Number | Date | Country | Kind |
---|---|---|---|
9-129673 | May 1997 | JP |
Number | Name | Date | Kind |
---|---|---|---|
4262280 | Kochert | Apr 1981 | |
4579455 | Levy et al. | Apr 1986 | |
5576833 | Miyoshi et al. | Nov 1996 |
Number | Date | Country |
---|---|---|
61-82107 | Apr 1986 | JP |
61-200415 | Sep 1986 | JP |
Entry |
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K. Levy et al., “4579455: Photomask Inspection Apparatus and Method with Improved Defect Detection”, Patent Server: 4579455 Detailed View, 1997, pp. 1-3. |