Patent Grant
7997692
The present invention relates to a perovskite oxide, a process for producing the perovskite oxide, a piezoelectric film formed of the perovskite oxide, a piezoelectric device using the piezoelectric film, and a liquid discharge device using the piezoelectric film.
Currently, demands for downsizing of piezoelectric devices, as well as semiconductor devices, are, increasing with the development of the microprocessing and micromachining. For example, piezoelectric devices constituted by a piezoelectric body and electrodes are used as, for example, actuators installed in inkjet recording heads. In the piezoelectric devices, the piezoelectric body expands and contracts in correspondence with increase and decrease in the strength of an electric field applied from the electrodes to the piezoelectric body. In order to improve the image quality, it is necessary to increase the installation density of piezoelectric devices constituting each inkjet recording head. In the case where high installation density of the piezoelectric devices is required, it is preferable to minimize the thickness of the piezoelectric body used in each piezoelectric device from the viewpoint of the precision of the processing or machining. Therefore, there are demands for thin piezoelectric films exhibiting satisfactory piezoelectric performance.
For example, perovskite oxides such as PZT (lead titanate zirconate) are known as materials suitable for the piezoelectric body. Such materials are ferroelectric materials which exhibit spontaneous polarization even when no electric field is applied. The piezoelectric materials are reported to exhibit high piezoelectric performance at and near the morphotropic phase boundary (MPB).
Currently, the public interest in the environmental load is increasing, and demands for lead-free piezoelectric films are increasing. Various types of materials including the following types (1) to (3) are currently being studied as lead-free perovskite oxides exhibiting superior piezoelectric performance.
(1) The +1/+5 type perovskite oxides in which one or more monovalent metal elements (including K, Na, and Li) reside in the A sites, and one or more pentavalent metal elements (including Nb, Ta, and Sb) reside in the B sites.
(2) The +2/+4 type perovskite oxides in which one or more divalent metal elements (including Ba and Sr) reside in the A sites, and one or more quadrivalent metal elements (including Zr and Ti) reside in the B sites. The +2/+4 type perovskite oxides also include a type in which the trivalent metal element Bi and the one or two monovalent metal elements Na and/or K reside in the A sites so that the average valence of the A-site elements becomes two.
(3) The +3/+3 type perovskite oxides in which one or more trivalent metal elements reside in both of the A sites and the B sites. For example, a piezoelectric device having a piezoelectric film of BiFeO3 is disclosed in Japanese Unexamined Patent Publication No. 2005-039166 (which is hereinafter referred to as JP2005-039166A, and corresponds to the U.S. Pat. No. 7,216,962).
However, the conventional piezoelectric films of lead-free perovskite oxides do not have a piezoelectric constant d31 exceeding 50 pm/V. For example, although BaTiO3 is known as a lead-free perovskite oxide exhibiting high piezoelectric performance, the piezoelectric constant d33 of the BaTiO3 film is approximately 120 pm/V, which corresponds to the piezoelectric constant d31 of approximately 50 pm/V. In addition, the BiFeO3 film is also known as a piezoelectric film. However, since iron (Fe) as the B-site element is a transition metal element, the valence of Fe is likely to vary, so that the leakage current can increase.
The present invention has been made in view of such circumstances.
The first object of the present invention is to provide a process for producing a perovskite oxide on the basis of a novel material design principle proposed for designing a perovskite oxide superior in performance such as the piezoelectric performance, where the process is particularly suitable for producing a lead-free perovskite oxide.
The second object of the present invention is to provide a perovskite oxide which is produced by the above process.
The third object of the present invention is to provide a perovskite film formed of the above perovskite oxide.
The fourth object of the present invention is to provide a piezoelectric device and a liquid discharge device using the above piezoelectric body.
(I) In order to accomplish the above first object, a process according to the first aspect of the present invention for producing a perovskite oxide is provided. In the process according to the first aspect of the present invention, the composition of the perovskite oxide is expressed by a compositional formula,
A(B,C)O3, (PX)
where each of A, B, and C represents one or more metal elements, A represents one or more A-site elements, each of B and C represents one or more B-site elements, O represents oxygen atoms, the one or more B-site elements represented by B have composition different from the one or more B-site elements represented by C, and the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of all the B-site elements constituting the perovskite oxide A(B, C)O3 to the molar amount of the oxygen atoms may deviate from 1:3 within a range in which the composition expressed by the compositional formula A(B, C)O3 can form a perovskite structure. The process according to the first aspect of the present invention is characterized in that the main component of the one or more A-site elements is bismuth, and the composition of the perovskite oxide satisfies the conditions (1), (2), and (3),
0.98<TF(PX)<1.01, (1)
TF(ABO3)>1.0, and (2)
TF(ACO3)<1.0, (3)
where TF(PX) is a tolerance factor of the perovskite oxide expressed by the compositional formula A(B, C)O3, TF(ABO3) is a tolerance factor of an oxide expressed by a compositional formula ABO3, and TF(ACO3) is a tolerance factor of an oxide expressed by a compositional formula ACO3.
In this specification, the main component of the one or more A-site elements means a component the mole fraction of which is 80% or higher.
In addition, in this specification, TF(X) is the tolerance factor of an oxide expressed by the compositional formula X, although the tolerance factor of the perovskite oxide A(B, C)O3 is expressed as TF(PX). The tolerance factor is defined as
TF=(rA+rO)/√{square root over (2)}(rB+rO),
where rA is the average ionic radius of the one or more A-site elements, rB is the average ionic radius of the B-site elements constituting the perovskite oxide, and rO is the ionic radius of the oxygen ion. In this specification, the ionic radius is the Shannon ionic radius. (See R. D. Shannon, “Revised effective ionic radii and systematic studies of interatomic distances in halides and chalcogenides”, Acta Crystallographica, A32 (1976), pp. 751-767.) The average ionic radius is expressed by ΣCiRi, where Ci indicates the mole fraction of each ion in a lattice site, and Ri is the ionic radius of the ion.
Further, in the process according to the first aspect of the present invention, the tolerance factor of each of the oxides A(B, C)O3, ABO3, and ACO3 is theoretically obtained. At this time, even when one or more of the oxides do not form a perovskite structure by themselves, the tolerance factor of each of the oxides is theoretically obtained. Thereafter, the composition of the perovskite oxide A(B, C)O3 (i.e., the perovskite oxide (PX)) is determined as above. Further, in the process according to the third aspect of the present invention (which are explained later), the tolerance factors of the oxide ADO3 and the perovskite oxide A(B, C, D)O3 (which is explained later as the second perovskite oxide (PY) according to the present invention) can also be theoretically obtained, and the composition of a perovskite oxide A(B, C, D)O3 is determined on the basis of the tolerance factors.
(II) In order to accomplish the aforementioned second object, a perovskite oxide according to the second aspect of the present invention is provided. The perovskite oxide according to the second aspect of the present invention (which may be hereinafter referred to as the first perovskite oxide according to the present invention) has the composition expressed by the compositional formula,
A(B,C)O3, (PX)
where each of A, B, and C represents one or more metal elements, A represents one or more A-site elements, each of B and C represents one or more B-site elements, O represents oxygen atoms, the one or more B-site elements represented by B have composition different from the one or more B-site elements represented by C, and (although the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of all the B-site elements constituting the perovskite oxide to the molar amount of the oxygen atoms is normally 1:3,) the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of all the B-site elements constituting the perovskite oxide to the molar amount of the oxygen atoms may deviate from 1:3 within a range in which the composition expressed by the compositional formula A(B, C)O3 can form a perovskite structure. The perovskite oxide according to the second aspect of the present invention is characterized in that the main component of the one or more A-site elements is bismuth, and the composition of the perovskite oxide satisfies the conditions (1), (2), and (3),
0.98<TF(PX)<1.01, (1)
TF(ABO3)>1.0, and (2)
TF(ACO3)<1.0, (3)
where TF(PX) is a tolerance factor of the perovskite oxide expressed by the compositional formula A(B, C)O3, TF(ABO3) is a tolerance factor of an oxide expressed by a compositional formula ABO3, and TF(ACO3) is a tolerance factor of an oxide expressed by a compositional formula ACO3.
Preferably, the perovskite oxide according to the second aspect of the present invention (i.e., the first perovskite oxide according to the present invention) may further have one or any possible combination of the following additional features (i) to (xi). In addition, preferably, the process according to the first aspect of the present invention may further have one or any possible combination of the following additional features (i) to (xi).
(i) The main component of the B-site elements constituting the perovskite oxide is a trivalent metal element, and part of atoms of the B-site elements constituting the perovskite oxide are substituted by one or more of quadrivalent elements and pentavalent metal elements.
In this specification, the main component of the B-site elements constituting the perovskite oxide means a component the mole fraction of which is 800 or higher.
(ii) The average valence of the B-site elements constituting the perovskite oxide is three.
(iii) In the perovskite oxide according to the second aspect of the present invention, (preferably, in the case where the perovskite oxide has the feature (i) and/or (ii),) the one or more B-site elements represented by B include aluminum.
(iv) In the perovskite oxide having the feature (iii), the one or more B-site elements represented by C include one or more trivalent metal elements.
(v) In the perovskite oxide having the feature (iv), the one or more B-site elements represented by C include one or more of the metal elements scandium (Sc), gallium (Ga), yttrium (Y), and indium (In).
(vi) In the perovskite oxide according to the second aspect of the present invention, (preferably, in the case where the perovskite oxide has one or more of the features (i) to (iii),) the one or more B-site elements represented by C are realized by one or more divalent metal elements and one or more quadrivalent metal elements.
(vii) In the perovskite oxide according to the second aspect of the present invention, (preferably, in the case where the perovskite oxide has one or more of the features (i) to (iii),) the one or more B-site elements represented by C are realized by one or more divalent metal elements and one or more pentavalent metal elements.
The phase structure of the perovskite oxide according to the second aspect of the present invention is not specifically limited. However, it is preferable that the perovskite oxide according to the second aspect of the present invention may further have one or any possible combination of the following additional features (viii) to (xi).
(viii) In the perovskite oxide according to the second aspect of the present invention, (preferably, in the case where the perovskite oxide has one or more of the feature (i) to (vii),) the perovskite oxide contains a first component ABO3 and a second component ACO3. In each of the first component ABO3 and the second component ACO3, the ratio of each of the total molar amount of one or more A-site elements and the total molar amount of one or more B-site elements to the molar amount of oxygen atoms is normally 1:3. However, the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of the one or more B-site elements to the molar amount of oxygen atoms in each of the first component ABO3 and the second component ACO3 may deviate from 1:3 within a range in which each of the first component ABO3 and the second component ACO3 can form a perovskite structure.
For example, the perovskite oxide according to the second aspect of the present invention may have a two-phase mixed-crystal structure in which the two components ABO3 and ACO3 coexist, or a single-phase structure in which the two components ABO3 and ACO3 are completely solid solved into a single phase. The perovskite oxide according to the second aspect of the present invention may have another structure.
(ix) In the perovskite oxide having the feature (viii), the first component and the second component each form a crystal structure corresponding to a different crystal system.
(x) In the perovskite oxide having the feature (ix), the first component forms a first crystal structure corresponding to one of tetragonal, orthorhombic, monoclinic, trigonal, and rhombohedral systems, and the second component forms a second crystal structure corresponding to one of tetragonal, orthorhombic, and rhombohedral systems which is different from the first crystal structure.
(xi) In the perovskite oxide having the feature (x), the first crystal structure corresponds to the tetragonal system, and the second crystal structure corresponds to the rhombohedral system.
(III) In order to accomplish the above first object, a process according to the third aspect of the present invention for producing a perovskite oxide also is provided. In the process according to the third aspect of the present invention, the composition of the perovskite oxide is expressed by a compositional formula,
A(B,C,D)O3, (PY)
where each of A, B, C, and D represents one or more metal elements, A represents one or more A-site elements, each of B, C, and D represents one or more B-site elements, O represents oxygen atoms, the one or more B-site elements represented by B, the one or more B-site elements represented by C, and the one or more B-site elements represented by D have composition different from each other, and the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of all the B-site elements constituting the perovskite oxide to the molar amount of the oxygen atoms may deviate from 1:3 within a range in which the composition expressed by the compositional formula A(B, C)O3 can form a perovskite structure. The process according to the third aspect of the present invention is characterized in that the main component of the one or more A-site elements is bismuth, and the composition of the perovskite oxide satisfies the conditions (1), (2), (3), and (4),
0.98<TF(PX)<1.01, (1)
TF(ABO3)>1.0, (2)
TF(ACO3)<1.0, and (3)
TF(ACO3)<TF(ADO3)<TF(ABO3), (4)
where TF(PX) is a tolerance factor of the perovskite oxide expressed by the compositional formula A(B, C, D)O3, TF(ABO3) is a tolerance factor of an oxide expressed by a compositional formula ABO3, TF(ACO3) is a tolerance factor of an oxide expressed by a compositional formula ACO3, and TF(ADO3) is a tolerance factor of an oxide expressed by a compositional formula ADO3.
In the process according to the third aspect of the present invention, the tolerance factor of each of the oxides A(B, C, D)O3, ABO3, ACO3, and ADO3 is theoretically obtained. At this time, even when one or more of the oxides do not form a perovskite structure by themselves, the tolerance factor of each of the oxides is theoretically obtained. Thereafter, the composition of the perovskite oxide A(B, C, D)O3 (i.e., the perovskite oxide (PY)) is determined as above.
(IV) In order to accomplish the aforementioned second object, a perovskite oxide according to the fourth aspect of the present invention is provided. The perovskite oxide according to the fourth aspect of the present invention (which may be hereinafter referred to as the second perovskite oxide according to the present invention) has the composition expressed by the compositional formula,
A(B,C,D)O3, (PY)
where each of A, B, C, and D represents one or more metal elements, A represents one or more A-site elements, each of B and C represents one or more B-site elements, O represents oxygen atoms, the one or more B-site elements represented by D, the one or more B-site elements represented by D, and the one or more B-site elements represented by D have composition different from each other, and (although the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of all the B-site elements constituting the perovskite oxide to the molar amount of the oxygen atoms is normally 1:3,) the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of all the B-site elements constituting the perovskite oxide to the molar amount of the oxygen atoms may deviate from 1:3 within a range in which the composition expressed by the compositional formula A(B, C, D)O3 can form a perovskite structure. The perovskite oxide according to the fourth aspect of the present invention is characterized in that the main component of the one or more A-site elements is bismuth, and the composition of the perovskite oxide satisfies the conditions (1), (2), (3), and (4),
0.98<TF(PY)<1.01, (1)
TF(ABO3)>1.0, (2)
TF(ACO3)<1.0, and (3)
TF(ACO3)<TF(ADO3)<TF(ABO3), (4)
where TF(PY) is a tolerance factor of the perovskite oxide expressed by the compositional formula A(B, C, D)O3, TF(ABO3) is a tolerance factor of an oxide expressed by a compositional formula ABO3, TF(ACO3) is a tolerance factor of an oxide expressed by a compositional formula ACO3, and TF(ADO3) is a tolerance factor of an oxide expressed by a compositional formula ADO3.
Preferably, the perovskite oxide according to the fourth aspect of the present invention (i.e., the second perovskite oxide according to the present invention) may further have one or any possible combination of the following additional features (xii) to (xxi). In addition, preferably, the process according to the third aspect of the present invention may further have one or any possible combination of the following additional features (xii) to (xxi).
(xii) The composition of the perovskite oxide is determined so as to further satisfy the condition (5),
0.98<TF(ADO3)<1.02. (5)
(xiii) In the perovskite oxide according to the fourth aspect of the present invention, (preferably, in the case where the perovskite oxide has the feature (xii),) the B-site elements constituting the perovskite oxide include a trivalent metal element as a main component, and part of atoms of the B-site elements constituting the perovskite oxide are substituted by one or more of quadrivalent metal elements and pentavalent metal elements.
(xiv) In the perovskite oxide according to the fourth aspect of the present invention, (preferably, in the case where the perovskite oxide has the feature (xii),) an average valence of the B-site elements constituting the perovskite oxide is three.
(xv) In the perovskite oxide according to the fourth aspect of the present invention, (preferably, in the case where the perovskite oxide has one or more of the features (xii) to (xiv),) the one or more B-site elements represented by B include aluminum.
(xvi) In the perovskite oxide according to the fourth aspect of the present invention having the feature (xv), the one or more B-site elements represented by C include one or more trivalent metal elements.
(xvii) In the perovskite oxide according to the fourth aspect of the present invention having the feature (xvi), the one or more B-site elements represented by C include one or more of the metal elements scandium (Sc), gallium (Ga), yttrium (Y), and indium (In), and the one or more B-site elements represented by D include one or both of technetium (Tc) and tellurium (Te).
The phase structure of the perovskite oxide according to the fourth aspect of the present invention is not specifically limited. However, it is preferable that the perovskite oxide according to the fourth aspect of the present invention may further have one or any possible combination of the following additional features (xviii) to (xxi).
(xviii) The perovskite oxide according to the fourth aspect of the present invention (preferably, having one or more of the features (xii) to (xvii)) contains a first component ABO3, a second component ACO3, and a third component ADO3. In each of the first component ABO3, the second component ACO3, and the third component ADO3, the ratio of each of the total molar amount of one or more A-site elements and the total molar amount of one or more the B-site elements to the molar amount of oxygen atoms is normally 1:3. However, the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of the one or more B-site elements to the molar amount of the oxygen atoms in each of the first component ABO3, the second component ACO3, and the third component ADO3 may deviate from 1:3 within a range in which each of the first component ABO3, the second component ACO3, and the third component ADO3 can form a perovskite structure.
For example, the perovskite oxide according to the fourth aspect of the present invention may have a three-phase mixed-crystal structure in which the three components ABO3, ACO3, and ADO3 coexist, or a single-phase structure in which the three components ABO3, ACO3, and ADO3 are completely solid solved into a single phase. The perovskite oxide according to the fourth aspect of the present invention may have another structure.
(xix) In the perovskite oxide according to the fourth aspect of the present invention having the feature (xviii), the first component, the second component, and the third component each form a crystal structure corresponding to a different crystal system.
(xx) In the perovskite oxide according to the fourth aspect of the present invention having the feature (xix), the first component forms a first crystal structure corresponding to one of tetragonal, orthorhombic, monoclinic, trigonal, and rhombohedral systems, and the second component forms a second crystal structure corresponding to one of tetragonal, orthorhombic, and rhombohedral systems which is different from the first crystal structure, and the third component forms a third crystal structure corresponding to one of cubic and pseudocubic systems.
(xxi) In the perovskite oxide according to the fourth aspect of the present invention having the feature (xx), the first crystal structure corresponds to the tetragonal system, and the second crystal structure corresponds to the rhombohedral system.
(V) Furthermore, preferably, the perovskite oxides according to the second and fourth aspects of the present invention (preferably, having one or more of the aforementioned features (i) to (xxi)) may further have one or any possible combination of the following additional features (xxii) to (xxv). In addition, preferably, the processes according to the first and third aspects of the present invention (preferably, having one or more of the aforementioned features (i) to (xxi)) may further have one or any possible combination of the following additional features (xxii) to (xxv).
(xxii) In the perovskite oxides according to the second and fourth aspects of the present invention (preferably, having one or more of the aforementioned features (i) to (xxi)), the one or more A-site elements include a metal element which defines a type of atoms having an ionic radius greater than the bismuth atoms.
(xxiii) In the perovskite oxides according to the second and fourth aspects of the present invention (preferably, having one or more of the aforementioned features (i) to (xxii)), the difference |MA−MB| between an average atomic mass MA of the one or more A-site elements and an average atomic mass MB of the one or more B-site elements constituting the perovskite oxide is greater than 145.
(xxiv) The perovskite oxides according to the second and fourth aspects of the present invention (preferably, having one or more of the aforementioned features (i) to (xxiii)) contains no lead (Pb). This feature is preferable from the viewpoint of environmental load.
(xxv) The perovskite oxides according to the second and fourth aspects of the present invention (preferably, having one or more of the aforementioned features (i) to (xxiv)) contains none of the Groups 4, 5, 6, 7, 8, 9, 10, 11, and 12 transition metal elements. The numbering of the groups of elements are in accordance with the recommendation by the International Union of Pure and Applied Chemistry (IUPAC). This feature is preferable because leakage current is likely to occur in the perovskite oxides containing at least one of the Groups 4, 5, 6, 7, 8, 9, 10, 11, and 12 transition metal elements.
(VI) In order to accomplish the aforementioned third object, a piezoelectric film according to the fifth aspect of the present invention is provided. The piezoelectric film according to the fifth aspect of the present invention contains one of the perovskite oxide according to the second aspect of the present invention (preferably, having one or more of the aforementioned features (i) to (xi), and (xxii) to (xxv)) and the perovskite oxide according to the fourth aspect of the present invention (preferably, having one or more of the aforementioned features (xii) to (xxi), and (xxii) to (xxv)).
Preferably, the piezoelectric film according to the fifth aspect of the present invention may further have one or any possible combination of the following additional features (xxvi) to (xxix).
(xxvi) The piezoelectric film according to the fifth aspect of the present invention contains at least one ferroelectric phase which has crystal orientation.
In this specification, the expression “having crystal orientation” means that the degree F. of orientation measured by the Lotgerling technique is 80% or higher. The degree F. of orientation is defined as
F(%)=(P−P0)/(1−P0)×100,
where P is the ratio of the total XRD (X-ray diffraction) intensity from an orientation plane to the total XRD intensity from all the crystal planes, and P0 is the value of P in the case where the sample is completely randomly oriented. In the case of the (001) orientation, P=ΣI(001)/ΣI (hkl), where I(hkl) is the XRD intensity from the crystal plane (hkl), ΣI (001) is the total XRD intensity from the crystal plane (001), and ΣI(hkl) is the total XRD intensity from all the crystal planes (hkl). For example, in the case of the (001) orientation in a perovskite crystal, P=I(001)/{I(001)+I(100)+I(101)+I(110)+I(111)}. When the sample is completely randomly oriented, P=P0 and F=0%. When the sample is completely oriented, P=1 and F=100%.
(xxvii) The piezoelectric film according to the fifth aspect of the present invention having the feature (xxvi) contains at least one ferroelectric phase, where one of the at least one ferroelectric phase has a spontaneous polarization axis along a first direction and crystal orientation along a second direction different from the first direction.
In this specification, the expression “having crystal orientation along approximately an <abc> direction” means that the degree F. of orientation along the <abc> direction is 80% or higher.
In the piezoelectric film according to the fifth aspect of the present invention having the feature (xxvii), it is further preferable that at least a portion of the ferroelectric phase in the piezoelectric film according to the sixth aspect of the present invention transition when an electric field is applied to the piezoelectric body along a direction different from the orientation of the spontaneous polarization axis.
(xxviii) In the piezoelectric film according to the fifth aspect of the present invention having the feature (xxvii), the at least one ferroelectric phase is at least one of a rhombohedral phase having crystal orientation along approximately a <100> direction, a rhombohedral phase having crystal orientation along approximately a <110> direction, a tetragonal phase having crystal orientation along approximately a <110> direction, a tetragonal phase having crystal orientation along approximately a <111> direction, an orthorhombic phase having crystal orientation along approximately a <100> direction, and an orthorhombic phase having crystal orientation along approximately a <111> direction.
(xxix) In the piezoelectric film according to the fifth aspect of the present invention having the feature (xxvii) or (xxviii), at least a portion of the one of the at least one ferroelectric phase transitions to another ferroelectric phase corresponding to a crystal system different from a crystal system corresponding to the one of the at least one ferroelectric phase, when an electric field is applied to the piezoelectric film along a direction different from the first direction.
(VII) In order to accomplish the aforementioned fourth object, a piezoelectric device according to the sixth aspect of the present invention is provided. The piezoelectric device according to the sixth aspect of the present invention comprises the piezoelectric film according to the fifth aspect of the present invention (preferably having one or more of the aforementioned features (xxvii) to (xxix)), and electrodes through which an electric field is applied to the piezoelectric film.
Preferably, the piezoelectric device according to the sixth aspect of the present invention may further have the following additional feature (xxx).
(xxx) The electric field applied to the piezoelectric film through the electrodes is along a direction different from a direction in which a spontaneous polarization axis of one of one or more ferroelectric phases in the piezoelectric film is oriented, and the one of the one or more ferroelectric phases has crystal orientation along a direction different from the direction in which the spontaneous polarization axis is oriented.
(VIII) In order to accomplish the aforementioned fourth object, a liquid discharge device according to the seventh aspect of the present invention is provided. The liquid discharge device according to the seventh aspect of the present invention comprises the piezoelectric device according to the sixth aspect of the present invention (preferably having the feature (xxx)), and a discharge member. The discharge member includes a liquid-reserve chamber which reserves liquid, and a liquid-discharge outlet through which the liquid is externally discharged from the liquid-reserve chamber.
(IX) The present invention has the following advantages.
(a) The first and third aspects of the present invention present novel material design principles for producing a perovskite oxide superior in the piezoelectric performance, and is effective, in particular, for producing a lead-free perovskite oxide. Therefore, when the processes according to the first and third aspects of the present invention are used, it is possible to easily design the composition of the perovskite oxide superior in the piezoelectric performance.
(b) The present inventor and colleagues belonging to the present assignee have proposed in the Japanese Unexamined Patent Publication No. 2007-116091 (which is hereinafter referred to as JP2007-116091A, and corresponds to the Japanese Patent Application No. 2006-188765 claiming the benefits of priority from the prior Japanese Patent Application No. 2005-277108) a piezoelectric device using a piezoelectric body which contains a first ferroelectric phase corresponding to a first crystal system and having crystal orientation. In the piezoelectric body, the first ferroelectric phase transitions to a second ferroelectric phase corresponding to a second crystal system different from the first crystal system when an electric field is applied to the piezoelectric body.
The material design principles presented by the first and third aspects of the present invention are suitable for designing the composition of a perovskite oxide for use in the system utilizing phase transition induced by an electric field as proposed in JP2007-116091A (which is hereinafter referred to as the field-induced phase transition system). According to the present invention, it is possible to provide a perovskite oxide having such a domain structure that phase transition and great distortion (displacement) can easily occur even when the strength of the electric field applied to the perovskite oxide is relatively low.
(c) It is possible to provide a piezoelectric device having superior piezoelectric performance by using the perovskite oxide produced in accordance with the material design principles presented by the present invention.
Preferred embodiments of the present invention are explained in detail below with reference to drawings.
In the embodiments, +3/+3 type perovskite oxides in which each of the average valence of the A-site metal elements and the average valence of the B-site metal elements is three are taken as examples. As mentioned before, the embodiments of the present invention are effective, in particular, for producing lead-free perovskite oxides.
Generally, the piezoelectric constant d31 of the ceramic material is expressed as
d31=k31√{square root over (∈33T)}√{square root over (s33E)},
where k31 is the electromechanical coupling coefficient, ∈33T is the dielectric constant measured under constant mechanical stress (i.e., the free permittivity) in the case where an electric field is applied along the polarization direction, and s33T is the elastic constant measured under constant electric field. That is, the piezoelectric constant is proportional to the electromechanical coupling coefficient and the square root of the dielectric constant, and the piezoelectric performance is improved with increase in the electromechanical coupling coefficient and the dielectric constant.
In the case of the bulk ceramic materials of the lead-based perovskite oxides having MPB composition, as reported by Y. Hosono and Y. Yamashita, “High-Efficiency Piezoelectric Single Crystals,” Toshiba Review Vol. 59 (2004), No. 10, pp. 39-42 (in Japanese), it is conventionally known that there is a correlation between the piezoelectric performance and the difference |MA−MB| between the average atomic mass MA of one or more A-site elements constituting each lead-based perovskite oxide and the average atomic mass MB of one or more B-site elements constituting the lead-based perovskite oxide, and the electromechanical coupling coefficient and the piezoelectric performance increase with the difference |MA−MB|. The present inventor has found that there is a similar correlation even in the lead-free perovskite oxides.
Therefore, it is possible to expect that the +3/+3 type perovskite oxide will exhibit further superior piezoelectric performance by selecting one or more A-site elements and one or more B-site elements so as to increase the difference |MA−MB|. For example, it is possible to select one or more A-site elements having as great atomic masses as possible and one or more B-site elements having as small atomic masses as possible. In consideration of the values of the difference |MA−MB| in the lead-based perovskite oxides disclosed in the Hosono reference, it is preferable that the differences |MA−MB| in the lead-free perovskite oxides are greater than 145.
An example of a trivalent element having a great atomic mass is bismuth (Bi), which has the atomic mass of 209.0. The atomic masses of the other trivalent elements are approximately equal to or less than 150. Therefore, the other trivalent elements cannot realize great values of the difference |MA−MB|.
According to the present invention, the composition of a +3/+3 type perovskite oxide containing bismuth as a main component of one or more A-site elements is designed so that the composition is at or near the morphotropic phase boundary (MPB).
As explained in the “Disclosure of Invention,” the first aspect of the present invention presents a process for producing a perovskite oxide expressed by the compositional formula,
A(B,C)O3, (PX)
where each of A, B, and C represents one or more metal elements, A represents one or more A-site elements, each of B and C represents one or more B-site elements, O represents oxygen atoms, the one or more B-site elements represented by B have composition different from the one or more B-site elements represented by C, and the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of all the B-site elements constituting the perovskite oxide A(B, C)O3 to the molar amount of the oxygen atoms may deviate from 1:3 within a range in which the composition expressed by the compositional formula A(B, C)O3 can form a perovskite structure. The process according to the first aspect of the present invention is characterized in that the main component of the one or more A-site elements is bismuth, and the composition of the perovskite oxide satisfies the conditions (1), (2), and (3),
0.98<TF(PX)<1.01, (1)
TF(ABO3)>1.0, and (2)
TF(ACO3)<1.0, (3)
where TF(PX) is a tolerance factor of the perovskite oxide expressed by the compositional formula A(B, C)O3, TF(ABO3) is a tolerance factor of an oxide expressed by a compositional formula ABO3, and TF(ACO3) is a tolerance factor of an oxide expressed by a compositional formula ACO3.
In addition, as explained in the “Disclosure of Invention,” the second aspect of the present invention presents the above perovskite oxide produced by the process according to the first aspect of the present invention. That is, the perovskite oxide according to the second aspect of the present invention (i.e., the first perovskite oxide according to the present invention) has the composition expressed by the above compositional formula A(B, C)O3, and the perovskite oxide according to the second aspect of the present invention is characterized in that the main component of the one or more A-site elements is bismuth, and the composition of the perovskite oxide A(B, C)O3 satisfies the conditions expressed by the above inequalities (1) to (3).
In
When the tolerance factor TF is equal to 1.0, the crystal lattice of the perovskite oxide has a closest packed structure. Since the B-site ions hardly move in the crystal lattice under this condition, the perovskite oxide is likely to have a stable structure. When the perovskite oxide has such a composition as to realize the above condition, the perovskite oxide is likely to have a crystal structure such as the cubic or pseudocubic crystal structure, and does not exhibit ferroelectricity or exhibits very low ferroelectricity.
When the tolerance factor TF is greater than 1.0, the B-site ions are smaller than the A-site ions. Under this condition, the B-site ions are likely to enter the crystal lattice and move in the crystal lattice even when the crystal lattice is not distorted. When the perovskite oxide has such a composition as to realize the above condition, the perovskite oxide is likely to have spontaneous polarization and a crystal structure such as the tetragonal crystal (in which the spontaneous polarization axis is orientated along the <001> direction), and exhibits ferroelectricity. There is a tendency that the ferroelectricity becomes higher when the difference of the tolerance factor from 1.0 increases.
When the tolerance factor TF is smaller than 1.0, the B-site ions are greater than the A-site ions. Under this condition, the B-site ions do not enter the crystal lattice unless the crystal lattice is distorted. When the perovskite oxide has such a composition as to realize the above condition, the perovskite oxide is likely to have a crystal structure such as the orthorhombic crystal (in which the spontaneous polarization axis is orientated along the <110> direction) or the rhombohedral crystal (in which the spontaneous polarization axis is orientated along the <111> direction), and exhibits ferroelectricity or antiferroelectricity. There is a tendency that the ferroelectricity becomes higher when the difference of the tolerance factor from 1.0 increases.
Table 1 shows first and second components constituting each of various mixed crystals and the mole fractions of the first and second components which realize a morphotropic phase boundary (MPB) in each mixed crystal, where the tolerance factor TF of the first component is greater than one, and the tolerance factor TF of the second component is smaller than one. Table 1 also shows the average ionic radii of the A-site and B-site ions in each mixed crystal, the tolerance factor TF of each mixed crystal, the crystal system of the monocrystal formed by each of the first and second components, the ionic radii of the A-site and B-site ions in the monocrystal, and the tolerance factor TF of the monocrystal. In Table 1, the tetragonal crystal, the orthorhombic crystal, and the rhombohedral crystal are respectively indicated by T, O, and R.
As understood from Table 1, the tolerance factors TF of the MPB compositions of the mixed crystals fall within the range of 0.98 to 1.01. Since the composition of the perovskite oxide according to the present invention is determined to satisfy the inequalities (1), the composition of the perovskite oxide according to the second aspect of the present invention is at or near the MPB.
For example, it is possible to design a perovskite oxide satisfying the conditions (1) to (3) by selecting a first material (having the composition ABO3 and a tolerance factor TF greater than 1.0) as the first component and a second material (having the composition ACO3 and a tolerance factor TF smaller than 1.0) as the second component so that the tolerance factor TF of the perovskite oxide A(B, C)O3 is in the range of 0.98 to 1.01.
In the above design, the first component ABO3 having a tolerance factor TF greater than 1.0 (i.e., exhibiting high ferroelectricity) and the second component ACO3 having a tolerance factor TF smaller than 1.0 (i.e., exhibiting high ferroelectricity or antiferroelectricity) are selected so that the composition of the perovskite oxide A(B, C)O3 is at or near the MPB.
From the viewpoint of the piezoelectric (ferroelectric) performance of the perovskite oxide A(B, C)O3 designed according to the present invention, it is more preferable that the ferroelectricity of the first component ABO3 and the ferroelectricity (or antiferroelectricity) of the second component ACO3 be higher. That is, it is more preferable that the tolerance factor TF of each of the first component ABO3 and the second component ACO3 more greatly differ from 1.0.
Since the perovskite oxides according to the present invention (i.e., the first perovskite oxide according to the present invention) are +3/+3 type perovskite oxides, it is preferable that the average ionic valence of the B-site elements represented by B and C be three.
It is possible to substitute part of atoms of the B-site elements with one or more elements having greater ionic valences. Therefore, in an example of the composition of the B-site elements, the main component of the B-site elements is a trivalent metal element, and part of atoms of the B-site elements constituting the perovskite oxide are substituted by one or more of quadrivalent metal elements and pentavalent metal elements. In the case where part of atoms of the B-site elements are substituted with one or more elements having ionic valences greater than three, it is possible to expect suppression of leakage current, which can be caused by loss of bismuth or oxygen.
Hereinbelow, details of design of the composition of the B-site elements are explained for the case where bismuth is the only A-site element, and the average ionic valence of the B-site elements represented by B and C is three.
Table 2 shows the atomic masses and the ionic radii of typical trivalent elements which are considered to be candidates for the B-site elements, and the difference |MA−MB| and the tolerance factor TF in a Bi-based perovskite oxide when each trivalent element is used as a B-site element. Among the candidates for the B-site elements indicated in Table 2, only aluminum can realize a perovskite oxide which has bismuth as the only A-site element and the tolerance factor TF greater than 1.0. Therefore, aluminum, which has the small atomic mass, is preferable for use as a B-site element. As mentioned before, the electromechanical coupling coefficient and the piezoelectric performance increase with the difference |MA−MB|. Since the atomic mass of aluminum is small, aluminum is preferable for use as the B-site element represented by B. Since the difference |MA−MB| in BiAlO3 is as great as 182.0, it is possible to expect that Bi-based perovskite oxides have a great value of the difference |MA−MB| when aluminum is used as a B-site element.
As indicated in Table 2, in the case where bismuth is used as the only A-site element and each of the trivalent elements Sc, Fe, and Ga among the candidates indicated in Table 2 is used as another B-site element, the tolerance factor TF of the Bi-based perovskite oxide is smaller than 1.0. Table 3 shows the MPB composition, the tolerance factor TF, the difference |MA−MB| the eleoctromechanical coupling constant kp, and the value of kp√{square root over (ε33T)}, which are calculated in the radial directional mode for each of the Bi-based perovskite oxides in which the respective trivalent elements Sc, Fe, and Ga are used as the other B-site element C, where the values of the eleoctromechanical coupling constant kp in the radial directional mode are obtained by extrapolation from literature values, and the value of ε33T is assumed to be 5,000. The Bi-based perovskite oxides indicated in Table 3 have the values of the difference |MA−MB| greater than 145 and great values of kp√{square root over (ε33T)}. In the case where the specimen has a disklike shape, the piezoelectric constant in the radial directional mode is expressed by d31, and the piezoelectric constant d31 is proportional to the value of kp√{square root over (ε33T)}. Therefore, it is possible to expect a great value of the piezoelectric constant d31 when each MPB composition indicated in Table 3 is realized. However, in the films of the perovskite oxides, in contrast to the bulk ceramic materials, the stress imposed on the films and the like are likely to vary the MPB composition, and the crystallinity and the like vary with the composition. Therefore, although there is a general tendency that the piezoelectric performance is improved with the difference |MA−MB| as in the bulk ceramic materials, the piezoelectric performance is not improved with the difference |MA−MB| in some cases.
From the viewpoint of the ionic radius and the atomic mass, yttrium (Y) and indium (In), as well as gallium (Ga), scandium (Sc), and the like, can be used as the one or more B-site elements represented by C. (See
In other words, in the case where a B-site element represented by B is aluminum, the one or more B-site elements represented by C are preferably one or more trivalent metal elements, and more preferably one or more of the metal elements Sc, Ga, Y, and In.
Alternatively, the one or more B-site elements represented by C may be realized by one or more divalent metal elements and one or more quadrivalent metal elements, or by one or more divalent metal elements and one or more pentavalent metal elements.
Examples of the divalent, quadrivalent, and pentavalent metal elements are indicated below in association with the ionic radii of the respective elements (in angstroms).
As explained before, the main component of the one or more A-site elements represented by A is bismuth (Bi). The one or more A-site elements represented by A may be realized by only bismuth, or part of atoms of the bismuth may be substituted with one or more other elements. The trivalent elements with which part of atoms of the bismuth can be substituted may be neodymium (Nd) or the like. However, the atomic masses of such trivalent elements are smaller than the atomic mass of bismuth by fifty or more. Therefore, in order to realize a great value of the difference |MA−MB|, a greater molar fraction of bismuth in the A sites is more preferable. Specifically, it is preferable that the molar fraction of bismuth in the A sites be 90 mol % or higher.
As understood from
It is possible to substitute part of atoms of the bismuth with lead (Pb) atoms, which have ionic radii approximately identical to the bismuth atoms. However, when the environmental load is considered, it is preferable that the lead content of the perovskite oxide according to the second aspect of the present invention (i.e., the first perovskite oxide according to the present invention) be low, and it is particularly preferable that the perovskite oxide according to the second aspect of the present invention contain no lead, although the perovskite oxide may contain a very small amount of lead as inevitable impurity. In the case where the perovskite oxides are designed according to the present invention, it is possible to achieve high piezoelectric performance even when the perovskite oxides contain no lead.
Conventionally, in the field of the synthesis of bulk ceramics, synthesis of Bi(Al, Ga)O3 is reported by A. A. Belik et al., “High-pressure synthesis, crystal structures, and properties of perovskite-like BiAlO3 and pyroxene-like BiGaO3”, Chemistry of materials, Vol. 18 (2006) pp. 133-139.
However, the above synthesis of Bi(Al, Ga)O3 has been achieved in the research of multiferroic materials. Therefore, the Belik reference reports the synthesis of a bulk ceramic having the above composition and evaluation of the crystal system and the lattice constant, and the Belik reference does not report investigation of Bi(Al, Ga)O3 as a piezoelectric material, and does not evaluate the piezoelectric constant and the like.
In the research reported by the Belik reference, the synthesis of the Bi(Al, Ga)O3 is made at the aluminum/gallium molar ratios of 100/0, 75/25, 50/50, 25/75, and 0/100. However, the Belik reference teaches neither the synthesis with the MPB composition nor the material design realizing the MPB.
It is generally considered that the synthesis of a bulk ceramic of a multiferroic material BiMO3 (where M is Cr, Mn, Fe, Co, Ni, or the like) is required to be made under high pressure at high temperature. The Belik reference reports that the synthesis of Bi(Al, Ga)O3 was made at the high pressure of 6 GPa and high temperature of 1200° C.
On the other hand, according to the fifth aspect of the present invention, a piezoelectric film containing one of the perovskite oxides according to the second and fourth aspects of the present invention is provided. It is easy to grow a film of a material having a perovskite structure by using an underlying layer (e.g., a substrate or a lower electrode) having a perovskite structure, and it is possible to form such a film under an equilibrium condition. Therefore, the high pressure, which is required for producing the bulk ceramic, is not required for producing the piezoelectric film.
In the field of the thin film, synthesis of Bi(Fe, Sc)O3 is reported by S. Yasui et al., “Formation of BiFeO3—BiScO3 Thin Films and Their Electrical Properties,” Japanese Journal of Applied Physics, Vol. 45 (2006), No. 9B, pp. 7321-7324. The Yasui reference does not pay attention to the material design realizing the MPB. Actually, the tolerance factors TF of BiFeO3 and BiScO3 are both smaller than 1.0. Therefore, no combination of BiFeO3 and BiScO3 can realize the MPB composition under normal condition.
According to the present invention, the tolerance factor TF of each of the oxides A(B, C)O3, ABO3, and ACO3 is theoretically obtained, and then the composition of the perovskite oxide A(B, C)O3 is determined. At this time, even when one or more of the oxides do not form a perovskite structure by themselves, the tolerance factor of each of the oxides is theoretically obtained, and then the composition of the perovskite oxide A(B, C)O3 is obtained so as to satisfy the conditions (1) to (3). The perovskite oxides designed in accordance with the material design principle as above have composition at or near the MPB, and therefore exhibit high piezoelectric (ferroelectric) performance.
As explained in the “Disclosure of the Invention,” the phase structure of the first perovskite oxide according to the present invention is not specifically limited. For example, the perovskite oxide may have a two-phase mixed-crystal structure in which the two components ABO3 and ACO3 coexist, or a single-phase structure in which the two components ABO3 and ACO3 are completely solid solved into a single phase, or another structure.
However, it is preferable that the first perovskite oxide according to the present invention contain the first component ABO3 having the tolerance factor TF greater than 1.0 and the second component ACO3 having the tolerance factor TF smaller than 1.0. As mentioned before, although the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of the B-site elements constituting the perovskite oxide to the molar amount of the oxygen atoms is normally 1:3, the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of the B-site elements constituting the perovskite oxide to the molar amount of the oxygen atoms may deviate from 1:3 within a range in which the composition expressed by the compositional formula A(B, C)O3 can form a perovskite structure.
It is also preferable that the first component ABO3 and the second component ACO3 form structures respectively corresponding to different crystal systems. In a preferable example of the perovskite oxide, the crystal system of the first component ABO3 is one of the tetragonal, orthorhombic, monoclinic, trigonal, and rhombohedral systems, and the crystal system of the second component ACO3 is one of the tetragonal, orthorhombic, and rhombohedral systems which is different from the first component ABO3.
When a perovskite oxide is designed according to the present invention as described above, it is possible to produce the perovskite oxide so as to have a composition at or near the MPB and a mixed-crystal structure composed of at least two of the tetragonal, orthorhombic, and rhombohedral phases.
The B-site elements of the perovskite oxide according to the present invention may further contain one or more additional elements D as explained below.
As explained in the “Disclosure of the Invention,” the third aspect of the present invention presents a process for producing a perovskite oxide expressed by the compositional formula,
A(B,C,D)O3, (PY)
where each of A, B, C, and D represents one or more metal elements, A represents one or more A-site elements, each of B, C, and D represents one or more B-site elements, O represents oxygen atoms, the one or more B-site elements represented by B, the one or more B-site elements represented by C, and the one or more B-site elements represented by D have composition different from each other, and the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of all the B-site elements constituting the perovskite oxide to the molar amount of the oxygen atoms may deviate from 1:3 within a range in which the composition expressed by the compositional formula A(B, C)O3 can form a perovskite structure. The process according to the third aspect of the present invention is characterized in that the main component of the one or more A-site elements is bismuth, and the composition of the perovskite oxide satisfies the conditions (1), (2), (3), and (4),
0.98<TF(PX)<1.01, (1)
TF(ABO3)>1.0, (2)
TF(ACO3)<1.0, and (3)
TF(ACO3)<TF(ADO3)<TF(ABO3), (4)
where TF(PX) is a tolerance factor of the perovskite oxide expressed by the compositional formula A(B, C, D)O3, TF(ABO3) is a tolerance factor of an oxide expressed by a compositional formula ABO3, TF(ACO3) is a tolerance factor of an oxide expressed by a compositional formula ACO3, and TF(ADO3) is a tolerance factor of an oxide expressed by a compositional formula ADO3.
In the process according to the third aspect of the present invention, it is preferable that the composition of the perovskite oxide be determined so as to further satisfy the condition (5),
0.98<TF(ADO3)<1.02. (5)
The perovskite oxide according to the fourth aspect of the present invention (i.e., the second perovskite oxide according to the present invention) is a perovskite oxide having the composition expressed by the compositional formula (PY) and being characterized in that the main component of the one or more A-site elements is bismuth, and the composition of the perovskite oxide satisfies the conditions (1), (2), (3), and (4).
Preferably, the perovskite oxide according to the fourth aspect of the present invention (i.e., the second perovskite oxide according to the present invention) may be determined so as to further satisfy the condition (5).
The perovskite oxide according to the fourth aspect of the present invention (i.e., the second perovskite oxide according to the present invention) can be designed in a similar manner to the perovskite oxide according to the second aspect of the present invention (i.e., the first perovskite oxide according to the present invention) except that the B-site elements include the additional element D so that the above conditions (1) to (4) (preferably, (1) to (5)) are satisfied.
Specifically, the one or more A-site elements represented by A in the compositional formula A(B, C, D)O3 and the B-site elements represented by B and C in the compositional formula A(B, C, D)O3 in the second perovskite oxide according to the present invention are similar to the one or more A-site elements represented by A in the compositional formula A(B, C)O3 and the B-site elements represented by B and C in the compositional formula A(B, C)O3 in the first perovskite oxide according to the present invention. The one or more additional elements D may be, for example, technetium (Tc) and tellurium (Te).
As explained in the “Disclosure of the Invention,” the phase structure of the second perovskite oxide according to the present invention is not specifically limited. For example, the second perovskite oxide according to the present invention may have a three-phase mixed-crystal structure in which the three components ABO3, ACO3, and ADO3 coexist, or a single-phase structure in which the three components ABO3, ACO3, and ADO3 are completely solid solved into a single phase, or another structure.
However, it is preferable that the first perovskite oxide according to the present invention contain the first component ABO3 having the tolerance factor TF greater than 1.0, the second component ACO3 having the tolerance factor TF smaller than 1.0, and the third component ADO3 having the tolerance factor TF near 1.0. As mentioned before, although the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of the B-site elements constituting the perovskite oxide to the molar amount of the oxygen atoms is normally 1:3, the ratio of each of the total molar amount of the one or more A-site elements and the total molar amount of the B-site elements constituting the perovskite oxide to the molar amount of the oxygen atoms may deviate from 1:3 within a range in which the composition expressed by the compositional formula A(B, C, D)O3 can form a perovskite structure.
It is also preferable that the first component ABO3 and the second component ACO3 form structures respectively corresponding to different crystal systems, and particularly preferable that the first component ABO3, the second component ACO3, and the third component ADO3 form structures respectively corresponding to different crystal systems.
In a preferable example of the perovskite oxide, the crystal system of the first component ABO3 is one of the tetragonal, orthorhombic, monoclinic, trigonal, and rhombohedral systems, the crystal system of the second component ACO3 is one of the tetragonal, orthorhombic, and rhombohedral systems which is different from the first component ABO3, and the third component ADO3 is one of the cubic and pseudocubic systems.
When a perovskite oxide is designed according to the third aspect of the present invention as described above, it is possible to produce the perovskite oxide so as to have a composition at or near the MPB and a mixed-crystal structure composed of at least two of the tetragonal, orthorhombic, and rhombohedral phases and at least one of the cubic and pseudocubic phases.
The present inventor has confirmed that both of the first perovskite oxide according to the present invention having the two-phase structure of the first and second components ABO3 and ACO3, and the second perovskite oxide according to the present invention having the three-phase structure of the first, second, and third components ABO3, ACO3, and ADO3 can be effectively used in the field-induced phase transition system proposed in JP2007-116091A, and exhibit high piezoelectric performance.
Hereinbelow, the characteristics of the piezoelectric oxides according to the present invention are explained by an example in which a piezoelectric body (e.g., a piezoelectric film) formed of one of the perovskite oxides according to the second and fourth aspects of the present invention is used in a field-induced phase transition system as proposed in JP2007-116091A. The perovskite oxides according to the second and fourth aspects of the present invention contain a first ferroelectric phase forming a structure in a first crystal system, and at least a portion of the first ferroelectric phase transitions to a second ferroelectric phase which forms a structure in a second crystal system different from the first crystal system, when an electric field is applied to the perovskite oxides.
First, the piezoelectric characteristic of the above piezoelectric body is explained below, where it is assumed, for simple explanation, that the entire piezoelectric body is initially formed of only the above first ferroelectric phase, which can transition to the above second ferroelectric phase when an electric field is applied to the piezoelectric body.
In
In the first range of the electric field strength E of 0 to E1, the distortion amount of the piezoelectric body linearly increases with increase in the electric field strength because of the piezoelectric effect in the first ferroelectric phase (before the phase transition). In the second range of the electric field strength E of E1 to E2, the distortion amount of the piezoelectric body still linearly increases with increase in the electric field strength because the change in the crystal structure associated with the phase transition causes a volume change in the piezoelectric body. In the third range of the electric field strength E greater than E2, the distortion amount of the piezoelectric body further linearly increases with increase in the electric field strength because of the piezoelectric effect in the second ferroelectric phase (after the phase transition).
As explained above, a change in the crystal structure associated with phase transition causes a volume change in the piezoelectric body, and the piezoelectric effect in the ferroelectric material works both before and after the phase transition since the piezoelectric body is in a ferroelectric phase both before and after the phase transition. Therefore, the piezoelectric body according to the present invention can achieve great distortion in each of the first range of 0 to E1, the second range of E1 to E2, and the third range greater than E2.
Further,
Conventionally, it is common to utilize the piezoelectric effect of expanding a piezoelectric body in the direction of the spontaneous polarization axis of the piezoelectric body by applying an electric field along a direction matching with the spontaneous polarization axis as in the first type of conventional piezoelectric devices. In this case, as indicated by the thick one-dot chain line Y in
In addition, in the case where the phase transition between a ferroelectric phase and a paraelectric phase is utilized as in the second type of conventional piezoelectric devices, the distortion amount of the piezoelectric body linearly increases with increase in the electric field strength because of the piezoelectric effect in the first ferroelectric phase (before the phase transition) until the electric field strength reaches a level at which the phase transition begins (at the electric field strength E1 in
On the other hand, the piezoelectric body in which a first ferroelectric phase corresponding to a first crystal system transitions to a second ferroelectric phase corresponding to a second crystal system when an electric field is applied to the piezoelectric body can achieve greater distortion amount than the piezoelectric bodies in the aforementioned first and second types of conventional piezoelectric devices. Although no specific condition is imposed on the activation of the piezoelectric body, when the distortion amount is considered, it is preferable to activate the piezoelectric body so that the minimum electric field strength Emin and the maximum electric field strength Emax satisfy the condition expressed by the inequalities (6).
Emin<E1<Emax (6)
In addition, it is particularly preferable to activate the piezoelectric body so that the minimum electric field strength Emin and the maximum electric field strength Emax satisfy the condition expressed by the inequalities (7).
Emin<E1<E2<Emax (7)
Further, it is preferable that the ferroelectric phase in which the phase transition occurs have crystal orientation along a direction different from the orientation of the spontaneous polarization, and it is more preferable that the ferroelectric phase after the phase transition has crystal orientation along a direction approximately identical to the orientation of the spontaneous polarization axis after the phase transition. Normally, the crystal orientation is equal to the direction of the applied electric field. It is particularly preferable to approximately equalize the direction of the applied electric field with the orientation of the spontaneous polarization axis after the phase transition, since in this case the engineered-domain effect can work before the phase transition and make the distortion amount before the phase transition greater than the distortion amount achieved by equalizing the direction of the applied electric field with the orientation of the spontaneous polarization axis before the phase transition. The engineered-domain effect in a monocrystal is explained by S. E. Park and T. R. Shrout, “Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals,” Journal of Applied Physics, Vol. 82, No. 4 (1997), pp. 1804-1811.
Furthermore, the phase transition can readily occur when the direction of the applied electric field is approximately equal to the orientation of the spontaneous polarization axis after the phase transition. The present inventor considers that since the state in which the direction of the applied electric field is equal to the orientation of the spontaneous polarization axis is crystallographically stable, transition to the more stable state can readily occur. In some cases, phase transition does not occur in a portion of the ferroelectric phase even when the electric field higher than the electric field strength E2 is applied to the piezoelectric body. However, when the phase transition can readily occur, it is possible to reduce the portion the ferroelectric phase in which the phase transition does not occur even when the electric field higher than the electric field strength E2 is applied to the piezoelectric body. Therefore, in the case where the direction of the applied electric field is approximately equal to the orientation of the spontaneous polarization axis after the phase transition, it is possible to stably achieve greater distortion than in the case where the direction of the applied electric field is equal to the orientation of the spontaneous polarization axis before the phase transition.
Moreover, since the direction of the applied electric field is approximately equal to the orientation of the spontaneous polarization axis after the phase transition, the piezoelectric effect effectively works in the ferroelectric phase after the phase transition, so that it is possible to stably achieve great distortion.
As explained above, in the case where the direction of the applied electric field is approximately equal to the orientation of the spontaneous polarization axis after the phase transition, it is possible to achieve great distortion before, during, and after the phase transition. This effect works at least when the direction of the applied electric field is different from the orientation of the spontaneous polarization axis before the phase transition, and becomes more prominent as the direction of the applied electric field approaches the orientation of the spontaneous polarization axis after the phase transition.
In the above explanations, the piezoelectric body is assumed to have a single-phase structure containing only a single first ferroelectric phase corresponding to a first crystal system which transitions to a second ferroelectric phase corresponding to a second crystal system different from the first crystal system when an electric field is applied to the piezoelectric body. However, the above explanations can also be applied to piezoelectric bodies which have a mixed-crystal structure containing a ferroelectric phase corresponding to a crystal system which transitions to another ferroelectric phase corresponding to a different crystal system when an electric field is applied to the piezoelectric body.
In the perovskite oxide according to the second aspect of the present invention (i.e., the first perovskite oxide according to the present invention) having the two-phase mixed-crystal structure, both of the first and second components ABO3 and ACO3 form a ferroelectric phase. Therefore, it is possible to make either or both of the first and second components ABO3 and ACO3 form a ferroelectric phase corresponding to a crystal system in which phase transition to another ferroelectric phase corresponding to another crystal system can be caused by application of an electric field to the perovskite oxide.
In addition, in the perovskite oxide according to the fourth aspect of the present invention (i.e., the second perovskite oxide according to the present invention) having the three-phase mixed-crystal structure, both of the first and second components ABO3 and ACO3 form a ferroelectric phase, and the third component ADO3 does not form a ferroelectric phase. Therefore, it is possible to make either or both of the first and second components ABO3 and ACO3 form a ferroelectric phase corresponding to a crystal system in which phase transition to another ferroelectric phase corresponding to another crystal system can be caused by application of an electric field to the perovskite oxide.
As explained above, the present invention presents a novel material design principle for producing a perovskite oxide superior in piezoelectric (ferroelectric) performance. Therefore, according to the present invention, it is possible to easily design the composition of a perovskite oxide at or near the MPB so that the perovskite oxide exhibits superior piezoelectric (ferroelectric) performance.
In particular, the perovskite oxide produced in accordance with the material design principle of the present invention is suitable for use in the system utilizing phase transition induced by application of an electric field as proposed in JP2007-116091A. According to the present invention, it is possible to provide a perovskite oxide having a domain structure in which phase transition can readily occur and great distortion can be achieved even at relatively low electric field strength. The feature of achieving great distortion at relatively low electric field strength is preferable for saving energy.
As described before, the piezoelectric device according to the sixth aspect of the present invention is characterized in comprising the piezoelectric film according to the fifth aspect of the present invention and electrodes for applying an electric field to the piezoelectric film. Since the piezoelectric device according to the present invention uses a perovskite oxide according to the present invention, the piezoelectric device according to the present invention exhibits high piezoelectric performance.
For example, in the case where the piezoelectric film constituting the piezoelectric device is formed of the perovskite oxide according to the second aspect of the present invention (i.e., the first perovskite oxide according to the present invention), the piezoelectric film has a two-phase mixed-crystal structure composed of the first component ABO3 with the tolerance factor TF greater than 1.0 and the second component ACO3 with the tolerance factor TF smaller than 1.0, and the ferroelectric phase of one or each of the first and second components transitions to another ferroelectric phase having a different crystal structure in response to application of an electric field to the piezoelectric film, so that the piezoelectric device exhibits high piezoelectric performance even at relatively low electric field strength. Hereinbelow, the structures of the above piezoelectric device and an inkjet recording head (as a liquid discharge device) using the piezoelectric device are explained with reference to
As illustrated in
The material for the substrate 11 is not specifically limited. For example, the substrate 11 may be made of silicon, glass, stainless steel, YSZ (yttrium stabilized zirconia), alumina, sapphire, silicon carbide, or the like. In addition, the substrate 11 may be realized by a laminated substrate such as the SOI (silicon-on-insulator) substrate, which is produced by forming on a surface of a silicon substrate an oxide film of SiO2 and a Si active layer in this order. In addition, it is possible to arrange a buffer layer and the like between the substrate 11 and the lower electrode 12.
The main component of the lower electrode 12 is not specifically limited, and may be, for example, one or a combination of metals such as Au, Pt, and Ir and metal oxides such as IrO2, RuO2, LaNiO3, and SrRuO3. In addition, the main component of the upper electrodes 14 is not specifically limited, and may be, for example, one or a combination of the same materials as the above examples of the main component of the lower electrode 12 and other materials (such as Al, Ta, Cr, or Cu) which are generally used in the electrodes in the semiconductor processes. Moreover, the thicknesses of the lower and upper electrodes 12 and 14 are not specifically limited, and are preferably 50 to 500 nm.
In the case where the substrate 11 is formed of silicon and the piezoelectric film 13 is formed of Bi(Al, Sc)O3 having an MPB composition on the substrate 11, it is possible to achieve satisfactory lattice matching by forming the piezoelectric device 1, for example, with the substrate 11 of silicon (having the lattice constant of 3.840 angstroms), a buffer layer of CeO2 (having the lattice constant of 3.826 angstroms), the lower electrode 12 of LaNiO3 (having the lattice constant of 3.861 angstroms), and the piezoelectric film 13 (having the lattice constant of 3.802 angstroms).
The piezoelectric actuator 2 is produced by attaching a diaphragm 16 to the back surface of the substrate 11 of the piezoelectric device 1 so that the diaphragm 16 vibrates in correspondence with expansion and contraction of the piezoelectric film 13. The piezoelectric actuator 2 is provided with a controller 15, which includes a driver circuit and the like for driving the piezoelectric device 1.
In outline, the inkjet recording head 3 is produced by attaching an ink nozzle 20 to the back surface of the piezoelectric actuator 2. The ink nozzle 20 is a member for reserving and discharging ink, and comprises an ink chamber 21 (as a liquid-reserve chamber) and an ink outlet 22 (as a liquid-discharge outlet). The ink chamber 21 reserves ink, and the ink held in the ink chamber 21 is discharged out of the ink chamber 21 through the ink outlet 22 connected to the ink chamber 21.
In the above inkjet recording head 3, the strength of the electric field applied to the piezoelectric device 1 is increased or decreased so as to expand or contract the piezoelectric device 1 and control the discharge of the ink from the ink chamber 21 and the discharge amount of the ink.
Alternatively, it is possible to process portions of the substrate 10 into the diaphragm 16 and the ink nozzle 20, instead of attaching the diaphragm 16 and the ink nozzle 20 to the piezoelectric device 1. For example, in the case where the substrate 11 is realized by a laminated substrate such as an SOI substrate, the ink chambers 21 can be formed by etching the corresponding portions of the substrate 11 from the bottom surface of the substrate 11, and the diaphragm 16 and the other structures of the ink nozzle 20 can be produced by processing the substrate 11 per se.
In the field of the inkjet recording heads and the like, techniques for increasing the density of arrangement of piezoelectric elements (devices) are currently being studied in order to improve image quality. Since the density of the arrangement of piezoelectric elements is currently planned to increase, techniques for reduction in the thicknesses of the piezoelectric devices are being studied. In order to reduce the thickness of the piezoelectric device, the thickness of the piezoelectric film 13 is preferably small, and more preferably 20 nm or smaller. The thin piezoelectric film is required to have a high piezoelectric constant. Since the perovskite oxides according to the present invention have a high piezoelectric constant, the perovskite oxides according to the present invention can be effectively used as the material for the thin piezoelectric film.
In this example, the piezoelectric film 13 has a two-phase mixed-crystal structure composed of the first component ABO3 with the tolerance factor TF greater than 1.0 and the second component ACO3 with the tolerance factor TF smaller than 1.0, and the ferroelectric phase of one or each of the first and second components transitions to another ferroelectric phase having a different crystal structure in response to application of an electric field to the piezoelectric film 13.
In this embodiment, preferably, the ferroelectric phase or phases which transition in response to application of the electric field have crystal orientation. More preferably, the crystal orientation of each ferroelectric phase in which the transition occurs is along a direction different from the orientation of the spontaneous polarization axis in the ferroelectric phase before the phase transition, and particularly preferably, the crystal orientation is approximately identical to the orientation of the spontaneous polarization axis after the phase transition. In this embodiment, the crystal orientation is identical to the direction of the electric field applied to the piezoelectric film.
The spontaneous polarization axis of the ferroelectric material is <001> in the tetragonal system, <110> in the orthorhombic system, and <111> in the rhombohedral system. It is possible to equalize the direction of the electric field applied to the piezoelectric film with the spontaneous polarization axis after the phase transition when the ferroelectric phase of the one or each of the first and second components is one of the rhombohedral phase having crystal orientation along approximately the <100> direction, the rhombohedral phase having crystal orientation along approximately the <110> direction, the tetragonal phase having crystal orientation along approximately the <110> direction, the tetragonal phase having crystal orientation along approximately the <111> direction, the orthorhombic phase having crystal orientation along approximately the <100> direction, and the orthorhombic phase having crystal orientation along approximately the <111> direction.
For example, the piezoelectric film 13 having the crystal orientation may be an orientated film (having single-axis orientation), an epitaxial film (having three-axis orientation), or a grain-oriented, sintered ceramic body. The orientated film can be formed under a condition enabling production of a single-axis oriented crystal, by using one of the known thin-film formation techniques including the vapor-phase techniques and the liquid-phase techniques, where the vapor-phase techniques include sputtering, MOCVD (metal organic chemical vapor deposition), PLD (pulsed-laser deposition), and the like, and the liquid-phase techniques include the sol-gel technique, MOD (metal organic decomposition), and the like. For example, the (100) orientation can be realized by using (100)-oriented platinum or the like as the lower electrode. The epitaxial film can be formed by using, in the substrate and the lower electrode, materials which lattice-match well with the piezoelectric film. For example, preferable combinations of the materials for the substrate and the lower electrode are SrTiO3/SrRuO3, MgO/Pt, and the like. The grain-oriented, sintered ceramic body can be formed by the hot-pressing technique, the sheet technique, the lamination press technique, and the like. In the lamination press technique, a plurality of sheets obtained by the sheet technique are laminated and pressed.
The condition for driving the piezoelectric film 13 by the controller 15 is not specifically limited. However, as explained before with reference to
Emin<E1<Emax (6)
In addition, it is particularly preferable that the minimum electric field strength Emin and the maximum electric field strength Emax satisfy the condition expressed by the inequalities (7).
Emin<E1≦E2<Emax (7)
In the above inequalities (6) and (7), E1 is the minimum electric field strength at which the phase transition of the ferroelectric phase of one or each of the first and second components begins, and E2 is the electric field strength at which the phase transition is substantially completed.
In addition, it is preferable to design the piezoelectric device 1 according to the present embodiment so that the phase transition can be realized basically by only changing the electric field strength. Specifically, it is preferable to determine the composition of the piezoelectric film 13 and the crystal systems between which the phase transition occurs in the piezoelectric film 13 so that the phase transition can occur at the environmental temperature of the piezoelectric film 13. However, when necessary, it is possible to adjust the operational temperature of the piezoelectric device 1 so that the phase transition can occur. In any case, in order to efficiently utilize the phase transition, it is preferable to drive the piezoelectric device 1 at or near the phase transition temperature.
Since the piezoelectric device 1 according to the present invention uses the piezoelectric film 13 formed of the perovskite oxide which is designed in accordance with the material design principle according to the present invention, the piezoelectric device 1 can exhibit high piezoelectric performance even at relatively low electric field strength.
Hereinbelow, an example of an inkjet recording apparatus having the inkjet recording head 3 is explained with reference to
As schematically illustrated in
Each of the heads 3K, 3C, 3M, and 3Y constituting the printing unit 102 corresponds to the inkjet recording head according to the present embodiment as explained before, although, in order to realize a linear head (explained later), each inkjet recording head used in the inkjet recording apparatus 100 comprises a plurality of piezoelectric devices on the lower electrode 12, and a plurality of ink chambers and a plurality of ink outlets are arranged in correspondence with the arrangement of the plurality of piezoelectric devices on the lower electrode 12.
The decurling unit 120 performs decurling of the recording sheet 116 by heating the recording sheet 116 with a heating drum 130 so as to eliminate the curl produced in the sheet feeding unit 118.
In the case where the inkjet recording apparatus 100 uses roll paper, a cutter 128 for cutting the roll paper into desired size is arranged in the stage following the decurling unit 120. The cutter 128 is constituted by a fixed blade 128A and a round blade 128B. The fixed blade 128A has a length equal to or greater than the width of the conveying path of the recording sheet 116, and is arranged on the side opposite to the print side of the recording sheet 116. The round blade 128B is arranged opposite to the fixed blade 128A on the print side of the recording sheet 116, and moves along the fixed blade 128A. In the inkjet recording apparatuses using cut paper, the cutter 128 is unnecessary.
After the roll paper is decurled and cut into the recording sheet 116, the recording sheet 116 is transferred to the suction-type belt conveyer 122. The suction-type belt conveyer 122 is constituted by rollers 131 and 132 and an endless belt 133. The rollers 131 and 132 are placed apart and the endless belt 133 is looped around the rollers 131 and 132 in such a manner that at least portions of the endless belt 133 which face the nozzle faces of the printing unit 102 and the sensor face of the print detection unit 124 are flat and horizontal.
The endless belt 133 has a width greater than the width of the recording sheet 116, and a great number of suction pores (not shown) are formed through the endless belt 133. A suction chamber 134 is arranged inside the loop of the endless belt 133 at the position opposite to the nozzle faces of the printing unit 102 and the sensor face of the print detection unit 124, and suctioned by a fan 135, so that a negative pressure is generated in the suction chamber 134, and the recording sheet 116 on the endless belt 133 is held by suction.
The power of a motor (not shown) is transmitted to at least one of the rollers 131 and 132 so that the endless belt 133 is driven clockwise in
In the case of borderless printing, ink can be deposited on the endless belt 133. Therefore, in order to clean the endless belt 133, a belt cleaning unit 136 is arranged at a predetermined (appropriate) position outside the loop of the endless belt 133 and the printing region.
A heating fan 140 is arranged on the upstream side of the printing unit 102 above the conveying path of the recording sheet 116, where the conveying path is realized by the suction-type belt conveyer 122. The heating fan 140 blows heated air to the recording sheet 116 before printing so as to heat the recording sheet 116 and facilitate drying of deposited ink.
Each of the heads 3K, 3C, 3M, and 3Y in the printing unit 102 is a so-called full-line type head, which is a linear head having a length corresponding to the maximum width of the recording sheet 116, and being arranged across the width of the recording sheet 116 (i.e., in the main scanning direction perpendicular to the feeding direction of the recording sheet 116) as illustrated in
The print detection unit 124 may be constituted by, for example, a line sensor which takes an image formed of spots of the inks discharged from the printing unit 102, and detects, from the image taken by the line sensor, incomplete discharge, which can be caused by clogging of a nozzle or the like.
A rear drying unit 142 for drying the printed surface of the recording sheet 116 is arranged in the stage following the print detection unit 124. For example, the rear drying unit 142 is realized by a heating fan or the like. Since it is preferable to avoid contact with the printed surface before the ink on the printed surface is completely dried, it is preferable that the rear drying unit 142 dry the ink on the printed surface by blowing heated air.
In order to control the glossiness of the image printed on the recording sheet 116, a heating-and-pressurizing unit 144 is arranged in the stage following the rear drying unit 142. The heating-and-pressing unit 144 comprises a pressure roller 145 with a surface having predetermined projections and depressions, and transfers the predetermined projections and depressions to the printed surface of the recording sheet 116 by pressing the printed surface with the pressure roller 145 while heating the printed surface.
Finally, the printed recording sheet 116 produced as above is outputted from the sheet output unit 126. It is preferable to separately output test prints and prints for practical use. Therefore, the sheet output unit 126 includes a first output unit 126A for the prints for practical use and a second output unit 126B for the test prints. Although not shown, the inkjet recording apparatus 100 further comprises a sorting unit. The sorting unit sorts the printed recording sheets 116 into the test prints and the prints for practical use, and sends the test prints to the first output unit 126B, and the prints for practical use to the second output unit 126A.
Further, in the case where the size of the recording sheet 116 is large, and both of a test image and an image for practical use are concurrently printed on the recording sheet 116, it is possible to arrange a cutter 148, and separate a first portion of the recording sheet 116 on which the test image is printed and a second portion of the recording sheet 116 on which the image for practical use is printed.
The present inventor has produced concrete examples of the piezoelectric device according to the present invention and comparison examples of the conventional piezoelectric devices as indicated below.
The concrete example 1 of the piezoelectric device according to the present invention is produced as follows.
A lower electrode of SrRuO3 having a thickness of 0.2 micrometers is formed on a (100) substrate of SrTiO3 having a thickness of 500 micrometers at the substrate temperature of 600° C. by PLD (pulsed-laser deposition). Then, a piezoelectric film of Bi(Al, Fe)O3 having a thickness of 2.0 micrometers is formed on the lower electrode at the substrate temperature of 600° C. by PLD. Bi(Al, Fe)O3 is a mixed crystal of the first component BiAlO3 and the second BiFeO3, where TF(BiAlO3)>1.0 and TF(BiFeO3)<1.0. At this time, a plurality of samples of the piezoelectric device as the concrete example 1 having piezoelectric films with different fractions x of Al in the B-site elements in the piezoelectric film of Bi(Al, Fe)O3 are produced, where the different fractions x are within a range from 0.4 to 0.9, in which the inequalities 0.98<TF(Bi(Al, Fe)O3)<1.01 are satisfied.
Crystal structure analysis of the piezoelectric film in the above samples by XRD (X-ray diffraction) indicates that the piezoelectric film in every sample is a (001)/(100)-oriented single-phase perovskite film.
Although no shoulder has been observed on the peak corresponding to the rhombohedral (R) crystal at x=0.5, a shoulder corresponding to the tetragonal (T) crystal has been observed on each of the (200) peaks at x=0.6 or greater. Therefore, it has been confirmed that the MPB composition exists in the range of x from 0.5 to 0.6
Thereafter, an upper electrode of Pt is formed on the piezoelectric film in each sample by sputtering at the substrate temperature of 200° C. Thus, the production of each sample of the piezoelectric device as the concrete example 1 is completed. Then, a cantilever using each sample of the piezoelectric device and having the dimensions of 15 mm×2.5 mm is produced, and the displacement amount of the tip end of the cantilever is measured while a voltage of 20 V is applied to each sample of the piezoelectric device.
The piezoelectric device as the comparison example 1 having a piezoelectric film of Bi(Al, Fe)O3 is produced in a similar manner to the piezoelectric device as the concrete example 1 except that the composition of the piezoelectric film does not satisfy the inequalities 0.98<TF(Bi(Al, Fe)O3)<1.01.
Specifically, a plurality of samples of the piezoelectric device as the comparison example 1 having piezoelectric films with different fractions x of Al in the B-site elements of the piezoelectric film of Bi(Al, Fe)O3 are produced, where the different fractions x are 0.0, 0.3, and 1.0, and out of the aforementioned range in which the inequalities 0.98<TF(Bi(Al, Fe)O3)<1.01 are satisfied. In each sample of the piezoelectric device as the comparison example 1, a piezoelectric film of Bi(Al, Fe)O3 having a thickness of 2.0 micrometers is formed on the lower electrode in a similar manner to the concrete example 1.
Crystal structure analysis of the piezoelectric film in the above samples by XRD indicates that the piezoelectric film in every sample is a (001)/(100)-oriented single-phase perovskite film.
Thereafter, the production of each sample of the piezoelectric device as the comparison example 1 is completed in a similar manner to the concrete example 1. Then, similarly to the concrete example 1, a cantilever using each sample of the piezoelectric device as the comparison example 1 is produced, and the displacement amount of the tip end of the cantilever is measured while a voltage of 20 V is applied to each sample of the piezoelectric device.
The measurement results of the concrete example 1 and the comparison example 1 are indicated in Table 4. Table 4 shows, for the concrete example 1 and the comparison example 1, the film composition, the molar fraction (x) of Al, the tolerance factors TF(BiAlO3), TF(BiFeO3), and TF(Bi(Al, Fe)O3), the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, the crystal system determined on the basis of the XRD measurement, and the displacement amount of the tip end of the cantilever (and the displacement amount normalized with respect to the maximum value). In Table 4, the plurality of samples of the concrete example 1 are respectively denoted as “Concrete Example 1-1,” “Concrete Example 1-2,” “Concrete Example 1-3,” “Concrete Example 1-4,” and “Concrete Example 1-5,” and the plurality of samples of the comparison example 1 are respectively denoted as “Comparison Example 1-1,” “Comparison Example 1-2,” and “Comparison Example 1-3.”
As indicated in Table 4, the displacement amount of the tip end of the cantilever is 0.82 micrometers at x=0.6, at which the composition of the piezoelectric film is considered to be closest to the MPB composition. In addition, in the case where the tolerance factor TF(Bi(Al, Fe)O3) of the piezoelectric film is between 0.98 and 1.01, the measured displacement amount of the tip end of the cantilever does not fall below 50% of the displacement amount at the MPB composition. That is, the concrete example 1 has been confirmed to exhibit satisfactory piezoelectric performance.
The piezoelectric device as the concrete example 2 is different from the concrete example 1 only in that part of the Bi atoms in the piezoelectric film having the composition (Bi0.6La0.4)(Al0.6Fe0.4)O3, which is confirmed in the concrete example 1 to be the MPB composition, are substituted by lanthanum (La) atoms. The atomic mass of La is smaller than the atomic mass of Bi.
Specifically, a plurality of samples of the piezoelectric device as the concrete example 2 having piezoelectric films with different compositions as indicated in Table 5 are produced. In each sample of the concrete example 2, the piezoelectric film having one of the different compositions is formed on the lower electrode in a similar manner to the concrete example 1. The piezoelectric films with different compositions are a Bi(Al0.6Fe0.4)O3 film and (Bi, La)(Al, Fe)O3 films, where the (Bi, La)(Al, Fe)O3 films have three different compositions (as indicated in Table 5) within a range in which the aforementioned difference |MA−MB| is greater than 145.
Crystal structure analysis of the piezoelectric film in the above samples by XRD indicates that the piezoelectric film in every sample is a (001)/(100)-oriented single-phase perovskite film.
Thereafter, an upper electrode of Pt is formed on the piezoelectric film in each sample in a similar manner to the concrete example 1. Thus, the production of each sample of the piezoelectric device as the concrete example 2 is completed. Then, a cantilever using each sample of the piezoelectric device is produced in a similar manner to the concrete example 1, and the displacement amount of the tip end of the cantilever is measured while a voltage of 20 V is applied to each sample of the piezoelectric device.
The piezoelectric device as the comparison example 2 is produced in a similar manner to the piezoelectric device as the concrete example 2 except that the aforementioned difference |MA−MB| of the piezoelectric film is not greater than 145.
Specifically, a piezoelectric film of (Bi0.6La0.4) (Al0.6Fe0.4)O3, of which the aforementioned difference |MA−MB| is 142, is formed on the lower electrode in the piezoelectric device as the comparison example 2 in a similar manner to the concrete example 2. Crystal structure analysis of the piezoelectric film in the comparison example 2 by XRD indicates that the piezoelectric film in comparison example 2 is a (001)/(100)-oriented single-phase perovskite film.
Thereafter, the production of the piezoelectric device as the comparison example 2 is completed in a similar manner to the concrete example 1. Then, similarly to the concrete example 2, a cantilever using the piezoelectric device as the comparison example 2 is produced, and the displacement amount of the tip end of the cantilever is measured while a voltage of 20 V is applied to the piezoelectric device.
The measurement results of the concrete example 2 and the comparison example 2 are indicated in Table 5. Table 5 shows, for the concrete example 2 and the comparison example 2, the film composition, the average atomic mass MA of the A-site elements, the tolerance factors TF(BiAlO3), TF(BiFeO3), and TF(Bi(Al, Fe)O3), the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, the crystal structure confirmed by the XRD measurement, and the displacement amount of the tip end of the cantilever (and the displacement amount normalized with respect to the maximum value). In Table 5, the plurality of samples of the concrete example 2 are respectively denoted as “Concrete Example 2-1,” “Concrete Example 2-2,” “Concrete Example 2-3,” and “Concrete Example 2-4.”
As indicated in Table 5, the displacement amount of the tip end of the cantilever increases with the difference |MA−MB|. In addition, in the case where the difference |MA−MB| is greater than 145, the measured displacement amount of the tip end of the cantilever does not fall below 50% of the displacement amount at the MPB composition. That is, the concrete example 2 has been confirmed to exhibit satisfactory piezoelectric performance.
The piezoelectric device as the concrete example 3 is different from the concrete example 1 only in that part (50%) of the Al atoms in the piezoelectric film having the composition Bi(Al, Fe)O3 are substituted by silicon (Si) atoms so that the tolerance factor of the piezoelectric film is between 0.98 and 1.01. Silicon is a quaternary element. That is, the piezoelectric film in the concrete example 3 is formed of a mixed crystal Bi((Al, Si), Fe)O3 of the first component Bi(Al0.5Si0.5)O3 and the second component BiFeO3, where TF(Bi(Al0.5Si0.5)O3)>1.0, TF(BiFeO3)<1.0, and 0.98<TF(Bi((Al, Si), Fe)O3)<1.01.
Specifically, a plurality of samples of the piezoelectric device as the concrete example 3 having piezoelectric films with different compositions as indicated in Table 6 are produced. In each sample of the concrete example 3, the piezoelectric film having one of the different compositions is formed on the lower electrode in a similar manner to the concrete example 1. Crystal structure analysis of the piezoelectric film in the above samples by XRD indicates that the piezoelectric film in every sample is a (001)/(100)-oriented single-phase perovskite film.
Thereafter, an upper electrode of Pt is formed on the piezoelectric film in each sample in a similar manner to the concrete example 1. Thus, the production of each sample of the piezoelectric device as the concrete example 3 is completed. Then, a cantilever using each sample of the piezoelectric device is produced in a similar manner to the concrete example 1, and the displacement amount of the tip end of the cantilever is measured while a voltage of 20 V is applied to each sample of the piezoelectric device.
The piezoelectric device of Bi((Al, Si), Fe)O3 as the comparison example 3 is produced in a similar manner to the piezoelectric device as the concrete example 3 except that the composition of the piezoelectric film does not satisfy the inequalities 0.98<TF(Bi(Al, Fe)O3)<1.01.
Specifically, a plurality of samples of the piezoelectric device as the comparison example 3 having different compositions as indicated in Table 6 are produced, where the different compositions do not satisfy the inequalities 0.98<TF(Bi(Al, Fe)O3)<1.01. In each sample of the piezoelectric device, a piezoelectric film of Bi((Al, Si), Fe)O3 having one of the different compositions is formed on the lower electrode in a similar manner to the concrete example 3. Crystal structure analysis of the piezoelectric films in the above samples of the comparison example 3 by XRD indicates that the piezoelectric film in every sample of the comparison example 3 is a (001)/(100)-oriented single-phase perovskite film.
Thereafter, the production of each sample of the piezoelectric device as the comparison example 3 is completed in a similar manner to the concrete example 1. Then, similarly to the concrete example 3, a cantilever using the piezoelectric device as the comparison example 3 is produced, and the displacement amount of the tip end of the cantilever is measured while a voltage of 20 V is applied to each sample of the piezoelectric device.
The measurement results of the concrete example 3 and the comparison example 3 are indicated in Table 6. Table 6 shows, for the concrete example 3 and the comparison example 3, the film composition, the total molar fraction of Al and Si in the B-site elements, the tolerance factors TF(BiAlO3), TF(BiFeO3), and TF(Bi(Al, Fe)O3), the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, the crystal structure confirmed by the XRD measurement, and the displacement amount of the tip end of the cantilever (and the displacement amount normalized with respect to the maximum value). In Table 6, the plurality of samples of the concrete example 3 are respectively denoted as “Concrete Example 3-1,” “Concrete Example 3-2,” and “Concrete Example 3-3,” and the plurality of samples of the comparison example 3 are respectively denoted as “Comparison Example 3-1” and “Comparison Example 3-2.”
As indicated in Table 6, the maximum measured value of the displacement amount of the tip end of the cantilever is 1.04 micrometers. In addition, in the case where the difference |MA−MB| is greater than 145, the measured displacement amount of the tip end of the cantilever does not fall below 50% of the displacement amount with the maximum measured value of the displacement amount. That is, the concrete example 3 has been confirmed to exhibit satisfactory piezoelectric performance.
The piezoelectric device as the concrete example 4 is different from the concrete example 1 only in that the piezoelectric film is formed of Bi((Co, Si), Fe)O3, which is composed of the first component Bi(Co0.5Si0.5)O3 and the second component BiFeO3, where TF(Bi(Co0.5Si0.5)O3)>1.0, TF(BiFeO3)<1.0, and 0.98<TF(Bi((Co, Si), Fe)O3)<1.01. Since Co is a divalent element, and Si is a quaternary element, the average valence of the B-site elements of the first component is three.
Specifically, a plurality of samples of the piezoelectric device as the concrete example 4 having piezoelectric films with different compositions as indicated in Table 7 are produced. In each sample of the concrete example 4, the piezoelectric film having one of the different compositions is formed on the lower electrode in a similar manner to the concrete example 1. Crystal structure analysis of the piezoelectric film in the above samples by XRD indicates that the piezoelectric film in every sample is a (001)/(100)-oriented single-phase perovskite film.
Thereafter, an upper electrode of Pt is formed on the piezoelectric film in each sample in a similar manner to the concrete example 1. Thus, the production of each sample of the piezoelectric device as the concrete example 4 is completed. Then, a cantilever using each sample of the piezoelectric device is produced in a similar manner to the concrete example 1, and the displacement amount of the tip end of the cantilever is measured while a voltage of 20 V is applied to each sample of the piezoelectric device.
The piezoelectric device of Bi((Co, Si), Fe)O3 as the comparison example 4 is produced in a similar manner to the piezoelectric device as the concrete example 4 except that the composition of the piezoelectric film does not satisfy the inequalities 0.98<TF(Bi(Co, Fe)O3)<1.01.
Specifically, a plurality of samples of the piezoelectric device as the comparison example 3 having different compositions as indicated in Table 7 are produced, where the different compositions do not satisfy the inequalities 0.98<TF(Bi(Co, Fe)O3)<1.01. In each sample of the piezoelectric device, a piezoelectric film of Bi((Co, Si), Fe)O3 having one of the different compositions is formed on the lower electrode in a similar manner to the concrete example 4. Crystal structure analysis of the piezoelectric films in the above samples of the comparison example 4 by XRD indicates that the piezoelectric film in every sample of the comparison example 4 is a (001)/(100)-oriented single-phase perovskite film.
Thereafter, the production of each sample of the piezoelectric device as the comparison example 4 is completed in a similar manner to the concrete example 1. Then, similarly to the concrete example 4, a cantilever using the piezoelectric device as the comparison example 4 is produced, and the displacement amount of the tip end of the cantilever is measured while a voltage of 20 V is applied to each sample of the piezoelectric device.
The measurement results of the concrete example 4 and the comparison example 4 are indicated in Table 7. Table 7 shows, for the concrete example 4 and the comparison example 4, the film composition, the total molar fraction of Co and Si in the B-site elements, the tolerance factors TF(BiAlO3), TF(BiFeO3), and TF(Bi(Al, Fe)O3), the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, the crystal structure confirmed by the XRD measurement, and the displacement amount of the tip end of the cantilever (and the displacement amount normalized with respect to the maximum value). In Table 7, the plurality of samples of the concrete example 4 are respectively denoted as “Concrete Example 4-1” and “Concrete Example 4-2,” and the plurality of samples of the comparison example 4 are respectively denoted as “Comparison Example 4-1” and “Comparison Example 4-2.”
As indicated in Table 7, the maximum measured value of the displacement amount of the tip end of the cantilever is 0.95 micrometers. In addition, in the case where the tolerance factor of the piezoelectric film is between 0.98 and 1.01, the measured displacement amount of the tip end of the cantilever does not fall below 50% of the displacement amount with the maximum measured value of the displacement amount. That is, the concrete example 4 has been confirmed to exhibit satisfactory piezoelectric performance.
The piezoelectric device as the concrete example 5 is different from the concrete example 1 only in that the piezoelectric film is formed of (Bi0.9Ba0.1) ((Si0.5Ti0.5)0.3Fe0.7)O3 and has a thickness of 2.0 micrometers. That is, the piezoelectric film is formed of a mixed crystal of the first component (Bi0.9Ba0.1) (Si0.5Ti0.5)O3 and the second component (Bi0.9Ba0.1)FeO3, where TF((Bi0.9Ba0.1) (Si0.5Ti0.5)O3)>1.0, TF((Bi0.9Ba0.1)FeO3)<1.0, and 0.98 TF((Bi0.9Ba0.1) ((Si0.5Ti0.5)0.3Fe0.7)O3)<1.01. The manner of formation of the piezoelectric film is similar to the concrete example 1. Ba as an A-site element has an ionic radius greater than Bi as another A-site element, and Si and Ti as the B-site elements are quaternary elements. Crystal structure analysis of the piezoelectric film in the concrete example 5 is performed by XRD. Table 8 shows for the concrete example 5 the film composition, the tolerance factors TF((Bi0.9Ba0.1) (Si0.5Ti0.5)O3), TF((Bi0.9Ba0.1) FeO3), and TF((Bi0.9Ba0.1) ((Si0.5Ti0.5)0.3Fe0.7)O3) the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, and the crystal structure confirmed by the XRD measurement. As indicated in Table 8, the crystal structure analysis of the piezoelectric film in the concrete example 5 by XRD indicates that the piezoelectric film in the concrete example 5 is a (001)/(100)-oriented single-phase perovskite film.
The piezoelectric device as the concrete example 6 is different from the concrete example 1 only in that the piezoelectric film is composed of the first component BiAlO3 and the second component which is one of BiGaO3, BiScO3, and BiInO3. Specifically, the second components in the first, second, and third samples of the piezoelectric device as the concrete example 6 are BiGaO3, BiScO3, and BiInO3 as indicated in Table 8. Table 8 also shows for the concrete example 6 the film composition, the tolerance factors of the first and second components and the first, second, and third samples of the piezoelectric film, the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, and the crystal structure confirmed by the XRD measurement. In Table 8, the first, second, and third samples of the piezoelectric film are respectively denoted as “Concrete Example 6-1,” “Concrete Example 6-2,” and “Concrete Example 6-3.” Crystal structure analysis of the piezoelectric films in the concrete example 6 is performed by XRD. As indicated in Table 8, the crystal structure analysis of the piezoelectric films in the concrete example 6 by XRD indicates that the piezoelectric film in every sample is a (001)/(100)-oriented single-phase perovskite film.
The piezoelectric device as the concrete example 7 is different from the concrete example 1 only in that the piezoelectric film is formed of Bi(Al, (Fe, Nb))O3, which is composed of the first component BiAlO3 and the second component Bi(Fe0.9Nb0.1)O3, where TF(BiAlO3)>1.0, TF(Bi(Fe0.9Nb0.1)O3)<1.0, and 0.98<TF(Bi(Al, (Fe, Nb))O3)<1.01. The manner of formation of the piezoelectric film is similar to the concrete example 1. Bi(Fe0.9Nb0.1)O3 can be produced by doping BiFeO3 with a pentavalent element Nb as another B-site element. Crystal structure analysis of the piezoelectric film in the concrete example 7 is performed by XRD. Table 8 further shows for the concrete example 7 the film composition, the tolerance factors TF(BiAlO3), TF(Bi(Fe0.9Nb0.1)O3), and TF(Bi(Al, (Fe, Nb))O3), the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, and the crystal structure confirmed by the XRD measurement. As indicated in Table 8, the crystal structure analysis of the piezoelectric film in the concrete example 7 by XRD indicates that the piezoelectric film in the concrete example 7 is a (001)/(100)-oriented single-phase perovskite film.
The piezoelectric device as the concrete example 8 is different from the concrete example 1 only in that the piezoelectric film is formed of Bi(Al, (Co, Ti))O3, which is composed of the first component BiAlO3 and the second component Bi(Co0.5Ti0.5)O3, where TF(BiAlO3)>1.0, TF(Bi(Co0.5Ti0.5)O3)<1.0, and 0.98<TF(Bi(Al, (Co, Ti))O3)<1.01. The manner of formation of the piezoelectric film is similar to the concrete example 1. Ti is a quaternary element. Crystal structure analysis of the piezoelectric film in the concrete example 8 is performed by XRD. Table 8 further shows for the concrete example 8 the film composition, the tolerance factors TF(BiAlO3), TF(Bi(Co0.5Ti0.5)O3), and TF(Bi(Al, (Co, Ti))O3), the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, and the crystal structure confirmed by the XRD measurement. As indicated in Table 8, the crystal structure analysis of the piezoelectric film in the concrete example 8 by XRD indicates that the piezoelectric film in the concrete example 8 is a (001)/(100)-oriented single-phase perovskite film.
The piezoelectric device as the concrete example 9 is different from the concrete example 1 only in that the piezoelectric film is formed of Bi(Al, (Co, Nb))O3, which is composed of the first component BiAlO3 and the second component Bi(Co0.67Nb0.33)O3, where TF(BiAlO3)>1.0, TF(Bi(Co0.67Nb0.33)O3)<1.0, and 0.98<TF(Bi(Al, (Co, Nb))O3)<1.01. The manner of formation of the piezoelectric film is similar to the concrete example 1. Ti is a quaternary element. Crystal structure analysis of the piezoelectric film in the concrete example 9 is performed by XRD. Table 8 further shows for the concrete example 9 the film composition, the tolerance factors TF(BiAlO3), TF(Bi(Co0.67Nb0.33)O3), and TF(Bi(Al, (Co, Nb))O3), the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, and the crystal structure confirmed by the XRD measurement. As indicated in Table 8, the crystal structure analysis of the piezoelectric film in the concrete example 9 by XRD indicates that the piezoelectric film in the concrete example 9 is a (001)/(100)-oriented single-phase perovskite film.
Two samples of the piezoelectric device have been produced as the concrete example 10 in a similar manner to the concrete example 1. However, the piezoelectric film in the first sample is formed of Bi(Al0.5Fe0.3Ga0.2)O3, and the piezoelectric film in the second sample is formed of Bi(Al0.6Sc0.1Ga0.3)O3. That is, the piezoelectric film in each sample is formed of a mixed crystal of the first component BiAlO3, the second component BiScO3 or BiFeO3, and the third component BiGaO3, where the tolerance factor of the first component is greater than 1.0, the tolerance factor of the second component is smaller than 1.0, and the tolerance factor of the third component is between the tolerance factors of the first and second components. The thickness of the piezoelectric film in each sample is 2.0 micrometers. Crystal structure analysis of the piezoelectric film in the concrete example 10 is performed by XRD. Table 9 shows for the concrete example 10 the film composition, the tolerance factors of the first, second, and third components and the first and second samples of the piezoelectric film, the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, and the crystal structure confirmed by the XRD measurement. In Table 9, the first and second samples of the piezoelectric film as the concrete example 10 are respectively denoted as “Concrete Example 10-1” and “Concrete Example 10-1.” As indicated in Table 9, the crystal structure analysis of the piezoelectric films in the concrete example 10 by XRD indicates that the piezoelectric film in every sample is a (001)/(100)-oriented single-phase perovskite film.
Two samples of the piezoelectric device have been produced as the concrete example 11 in a similar manner to the concrete example 1. However, the piezoelectric film in the first sample is formed of (Bi0.8Ba0.2) (Al0.1Fe0.2Ti0.7)O3, and the piezoelectric film in the second sample is formed of Bi((Co0.5Si0.5)0.1Fe0.4Al0.5)O3. That is, the piezoelectric film in the first sample is formed of a mixed crystal of the first component (Bi0.8Ba0.2)AlO3, the second component (Bi0.9Ba0.2)FeO3, and the third component (Bi0.8Ba0.2)TiO3, and the piezoelectric film in the second sample is formed of a mixed crystal of the first component Bi(Co0.5Si0.5)O3, the second component BiFeO3, and the third component BiAlO3, where the tolerance factor of the first component is greater than 1.0, the tolerance factor of the second component is smaller than 1.0, and the tolerance factor of the third component is between 0.98 and 1.02. The thickness of the piezoelectric film in each sample is 2.0 micrometers. Crystal structure analysis of the piezoelectric film in the concrete example 11 is performed by XRD. Table 9 shows, for the first and second samples of the concrete example 11, the film composition, the tolerance factors of the first, second, and third components and the piezoelectric film, the difference |MA−MB| between the atomic mass MA of the A-site element and the average atomic mass MB of the B-site elements, and the crystal structure confirmed by the XRD measurement. In Table 9, the first and second samples of the piezoelectric film as the concrete example 11 are respectively denoted as “Concrete Example 11-1” and “Concrete Example 11-2.” As indicated in Table 9, the crystal structure analysis of the piezoelectric films in the concrete example 11 by XRD indicates that the piezoelectric film in every sample is a (001)/(100)-oriented single-phase perovskite film.
The concrete example 12 of the piezoelectric device according to the present invention is produced as follows.
A lower electrode of SrRuO3 having a thickness of 0.2 micrometers is formed on a (110) substrate of SrTiO3 having a thickness of 500 micrometers at the substrate temperature of 600° C. by PLD (pulsed-laser deposition). Then, a piezoelectric film of Bi(Al0.5Fe0.5)O3 having a thickness of 2.0 micrometers is formed on the lower electrode at the substrate temperature of 600° C. by PLD. Crystal structure analysis of the piezoelectric film in the concrete example 12 by XRD indicates that the piezoelectric film is a (110)-oriented single-phase perovskite film having a rhombohedral crystal structure.
The concrete example 13 of the piezoelectric device according to the present invention is produced as follows.
A lower electrode of SrRuO3 having a thickness of 0.2 micrometers is formed on a (111) substrate of SrTiO3 having a thickness of 500 micrometers at the substrate temperature of 600° C. by PLD. Then, a piezoelectric film of Bi(Al0.7Fe0.3)O3 having a thickness of 2.0 micrometers is formed on the lower electrode at the substrate temperature of 600° C. by PLD. Crystal structure analysis of the piezoelectric film in the concrete example 13 by XRD indicates that the piezoelectric film is a (111)-oriented single-phase perovskite film having a tetragonal crystal structure.
The concrete example 14 of the piezoelectric device according to the present invention is produced as follows.
A lower electrode of SrRuO3 having a thickness of 0.2 micrometers is formed on a (110) substrate of SrTiO3 having a thickness of 500 micrometers at the substrate temperature of 600° C. by PLD. Then, a piezoelectric film of Bi(Al0.7Fe0.3)O3 having a thickness of 2.0 micrometers is formed on the lower electrode at the substrate temperature of 600° C. by PLD. Crystal structure analysis of the piezoelectric film in the concrete example 14 by XRD indicates that the piezoelectric film is a (110)-oriented single-phase perovskite film having a tetragonal crystal structure.
The piezoelectric devices according to the present invention can be preferably used in piezoelectric actuators, ferroelectric memories (FRAMs), and the like, where the piezoelectric actuators may be mounted in the inkjet recording heads, the magnetic recording-and-reproduction heads, MEMS (micro electromechanical systems) devices, micropumps, ultrasonic probes, and the like.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2007-010185 | Jan 2007 | JP | national |
| Filing Document | Filing Date | Country | Kind | 371c Date |
|---|---|---|---|---|
| PCT/JP2008/051020 | 1/18/2008 | WO | 00 | 7/17/2009 |
| Publishing Document | Publishing Date | Country | Kind |
|---|---|---|---|
| WO2008/088086 | 7/24/2008 | WO | A |
| Number | Name | Date | Kind |
|---|---|---|---|
| 4748143 | Tabata et al. | May 1988 | A |
| 5306411 | Mazanec et al. | Apr 1994 | A |
| 7216962 | Miyazawa et al. | May 2007 | B2 |
| 20030031622 | Eitel et al. | Feb 2003 | A1 |
| Number | Date | Country |
|---|---|---|
| 61-283348 | Dec 1986 | JP |
| 6-56428 | Mar 1994 | JP |
| 2000-133848 | May 2000 | JP |
| 2003-277146 | Oct 2003 | JP |
| 2005-39166 | Feb 2005 | JP |
| Number | Date | Country | |
|---|---|---|---|
| 20100103226 A1 | Apr 2010 | US |
