Pedestal of heat insulating cylinder for manufacturing semiconductor wafers

Information

  • Patent Grant
  • D616396
  • Patent Number
    D616,396
  • Date Filed
    Wednesday, September 2, 2009
    15 years ago
  • Date Issued
    Tuesday, May 25, 2010
    14 years ago
Abstract
Description


FIG. 1 is front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;



FIG. 2 is a front view thereof;



FIG. 3 is a rear view thereof;



FIG. 4 is a right side view thereof;



FIG. 5 is a left side view thereof;



FIG. 6 is a top plan view thereof;



FIG. 7 is a bottom plan view thereof;



FIG. 8 is a cross-sectional view taken through line 88 of FIG. 2;



FIG. 9 is a cross-sectional view taken through line 99 of FIG. 2; and,



FIG. 10 is a front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers in use.


The broken lines are shown for illustrative purposes only and form no part of the claimed design.


Claims
  • The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
Priority Claims (1)
Number Date Country Kind
2009-005525 Mar 2009 JP national
US Referenced Citations (9)
Number Name Date Kind
4872554 Quernemoen Oct 1989 A
5897311 Nishi Apr 1999 A
D409158 Shimazu May 1999 S
6099645 Easley et al. Aug 2000 A
6110285 Kitazawa et al. Aug 2000 A
6488497 Buckley et al. Dec 2002 B1
7033168 Gupta et al. Apr 2006 B1
7484958 Kobayashi Feb 2009 B2
7501370 Narendar et al. Mar 2009 B2