Claims
- 1. An apparatus for sealing of a substrate on a substrate support comprising:
a base portion; and a seal portion in communication with said base portion, said seal portion configured in a corrugated shape.
- 2. The apparatus of claim 1, wherein said seal portion includes:
a first arm member in communication with said base portion; a second arm member in communication with said first arm member; and a “U” shaped groove intermediate said first arm member and said second arm member, said “U” shaped groove defining said corrugated shape in said seal portion.
- 3. The apparatus of claim 2, wherein said first arm member and said second arm member are configured to allow said seal portion to move linearly when said seal portion is moved between uncompressed and compressed states.
- 4. The apparatus of claim 2, wherein said second arm member includes at least one protrusion.
- 5. The apparatus of claim 4, wherein said protrusion includes at least one edge, said at least one edge in a rounded shape.
- 6. An apparatus for clamping a substrate, comprising:
a substrate support; a clamp coupled to said substrate support, said clamp configured for moving between a first inactive position, and a second active position, where a substrate is secured to said substrate support; and a corrugated shaped seal positioned around a periphery of said substrate support, said seal configured to provide a seal between the substrate support and the substrate.
- 7. The apparatus of claim 6, wherein said seal includes:
a first arm member in communication with said base portion; a second arm member in communication with said first arm member; and a “U” shaped groove intermediate said first arm member and said second arm member, said “U” shaped groove defining said corrugated shape in said seal.
- 8. The apparatus of claim 7, wherein said first arm member and said second arm member are configured to allow said seal to move linearly when said seal is moved between uncompressed and compressed states.
- 9. The apparatus of claim 8, wherein said second arm member includes at least one protrusion.
- 10. The apparatus of claim 9, wherein said protrusion includes at least one edge, said at least one edge in a rounded shape.
- 11. The apparatus of claim 6, wherein said clamp is a mechanical clamp.
- 12. The apparatus of claim 6, wherein said clamp is an electrostatic clamp.
- 13. An apparatus for clamping a substrate within a processing chamber comprising:
a clamp configured for holding the substrate to an upper surface of a chuck; a substrate release; and a corrugated shaped seal for sealing the substrate with respect to the chuck, said seal configured for extending around a periphery of the chuck.
- 14. The apparatus of claim 13, wherein said seal includes:
a first arm member in communication with said base portion; a second arm member in communication with said first arm member; and a “U” shaped groove intermediate said first arm member and said second arm member, said “U” shaped groove defining said corrugated shape in said seal.
- 15. The apparatus of claim 14, wherein said first arm member and said second arm member are configured to allow said seal to move linearly when said seal is moved between uncompressed and compressed states.
- 16. The apparatus of claim 15, wherein said second arm member includes at least one protrusion.
- 17. The apparatus of claim 16, wherein said protrusion includes at least one edge, said at least one edge in a rounded shape.
- 18. The apparatus of claim 13, wherein said clamp is a mechanical clamp and said chuck is a mechanical chuck.
- 19. The apparatus of claim 13, wherein said clamp is an electrostatic clamp and said chuck is an electrostatic chuck.
- 20. The apparatus of claim 13, wherein said substrate release includes lift pins.
- 21. A method of mechanically clamping a substrate to a substrate support, comprising:
providing a corrugated shaped seal positioned around a periphery of the substrate support, said seal including a groove defining said corrugated shape, said groove configured such that portions of said seal move between compressed and uncompressed positions; positioning a substrate having a peripheral edge upon said seal; and mechanically clamping said substrate to said substrate support, including moving said seal to a compressed position, and maintaining a sealing engagement with the substrate.
- 22. The method of claim 21, wherein said moving said seal to a compressed position includes creating a rolling contact between a portion of said seal and the substrate that maintains the sealing between said seal and the substrate.
- 23. The method of claim 21, additionally comprising, releasing said mechanical clamping on said substrate, to uncompress said seal and cause said seal to impart linear motion to the substrate to be aligned for pick-up.
- 24. The method of claim 23, wherein said uncompressing includes creating a rolling contact between a portion of said seal and the substrate.
- 25. A method of electrostatically clamping a substrate to a substrate support, comprising:
providing a corrugated shaped seal positioned around a periphery of the substrate support, said seal including a groove defining said corrugated shape, said groove configured such that portions of said seal move between compressed and uncompressed positions; positioning a substrate having a peripheral edge upon said seal; and electrostatically clamping said substrate to said substrate support, including moving said seal to a compressed position, and maintaining a sealing engagement with the substrate.
- 26. The method of claim 25, wherein said moving said seal to a compressed position includes creating a rolling contact between a portion of said seal and the substrate that maintains the sealing between said seal and the substrate.
- 27. The method of claim 25, additionally comprising, releasing said electrostatic clamping on said substrate, to uncompress said seal and cause said seal to impart linear motion to the substrate to be aligned for pick-up.
- 28. The method of claim 27, wherein said uncompressing includes creating a rolling contact between a portion of said seal and the substrate.
- 29. A method of sealing a substrate on a substrate support for processing, comprising:
providing a corrugated shaped seal positioned around a periphery of the substrate support, said seal including a groove defining said corrugated shape, said groove configured such that portions of said seal move between compressed and uncompressed positions; positioning a substrate having a peripheral edge upon said seal; and clamping said substrate to said substrate support, including moving said seal to a compressed position, and maintaining a sealing engagement with the substrate.
- 30. The method of claim 29, wherein said moving said seal to a compressed position includes creating a rolling contact between a portion of said seal and the substrate that maintains the sealing between said seal and the substrate.
- 31. The method of claim 29, additionally comprising, releasing said clamping on said substrate, to uncompress said seal and cause said seal to impart linear motion to the substrate to be aligned for pick-up.
- 32. The method of claim 31, wherein said uncompressing includes creating a rolling contact between a portion of said seal and the substrate.
- 33. The method of claim 29, wherein said clamping is by mechanical forces.
- 34. The method of claim 29, wherein said clamping is by electrostatic forces.
CROSS REFERENCES TO RELATED APPLICATIONS
[0001] This application claims priority from and is related to commonly owned U.S. Provisional Patent Application Serial No. 60/308,734, filed Jul. 30, 2001, entitled: Perimeter Seal For Backside Cooling Of Substrates, this Provisional Patent Application incorporated by reference herein.
Provisional Applications (1)
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Number |
Date |
Country |
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60308734 |
Jul 2001 |
US |