Claims
- 1. A light source system comprising light source unit for emitting a beam and light guide optical system for receiving the beam emitted from said light source unit and converging it to form a light source image,
- the beam emitted from the light source image having a constant beam diameter in all outgoing directions of the beam, wherein said light guide optical system comprises a first optical system and a second optical system which are arranged in order from said light source unit,
- wherein said first optical system holds a relation of y=f.sub.1 .multidot.g.sub.1 (.theta..sub.1) when a beam enters said first optical system at an angle of incidence .theta..sub.1, where y is a height from the optical axis, of said beam as converged at a focal position of said first optical system, g.sub.1 (.theta..sub.1), a function for .theta..sub.1, and f.sub.1 a focal length of the first optical system,
- wherein said second optical system holds a relation of y=f.sub.2 .multidot.g.sub.2 (.theta..sub.2) when a beam from said first optical system at a height y from said optical axis and at said focal position of said first optical system is outgoing from the second optical system, where .theta..sub.2 is an outgoing angle, g.sub.2 (.theta..sub.2) a function for .theta..sub.2, and f.sub.2 a focal length of the second optical system, and
- wherein said first optical system and said second optical system satisfy the following relation:
- g.sub.2 '(.theta..sub.2).multidot.cos.theta..sub.1 =g.sub.1 '(.theta..sub.1),
- where g.sub.1 '(.theta..sub.1) is a derivative of g.sub.1 (.theta..sub.1) and g.sub.2 '(.theta..sub.2) a derivative of g.sub.2 (.theta..sub.2).
- 2. A light source system according to claim 1, wherein said light source units comprise a light source for emitting the beam and an optical integrator for receiving the beam emitted from said light source to form a plurality of beams.
- 3. A light source system according to claim 1, wherein said first optical system comprises an f.multidot.sin.theta. lens and said second optical system comprises an f.theta. lens.
- 4. A light source system according to claim 3, wherein said first optical system comprises a double-convex positive lens, a double-concave negative lens and a double-convex positive lens, which are arranged in order from said light source unit, and
- wherein said second optical system comprises a double-convex positive lens, a double-concave negative lens, a double-convex positive lens and a meniscus negative lens with a concave surface on the side of said light source, which are arranged in order from said light source unit.
- 5. A light source system according to claim 1, wherein in said second optical system a real image of said light source image is formed in a space within the second optical system and an aperture stop is located at a position where the real image of the light source image is formed.
- 6. A light source system according to claim 5, wherein said aperture stop has a ring aperture portion.
- 7. An illumination optical apparatus for illuminating a surface to be illuminated in the shape of arc or annulus, which comprises a light source system for forming a light source image to emit a beam and an optical reflector for reflecting the beam emitted from said light source system,
- wherein said light source system comprises light source unit for emitting the beam and light guide optical system for receiving the beam emitted from said light source unit and converging it to form a light source image, the beam emitted from said light source image having substantially constant beam diameter in all outgoing directions of the beam,
- wherein a reflective plane of said optical reflector has a curved surface which constitutes at least a part of a parabolic toric surface, said parabolic toric surface being obtained by rotating an arbitrary parabola with a first axis passing through the vertex and the focus of the parabola about a second axis passing through a point located on an opposite side to the directrix of the parabola with respect to said focus while being parallel to the directrix,
- wherein light guide optical system comprises a first optical system and a second optical system which are arranged in order from said light source unit,
- wherein said first optical system holds a relation of y=f.sub.1 .multidot.g.sub.1 (.theta..sub.1) when a beam enters said first optical system at an angle of incidence .theta..sub.1, where y is a height from the optical axis, of said beam as converged at a focal position of said first optical system, g.sub.1 (.theta..sub.1), a function for .theta..sub.1, and f.sub.1 a focal length of the first optical system,
- wherein said second optical system holds a relation of y=f.sub.2 .multidot.g.sub.2 (.theta..sub.2) when a beam from said first optical system at a height y from said optical axis and at said focal position of said first optical system is outgoing from the second optical system, where .theta..sub.2 is an outgoing angle, g.sub.2 (.theta..sub.2) a function for .theta..sub.2, and f.sub.2 a focal length of the second optical system, and
- wherein said first optical system and said second optical system satisfy the following relation:
- g.sub.2 '(.theta..sub.2).multidot.cos.theta..sub.1 =g.sub.1 '(.theta..sub.1),
- wherein g.sub.1 '(.theta..sub.1) is a derivative of g.sub.1 (.theta..sub.1) and g.sub.2 '(.theta..sub.2) a derivative of g.sub.2 (.theta..sub.2).
- 8. An illumination optical apparatus according to claim 7, wherein said light source unit comprises a light source for emitting the beam and an optical integrator for receiving the beam emitted from said light source to form a plurality of beams.
- 9. An illumination optical apparatus according to claim 7, wherein said second axis is apart from the focus at a distance equal to a distance between said focus and said directrix of the parabola.
- 10. An illumination optical apparatus according to claim 9, wherein said reflective plane of the optical reflector is formed in the shape of belt-like arc which constitutes a part of said parabolic toric surface.
- 11. An illumination optical apparatus according to claim 10, wherein the light source image emitted from said light source system is formed on said second axis.
- 12. An illumination optical apparatus according to claim 11, wherein said light source image is located around a position on said second axis which is apart from an intersection between said first axis and said second axis at a distance equal to a distance between the second axis and said focus.
- 13. An illumination optical apparatus according to claim 7, wherein said first optical system comprises an f.multidot.sin.theta. lens and said second optical system comprises an f.theta. lens.
- 14. An illumination optical apparatus according to claim 13, wherein said first optical system comprises a double-convex positive lens, a double-concave negative lens and a double-convex positive lens, which are arranged in order from said light source unit, and wherein said second optical system comprises a double-convex positive lens, a double-concave negative lens, a double-convex positive lens and a meniscus negative lens with a concave surface on the side of said light source, which are arranged in order from said light source unit.
- 15. An illumination optical apparatus according to claim 14, wherein in said second optical system a real image of said light source image is formed in a space within the second optical system and an aperture stop is located at a position where the real image of the light source image is formed.
- 16. An illumination optical apparatus according to claim 15, wherein said aperture stop has a ring aperture portion.
- 17. An illumination optical apparatus according to claim 7, wherein said light source system comprises a field stop having an aperture for defining a shape of an arcuate illumination region formed in illuminating said surface to be illuminated, at a position where the beam emitted from said first optical system is converged.
- 18. An illumination optical apparatus according to claim 17, wherein said aperture in the field stop has such a shape as to make a curvature of a contour line of an outer periphery in said arcuate illumination region substantially equal to a curvature of a contour line of an inner periphery thereof.
- 19. An illumination optical apparatus according to claim 18, wherein said shape of the aperture in the field stop is an elongate rectangle extending along a direction of rotation of said parabola and located on a plane perpendicular to the optical axis of said optical system and wherein a width of said aperture in a direction along said second axis gradually decreases toward both side edges from a central portion thereof.
- 20. An illumination optical apparatus according to claim 7, further comprising:
- mask holding unit for holding a photo mask which is to be illuminated by said illumination optical apparatus;
- substrate holding unit for holding a substrate onto which an image of a pattern on said photo mask is to be replicated;
- a projection optical system which the image of the pattern on said photo mask enters and which projects the pattern image onto said substrate; and
- transfer unit for transferring said mask holding unit and said substrate holding unit in synchronism with each other;
- wherein the image of the pattern on said photo mask is successively replicated on said substrate while said transfer unit sequentially moves said mask holding unit and said substrate holding unit.
- 21. An illumination optical apparatus according to claim 20, wherein said second axis is apart from the focus at a distance equal to a distance between said focus and said directrix of the parabola.
- 22. An illumination optical apparatus according to claim 21, wherein said reflective plane of the optical reflector is formed in the shape of belt-like arc which constitutes a part of said parabolic toric surface.
- 23. An illumination optical apparatus according to claim 22, wherein the light source image emitted from said light source system is formed on said second axis.
- 24. An illumination optical apparatus according to claim 23, wherein said light source image is located around a position on said second axis which is apart from an intersection between said first axis and said second axis at a distance equal to a distance between the second axis and said focus.
- 25. An illumination optical apparatus according to claim 24, wherein said first optical system comprises an f.multidot.sin.theta. lens and said second optical system comprises an f.theta. lens.
- 26. An illumination optical apparatus according to claim 25, wherein said first optical system comprises a double-convex positive lens, a double-concave negative lens and a double-convex positive lens, which are arranged in order from said light source unit, and wherein said second optical system comprises a double-convex positive lens, a double-concave negative lens, a double-convex positive lens and a meniscus negative lens with a concave surface on the side of said light source, which are arranged in order from said light source unit.
- 27. An illumination optical apparatus according to claim 26, wherein in said second optical system a real image of said light source image is formed in a space within the second optical system and an aperture stop is located at a position where the real image of the light source image is formed.
- 28. An illumination optical apparatus according to claim 27, wherein said aperture stop has a ring aperture portion.
- 29. An illumination optical apparatus according to claim 20, further comprising a second re-imaging optical system disposed between said surface to be illuminated and said mask holding unit, for re-imaging on said photo mask the illumination light beam projected on said surface to be illuminated.
- 30. An illumination optical apparatus according to claim 29, wherein said second re-imaging optical system comprises an aperture stop having a plurality of transparent portions and located at a position of a pupil in the second re-imaging optical system, said transparent portions being located at offset positions from the optical axis of said second re-imaging optical system.
- 31. An illumination optical apparatus according to claim 30, wherein the optical axis of said second re-imaging optical system is located on said second axis.
- 32. An illumination optical apparatus according to claim 30, wherein the optical axis of said second re-imaging optical system is located on an axis perpendicular to said surface to be illuminated.
- 33. An illumination optical system in which an optical reflector reflects a light source image emitted from a light source system to illuminate a surface to be illuminated in the shape of arc or annulus,
- wherein a reflective plane of said optical reflector has a curved surface which constitutes at least a part of a parabolic surface, said parabolic surface being obtained by rotating an arbitrary parabola about a third axis passing through the vertex and the focus of said parabola.
- 34. An illumination optical system according to claim 33, wherein said reflective plane of the optical reflector is formed in the shape of belt-like arc which constitutes a part of said parabolic surface.
- 35. An illumination optical system according to claim 34, wherein the light source image emitted from said light source system is formed on said third axis.
- 36. An illumination optical system according to claim 35, wherein said light source image is located around a position of said focus on said third axis.
- 37. An illumination optical apparatus for illuminating a surface to be illuminated in the shape of arc or annulus, which comprises a light source system for forming a light source image to emit the beam and an optical reflector for reflecting the beam emitted from said light source system,
- wherein said light source system comprises light source unit for emitting the beam and light guide optical system for receiving the beam emitted from said light source unit and converging it to form a light source image, the beam emitted from said light source image having a substantially constant beam diameter in all outgoing directions of the beam,
- wherein a reflective plane of said optical reflector has a curved surface which constitutes at least a part of a parabolic surface, said parabolic surface being obtained by rotating an arbitrary parabola about a third axis passing through the vertex and the focus of said parabola,
- wherein light guide optical system comprises a first optical system and a second optical system which are arranged in order from said light source unit,
- wherein said first optical system holds a relation of y=f.sub.1 .multidot.g.sub.1 (.theta..sub.1) when a beam enters said first optical system at an angle of incidence .theta..sub.1, where y is a height from the optical axis, of said beam as converged at a focal position of said first optical system, g.sub.1 (.theta..sub.1) a function for .theta..sub.1, and f.sub.1 a focal length of the first optical system,
- wherein said second optical system holds a relation of y=f.sub.2 .multidot.g.sub.2 (.theta..sub.2) when a beam from said first optical system at a height y from said optical axis and at said focal position of said first optical system is outgoing from the second optical system, where .theta..sub.2 is an outgoing angle, g.sub.2 (.theta..sub.2) a function for .theta..sub.2, and f.sub.2 a focal length of the second optical system, and
- wherein said first optical system and said second optical system satisfy the following relation:
- g.sub.2 '(.theta..sub.2).multidot.cos.theta..sub.1 =g.sub.1 '(.theta..sub.1),
- where g.sub.1 '(.theta..sub.1) is a derivative of g.sub.1 (.theta..sub.1) and g.sub.2 '(.theta..sub.2) a derivative of g.sub.2 '(.theta..sub.2).
- 38. An illumination optical apparatus according to claim 37, wherein said light source means comprises a light source for emitting the beam and an optical integrator for receiving the beam emitted from said light source to form a plurality of beams.
- 39. An illumination optical apparatus according to claim 37, wherein said reflective plane of the optical reflector is formed in the shape of belt-like arc which constitutes a part of said parabolic surface.
- 40. An illumination optical apparatus according to claim 39, wherein the light source image emitted from said light source system is formed on said third axis.
- 41. An illumination optical apparatus according to claim 40, wherein said light source image is located around a position of said focus on said third axis.
- 42. An illumination optical apparatus according to claim 37, wherein said first optical system comprises an f.multidot.sin.theta. lens and said second optical system comprises an f.theta. lens.
- 43. An illumination optical apparatus according to claim 42, wherein said first optical system comprises a double-convex positive lens, a double-concave negative lens and a double-convex positive lens, which are arranged in order from said light source unit, and wherein said second optical system comprises a double-convex positive lens, a double-concave negative lens, a double-convex positive lens and a meniscus negative lens with a concave surface on the side of said light source, which are arranged in order from said light source unit.
- 44. An illumination optical apparatus according to claim 43, wherein in said second optical system a real image of said light source image is formed in a space within the second optical system and an aperture stop is located at a position where the real image of the light source image is formed.
- 45. An illumination optical apparatus according to claim 44, wherein said aperture stop has a ring aperture portion.
- 46. An illumination optical apparatus according to claim 37, wherein said light source system comprises a field stop having an aperture for defining a shape of an arcuate illumination region formed in illuminating said surface to be illuminated, at a position where the beam emitted from said first optical system is converged.
- 47. An illumination optical apparatus according to claim 46, wherein said aperture in the field stop has such a shape as to make a curvature of a contour line of an outer periphery in said arcuate illumination region substantially equal to a curvature of a contour line of an inner periphery thereof.
- 48. An illumination optical apparatus according to claim 47, wherein said shape of the aperture in the field stop is an elongate rectangle extending along a direction of rotation of said parabola and located on a plane perpendicular to the optical axis of said optical system and wherein a width of said aperture in a direction along said second axis gradually decreases toward both side edges from a central portion thereof.
- 49. An illumination optical apparatus according to claim 37, further comprising a second re-imaging optical system disposed between said surface to be illuminated and said mask holding unit, for re-imaging on said photo mask the illumination light beam projected on said surface to be illuminated.
- 50. An illumination optical apparatus according to claim 49, wherein said second re-imaging optical system comprises an aperture stop having a plurality of transparent portions and located at a position of a pupil in the second re-imaging optical system, said transparent portions being located at offset positions from the optical axis of said second re-imaging optical system.
- 51. An illumination optical apparatus according to claim 50, wherein the optical axis of said second re-imaging optical system is located on said second axis.
- 52. An illumination optical apparatus according to claim 50, wherein the optical axis of said second re-imaging optical system is located on an axis perpendicular to said surface to be illuminated.
- 53. An illumination optical apparatus for illuminating a surface to be illuminated in the shape of arc or annulus, which comprises a light source system for forming a light source image to emit the beam and an optical reflector for reflecting the beam emitted from said light source system:
- mask holding unit for holding a photo mask which is to be illuminated by said illumination optical apparatus;
- substrate holding unit for holding a substrate onto which an image of a pattern on said photo mask is to be replicated;
- a projection optical system which the image of the pattern on said photo mask enters and which projects the pattern image onto said substrate; and
- transfer unit for transferring said mask holding unit and said substrate holding unit in synchronism with each other;
- wherein the image of the pattern on said photo mask is successively replicated on said substrate while said transfer unit sequentially moves said mask holding unit and said substrate holding unit,
- wherein said light source system comprises light source unit for emitting the beam and light guide optical system for receiving the beam emitted from said light source unit and converging it to form a light source image, the beam emitted from said light source image having a substantially constant beam diameter in all outgoing direction of the beam, and
- wherein a reflective plane of said optical reflector has a curved surface which constitutes at least a part of a parabolic surface, said parabolic surface being obtained by rotating an arbitrary parabola about a third axis passing through the vertex and the focus of said parabola.
- 54. An illumination optical apparatus according to claim 53, wherein said reflective plane of the optical reflector is formed in the shape of belt-like arc which constitutes a part of said parabolic surface.
- 55. An illumination optical apparatus according to claim 54, wherein the light source image emitted from said light source system is formed on said third axis.
- 56. An illumination optical apparatus according to claim 55, wherein said light source image is located around a position of said focus on said third axis.
- 57. An illumination optical apparatus according to claim 56, wherein said first optical system comprises an f.multidot.sin.theta. lens and said second optical system comprises an f.theta. lens.
- 58. An illumination optical apparatus according to claim 57, wherein said first optical system comprises a double-convex positive lens, a double-concave negative lens and a double-convex positive lens, which are arranged in order from said light source means, and wherein said second optical system comprises a double-convex positive lens, a double-convex negative lens, a double-convex positive lens and a meniscus negative lens with a concave surface on the side of said light source, which are arranged in order from said light source means.
- 59. An illumination optical apparatus according to claim 58, wherein in said second optical system a real image of said light source image is formed in a space within the second optical system and an aperture stop is located at a position where the real image of the light source image is formed.
- 60. An illumination optical apparatus according to claim 59, wherein said aperture stop has a ring aperture portion.
Priority Claims (5)
Number |
Date |
Country |
Kind |
4-242486 |
Sep 1992 |
JPX |
|
4-316717 |
Nov 1992 |
JPX |
|
5-271952 |
Oct 1993 |
JPX |
|
5-323718 |
Dec 1993 |
JPX |
|
6-134916 |
May 1994 |
JPX |
|
RELATED APPLICATIONS
This is a continuation-in-part application of application Ser. No. 08/120,873 filed on Sep. 10, 1993, now abandoned
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Non-Patent Literature Citations (1)
Entry |
N. Shiraishi et al. "New Imaging Technique for 64M-DRAM", SPIE vol. 1647 Optical/Laser Microlithography (Mar. 11-13, 1992). |
Continuation in Parts (1)
|
Number |
Date |
Country |
Parent |
120873 |
Sep 1993 |
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