Number | Name | Date | Kind |
---|---|---|---|
5244759 | Pierrat | Sep 1993 | |
5275896 | Garofalo et al. | Jan 1994 | |
5300378 | Minami | Apr 1994 | |
5348826 | Dao et al. | Sep 1994 | |
5352550 | Okamoto | Oct 1994 | |
5354632 | Dao et al. | Oct 1994 | |
5358808 | Nitayama et al. | Oct 1994 | |
5405721 | Pierrat | Apr 1995 | |
5688409 | Dao et al. | Nov 1997 |
Entry |
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Pierrat et al., "Phase-Shifting Mask Topography Effects on Lithographic Image Quality", SPIE vol. 1927, Optical/Laser Microlithography VI pp. 28-41, 1993. |