Pedestal of heat insulating cylinder for manufacturing semiconductor wafers

Information

  • Patent Grant
  • D616391
  • Patent Number
    D616,391
  • Date Filed
    Wednesday, September 2, 2009
    15 years ago
  • Date Issued
    Tuesday, May 25, 2010
    14 years ago
Abstract
Description


FIG. 1 is front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;



FIG. 2 is a front view thereof;



FIG. 3 is a rear view thereof;



FIG. 4 is a right side view thereof;



FIG. 5 is a left side view thereof;



FIG. 6 is a top plan view thereof;



FIG. 7 is a bottom plan view thereof;



FIG. 8 is a cross-sectional view taken through line 88 of FIG. 2; and,



FIG. 9 is a front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers in use.


The broken lines are shown for illustrative purposes only and form no part of the claimed design.


Claims
  • The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
Priority Claims (1)
Number Date Country Kind
2009-004985 Mar 2009 JP national
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