Pedestal for a substrate processing system

Abstract

Description

FIG. 1 is a perspective view of a pedestal for a substrate processing system;

FIG. 2 shows the perspective view with cross-sectional indicators indicating cross-sections taken from a specific depth;

FIG. 3 is a top plan view thereof;

FIG. 4 is a cross-sectional view taken along line 4-4 in FIGS. 2 and 3;

FIG. 5 is a cross-sectional view taken along line 5-5 in FIGS. 2 and 3;

FIG. 6 is a cross-sectional view along line 6-6 in FIGS. 2 and 3; and,

FIG. 7 is an enlarged fragment of area “7” in FIG. 3.

The dash-dash broken lines in the drawings illustrate portions of the article that form no part of the claimed design.

The dash-dot broken lines in the drawings indicate the cross-sections and form no part of the claimed design.

The dot-dot-dash broken lines in the drawings indicate an enlarged view and form no part of the claimed design.

The characteristic feature of the design resides in one of the shorter radial grooves being not centered between longer radial grooves on either side.

Claims

The ornamental design for a pedestal for a substrate processing system as shown and described.