either case, if the first platform body is mounted after the second platform body was first mounted on the die pad and a screening test was performed, it is not necessary to perform a wasteful process to the product in process which has initial failure.
In a preferred aspect of the present invention, the optical module further comprises a receiving photo-diode mounted on the first platform body and adapted for transforming optical signals received through the optical fiber into electric signals, and a filter provided so that the optical fiber is divided at the position between the receiving photo-diode and the light emitter. The optical module further comprises a ferrule in which the end portion of the optical fiber is inserted.
In a further preferred aspect of the present invention, the optical module further comprises a monitoring photo-diode which is mounted on the second platform body and used for monitoring the luminescence intensity of the light emitter. According to this aspect of the present invention, it is not only possible to optimize the luminescence intensity of the light emitter but also perform the screening test easily.
In a further preferred aspect of the present invention, the optical module further comprises an encapsulation member which covers at least part of the first platform body and the second platform body and part of the die pad. According to this preferred aspect of the present invention, since the at least two platform bodies mounted on the die pad are integrally covered by the encapsulating member, the optical module is very easy to handle. Further, since, differently from the conventional optical module, the optical module does not require fine tuning by a skilled worker, it has high fabrication efficiency. Moreover, the optical module can be realized at relatively low cost, which is not possible with the optical module including a conventional optical waveguide.
In a further preferred aspect of the present invention, the optical module further comprises silicone gel which covers at least part of the optical fiber, the receiving photo-diode, the light emitter or the filter. According to this preferred aspect of the present invention, it is possible to protect the optical fiber, the receiving photo-diode, the light emitter and/or the filter efficiently.
In a further preferred aspect of the present invention, the optical module further comprises at least one IC which receive the output signals from the receiving photo-diode and process the output signals and/or drive the light emitter. In this case, the at least one IC may be mounted on the first platform body or the second platform body, and may also be mounted on the die pad.
In a further preferred aspect of the present invention, the optical module further comprises a plurality of leads at least some of which are covered by an encapsulation member. According to this preferred aspect of the present invention, since the optical module can be mounted on a printed circuit board similarly to a conventional semiconductor device, the optical module can be easily handled. In this case, the plurality of leads may be drawn out from a package body consisting of the encapsulation member or may be terminated at a mounting surface of the package body. If the plurality of leads are provided so as to be terminated at the mounting surface of the package body, since the mounting area of the optical module on a printed circuit board can be reduced, it is possible to produce a much smaller end product.
In a further preferred aspect of the present invention, the die pad is located at a side opposite to a mounting surface of a package body with respect to the platform bodies. According to this preferred aspect of the present invention, since the die pad located on the upper surface side of the package body serves as a heat sink, it is possible to obtain a very high heat radiating property. It is therefore possible to realize miniaturization of the end product and improved reliability.
Here, the die pad may be provided on a printed circuit board.
The above objects of the present invention can be also accomplished by a method for fabricating an optical module for transmitting and receiving optical signals comprising a step of mounting on a die pad a second platform body including at least a light emitter which generates optical signals to be transmitted, a step of mounting on the die pad or the second platform body a first platform body including at least optical fibers, a receiving photo-diode that performs photoelectric conversion of an optical signal received through the optical fibers and a filter that separates the optical signal received from the optical signal to be transmitted, and a step of encapsulating the second platform body and the first platform body with an encapsulation member so that end portions of the optical fibers opposite to the light emitter are exposed.
According to the present invention, since the LE platform body including the light emitter and the PD platform body including the receiving photo-diode and the like are mounted on the die pad and integrally encapsulated with the encapsulation member, the thus fabricated optical module can be easily handled. Moreover, since, differently from the conventional optical module, the optical module does not require fine tuning by a skilled worker, it has high fabrication efficiency and it is possible to realize relatively low cost, which is not possible with the optical module including the conventional optical waveguide.
In a preferred aspect of the present invention, the method for fabricating an optical module further comprises a step of mounting the second platform body on the die pad, performing a screening test and mounting the first platform body on the die pad. According to this preferred aspect of the present invention, it is not necessary to perform needless processing on a product in process that has an initial failure.
In a further preferred aspect of the present invention, the method for fabricating an optical module further comprises a step of applying silicon gel to cover at least part of the optical fiber, the receiving photo-diode, the light emitter or the filter. According to this preferred aspect of the present invention, it is possible to effectively protect the optical fiber, the receiving photo-diode, the light emitter and/or the filter.
Preferred embodiments of the present invention will now be explained with reference to the drawings.
As shown in
The die pad 101 and the leads 102 are portions formed by cutting or etching a lead frame and are formed of metal. The kind of metal used for forming each of the die pad 101 and the leads 102 is not particularly limited but it is preferable to form both the die pad 101 and the leads 102 of an alloy having excellent electrical conductivity, thermal conductivity, mechanical strength and the like normally used for forming a lead frame, such as an alloy containing copper as a primary component or an alloy containing iron as a primary component such as 42-alloy (A42). The thickness of the die pad 101 and the leads 102 is set to be as thin as possible so as to ensure the required mechanical strength. The actual thickness thereof is not particularly limited but it is preferable to form both the die pad 101 and the leads 102 so as to have a thickness of 0.1 mm to 0.25 mm. The area of the die pad 101 is determined in accordance with the bottom surface area of the first platform 110 and the second platform 120.
The first platform 110 is a platform on which various parts for transforming optical signals supplied from the optical fiber into electric signals are mounted. A perspective view of the first platform 110 is shown in
As shown in FIGS. 1 to 3, the first platform 110 comprises a first platform body 111 made of silicon or the like, a groove 112 formed on the upper surface of the first platform body 111, an optical fiber 113 accommodated in the groove 112, a ferrule 114 provided at the end portion of the optical fiber 113, a slit 115 formed on the upper surface of the first platform body 111 so as to cross the groove 112, a WDM filter 116 inserted in the slit 115, a receiving photo-diode 117 and a receiving IC 118 mounted on the upper surface of the first platform body 111, and bonding pads 119 formed on the upper surface of the first platform body 111, the upper surfaces of the receiving photo-diode 117, the receiving IC 118 and the like. In this embodiment and a following embodiment, the first platform 110 is sometimes referred to as a PD (photo-diode) platform and the first platform body is sometimes referred to as a PD platform body.
The PD platform body 111 is made of a silicon block or the like. A step 111a is cut at the portion on the PD platform body 111 where the ferrule 114 is mounted, and the ferrule 114 is supported by the step 111a. Such a step 111a can be formed by chemical etching or mechanical dicing. Although not illustrated, an insulation film coating, such as an oxide film or a nitride film, is also formed on the upper surface of the PD platform body 111. The pad electrodes, wiring and the like connecting with some of the bonding pads 119, the receiving photo-diode 117 and the like are provided on the insulation film coating.
The groove 112 is a guidance groove for holding the optical fiber 113. The width and depth thereof are set large enough to accommodate the optical fiber 113. The groove 112 can also be formed by chemical etching or mechanical dicing. The optical fiber 113 accommodated in the grooves 112 is fixed by an adhesive agent (not illustrated).
As known widely, an optical fiber is a fiber-shaped optical waveguide which consists of a core and a cladding surrounding the core, and light propagation can be attained by utilizing the difference of these refractive indexes. The end surface of the optical fiber 113 is made flat and smooth by polishing.
As known widely, a ferrule has cylinder shape which can hold an optical fiber. One end portion of the optical fiber 113 terminates inside of the ferrule 114. By inserting another optical fiber whose end portion is polished into the ferrule 114, it is possible to accomplish optical coupling between the two optical fibers.
The slit 115 is formed on the upper surface of the PD platform body 111 so as to cross the groove 112. The width and depth thereof are set according to the size of the WDM filter 116 inserted into it. If the width of the slit 115 is wider than necessary, diffraction loss will increase. Thus, the width of the slit 115 is set only slightly larger than the thickness of the WDM filter 116. The slit 115 is provided at a predetermined angle so that the light propagating through the optical fiber 113 from the side of the ferrule 114 reflects at the WDM filter 116 and advances in a direction above the upper surface of the PD platform body 111. The angle of the slit 115 is not particularly limited but it is preferably set at an angle of about 30 degree to a plane perpendicular to the upper surface of the PD platform body 111. The slit 115 can also be formed by the chemical etching or the mechanical dicing. However, it is preferably formed by mechanical dicing because, differently from the step 111a and the groove 112, it needs to be formed at the predetermined angle while simultaneously cutting the optical fiber 113.
The WDM filter 116 is an optical filter which transmits light of the transmission wavelength (for example, about 1.3 μm) and reflects light of the reception wavelength (for example, about 1.55 μm). Since the WDM filter 116 is inserted into the slit 115 formed at the above-mentioned predetermined angle, it reflects light of the reception wavelength propagating through the optical fiber 113 from the side of the ferrule 114 upwardly of the PD platform body 111, while it transmits light of the transmission wavelength propagating through the optical fiber 113 from the side of the LE platform 120 toward the side of the ferrule 114. In addition, the slit 115 into which the WDM filter 116 is inserted is filled with an optical resin (not illustrated), thus the WDM filter 116 is securely fixed by the resin in the slit 115.
The receiving photo-diode 117 is an element that detects light of the reception wavelength reflected by the WDM filter 116 at its bottom surface and transforms the optical signals into electrical signals. The receiving photo-diode 117 is mounted so as to straddle the groove 112 at the position where a reflective light from the WDM filter 116 can be received.
The receiving IC 118 is a device for at least receiving and processing the output signals of the receiving photo-diode 117. Transfer of the data between the receiving IC 118 and the receiving photo-diode 117 is performed through the wiring pattern (not shown) formed on the upper surface of the PD platform body 111, and transfer of the data between the receiving IC 118 and a terminal device (not shown) is performed through the bonding pads 119 or the leads 102. moreover, as shown in FIGS. 1 to 3, if a bonding pad 119 is formed on the photo-diode 117, the transfer of some of the data or the supply of power between the receiving photo-diode 117 and the terminal device (not illustrated) can be performed directly. Although only a single receiving IC 118 is mounted on the PD platform 110 for each transceiver unit in this embodiment, the number of receiving ICs is not particularly limited and two or more ICs may be mounted per transceiver unit. Moreover, it is also possible to omit the receiving IC 118 if the signal from the receiving photo-diode 117 is processed by another IC not mounted on the PD platform 110.
The first platform (PD platform) 110 is configured as explained above.
The second platform 120 is a platform on which various components for transforming electric signals supplied from the terminal device into optical signals and transmitting them through the optical fiber 113 are mounted. A perspective view of the second platform 120 is shown in
As shown in
The LE platform body 121 is made of a silicon block or the like, as well as the PD platform body 111. Although not illustrated, an insulation film coating, such as an oxide film or a nitride film, is also formed on the upper surface of the LE platform body 121. Some of the bonding pads 127, the pad electrodes, or the wiring connected with some of the bonding pads 127, the light emitter 124 and the like are provided on the insulation film coating.
The V groove 122 is a guidance groove for correctly aligning the optical fiber 113 mounted therealong, and the shape thereof is defined so that the end portion of the optical fiber 113 faces the light projecting surface of the light emitter 124 correctly. The V groove 122 can also be formed by chemical etching or mechanical dicing. Chemical etching is more preferable because it is necessary to position the optical fiber 113 correctly.
The trench 123 is provided so as to make the end portion of the V groove 122 a vertical plane. This is done because the end portion the V groove 122 may become taper-like when the V groove 122 is formed by chemical etching and in such a case, it becomes difficult to orient the optical fiber 113 and the light projecting surfaces of the light emitter 124 in the correct opposing relationship. In order to correctly oppose the end portion of the optical fiber 113 and the light projecting surfaces of the light emitter 124, the end portion of the V groove 122 needs to fall in a vertical plane, and in order to realize this, the trench 123 is formed. The trench 123 can also be formed by chemical etching or mechanical dicing.
The light emitter 124 is an element for generating the light projected into the optical fiber 113. It can be a laser diode (LD) or a light emitting diode (LED). The light emitter 124 has two opposing light projecting surfaces. One light projecting surface is located on the side of the V groove 122, and the other light projecting surface is located on the side of the monitoring photo-diode 125. Therefore, part of the light from the light emitter 124 is supplied to the optical fiber 113 installed in the V groove 122, and the remainder is supplied to the monitoring photo-diode 125.
The monitoring photo-diode 125 is used to receive the light from the other light projecting surface of light emitter 124 and to monitor its intensity. The output of the monitoring photo-diode 125 is supplied to the transmitting IC 126, which optimizes the luminescence intensity of light emitter 124.
The transmitting IC 126 is a device for receiving at least the signal transmitted from a terminal device and the output signal of the monitoring photo-diode 125, processing these signals, and driving the light emitter 124. Transfer of the data between the transmitting IC 126 and light emitter 124 or the transmitting IC 126 and the monitoring photo-diode 125 is performed through the wiring pattern (not shown) provided on the upper surface of LE platform body 121. Transfer of the data between the transmitting IC 126 and the terminal device (not illustrated) is performed through the bonding pads 127 and the leads 102, which are not illustrated. Moreover, as shown in
The optical module 100 of this embodiment is completed by mounting the PD platform 110 and the LE platform 120 of the foregoing structure in order on the die pad 101, connecting the bonding pads 119, 127 and the leads 102 by the bonding wires, and encapsulating the area M with resin.
As shown in
Next, a method for fabricating the optical module 100 according to this embodiment will be explained in detail.
The method for fabricating the PD platform 110 will be explained first. In fabricating the PD platform 110, a block member of silicon or the like to serve as the PD platform body 111 is first prepared, an insulation film coating, such as an oxide film or a nitride film, is formed on the upper surface of the block member, electrodes such as the bonding pads 119 and wiring patterns are formed on the insulation film coating, and a step 111a and grooves 112 are formed on the PD platform body 111 by chemical etching or mechanical dicing. Alternatively, the step 111a and the groove 112 may be formed before forming the insulation film coating, electrodes and the like. Furthermore, the electrodes may be formed after forming the step 111a, the groove 112 and the insulation film coating.
On the other hand, an optical fiber 113 whose end portions are both polished is prepared and one end portion thereof is inserted into and fixed in the ferrule 114. The optical fiber 113 having the ferrule 114 at the one end portion thereof is accommodated in the groove 112 and fixed in the groove 112 with an adhesive agent. At this time, as shown in
Next, the slit 115 is formed by chemical etching or mechanical dicing, preferably by mechanical dicing, and the WDM filter 116 is inserted into the slit 115. And the excess space of the slit 115 is filled with optical resin, thereby fixing the WDM filter 116 in the slit 115.
Then, the receiving photo-diode 117 and the receiving IC 118 are mounted on the electrode pattern formed on the PD platform body 111. Thus, the PD platform 110 has been fabricated.
Next, a method for fabricating the LE platform 120 will be explained. In fabricating the LE platform 120, a block member of silicon or the like to serve as the LE platform body 121 is prepared in a manner similar to the fabrication of the PD platform 110. An insulation film coating, such as an oxide film or a nitride film, is formed on the upper surface of the block member, and electrodes such as the bonding pads 127 and wiring patterns are formed on the insulation film coating. Then, the V groove 122 is formed on the LE platform body 121 by chemical etching or mechanical dicing, preferably chemical etching, and the trench 123 is formed on the LE platform body 121 by chemical etching or mechanical dicing, preferably mechanical dicing. The V groove 122 and the trench 123 may be formed before forming the insulation film coating, electrode and the like. Furthermore, the electrodes may be formed after forming the V groove 122 and trench 123, the insulation film coating. However, it is necessary to form the trench 123 after forming at least the V groove 122.
Next, the light-emitter 124, the monitoring photo-diode 125 and the IC for transmission 126 are mounted on the electrode pattern formed on the LE platform body 121. This completes the LE platform 120.
Next, a method for mounting the PD platform 110 and the LE platform 120 on the die pad 101 will be explained.
First, as shown in
After such pre-molding, the portions 105b connecting the die pad 101 and leads 102, as shown in
Next, as shown in
When the screening test is passed, the PD platform 110 is mounted on a predetermined area of the die pad 101 as shown in
Next, bonding pads on each platform and predetermined leads 102 are connected electrically with bonding wires 103, after which silicone gel (not illustrated) is applied onto all optical functional elements, such as the photo-diodes for reception 117, the light emitter 124 and the like. Such silicone gel mainly serves to ensure propagation of the light signals between the light emitter 124 and optical fiber 113 and as a buffer for protecting the optical functional elements, such as the light emitter 124 and the like, from mechanical stress from outside. The mechanical stress is absorbed by the silicone gel.
Further, the area M shown in
As described above, since the PD platform 110 and the LE platform 120 are mounted on a single die pad 101 and these are encapsulated integrally by resin, the optical module 100 of this embodiment can be handled very easily. Further, differently from the conventional optical module shown in
Further, if the LE platform 120 is first mounted on the die pad 101 and the PD platform 110 is then mounted, the parts on the PD platform 110 will not be affected by the heat imparted when mounting the light emitter 124 and the like on the LE platform body 121. Accordingly, it becomes easy to control temperature at each process in the fabrication.
Furthermore, in the fabrication of the optical module 100 of this embodiment, the PD platform 110 is mounted after mounting the LE platform 120 on the die pad 101 and a screening test is then carried out. As a result, it is not necessary to perform needless processing on a product in process that has an initial failure, and is therefore possible to reduce manufacturing cost.
In the above described optical module 100, although the receiving IC 118 is mounted on the PD platform body 111 and the transmitting IC 126 is mounted on the LE platform body 121, the IC may be mounted on the die pad 101 in the present invention. Next, an embodiment in which the receiving IC 118 and the transmitting IC 126 are mounted on the die pad 101 will be explained.
As shown in
The optical module 200 according to this embodiment offers the same advantages as the optical module 100 according to the above embodiment. Further, since the receiving IC 218 and the transmitting IC 226 are not mounted on a PD platform body 211 and an LE platform body 221 but are mounted on the die pad 201, it is possible to make the PD platform body 211 and then LE platform body 221 small. As a result, it is possible to reduce the manufacturing cost as well as the cost of materials, because a large number of platform bodies 211, 221 can be produced at one time by cutting a silicon wafer processed in a predetermined manner or the like into many pieces.
In this connection, in the optical module 200 according to this embodiment, although the two ICs are mounted on the die pad 201, the number of ICs mounted on the die pad may be only one or three or more. Further, a predetermined IC may be mounted on the die pad 201 and the other ICs may be mounted on the PD platform body 211 and/or the LE platform body 221.
In the above described optical module 100 or 200, both the PD platform 110 or 210 and the LE platform 120 or 220 are mounted on the die pad 101 or 201. However, in the present invention, the PD platform 110 or 120 may be mounted on the LE platform 120 or 220 instead of the die pad 101 or 201. Next, an embodiment in which a PD platform is mounted on an LE platform will be explained.
As shown in
The optical module 200 according to this embodiment offers the same advantages as the optical module 100 according to the above embodiment. Further, since the PD platform 310 and the LE platform 320 are substantially integrated, there is an advantage that the positional relationship between the light emitter 124 and the optical fiber 113 cannot change easily even if the shape of the die pad 301 changes slightly owing to heat stress.
Moreover, although the optical module 100, 200 or 300 has the capability to receive optical signal and the capability to transmit optical signals, in the present invention, it is sufficient for the optical module to have only the capability to transmit optical signals.
As shown in
The optical module 400 according to this embodiment offers the same advantages as the optical module 100, 200 or 300 according to the above embodiments even in the case where it does not have the capability to transmit optical signals. More specifically, it is possible to prevent the heat imparted when mounting the light emitters 124 and the like on the second platform body from affecting the first platform and it is further possible to mount the first platform after mounting the second platform on the die pad and performing the screening test. Moreover, according to this embodiment, the optical module 400 does not have the capability to transmit optical signals and the number of components is proportionally fewer, whereby it is unnecessary to accommodate the tip end portion of the optical fiber in the ferrule. As a result, it is possible to simplify the process for manufacturing the optical module 400 and reduce the manufacturing cost of the optical module 400.
Furthermore, the package of the optical module in the present invention is not particularly limited to the package shown in
As shown in
As shown in
According to this embodiment, similarly to the optical module 500 of the above embodiment, it is possible not only to reduce the mounting area on a printed circuit board to smaller than that of the optical module 100, but also to obtain a very high heat radiating property because the die pad 101 exposed at the upper surface of the package body 604 serves as a heat sink. It is therefore possible to realize miniaturization of the end product and improved reliability. In this embodiment, although the bottom surface of the die pad 101 is directly exposed, a heat sink can be separately provided on the bottom surface of the die pad 101 and heat radiation be conducted through the exposed heat sink.
Next, an optical connector incorporating an optical module according to the present invention will be explained.
In the present invention, the member on which the PD platform and the LE platform are mounted is not limited to the die pad of the lead frame insofar as it is possible to support the PD platform and the LE platform mechanically and to achieve the desired heat radiating property.
As shown in
As shown in
The present invention has thus been shown and described with reference to specific embodiments. However, it should be noted that the present invention is in no way limited to the details of the described arrangements but changes and modifications may be made without departing from the scope of the appended claims.
For example, in the above embodiment, the first platform and the second platform are encapsulated in resin. However, the encapsulation material is not particularly limited and another material may be adopted.
As explained above, since the optical module according to the present invention is constituted so that the first platform and the second platform are mounted on the single die pad and the respective platforms are independent from each other, the optical module can be easily handled. Further, if the second platform is first mounted on the die pad and the first platform is then mounted, the first platform will not be affected by the heat imparted when the light emitters and the like are mounted on the second platform body. Accordingly, temperature can be easily controlled at each process of the fabrication.
Furthermore, in fabricating the optical module of this invention, if the first platform is mounted after mounting the second platform on die pad and a screening test is then performed, it is not necessary to perform needless processing on a product in process which has an initial failure. This also helps to reduce manufacturing cost.
Moreover, since, unlike the conventional optical module, the optical module according to the present invention does not require fine tuning by a skilled worker, it has high fabrication efficiency. In addition, the optical module according to the present invention can be realized at relatively lower cost than the optical module including the conventional optical waveguide.
All of the above U.S. patents, U.S. patent application publications, U.S. patent applications, foreign patents, foreign patent applications and non-patent publications referred to in this specification and/or listed in the Application Data Sheet, are incorporated herein by reference, in their entirety.
From the foregoing it will be appreciated that, although specific embodiments of the invention have been described herein for purposes of illustration, various modifications may be made without deviating from the spirit and scope of the invention. Accordingly, the invention is not limited except as by the appended claims.
Number | Date | Country | Kind |
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2002-325604 | Nov 2002 | JP | national |
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/JP03/14076 | 11/4/2003 | WO | 2/28/2006 |