Number | Name | Date | Kind |
---|---|---|---|
4748131 | Zietlow | May 1988 | |
4801988 | Kenney | Jan 1989 | |
4833094 | Kenney | May 1989 | |
4894352 | Lane et al. | Jan 1990 | |
4960581 | Harada et al. | Oct 1990 | |
5043224 | Jaccodine et al. | Aug 1991 |
Entry |
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Kouvatsos et al., "Silicon-fluorine bonding and fluorine profiling in SiO.sub.2 films grown by NF.sub.3 -enhanced oxidation", Appl. Phys. Lett. 61 (7), pp. 780-782, Aug. 17, 1992. |