Patent Grant
10365448
The present invention relates to an optical module.
A Japanese Patent laid open No. 2011-253987A has disclosed a semiconductor light-receiving device and an optical module implementing the same.
For instance, a portion of front facet beam, which is output from the front facet of a semiconductor laser diode, is split by an optical splitter, and a light-receiving device may sense this portion of the front facet beam. Specifically, an optical splitter of a type of, what is called, the prism splitter may mount a light-receiving device on one surface thereof such that the back surface of the substrate faces and is in contact with this surface. In such an arrangement, the light-receiving device may receive the portion of the split beam output from the back surface thereof.
An aspect of the present invention relates to a transmitting optical module that comprises a semiconductor laser diode (LD), a first lens, a beam splitter (BS), and a semiconductor photodiode (PD). The LD emits a divergent optical beam. The first lens is optically coupled with the LD and converts the divergent optical beam into a collimated optical beam. The BS is optical coupled with the first lens and splits the collimated optical beam into a collimated monitored beam and a collimated signal beam. The PD has a semiconductor substrate and a semiconductor stack. The semiconductor substrate has a back surface and a top surface opposite to the back surface. The back surface optically couples with the BS and receives the collimated monitored beam. The top surface forms a Fresnel interface against the semiconductor stack provided thereon. A feature of the transmitting optical module of the invention is that the PD is mounted on the BS by interposing an anti-reflection film therebetween that eliminates multiple reflections caused between the top and bottom surfaces of the semiconductor substrate for the collimated monitored beam entering through the bottom surface thereof.
The transmitting optical module of the invention may further include other LDs, other first lenses, other BSs, other PDs, an optical system, and a second lens, where a total number of LDs, that of the first lenses, that of the BSs, and that of the PDs are equal to each other. The LDs emit divergent optical beams having wavelengths different from each other. The first lenses convert the divergent optical beams into collimated beams. The BSs split the collimated beams into collimated monitored beams and collimated signal beams. The PDs receive the collimated monitored beams. The optical system multiplexes the collimated signal beams into a multiplexed beam. The second lens concentrates the multiplexed beam onto an end of an optical fiber assembled with the transmitting optical module. Each of the first lenses, each of the BSs, and the second lens form the two-lens system between each of the LDs and the optical fiber. The PDs receive the collimated monitored beams. A feature of the multi-channel transmitting optical module of the present invention is that the PDs are mounted on the BSs by interposing anti-reflection films therebetween.
The invention will now be described by way of example only with reference to the accompanying drawings in which:
Next, embodiment according to the present invention will be described as referring to drawings. In the description of the embodiment, numerals or symbols same with or similar to each other will refer to elements same with or similar to each other without duplicating explanations.
The LDs, 11a to 11d, in the optical module 1A are independently driven and emit laser beams, L1a to L1d, which are divergent beams expanding from the LDs, 11a to 11d. Driving signals supplied to the LDs, 11a to 11d, are externally provided. The LDs, 11a to 11d, which may have a type of the distributed feedback (DFB) LD, are modulated with the driving signals and have wavelengths in a band of 1.3 μm but different from each other. The first lenses, 12a to 12d, are optically coupled with the LDs, 11a to 11d; specifically, the LDs, 11a to 11d, are disposed on respective focal points of the first lenses, 12a to 12d. The laser beams, L1a to L1d, which are divergent beams, enter the first lenses, 12a to 12d, and are converted into collimated optical beams, L2a to L2d.
Because the LDs, 11a to 11d, are not ideal point sources, the laser beams passing the first lenses, 12a to 12d, do not become exact collimated beams, name, becomes quasi-collimated beams. That is, the beams, L2a to L2d, show beam waists then diverge, where the beam waist becomes a minimum field diameter.
The BS 13 are disposed on optical paths from the first lenses, 12a to 12d, to the second lenses 4, which will be described later. Further specifically, the BS13 is disposed between the first lenses, 12a to 12d, and the optical coupling system 18. The BS 13 provides a multi-layered dielectric film whose normal are inclined with optical axes of the first lenses, 12a to 12d, or with optical axes of the collimated optical beams output from the first lenses. The BS 13 splits the collimated optical beams, L2a to L2d, into collimated monitored beams and collimated signal beams passing therethrough with a ratio of 5 to 10% for the collimated monitored beams. The PDs, 14a to 14d, which are mounted on the BS 13, may receive the monitored collimated beams split by the BS 13.
The optical coupling system 18, which is optically coupled with the first lenses, 12a to 12d, through the BS 13, multiplexes the collimated signal beams and includes first and second wavelength division multiplexing (WDM) filters, 15 and 16, a mirror 17, and a polarization beam combiner (PBC) 19.
The mirror 17, which optically couples with the first lenses, 12a to 12b, through the BS 13, provides a reflecting surface arranged on optical axes of the first lenses, 12a and 12b, and incline with respect to those optical axes. The mirror 17 reflects the collimated signal beams, L2a and L2b, by an angle of substantially 90°.
The first WDM filter 15, which optically couples with the first lens 12c through the BS 13, has a wavelength selective surface arranged on the optical axis of the first lens 12c and inclines with respect to the optical axis thereof. The first WDM filter 15 transmits the collimated signal beam L2c coming from the first lens 12c concurrently with reflecting the collimated beam L2a, which is reflected by the mirror 17, toward the PBC 19. Accordingly, the collimated signal beams, L2a and L2c, align the optical axes thereof after transmitted through and reflected by the first WDM filter 15 to form a multiplexed collimated beam L3a.
The second WDM filter 16, which optically couples with the first lens 12d through the BS 13, has a wavelength selective surface thereof on the optical axis of the first lens 12d but inclined therewith. The second WDM filter 16 transmits the collimated signal beam L2d coming from the first lens 12d, while, reflects another collimated signal beam L2b reflected by the mirror 17, thereby the collimated signal beams, L2b and L2d, in the optical axes thereof may be aligned by the second WDM filter 16 and become the multiplexed collimated beam L3b.
The PBC 19, which may be made of slab material, provides first and second surfaces, 19a and 19b, where the former surface 19a forms an anti-reflection film 19c and a polarization selective film 19f thereon, while, the latter surface 19b forms a reflecting film 19e and an anti-reflection film 19f. The anti-reflection film 19c on the first surface 19a receives the multiplexed collimated beam L3a coming from the first WDM filter 15. The multiplexed collimated beam L3a reaches the reflecting film 19e on the second surface 19b passing the PBC 19, reflected thereat, and reaches the polarization selective filter 19d on the first surface 19a. On the other hand, the other multiplexed collimated beam L3b coming from the second WDM filter 16 reaches the polarization selective filter 19d on the first surface 19a. Although not illustrate in
The optical coupling unit 3 has a cylindrical shape implementing the second lens 4, and the fiber stub 6. The second lens 4 optically couples with the optical coupling system 18, exactly, optically couples with the first lenses, 12a to 12d, through the optical coupling system 18 and the BS 13. The fiber stub 6 supports the optical fiber 5. The second lens 4 may concentrate the multiplexed collimated beam L4 output from the PBC 19 on the tip end of the optical fiber 5. The coupling unit 3 is fixed, exactly welded to the front wall 2A of the housing 2 after aligned with the multiplexed collimated beam 4. The coupling unit 3, in addition to the second lens 4 and the fiber stub 5, may implement an optical isolator therein.
The optical module 1A of the present embodiment has no function to control temperatures of the LDs, 11a to 11d, the PDs, 14a to 14d, and any other optical components. Specifically, the optical module 1A does not provide a thermo-electric cooler (TEC) type of Peliter elements that electrically controls a temperature of components mounted thereon. In an optical system that allocates four wavelength channels that are relatively wider, typically called as Coarse Wavelength Division Multiplexing (CWDM); an optical signal generated by an LD may not interfere with another optical signal generated by another LD even when respective LDs are not controlled in temperatures thereof. Accordingly, removing TECs from an optical module applicable to such an optical communication system, a cost of the optical module 1A may be effectively reduced.
The laser beam L1 output from the LD11, which is a divergent beam, is converted into a collimated optical beam L2 by the first lens 12. This collimated optical beam L2 becomes a signal beam L4 passing the BS 13 and multiplexed with other collimated beam. The signal beam L4 is concentrated by the second lens 4 and finally enters an optical fiber 5. A portion L5 of the collimated optical beam L2 split by the BS 13 enters the PD 14 from a back surface thereof as a collimated monitored beam, where the PD 14 is mounted on the BS 13.
The BS 13 comprises a first glass body 13a, a second glass body 13b, and a multi-layered filter 13c sandwiched by the glass bodies, 13a and 13b. The glass bodies, 13a and 13b, may be made of material substantially transparent for the collimated optical beam L2, which is typically a glass material called as BK-7. The first glass body 13a provides a bottom 13d facing and fixed to the base 7 mounted on a base of the housing 2, and an inclined surface 13f. The second body 13b provides a top 13e on which the PD 14 is mounted, and an inclined surface 13g. Two inclined surfaces, 13f and 13g, extend parallel and face to each other and sandwich the multi-layered filter 13c therebetween. The multi-layered filter 13c in a count of the layers, and refractive indices and thicknesses of the layers may determine a split ratio of the collimated optical beam L2. The inclined surfaces, 13f and 13g, make an angle with respect to the optical axis of the collimated beam L2, which is slightly greater than 45°, which may set an incident angle of the monitored beam L5 against the normal of the top surface 13e that is greater than 0° to eliminate backward beam returning the LD 11 reflected by an Fresnel interface between the top surface 13e and the bottom of the PD 14.
The PD 14 is mounted on the top surface 13e of the BS 13 such that the back surface of the PD 14 faces and is in contact with the top surface 13e. The PD 14 receives the collimated monitored beam L5 split by the BS 13 in the back surface thereof.
The semiconductor stack 22, which is grown on the top surface 21a of the semiconductor substrate 21, includes a first contact layer 23, a light-receiving layer 24, and a second contact layer 25. These layers, 23 to 25, may be primarily made of ternary compound material of indium gallium arsenide (InGaAs). The first contact layer 23 shows n-type conduction, while, the second contact layer 25 shows p-type conduction. The light-receiving layer 24 may be an intrinsic type, that is, the light-receiving layer 24 is not intentionally doped with impurities. The first contact layer 23 forms a non-rectified contact with the n-type electrode 26, while, the second contact layer 25 forms another non-rectified contact with the p-type electrode 27. The semiconductor stack 22 is covered with an insulating film 28. The n-type electrode 26 and the p-type electrode 27 are in direct contact with the first contact layer 23 and the second contact layer 25, respectively, through openings formed in the insulating film 28. Also, the n-type electrode 26 and the p-type electrode 27 are electrically connected with a circuit board installed within the housing 2 through respective bonding wires, which are not illustrated in the figures.
In an alternative, the PD 14 is mounted on the BS 13 by the flip-chip bonding. However, the flip-chip bonding inherently shows a cost demerit because the BS 13 is necessary to provide metallic interconnections on surfaces thereof. Moreover, the PD 14 of the present invention detects an average of the monitored collimated beam, which means that the PD 14 is unnecessary to show substantial frequency response. Accordingly, the flip-chip bonding that reduces degradation of response around the PD 14 in higher frequencies becomes redundant. Thus, the optical module 1A of the present invention mounts the PD 14 on the BS 13 such that the back surface of the PD14 faces and is in contact with the top surface 13e of the BS 13, and the electrodes, 26 and 27, provided on the top surface of the PD 14 are wire-bonded. The split collimated beam L5 enters the back surface of the PD 14, namely, the back surface 21b of the semiconductor substrate 21.
The back surface 21b of the semiconductor substrate 21 provides an anti-reflection film 29 which may be made of multi-layered dielectric film to compensate mismatch in refractive indices between the semiconductor substrate 21 and the second glass body 13b, typically silicon nitride (SiN).
The PD 14 may further provide an anti-reflection film 29 on the second contact layer 25, namely, the top surface of the PD 14. This anti-reflection film 29 may be effective even in the arrangement of the back surface illumination. The beam reaching the second contact layer 25 as passing the light-sensitive layer 24 is effectively prohibited from being reflected as the interface between the second contact layer 35 and air and rerunning the light-sensitive layer 24.
The optical module 1A may provide a transparent resin 31 between the AR film 29 and the top surface 13e of the second glass member 13b. The back surface 21b of the semiconductor substrate 21 is attached to the top surface 13e through the transparent resin 31. The transparent resin 31 may be resin filling a gap between the AR film 29 and the top surface 13e. That is, no materials except for the transparent resin 31 including air are provided in the gap between the AR film 29 and the top surface 13e. Thus, the back surface 21b of the semiconductor substrate 21 is optically coupled with the multi-layered filter 13c through the AR film 29, the transparent resin 31 and the second glass body 13b. The transparent resin 31 may be ultraviolet curable resin with refractive index thereof substantially equal to refractive index of the second glass member 13b, which is about 1.5 when the second glass member 13b is made of BK-7.
Next, subjects to be solved by the optical module 1A of the present embodiment will be described. In a conventional optical module 100 shown in
Because a conventional optical module shown in
However, the two lens system inevitably shows a subject that the collimated beam, not a converged beam, enters the PD. Such an arrangement causes a multiple reflection within the PD and intensity of the beam entering the light-sensitive layer in the PD shows interference. Varying a temperature of the PD, or the optical module, and/or varying a wavelength of the beam entering the PD, the PD in an output thereof reflects the multiple inner reflections. An optical module implemented within an optical transmitter usually provides a function to maintain the output optical power by feed-backing the output of the PD to the bias current supplied to the LD. The variation or fluctuation of the output of the PD depending on the inner multiple reflections sets the intensity of the output of the LD instable.
Referring to
The semiconductor substrate made of InP has refractive index of 3.20, and the BS is made of glass has refractive index of 1.50. When the semiconductor stack is made of InGaAs, refractive index is 3.92. Thus, the interface between the semiconductor substrate and the BS, and the interface between the semiconductor substrate and the semiconductor stack cause respective differences in the refractive indices thereof; that is, two interfaces each cause Fresnel reflection. Thus, the inner multiple reflections may occur within the semiconductor substrate.
In the conventional optical system shown in
In order to eliminate the multiple reflections, at least one of the interfaces between the semiconductor substrate and the BS and between the semiconductor substrate and the semiconductor stack decreases the reflection thereat. The latter interface is necessary to change semiconductor materials. However, the semiconductor materials are determined based on optical properties to realize designed function of optical-to-electrical conversion, and is hard or almost impossible to change the semiconductor material. Also, as described above, the interface between the semiconductor substrate and the semiconductor stack shows a relatively smaller difference in the refractive indices of two materials, which shows reflectively less than 1.0%. Accordingly, the decrease in the reflectivity at the interface between the semiconductor substrate and the semiconductor stack may be ineffective. The interface between the semiconductor substrate and the BS becomes effective.
That is, the present embodiment provides the PD14 having the anti-reflecting film 29 in the back surface 21b of the substrate 21. The anti-reflection film 29 may reduce Fresnel reflection at the interface between the semiconductor substrate 21 and the transparent resin 31, or the second glass member 13b of the BS 13 having refractive index substantially equal to that of the transparent resin 31.
Thus, without the anti-reflection film 29, the transmittance shows the variation of 0.648 dB, but the variation becomes 0.356 dB for the arrangement with the anti-reflection film 29, which is substantially half of the former variation. Calculations of the transmittance indicates that the anti-reflection film 29 with the refractive index of 2.191 realizes no-reflection condition, the refractive index of 2.07 gives the variation in the transmittance within 0.1 dB, and the refractive indices of 2.14 to 2.16 result in the variation less than 0.05 dB.
Not only refractive index but a thickness of the anti-reflection film 29 affects the variation in the transmittance. Another calculation indicates that the anti-reflection film 29 has a thickness of 0.15 to 0.16 μm causes the variation in the transmittance less than 0.1 dB. An anti-reflection film made of silicon nitride (SiN) may give such conditions for eliminating the variation in the transmittance. Depending on Si composition, a SiN film may show refractive index of 1.6 to 2.5. Silicon oxy-nitride (SiON) and silicon di-oxide (SiO2) that are popular materials in the field show refractive indices of about 2.0 and about 1.45 at most; accordingly, these materials are inadequate for the arrangement of the present embodiment.
An optical module applicable to, for instance, the dense wavelength division multiplexing (DWDM) system often or inevitably provides a thermo-electric controller (TEC) to keep a temperature of an LD constant to maintain a wavelength of laser beam because a wavelength span in the DWDM system is relatively narrow. The TEC mounts not only the LD but other optical components including a PD monitoring the output power of the LD. A PD whose temperature is kept constant may show substantially no variation in the transmittance, that is, a PD implemented in such a system is unnecessary to provide the anti-reflection film in the back surface of the semiconductor substrate. The optical module 1A of the embodiment provides no thermo-electric control (TEC) to control the temperature of the LD and the PD, the anti-reflection film at the back surface of the semiconductor substrate becomes effective.
Thus, the optical module 1A of the embodiment may suppress the variation of the intensity of the incident beam depending on the temperature and the wavelength. Accordingly, the LD may be stably and reliable controlled in the optical output power. Also, the optical system from the LD to the optical fiber may only provide two lenses, one of which collimates the divergent beam output from the LD and the other concentrates thus collimated beam onto the optical fiber. The optical module 1A may be formed in compact.
An optical module according to the present invention is not restricted in arrangements thereof to those of the embodiment, and various changes and modifications are applicable thereto. For instance, the PD of the embodiment provides the semiconductor substrate made of InP with the anti-reflection film in the back surface thereof and the semiconductor stack made of InGaAs. However, a PD may provide other structures and materials. Also, the embodiment provides the transparent resin between the anti-reflection film and the second glass member of the beam splitter. However, the anti-reflection film may be in direct contact with the second glass member without the transparent resin.
| Number | Name | Date | Kind |
|---|---|---|---|
| 6646745 | Verma | Nov 2003 | B2 |
| 20030190124 | Kuhara | Oct 2003 | A1 |
| 20080298402 | Rossi | Dec 2008 | A1 |
| 20100226655 | Kim | Sep 2010 | A1 |
| 20160282174 | Hasegawa | Sep 2016 | A1 |
| Number | Date | Country |
|---|---|---|
| 2011-253987 | Dec 2011 | JP |
| Number | Date | Country | |
|---|---|---|---|
| 20190187391 A1 | Jun 2019 | US |
