Photoconductive member having amorphous germanium and amorphous silicon regions with nitrogen

Abstract

A photoconductive member comprises a substrate for photoconductive member and a light receiving layer having a layer constitution in which a first layer region (G) comprising an amorphous material containing germanium atoms and a second layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms are successively provided from the substrate side, said light receiving layer containing carbon atoms.

Description

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to a photoconductive member having sensitivity to electromagnetic waves such as light [herein used in a broad sense, including ultraviolet rays, visible light, infrared rays, X-rays, gamma-rays, and the like].

2. Description of the Prior Art

Photoconductive materials, which constitute photoconductive layers in solid state image pick-up devices, image forming members for electrophotography in the field of image formation, or manuscript reading devices and the like, are required to have a high sensitivity, a high SN ratio [photocurrent (I.sub.p) / dark current (I.sub.d)], spectral characteristics matching to those of electromagnetic waves to be irradiated, a rapid response to light, a desired dark resistance value as well as no harm to human bodies during usage. Further, in a solid state image pick-up device, it is also required that the residual image should easily be treated within a predetermined time. Particularly, in case of an image forming member for electrophotography to be assembled in an electrophotographic device to be used in an office as office apparatus, the aforesaid harmless characteristic is very important.

From the standpoint as mentioned above, amorphous silicon [hereinafter referred to as a-Si] has recently attracted attention as a photoconductive material. For example, German OLS Nos. 2746967 and 2855718 disclose applications of a-Si for use in image forming members for electrophotography, and German OLS No. 2933411 discloses an application of a-Si for use in a photoelectric transducing reading device.

However, under the present situation, the photoconductive members of the prior art having photoconductive layers constituted of a-Si are further required to be improved in a balance of overall characteristics including electrical, optical and photoconductive characteristics such as dark resistance value, photosensitivity and response to light, etc., and environmental characteristics during use such as humidity resistance, and further stability with the lapse of time.

For instance, when the above photoconductive member is applied in an image forming member for electrophotography, residual potential is frequently observed to remain during use thereof if improvements to higher photosensitivity and higher dark resistance are scheduled to be effected at the same time. When such a photoconductive member is repeatedly used for a long time, there will be caused various inconveniences such as accumulation of fatigues by repeated uses or so called ghost phenomenon wherein residual images are formed, or response characteristic will gradually be lowered when used at high speed repeatedly.

Further, a-Si has a relatively smaller coefficient of absorption of the light on the longer wavelength side in the visible light region as compared with that on the shorter wavelength side. Accordingly, in matching to the semiconductor laser practically applied at the present time, the light on the longer wavelength side cannot effectively be utilized, when employing a halogen lamp or a fluorescent lamp as the light source. Thus, various points remain to be improved.

On the other hand, when the light irradiated is not sufficiently absorbed in the photoconductive layer, but the amount of the light reaching the substrate is increased, interference due to multiple reflection may occur in the photoconductive layer to become a cause for "unfocused" image, in the case when the substrate itself has a high reflectance against the light transmitted through the photoconductive layer.

This effect will be increased, if the irradiated spot is made smaller for the purpose of enhancing resolution, thus posing a great problem in the case of using a semiconductor laser as the light source.

Further, a-Si materials to be used for constituting the photoconductive layer may contain as constituent atoms hydrogen atoms or halogen atoms such as fluorine atoms, chlorine atoms, etc. for improving their electrical, photoconductive characteristics, boron atoms, phosphorus atoms, etc. for controlling the electroconduction type as well as other atoms for improving other characteristics. Depending on the manner in which these constituent atoms are contained, there may sometimes be caused problems with respect to electrical or photoconductive characteristics of the layer formed.

That is, for example, in many cases, the life of the photocarriers generated by light irradiation in the photoconductive layer formed is insufficient, or at the dark portion, the charges injected from the substrate side cannot sufficiently be impeded.

Further, when the layer thickness is as thick as ten and some microns or higher, there tend to occur such phenomena as loosening or peeling of layers off from the substrate surface or formation of cracks in the layers with lapse of time when left to stand in air after taking out from a vacuum deposition chamber for layer formation. These phenomenon will occur particularly frequently when the substrate is a drum-shaped substrate conventionally employed in the field of electrophotography. Thus, there are problems to be solved with respect to stability with lapse of time.

Accordingly, while attempting to improve the characteristics of a-Si material per se on one hand, it is also required to make efforts to overcome all the problems as mentioned above in designing of the photoconductive member on the other hand.

In view of the above points, the present invention contemplates the achievement obtained as a result of extensive studies made comprehensively from the standpoints of applicability and utility of a-Si as a photoconductive member for image forming members for electrophotography, solid state image pick-up devices, reading devices, etc. It has now been found that a photoconductive member having a layer constitution comprising a light receiving layer exhibiting photoconductivity, which comprises a-Si, especially an amorphous material containing at least one of hydrogen atom (H) and halogen atom (X) in a matrix of silicon atoms such as so called hydrogenated amorphous silicon, halogenated amorphous silicon or halogen-containing hydrogenated amorphous silicon [hereinafter referred to comprenehsively as a-Si(H,X)], said photoconductive member being prepared by designing so as to have a specific structure as hereinafter described, not only exhibits practically extremely excellent characteristics but also surpass the photoconductive members of the prior art in substantially all respects, especially having markedly excellent characteristics as a photoconductive member for electrophotography and also excellent absorption spectrum characteristics on the longer wavelength side.

SUMMARY OF THE INVENTION

A primary object of the present invention is to provide a photoconductive member having electrical, optical and photoconductive characteristics which are constantly stable and all-environment type with virtually no dependence on the environments under use, which member is markedly excellent in photosensitive characteristics on the longer wavelength side and light fatigue resistance and also excellent in durability without causing deterioration phenomenon when used repeatedly, exhibiting no or substantially no residual potential observed.

Another object of the present invention is to provide a photoconductive member which is high photosensitivity throughout the whole visible light region, particularly excellent in matching to a semiconductor laser and also rapid in response to light.

Another object of the present invention is to provide a photoconductive member which is excellent in adhesion between a substrate and a layer provided on the substrate or between respective laminated layers, stable with closeness of structural arrangement and high in layer quality

Still another object of the present invention is to provide a photoconductive member having sufficiently an ability to retain charges during charging treatment for formation of electrostatic images, when applied as a member for formation of an electrophotographic image and having excellent electrophotographic characteristics which is not substantially lowered even in a humid atmosphere, for which ordinary electrophotographic methods can very effectively be applied.

Further, still another object of the present invention is to provide a photoconductive member for electrophotography, which can easily provide an image of high quality which is high in density, clear in halftone, high in resolution and free from "unfocused" image.

Still another object of the present invention is to provide a photoconductive member having high photosensitivity and high SN ratio characteristic, and a good electrical contact with the substrate.

According to the first aspect of the present invention, there is provided a photoconductive member comprising a substrate for photoconductive member and a light receiving layer having a layer constitution in which a first layer region comprising an amorphous material containing germanium atoms and a second layer region exhibiting photoconductivity comprising an amorphous material containing silicon atoms are successively provided from the substrate side, said light receiving layer containing carbon atoms.

According to the second aspect of the present invention, there is provided a photoconductive member comprising a substrate for photoconductive member and a light receiving layer having a layer constitution in which a first layer region comprising an amorphous material containing germanium atoms and a second layer region exhibiting photoconductivity comprising an amorphous material containing silicon atoms are successively provided from the substrate side, said first layer region containing a substrate for controlling conductivity and said light receiving layer containing carbon atoms.

According to the third aspect of the present invention, there is provided a photoconductive member comprising a substrate for photoconductive member and a light receiving layer comprising a first layer with a layer constitution in which a first layer region (G) comprising an amorphous material containing germanium atoms and a second layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms are successively provided from the substrate side and a second layer comprising an amorphous material containing silicon atoms and nitrogen atoms, said first layer containing carbon atoms therein.

According to the fourth aspect of the present invention, there is provided a photoconductive member comprising a substrate for photoconductive member and a light receiving layer comprising a first layer with a layer constitution in which a first layer region (G) comprising an amorphous material containing germanium atoms and a second layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms are successively provided from the substrate side and a second layer comprising an amorphous material containing silicon atoms and nitrogen atoms, said first layer region (G) containing a substance for controlling conductivity and said first layer containing carbon atoms therein.

According to the fifth aspect of the present invention, there is provided a photoconductive member comprising a substrate for photoconductive member and a light receiving layer comprising a first layer with a layer constitution in which a first layer region (G) comprising an amorphous material containing germanium atoms and a second layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms are successively provided from the substrate side and a second layer comprising an amorphous material containing silicon atoms,and oxygen atoms, said first layer containing carbon atoms therein.

According to the sixth aspect of the present invention, there is provided a photoconductive member comprising a substrate for photoconductive member and a light receiving layer comprising a first layer with a layer constitution in which a first layer region (G) comprising an amorphous material containing germanium atoms and a second layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms are successively provided from the substrate side and a second layer comprising an amorphous material containing silicon atoms and oxygen atoms, said first layer region (G) containing a substance for controlling conductivity and said first layer containing carbon atoms therein.

The photoconductive member of the present invention designed to have such a layer constitution as described in detail above can solve all of the various problems as mentioned above and exhibit very excellent electrical, optical, photoconductive characteristics, dielectric strength and use environment characteristics.

In particular, the photoconductive member of the present invention is free from any influence from residual potential on image formation when applied for an image forming member for electrophotography, with its electrical characteristics being stable with high sensitivity, having a high SN ratio as well as excellent light fatigue resistance and excellent repeated use characteristic and being capable of providing images of high quality of high density, clear halftone and high resolution repeatedly and stably.

Also, in the photoconductive member of the present invention, the first layer formed on the substrate is itself tough and markedly excellent in adhesion to the substrate, and therefore it can be used continuously repeatedly at high speed for a long time.

Further, the photoconductive member of the present invention is high in photosensitivity over all the visible light region, particularly excellent in matching to semiconductor laser and rapid in response to light.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 and FIG. 2 each shows a schematic sectional view for illustration of the layer constitution of a preferred embodiment of the photoconductive member according to the present invention;

FIGS. 3 to 11 each shows a schematic illustration of the depth profile of carbon atoms in the layer region (C); and

FIG. 12 is a schematic illustration of the device used for preparation of the photoconductive members of the present invention in Examples.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Referring now to the drawings, the photoconductive members according to the present invention are to be described in detail below.

FIG. 1 shows a schematic sectional view for illustration of the layer constitution of a first embodiment of the photoconductive member of this invention.

The photoconductive member 100 as shown in FIG. 1 is constituted of a light receiving layer 102 formed on a substrate 101 for photoconductive member, said light receiving layer 102 having a free surface 105 on one end surface.

The light receiving layer 102 has a layer structure constituted of a first layer region (G) 103 consisting of germanium atoms and, if desired, at least one of silicon atoms, hydrogen atoms and halogen atoms [hereinafter abbreviated as "a-Ge (Si,H,X)"] and a second layer region (S) 104 having photoconductivity consisting of a-Si(H,X) laminated successively from the substrate side 101.

When germanium atoms are contained in the first layer region (G) 103 together with other atoms, germanium atoms are contained in the above layer region (G) 103 with a distribution continuous and uniform in the layer thickness direction of said first layer region (G) 103 and the interplanar direction in parallel to the surface of the substrate 101.

FIG. 2 shows a schematic illustration for explanation of the second embodiment of the present invention.

The photoconductive member 200 shown in FIG. 2 has a light receiving layer 207 comprising a first layer (I) 202 and a second layer (II) 203 on a substrate 201 for photoconductive member 200, said second layer (II) having a free surface 206 on one end surface. The first layer (I) 202 has a layer structure in which a first layer region (G) 204 consisting of an amrophous material comprising germanium atoms and, if necessary, at least one of silicon atoms, hydrogen atoms and halogen atoms (X) [hereinafter abbreviated as a-Ge(Si,H,X)] and a second layer region (S) 205 having photoconductivity constituted of a-Si(H,X) laminated successively from the substrate side 201.

The germanium atoms contained in the first layer region (G) 204 are contained in the distributed state such that they are distributed continuously and uniformly in the layer thickness direction of the first layer region (G) 204 and in the interplanar direction in parallel to the surface of the substrate 201.

The above second layer is constituted of an amorphous material containing either one of nitrogen atoms and oxygen atoms in a matrix of silicon atoms, containing desirably at least one of hydrogen atoms and halogen atoms therein.

In the present invention, in the second layer region (S) provided on the first layer region (G), no germanium atom is contained, and by forming the light receiving layer to such a layer structure, it is possible to give a photoconductive member which is excellent in photosensitivity to the light over the entire wavelength region from relatively shorter wavelength to relatively longer wavelength including visible light region.

Also, since the distribution of germanium atoms in the first layer region (G) is such that germanium atoms are distributed continuously over all the layer region, affinity between the first layer region (G) and the second layer region (S) is excellent, and the light on the longer wavelength side which cannot substantially be absorbed by the second layer region (S) can be absorbed in the first layer region (G) substantially completely, when employing a semiconductor laser, whereby interference by reflection from the substrate surface can be prevented.

Also, in the photoconductive member of the present invention, when silicon atoms are contained in the first layer region (G) the respective light receiving materials constituting the first layer region (G) and the second layer region (S) have the common constituent of silicon atoms, and therefore chemical stability can be sufficiently ensured at the laminated interface.

In the present invention, the content of germanium atoms in the first layer region (G) containing germanium atoms, which may suitably be determined as desired so as to achieve effectively the objects of the present invention, may preferably be 1 to 10.times.10.sup.5 atomic ppm, more preferably 100 to 9.5.times.10.sup.5 atomic ppm, most preferably 500 to 8.times.10.sup.5 atomic ppm based on the sum of germanium atoms and silicon atoms.

In the photoconductive member of the present invention, the layer thickness of the first layer region (G) and the thickness of the second layer region (S) are one of important factors for accomplishing effectively the object of the present invention and therefore sufficient care should be paid in designing of the photoconductive member so that desirable characteristics may be imparted to the photoconductive member formed.

In the present invention, the layer thickness T.sub.B of the first layer region (G) may preferably be 30 .ANG. to 50.mu., more preferably 40 .ANG. to 40.mu., most preferably 50 .ANG. to 30.mu..

On the other hand, the layer thickness T of the second layer region (S) may be preferably 0.5 to 90.mu., more preferably 1 to 80.mu., most preferably 2 to 50.mu..

The sum of the layer thickness T.sub.B of the first layer region (G) and the layer thickness T of the second layer region (S), namely (T.sub.B +T) may be suitably determined as desired in designing of the layers of the photoconductive member, based on the mutual organic relationship between the characteristics required for both layer regions and the characteristics required for the whole light receiving layer.

In the photoconductive member of the present invention, the numerical range for the above (T.sub.B +T) may preferably be from 1 to 100.mu., more preferably 1 to 80.mu., most preferably 2 to 50.mu..

In a more preferred embodiment of the present invention, it is preferred to select the numerical values for respective thicknesses T.sub.B and T as mentioned above so that the relation of T.sub.B /T.ltoreq.1 may be satisfied.

In selection of the numerical values for the thicknesses T.sub.B and T in the above case, the values of T.sub.B and T should preferably be determined so that the relation T.sub.B /T.ltoreq.0.9, most preferably, T.sub.B /T.ltoreq.0.8, may be satisfied.

In the present invention, when the content of germanium atoms in the first layer region (G) is 1.times.10.sup.5 atomic ppm or more, the layer thickness T.sub.B of the first layer region (G) should desirably be made as thin as possible, preferably 30.mu. or less, more preferably 25.mu. or less, most preferably 20.mu. or less.

In the photoconductive member of the present invention, for the purpose of improvements to higher photosensitivity, higher drak resistance and, further, improvement of adhesion between the substrate and the light receiving layer, carbon atoms are contained in the light receiving layer or the first layer. The carbon atoms contained in the light receiving layer or the first layer may be contained either evenly throughout the whole layer region of the light receiving layer or locally only in a part of the layer region of the light receiving layer or the first layer.

Carbon atoms may be distributed in such a state that the content C(C) may be either uniform or ununiform in the layer thickness direction in the light receiving layer or the first layer.

In the present invention, the layer region (C) containing carbon atoms provided in the light receiving layer or the first layer is provided so as to occupy the whole layer region of the light receiving layer or the first layer when it is intended to improve primarily photosensitivity and dark resistance. On the other hand, when the main object is to strengthen adhesion between the substrate and the light receiving layer, it is provided so as to occupy the end portion layer region (E) on the substrate side of the light receiving layer or the first layer.

In the former case, the content of carbon atoms to be contained in the layer region (C) is made relatively smaller in order to maintain high photosensitivity, while in the latter case, it should desirably be made relatively larger in order to ensure strengthening of adhesion with the substrate.

For the purpose of accomplishing simultaneously both of the former and the latter cases, carbon atoms may be distributed at relatively higher content on the substrate side and at relatively lower content on the free surface side of the light receiving layer, or alternatively, there may be formed a distribution of carbon atoms such that carbon atoms are not positively contained in the surface layer region on the free surface side of the light receiving layer or the first layer.

In the present invention, the content of carbon atoms to be contained in the layer region (C) provided in the light receiving layer or the first layer may be suitably selected depending on the characteristics required for the layer region (C) per se or, when said layer region (C) is provided in direct contact with the substrate, depending on the organic relationship such the relation with the characteristics at the contacted interface with said substrate and others.

When another layer region is to be provided in direct contact with said layer region (C), the content of carbon atoms may be suitably selected also with considerations about the characteristics of said another layer region and the relation with the characteristics of the contacted interface with said another layer region.

The content of carbon atoms in the layer region (C), which may suitably be determined as desired depending on the characteristics required for the photoconductive member to be formed, may be preferably 0.001 to 50 atomic %, more preferably 0.002 to 40 atomic %, most preferably 0.003 to 30 atomic %.

In the present invention, when the layer region (C) comprises the whole region of the light receiving layer or the first layer or when, although it does not comprises the whole layer region, the layer thickness T.sub.o of the layer region (C) is sufficiently large relative to the layer thickness T of the light receiving layer, the upper limit of the content of carbon atoms in the layer region (C) should desirably be sufficiently smaller than the aforesaid value.

In the case of the present invention, in such a case when the ratio of the layer thickness T.sub.o of the layer region (C) relative to the layer thickness T of the light receiving layer is 2/5 or higher, the upper limit of the content of carbon atoms in the layer region (C) may preferably be 30 atomic % or less, more preferably 20 atomic % or less, most preferably 10 atomic % or less.

FIGS. 3 through 11 show typical examples of distribution in the direction of layer thickness of carbon atoms contained in the layer region (C) of the photoconductive member in the present invention.

In FIGS. 3 through 11, the abscissa indicates the content C(C) of carbon atoms and the ordinate the layer thickness of the layer region (C), t.sub.B showing the position of the end surface of the layer region (C) on the substrate side and t.sub.T the position of the end surface of the layer region (C) on the side opposite to the substrate side. That is, layer formation of the layer region (C) containing carbon atoms proceeds from the t.sub.B side toward the t.sub.T side.

In FIG. 3, there is shown a first typical embodiment of the depth profile of carbon atoms in the layer thickness direction contained in the layer region (C).

In the embodiment as shown in FIG. 3, from the interface position t.sub.B at which the surface of the substrate, on which the layer region (C) containing carbon atoms is to be formed, is contacted with the surface of said layer region (C) to the position t.sub.1, carbon atoms are contained in the layer region (C) formed, while the content C(C) of carbon atoms taking a constant value of C.sub.1, the content being gradually decreased from the content C.sub.2 continuously from the position t.sub.1 to the interface position t.sub.T. At the interface position t.sub.T, the content C(C) of carbon atoms is made C.sub.3.

In the embodiment shown in FIG. 4, the content C(C) of carbon atoms contained is decreased gradually and continuously from the position t.sub.B to the position t.sub.T from the content C.sub.4 until it becomes the content C.sub.5 at the position t.sub.T.

In case of FIG. 5, the content C(C) of carbon atoms is made constant as C.sub.6 from the position t.sub.B to t.sub.2, gradually decreased continuously from the position t.sub.2 to the position t.sub.T, and the content C(N) is made substantially zero at the position t.sub.T (substantially zero herein means the content less than the detectable limit).

In case of FIG. 6, the content C(C) of carbon atoms are decreased gradually and continuously from the position t.sub.B to the position t.sub.T from the content C.sub.8, until it is made substantially zero at the position t.sub.T.

In the embodiment shown in FIG. 7, the content C(C) of carbon atoms is constantly C.sub.9 between the position t.sub.B and the position t.sub.3, and it is made C.sub.10 at the position t.sub.T. Between the position t.sub.3 and the position t.sub.T, the content is reduced as a first order function from the position t.sub.3 to the position t.sub.T.

In the embodiment shown in FIG. 8, there is formed a depth profile such that the content C(C) takes a constant value of C.sub.11 from the position t.sub.B to the position t.sub.4, and is decreased as a first order function from the content C.sub.12 to the content C.sub.13 from the position t.sub.4 to the position t.sub.T.

In the embodiment shown in FIG. 9, the content C(C) of carbon atoms is decreased as a first order function from the content C.sub.14 to zero from the position t.sub.B to the position t.sub.T.

In FIG. 10, there is shown an embodiment, where the content C(C) of carbon atoms is decreased as a first order function from the content C.sub.15 to C.sub.16 from the position t.sub.B to t.sub.5 and made constantly at the content C.sub.16 between the position t.sub.5 and t.sub.T.

In the embodiment shown in FIG. 11, the content C(C) of carbon atoms is at the content C.sub.17 at the position t.sub.B, which content C.sub.17 is initially decreased gradually and abruptly near the position t.sub.6 to the position t.sub.6, until it is made the content C.sub.18 at the position t.sub.6.

Between the position t.sub.6 and the position t.sub.7, the content C(C) is initially decreased abruptly and thereafter gradually, until it is made the content C.sub.19 at the position t.sub.7. Between the position t.sub.7 and the position t.sub.8, the content is decreased very gradually to the content C.sub.20 at the position t.sub.8. Between the position t.sub.8 and the position t.sub.T, the content is decreased along the curve having a shape as shown in the Figure from the content C.sub.20 to substantially zero.

As described above about some typical examples of depth profiles of carbon atoms contained in the layer region (C) in the direction of the layer thickness by referring to FIGS. 3 through 11, in the present invention, the layer region (C) is provided desirably in a depth profile so as to have a portion enriched in content C(C) of carbon atoms on the substrate side and a portion depleted in content C(C) of carbon atoms to considerably lower than that of the substrate side on the interface t.sub.T side.

In the present invention, the layer region (C) containing carbon atoms for constituting the light receiving layer or the first layer may preferably be provided so as to have a localized region (B) containing carbon atoms at a relatively higher content on the substrate side as described above, and in this case adhesion between the substrate and the light receiving layer can be further improved.

The localized region (B), as explained in terms of the symbols shown in FIGS. 3 to 11 may be desirably provided within 5.mu. from the interface position t.sub.B.

In the present invention, the above localized region (B) may be made to be identical with the whole layer region (L.sub.T) up to the depth of 5.mu. thickness for the interface position t.sub.B, or alternatively a part of the layer region (L.sub.T).

It may suitably be determined depending on the characteristics required for the light receiving layer to be formed, whether the localized region (B) is made a part or whole of the layer region (L.sub.T).

The localized region (B) may preferably formed according to such a layer formation that the maximum Cmax of the content C(C) of carbon atoms in a distribution in the layer thickness direction may preferably be 500 atomic ppm or more, more preferably 800 atomic ppm or more, most preferably 1000 atomic ppm or more.

That is, according to the present invention, the layer region (C) containing carbon atoms is formed so that the maximum value Cmax of the depth profile may exist within a layer thickness of 5.mu. from the substrate side(the layer region within 5.mu. thickness from t.sub.B).

In the present invention, illustrative of halogen atoms (X), which may optionally be incorporated in the first layer region (G) and the second layer region (S) constituting the light receiving layer or the first layer, are fluorine, chlorine, bromine and iodine, particularly preferably fluorine and chlorine.

In the present invention, formation of the first layer region (G) constituted of a-Ge(Si,H,X) may be conducted according to the vacuum deposition method utilizing discharging phenomenon, such as glow discharge method, sputtering method or ion-plating method. For example, for formation of the first layer region (G) constituted of a-Ge(Si,H,X) according to the glow discharge method, the basic procedure comprises introducing a starting gas for Ge supply capable of supplying germanium atoms (Ge) optionally together with a starting gas for Si supply capable of supplying silicon atoms (Si), and a starting gas for introduction of hydrogen atoms (H) and/or a starting gas for introduction of halogen atoms (X) into a deposition chamber which can be internally brought to a reduced pressure, and exciting glow discharge in said deposition chamber, thereby effecting layer formation on the surface of a substrate placed at a predetermined position. For distributing ununiformly the germanium atoms in the first layer region (G), a layer consisting of a-Ge(Si,H,X) may be formed while controlling the depth profile of germanium atoms according to a desired change rate curve. Alternatively, for formation according to the sputtering method, when carrying out sputtering by use of a target constituted of Si or two sheets of target of said target and a target constituted of Ge or target of a mixture of Si and Ge in an atmosphere of an inert gas such as Ar, He, etc. or a gas mixture based on these gases, a starting gas for Ge supply optionally diluted with He, Ar, etc. and optionally together with, if desired, a gas for introduction of hydrogen atoms (H) and/or a gas for introduction of halogen atoms (X) may be introduced into a deposition chamber for sputtering, thereby forming a plasma atmosphere of a desired gas, and sputtering of the aforesaid target may be effected, while controlling the gas flow rates of the starting gas supply of Ge acodrding to a desired change rate curve.

In the case of the ion-plating method, for example, a vaporizing source such as a polycrystalline silicon or a single crystalline silicon and a polycrystalline germanium or a single crystalline germanium may be placed as vaporizing source in an evaporating boat, and the vaporizing source is heated by the resistance heating method or the electron beam method (EB method) to be vaporized, and the flying vaporized product is permitted to pass through a desired gas plasma atmosphere, otherwise following the same procedure as in the case of sputtering.

The starting gas for supplying Si to be used in the present invention may include gaseous or gasifiable hydrogenated silicons (silanes) such as SiH.sub.4, Si.sub.2 H.sub.6, Si.sub.3 H.sub.8, Si.sub.4 H.sub.10 and others as effective materials. In particular, SiH.sub.4 and Si.sub.2 H.sub.6 are preferred with respect to easy handling during layer formation and efficiency for supplying Si.

As the substances which can be starting gases for Ge supply, there may be effectively employed gaseous or gasifiable hydrogenated germanium such as GeH.sub.4, Ge.sub.2 H.sub.6, Ge.sub.3 H.sub.8, Ge.sub.4 H.sub.10, Ge.sub.5 H.sub.12, Ge.sub.6 H.sub.14, Ge.sub.7 H.sub.16, Ge.sub.8 H.sub.18, Ge.sub.9 H.sub.20, etc. In particular, GeH.sub.4, Ge.sub.2 H.sub.6 and Ge.sub.3 H.sub.8 are preferred with respect to easy handling during layer formation and efficiency for supplying Ge.

Effective starting gases for introduction of halogen atoms to be used in the present invention may include a large number of halogenic compounds, as exemplified preferably by gaseous or gasifiable halogenic compounds such as halogenic gases, halides, interhalogen compounds, silane derivatives substituted with halogens, and the like.

Further, there may also be included gaseous or gasifiable silicon compounds containing halogen atoms constituted of silicon atoms and halogen atoms as constituent elements as effective ones in the present invention.

Typical examples of halogen compounds preferably used in the present invention may include halogen gases such as of fluorine, chlorine, bromine or iodine, interhalogen compounds such as BrF, ClF, ClF.sub.3, BrF.sub.5, BrF.sub.3, IF.sub.3, IF.sub.7, ICl, IBr, etc.

As the silicon compounds containing halogen atoms, namely so called silane derivatives substituted with halogens, there may preferably be employed silicon halides such as SiF.sub.4, Si.sub.2 F.sub.6, SiCl.sub.4, SiBr.sub.4, and the like.

When the characteristic photoconductive member of the present invention is formed according to the glow discharge method by employment of such a silicon compound containing halogen atoms, it is possible to form the first layer region (G) comprising a-Ge containing halogen atoms on a desired substrate without use of a hydrogenated silicon gas as the starting gas capable of supplying Si together with the starting gas for Ge supply.

In the case of forming first layer region (G) containing halogen atoms according to the glow discharge method, the basic procedure comprises introducing, for example, a silicon halide as the starting gas for Si supply, a hydrogenated germanium as the starting gas for Ge supply and a gas such as Ar, H.sub.2, He, etc. at a predetermined mixing ratio into the deposition chamber for formation of the first layer region (G) and exciting glow discharge to form a plasma atmosphere of these gases, whereby the first layer region (G) can be formed on a desired substrate. In order to control the ratio of hydrogen atoms incorporated more easily, hydrogen gas or a gas of a silicon compound containing hydrogen atoms may also be mixed with these gases in a desired amount to form the layer.

Also, each gas is not restricted to a single species, but multiple species may be available at any desired ratio.

In either case of the sputtering method and the ion-plating method, introduction of halogen atoms into the layer formed may be performed by introducing the gas of the above halogen compound or the above silicon compound containing halogen atoms into a deposition chamber and forming a plasma atmosphere of said gas.

On the other hand, for introduction of hydrogen atoms, a starting gas for introduction of hydrogen atoms, for example, H.sub.2 or gases such as silanes and/or hydrogenated germanium as mentioned above, may be introduced into a deposition chamber for sputtering, followed by formation of the plasma atmosphere of said gases.

In the present invention, as the starting gas for introduction of halogen atoms, the halides or halo-containing silicon compounds as mentioned above can effectively be used. Otherwise, it is also possible to use effectively as the starting material for formation of the first layer region (G) gaseous or gasifiable substances, including halide containing hydrogen atom as one of the constituents, e.g. hydrogen halide such as HF, HCl, HBr, HI, etc.; halo-substituted hydrogenated silicon such as SiH.sub.2 F.sub.2, SiH.sub.2 I.sub.2, SiH.sub.2 Cl.sub.2, SiHCl.sub.3, SiH.sub.2 Br.sub.2, SiHBr.sub.3, etc.; hydrogenated germanium halides such as GeHF.sub.3, GeH.sub.2 F.sub.2, GeH.sub.3 F, GeHCl.sub.3, GeH.sub.2 Cl.sub.3, GeH.sub.3 Cl, GeHBr.sub.3, GeH.sub.2 Br.sub.2, GeH.sub.3 Br, GeHI.sub.3, GeH.sub.2 I.sub.2, GeH.sub.3 I, etc.; germanium halides such as GeF.sub.4, GeCl.sub.4, GeBr.sub.4, GeI.sub.4, GeF.sub.2, GeCl.sub.2, GeBr.sub.2, GeI.sub.2, etc.

Among these substances, halides containing hydrogen atoms can preferably be used as the starting material for introduction of halogen atoms, because hydrogen atoms, which are very effective for controlling electrical or photoelectric characteristics, can be introudced into the layer simultaneously with introduction of halogen atoms during formation of the first layer region (G).

For introducing hydrogen atoms structurally into the first layer region (G), other than those as mentioned above, H.sub.2 or a hydrogenated silicon such as SiH.sub.4, Si.sub.2 H.sub.6, Si.sub.3 H.sub.8, Si.sub.4 H.sub.10, etc. together with germanium or a germanium compound for supplying Ge, or a hydrogenated germanium such as GeH.sub.4, Ge.sub.2 H.sub.6, Ge.sub.3 H.sub.8, Ge.sub.4 H.sub.10, Ge.sub.5 H.sub.12, Ge.sub.6 H.sub.14, Ge.sub.7 H.sub.16, Ge.sub.8 H.sub.18, Ge.sub.9 H.sub.20, etc. together with silicon or a silicon compound for supplying Si can be permitted to co-exist in a deposition chamber, followed by excitation of discharging.

According to a preferred embodiment of the present invention, the amount of hydrogen atoms (H) or the amount of halogen atoms (X) or the sum of the amounts of hydrogen atoms and halogen atoms (H+X) to be contained in the first layer region (G) constituting the photoconductive layer to be formed should preferably be 0.01 to 40 atomic %, more preferably 0.05 to 30 atomic %, most preferably 0.1 to 25 atomic %.

For controlling th.e amount of hydrogen atoms (H) and/or halogen atoms (X) to be contained in the first layer region (G), for example, the substrate temperature and/or the amount of the starting materials used for ihcorporation of hydrogen atoms (H) or halogen atoms (X) to be introduced into the deposition device system, discharging power, etc. may be controlled.

In the present invention, for formation of the the second layer region (S) constituted of a-Si-(H,X), the starting materials (I) for formation of the first layer region (G), from which the starting material for the starting gases for supplying Ge is omitted, are used as the starting materials (II) for formation of the second layer region (S), and layer formation can be effected following the same procedure and conditions as in formation of the first layer region (G).

More specifically, in the present invention, formation of the second layer region (S) constituted of a-Si(H,X), may be carried out according to the vacuum deposition method utilizing discharging phenomenon such as the glow discharge method, the sputtering method or the ion-plating method. For example, for formation of the seoond layer region (S) constituted of a-Si(H,X), the basic procedure comprises introducing a starting gas for Si supply capable of supplying silicon atoms as described above, optionally together with starting gases for introduction of hydrogen atoms (H) and/or halogen atoms (X), into a deposition chamber which can be brought internally to a reduced pressure and exciting glow discharge in said deposition chamber, thereby forming a layer comprising a-Si(H,X) on a desired substrate placed at a predetermined position. Alternatively, for formation according to the sputtering method, gases for introduction of hydrogen atoms (H) and/or halogen atoms (X) may be introduced into a deposition chamber when effecting sputtering of a target constituted of Si in an inert gas such as Ar, He, etc. or a gas mixture based on these gases.

In the present invention, for provision of the layer region (C) containing carbon atoms in the light receiving layer or the first layer, a starting material for introduction of carbon atoms may be used together with the starting material for formation of the light receiving layer or the first layer as mentioned above during formation of the light receiving layer or the first layer and may be incorporated in the layer formed while controlling their amounts.

When the glow discharge method is to be employed for formation of the layer region (C), the starting material as the starting gas for formation of the layer region (C) may be constituted by adding a starting material for introduction of carbon atoms to the starting material selected as desired from those for formation of the light receiving layer or the first layer as mentioned above. As such a starting material for introduction of carbon atoms, there may be employed most of gaseous or gasifiable substances containing at least carbon atoms as constituent atoms.

For example, there may be employed a mixture of a starting gas containing silicon atoms (Si) as constituent atoms, a starting gas containing carbon atoms (C) as constituent atoms and optionally a starting gas containing hydrogen atoms (H) and/or halogen atoms (X) as constituent atoms at a desired mixing ratio; a mixture of a starting gas containing silicon atoms (Si) as constituent atoms and a starting gas containing carbon atoms and hydrogen atoms as constituent atoms also at a desired mixing ratio or a mixture of a starting gas containing silicon atoms (Si) as constituent atoms and a starting gas containing the three atoms of silicon atoms (Si), carbon atoms (C) and hydrogen atoms (H) as constituent atoms.

Alternatively, there may also be employed a mixture of a starting gas containing silicon atoms (Si) and hydrogen atoms (H) as constituent atoms and a starting gas containing carbon atoms (C) as constituent atoms.

The starting gas for introduction of carbon atoms may include compounds containing C and H as constituent atoms such as saturated hydrocarbons containing 1 to 4 carbon atoms, ethylenic hydrocarbons having 2 to 4 carbon atoms, acetylenic hydrocarbons having 2 to 3 carbons atoms.

More specifically, there may be included, as saturated hydrocarbons, methane (CH.sub.4), ethane (C.sub.2 H.sub.6), propane (C.sub.3 H.sub.8), n-butane (n-C.sub.4 H.sub.10), pentane (C.sub.5 H.sub.12); as ethylenic hydrocarbons, ethylene (C.sub.2 H.sub.4), propylene (C.sub.3 H.sub.6), butene-1 (C.sub.4 H.sub.8), butene-2 (C.sub.4 H.sub.8), isobutylene (C.sub.4 H.sub.8), pentene (C.sub.5 H.sub.10); as acetylenic hydrocarbons, acetylene (C.sub.2 H.sub.2), methyl acetylene (C.sub.3 H.sub.4), butyne (C.sub.4 H.sub.6).

Other than these, the starting gas containing Si, C and H as constituent atoms may be alkyl silanes such as Si(CH.sub.3).sub.4, Si(CH.sub.2 H.sub.5).sub.4, etc.

In the present invention, for promoting further the effect obtained by carbon atoms, oxygen atoms and/or nitrogen atoms may also be added in the layer region (C) in addition to carbon atoms. The starting gas for incorporation of oxygen atoms in the layer region (C) may include, for example, oxygen (O.sub.2), ozone (O.sub.3), nitrogen monooxide (NO), nitrogen dioxide (NO.sub.2), dinitrogen monooxide (N.sub.2 O), dinitrogen trioxide (N.sub.2 O.sub.3), dinitrogen tetraoxide (N.sub.2 O.sub.4), dinitrogen pentaoxide (N.sub.2 O.sub.5), nitrogen trioxide (NO.sub.3), and lower siloxanes containing silicon atoms (Si), oxygen atoms (O) and hydrogen atoms (H) as constituent atoms such as disiloxane (H.sub.3 SiOSiH.sub.3), trisiloxane (H.sub.3 SiOSiH.sub.2 OSiH.sub.3) and the like.

As the starting material effectively used as the starting gas for introduction of nitrogen atoms (N) to be used during formation of the layer region (C), it is possible to use compounds containing N as constituent atom or compounds containing N and H as constituent atoms, such as gaseous or gasifiable nitrogen compounds, nitrides and azides, including for example, nitrogen (N.sub.2), ammonia (NH.sub.3), hydrazine (H.sub.2 NNH.sub.2), hydrogen azide (HN.sub.3), ammonium azide (NH.sub.4 N.sub.3) and so on. Alternatively, for the advantage of introducing halogen atoms (X) in addition to nitrogen atoms (N), there may be also employed nitrogen halide compounds such as nitrogen trifluoride (F.sub.3 N), dinitrogen tetrafluoride (F.sub.4 N.sub.2) and the like.

For formation of the layer region (C) containing carbon atoms according to the sputtering method, a single crystalline or polycrystalline Si wafer or C wafer or a wafer containing Si and C mixed therein may be employed and sputtering of these wafers may be conducted in various gas atmospheres.

For example, when Si wafer is employed as the target, a starting gas for introduction of carbon atoms optionally together with a starting gas for introduction of hydrogen atoms and/or halogen atoms, which may optionally be diluted with a diluting gas, may be introduced into a deposition chamber for sputtering to form gas plasma of these gases, in which sputtering of the aforesaid Si wafer may be effected.

Alternatively, by use of separate targets of Si and C or one sheet of a target containing Si and C mixed therein, sputtering may be effected in an atmosphere of a diluting gas as a gas for sputtering or in a gas atmosphere containing at least hydrogen atoms (H) and/or halogen atoms (X) as constituent atoms. As the starting gas for introduction of carbon atoms, there may be employed the starting gases shown as examples in the glow discharge method previously described also as effective gases in case of sputtering.

In the present invention, when providing a layer region (C) containing carbon atoms during formation of the light receiving layer or the first layer formation of the layer region (C) having a desired distribution state in the direction of layer thickness depth profile by varying the content C(C) of carbon atoms contained in said layer regio(C) may be conducted in case of glow discharge by introducing a starting gas for introduction of carbon atoms of which the content C(C) is to be varied into a deposition chamber, while varying suitably its gas flow rate according to a desired change rate curve. For example, by the manual method or any other method conventionally used such as an externally driven motor, etc., the opening of certain needle valve provided in the course of the gas flow channel system may be gradually varied. During this procedure, the rate of variation is not necessarily required to be linear, but the flow rate may be controlled according to a vairation rate curve previously designed by means of, for example, a microcomputer to give a desired content curve.

In case when the layer region (C) is formed by the sputtering method, formation of a desired depth profile of carbon atoms in the direction of layer thickness by varying the content C(C) of carbon atoms in the direction of layer thickness may be performed first similarly as in case of the glow discharge method by employing a starting material for introduction of carbon atoms under gaseous state and varying suitably as desired the gas flow rate of said gas when introduced into the deposition chamber.

Secondly, formation of such a depth profile can also be achieved by previously changing the composition of a target for sputtering. For example, when a target comprising a mixture of Si and C is to be used, the mixing ratio of Si to C may be varied in the direction of layer thickness of the target.

In the present invention, the amount of hydrogen atoms (H) or the amount of halogen atoms (X) or the sum of the amounts of hydrogen atoms and halogen atoms (H+X) to be contained in the second layer region (S) constituting the light receiving layer or the first layer to be formed should preferably be 1 to 40 atomic %, more preferably 5 to 30 atomic %, most preferably 5 to 25 atomic %.

In the photoconductive member of the present invention, by incorporating a substance (C) for controlling conductivity in the second layer region (S) containing no germanium atom provided on the first layer region (G) containing germanium atom, the conductivities of said layer region (S) can be controlled freely as desired.

In the present invention, when the substance (C) for controlling conductivity is contained in the first layer region (G) so as to exist locally in a part of the layer region (G), the layer region (PN) containing said substance (C) should desirably be provided as the end layer region of the first layer region (G). In particular, when the said layer region (PN) is provided as the end layer region on the substrate side of the first layer region (G), it is possible to inhibit effectively injection of charges of a specific polarity from the substrate into the light receiving layer by selecting adequately the aforesaid substance (C) to be contained in the layer region (PN) and its amount as desired.

In the present invention, when the substance (C) for controlling conductivity is contained in the first layer region (G) evenly throughout the whole region or locally in the layer thickness direction, it is further possible to incorporate the above substance (C) in the second layer region (S) which is provided on the first layer region (G).

When the above substance (C) is contained in the second layer region (S), the substance (C) to be contained in the second layer region (S), its amount and the manner in which it is contained may suitably be determined depending on the substance (C) contained in the first layer region (G), its amount and the manner in which it is contained.

In the present invention, when the above substance (C) is contained in the second layer region (S), it is preferred that the above substance (C) should be contained at least in the layer region including the contacted interface with the first layer region (G).

In the present invention, the above substance (C) may also be contained in the second layer region (S) evenly throughout the whole region or alternatively uniformly only in a part of the layer region.

Thus, when the substance (C) for controlling conductivity is contained in both of the first layer region (G) and the second layer region (S), it is desirable that the layer region containing the above substance (C) in the first layer region (G) and the layer region containing the above substance (C) in the second layer region (S) should be provided so as to be in contact with each other. The substance (C) contained in the first layer region (G) and that in the second layer region (S) may be of the same species or different, and their amounts may also be the same or different in respective layer regions.

However, in the case when the above substance (C) contained in the respective regions is of the same kind, it is preferable to increase sufficiently the content in the first layer region (G) or to incorporate substances with different electrical characteristics in respective desired layer regions.

When the substance for controlling conductivity is contained only in the second layer region (S), the content of said substance may be determined suitably on organic relationship such as those with the conductivity characteristic required for said layer region (S), or the characteristics of other layer regions provided in direct contact with said layer region (S) or the characteristic at the contacted interface with said other layer regions.

In the present invention, the content of the substance for controlling oonductivity contained in the second layer region (S) may preferably be 0.001 to 1000 atomic ppm, more preferably 0.05 to 500 atomic ppm, most preferably 0.1 to 200 atomic ppm.

In the present invention, by incorporating a substance (C) for controlling conductivity in the layer, the conductivity of the layer region containing said substance (C) can be controlled freely as desired, and such substances may include so called impurities in the field of semiconductor. In the present invention, there may be included p-type impurities giving p-type conductivity characteristics and n-type impurities giving n-type conductivity characteristics to a-Ge(Si,H,X) constituting the second layer region (S) formed.

More specifically, there may be mentioned as p-type impurities atoms belonging to the group III of the periodic table (Group III atoms), such as B (boron), Al (aluminum), Ga (gallium), In (indium), Tl (thallium), etc., particularly preferably B and Ga.

As n-type impurities, there may be included the atoms belonging to the group V of the periodic table (Group V atoms), such as P (phosphorus), As (arsenic), Sb (antimony), Bi (bismuth), etc., particularly preferably P and As.

In the present invention, the content of the substance (C) for controlling conductivity in the second layer region (S) may be suitably be selected depending on the conductivity required for said layer region (S), or the relationships with characteristics of other layer regions provided in direct contact with said layer region (S) or the characteristics at the contacted interface with said other layer regions.

That is, in the present invention, the content of the substance (C) for controlling conductivity in the layer region (PN) may be suitably be selected depending on the conductivity required for said layer region (PN), or the relationships with characteristics of other layer regions provided in direct contact with said layer region (PN) or the characteristics at the contacted interface with said other layer regions.

In the present invention, the content of the substance (C) for controlling conductivity contained in the layer region (PN) should preferably be 0.01 to 5.times.10.sup.4 atomic ppm, more preferably 0.5 to 1.times.10.sup.4 atomic ppm, most preferably 1 to 5.times.10.sup.3 atomic ppm.

In the present invention, by making the content of the substance (C) for controlling conductivity in the layer region (PN) preferably 30 atomic ppm or more, more preferably 50 atomic ppm or more, most preferably 100 atomic ppm or more, for example, in the case when said substance to be incorporated is a p-type impurity as mentioned above, migration of electrons injected from the substrate side into the light receiving layer can be effectively inhibited when the free surface of the light receiving layer is subjected to the charging treatment to .sym. polarity. On the other hand, when the substance to be incorporated is a n-type impurity, migration of positive holes injected from the substrate side into the light receiving layer can be effectively inhibited when the free surface of the light receiving layer is subjected to the charging treatment to .crclbar. polarity.

In the case as mentioned above, the layer region (Z) at the portion excluding the above layer region (PN) as described above may contain a substance for controlling conductivity of the other polarity, or a substance for controlling conductivity characteristics of the same polarity may be contained therein in an amount by far smaller than that practically contained in the layer region (PN).

In such a case, the content of the substance (C) for controlling conductivity contained in the above layer region (Z) can be determined adequately as desired depending on the polarity or the content of the substance contained in the layer region (PN), but it is preferably 0.001 to 1000 atomic ppm, more preferably 0.05 to 500 atomic ppm, most preferably 0.1 to 200 atomic ppm.

In the present invention, when the same kind of a substance for controlling conductivity is contained in the layer region (PN) and the layer region (Z), the content in the layer region (Z) should preferably be 30 atomic ppm or less.

In the present invention, it is also possible to provide a layer region containing a substance for controlling conductivity having one polarity and a layer region containing a substance for controlling conductivity having the other polarity in direct contact with each other, thus providing a so called depletion layer at said contact region. In short, for example, a layer region containing the aforesaid p-type impurity and a layer region containing the aforesaid n-type impurity are provided in the light receiving layer in direct contact with each other to form the so called p-n junction, whereby a depletion layer can be provided.

For formation of the layer region (PN) containing the aforesaid substance (C) by introducing structurally the substance for controlling conductivity such as the group III atoms or group V atoms into the layer region (PN), a starting material for introduction of the group III atoms or the group V atoms may be introduced under gaseous state into a deposition chamber together with other starting materials for formation of the light receiving layer during layer formation. As the starting material which can be used for introduction of the group III atoms, it is desirable to use those which are gaseous at room temperature under atmospheric pressure or can readily be gasified at least under layer forming conditions. Typical examples of such starting materials for introduction of the group III atoms, there may be included as the compounds for introduction of boron atoms boron hydrides such as B.sub.2 H.sub.6, B.sub.4 H.sub.10, B.sub.5 H.sub.9, B.sub.5 H.sub.11, B.sub.6 H.sub.10, B.sub.6 H.sub.12, B.sub.6 H.sub.14, etc. and boron halides such as BF.sub.3, BCl.sub.3, BBr.sub.3, etc. Otherwise, it is also possible to use AlCl.sub.3, GaCl.sub.3, Ga(CH.sub.3).sub.3, InCl.sub.3, TlCl.sub.3, and the like.

The starting materials which can effectively be used in the present invention for introduction of the group V atoms may include, for introduction of phosphorus atoms, phosphorus hydride such as PH.sub.3, P.sub.2 H.sub.4, etc., phosphorus halides such as PH.sub.4 I, PF.sub.3, PF.sub.5, PCl.sub.3, PCl.sub.5, PBr.sub.3, PBr.sub.5, PI.sub.3, and the like. Otherwise, it is also possible, to utilize AsH.sub.3, AsF.sub.3, AsCl.sub.3, AsBr.sub.3, AsF.sub.5, SbH.sub.3, SbF.sub.3, SbF.sub.5, SbCl.sub.3, SbCl.sub.5, BiH.sub.3, BiCl.sub.3, BiBr.sub.3, and the like effectively as the starting material for introduction of the group V atoms.

In the photoconductive member of the present invention, when the light receiving member formed on the substrate is made to have a layer constitution having the first layer as already described above, comprising a first layer region (G) comprising a-Ge(Si,H,X) and a second layer region (S) comprising a-Si(H,X) provided successively from the substrate side and containing carbon atoms, and further a second layer laminated on the first layer, the second layer has a free surface and is provided for accomplishing the objects of the present invention primarily in humidity resistance, continuous repeated use characteristic, dielectric strength, use environment characteristic and durability. The above second layer is constituted of an amorphous material containing at least one of nitrogen atoms (N) and oxygen atoms (0) in a matrix of silicon atoms (Si).

The above amorphous material constituting the second layer may include an amorphous material containing silicon atoms (Si) and nitrogen atoms (N), optionally together with hydrogen atoms (H) and/or halogen atoms (X) [hereinafter written as "a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y ", wherein 0<x, y<1].

Formation of the second layer, when it is constituted of a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y, may be performed according to the glow discharge method, the sputtering method, the electron beam method, etc. These preparation methods may be suitably selected depending on various factors such as the preparation conditions, the extent of the load for capital investment for installations, the production scale, the desirable characteristics required for the photoconductive member to be prepared, etc. For the advantages of relatively easy control of the preparation conditions for preparing photoconductive members having desired characteristics and easy introduction of nitrogen atoms and halogen atoms with silicon atoms into the second amrophous layer to be prepared, there may preferably be employed the glow discharge method or the sputtering method.

Further, in the present invention, the glow discharge method and the sputtering method may be used in combination in the same device system to form the second layer.

For formation of the second layer according to the glow discharge method, starting gases for formation of a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y, which may optionally be mixed with a diluting gas at a predetermined mixing ratio, may be introudced into a deposition chamber for vacuum deposition in which a substrate is placed, and glow discharge is excited in said deposition chamber to form the gases introduced into a gas plasma, thereby depositing a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y on the first layer already formed on the substrate.

In the present invention, as starting gases for formation of a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y, there may be employed most of substances containing at least one of silicon atoms (Si), nitrogen atoms (N), hydrogen atoms (H) and halogen atoms (X) as constituent atoms which are gaseous or gasified substances of readily gasifiable ones.

For example, it is possible to use a mixture of a starting gas containing Si as constituent atom, a starting gas containing N as constituent atom and optionally a starting gas containing H as constituent atom and/or a starting gas containing X as constituent atom at a desired mixing ratio, or a mixture of a starting gas containing Si as constituent atom and a starting gas containing N and H as constituent atoms and/or a starting gas containing N and X as constituent atoms also at a desired ratio, or a mixture of a starting gas containing Si as constituent atom and a starting gas containing three constituent atoms of Si, N and H or a starting gas containing three constituent atoms of Si, N and X.

Alternatively, it is also possible to use a mixture of a starting gas containing Si and H as constituent atoms with a starting gas containing N as constituent atom or a mixture of a starting gas containing Si and X as constituent atoms and a starting gas containing N as constituent atom.

In the present invention, suitable halogen atoms (X) contained in the second layer (II) are F, Cl, Br and I, particularly preferably F and Cl.

In the present invention, the starting gas which can be effectively used for formation of the second layer may include those which are gaseous under conditions of room temperature and atmospheric pressure or can be readily gasified.

Formation of the second amorphous layer constituted of the above amorphous material may be performed according to the glow discharge method, the sputtering method, the ion-implantation method, the ion-plating method, the electron beam method, etc. These preparation methods may be suitable selected depending on various factors such as the preparation conditions, the extent of the load for capital investment for installations, the production scale, the desirable characteristics required for the photoconductive member to be prepared, etc. For the advantages of relatively easy control of the preparation conditions for preparing photoconductive members having desired characteristics and easy introduction of nitrogen atoms, if necessary hydrogen atoms and halogen atoms, with silicon atoms (Si) into the second layer to be prepared, there may preferably be employed the glow discharge method or the sputtering method.

Further, in the present invention, the glow discharge method and the sputtering method may be used in combination in the same device system to form the second layer.

For formation of the second layer constituted of a-SiN(H,X) according to the glow discharge method, a starting gas for Si supply capable of supplying silicon atoms (Si) and a starting gas for introduction of nitrogen atoms (N), optionally together with starting gases for introduction of hydrogen atoms (H) and/or halogen atoms (X), may be introduced into a deposition chamber for vacuum deposition in which a substrate is placed, and glow discharge is excited in said deposition chamber to form the gases introduced into a gas plasma, thereby depositing a-SiN(H,X) for formation of the second layer on the first layer already formed on the substrate.

Formation of the second layer according to the sputtering method may be practiced as follows:

In the first place, when a target constituted of Si is subjected to sputtering in an atmosphere of an inert gas such as Ar, He, etc. or a gas mixture based on these gases, a starting gas for introduction of nitrogen atoms (N) gas may be introduced, optionally together with starting gases for introduction of hydrogen atoms (H) and/or halogen atoms (X), into a vacuum deposition chamber for carrying out sputtering.

In the second place, nitrogen atoms (N) can be introduced into the second layer formed by the use of a target constituted of Si.sub.3 N.sub.4, or two sheets of a target constituted of Si and a target constituted of Si.sub.3 N.sub.4, or a target constituted of Si and Si.sub.3 N.sub.4. In this case, if the starting gas for introduction of nitrogen atoms (N) as mentioned above is used in combination, the amount of nitrogen atoms (N) to be incorporated in the second layer can easily be controlled as desired by controlling the flow rate thereof.

The amount of nitrogen atoms (N) to be incorporated into the second layer can be controlled as desired by controlling the tlow rate of the starting gas for introduction of nitrogen atoms (N), adjusting the ratio of nitrogen atoms (N) in the target for introduction of nitrogen atoms (N) during preparation of the target, or performing both of these.

The starting gas for supplying Si to be used in the present invention may include gaseour or gasifiable hydrogenated silicons (silanes) such as SiH.sub.4, Si.sub.2 H.sub.6, Si.sub.3 H.sub.8, Si.sub.4 H.sub.10, and others as effective materials. In particular, SiH.sub.4 and Si.sub.2 H.sub.6 are preferred with respect to easy handling during layer formation and efficiency for supplying Si.

By the use of these starting materials, H can also be incorporated together with Si in the second layer formed by adequate choice of the layer forming conditions.

As the starting materials effectively used for supplying Si, in addition to the hydrogenated silicons as mentioned above, there may be included silicon compounds containing halogen atoms (X), namely the so called silane derivatives substituted with halogen atoms, including silicon halogenide such as SiF.sub.4, Si.sub.2 F.sub.6, SiCl.sub.4, SiBr.sub.4, SiCl.sub.3 Br, SiCl.sub.2 Br.sub.2, SiClBr.sub.3, SiCl.sub.3 I, etc., as preferable ones.

Further, halides containing hydrogen atoms as one of the constituents, which are gaseous or gasifiable, such as halo-substituted hydrogenated silicon, including SiH.sub.2 F.sub.2, SiH.sub.2 I.sub.2, SiH.sub.2 Cl.sub.2, SiHCl.sub.3, SiH.sub.3 Br, SiH.sub.2 Br.sub.2, SiHBr.sub.3, etc. may also be mentioned as the effective starting materials for supplying Si for formation of the second layer.

Also, in the case of employing a silicon compound containing halogen atoms (X), X can be introduced together with Si in the second layer formed by suitable choice of the layer forming conditions as mentioned above.

Among the starting materials described above, silicon halogenide compounds containing hydrogen atoms are used as preferable starting material for introduction of halogen atoms (X) in the present invention since hydrogen atoms (H), which are extremely effective for controlling electrical or photoelectric characteristics, can be incorporated together with halogen atoms (X) into the layer during the formation of the second layer.

Effective starting materials to be used as the starting gases for introduction of halogen atoms (X) in formation of the second layer (II) in the present invention, there may be included, in addition to those as mentioned above, for example, halogen gases such as fluorine, chlorine, bromine and iodine; interhalogen compounds such as BrF, ClF, ClF.sub.3, BrF.sub.5, BrF.sub.3, IF.sub.3, IF.sub.7, ICl, IBr, etc., and hydrogen halides such as HF, HCl, HBr, HI, etc.

The starting material effectively used as the starting gas for introduction of nitrogen atoms (N) to be used during formation of the second layer, it is possible to use compounds containing N as constituent atom or compounds containing N and H as constituent atoms, such as gaseous or gasifiable nitrogen compounds, nitrides and azides, including for example, nitrogen (N.sub.2), ammonia (NH.sub.3), hydrazine (H.sub.2 NNH.sub.2), hydrogen azide (HN.sub.3), ammonium azide (NH.sub.4 N.sub.3) and so on. Alternatively, for the advantage of introducing halogen atoms (X) in addition to nitrogen atoms (N), there may be also employed nitrogen halide compounds such as nitrogen trifluoride (F.sub.3 N), dinitrogen tetrafluoride (F.sub.4 N.sub.2) and the like.

In the present invention, as the diluting gas to be used in formation of the second layer by the glow discharge method or the sputtering method, there may be included the so called rare gases such as He, Ne and Ar as preferable ones.

The second layer in the present invention should be carefully formed so that the required characteristics may be given exactly as desired.

That is, the above material containing Si and N, optionally together with H and/or X as constituent atoms can take various forms from crystalline to amorphous and show electrical properties from conductive through semi-conductive to insulating and photoconductive properties from photoconductive to non-photoconductive depending on the preparation conditions. Therefore, in the present invention, the preparation conditions are strictly selected as desired so that there may be formed a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y having desired characteristics depending on the purpose. For example, when the second layer is to be provided primarily for the purpose of improvement of dielectric strength, a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y is prepared as an amorphous material having marked electric insulating behaviours under the use environment.

Alternatively, when the primary purpose for provision of the second layer is improvement of continuous repeated use characteristics or environmental use characteristics, the degree of the above electric insulating property may be alleviated to some extent and a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y may be prepared as an amorphous material having sensitivity to some extent to the light irradiated.

In forming the second layer consisting of a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y on the surface of the first layer, the substrate temperature during layer formation is an important factor having influences on the structure and the characteristics of the layer to be formed, and it is desired in the present invention to control severely the substrate temperature during layer formation so that a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y having intended characteristics may be prepared as desired.

As the substrate temperature in forming the second layer for accomplishing effectively the objects in the present invention, there may be selected suitably the optimum temperature range in conformity with the method for forming the second layer in carrying out formation of the second layer, preferably 20.degree. to 400.degree. C., more preferably 50.degree. to 350.degree. C., most preferably 100.degree. to 300.degree. C. For formation of the second layer, the glow discharge method or the sputtering method may be advantageously adopted, because severe control of the composition ratio of atoms constituting the layer or control of layer thickness can be conducted with relative ease as compared with other methods. In case when the second layer is to be formed according to these layer forming methods, the discharging power during layer formation is one of important factors influencing the characteristics of a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y to be prepared, similarly as the aforesaid substrate temperature.

The discharging power condition for preparing effectively a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y having characteristics for accomplishing the objects of the present invention with good productivity may preferably be 1.0 to 300 W, more preferably 2.0 to 250 W, most preferably 5.0 to 200 W.

The gas pressure in a deposition chamber may preferably be 0.01 to 1 Torr, more preferably 0.1 to 0.5 Torr.

In the present invention, the above numerical ranges may be mentioned as preferable numerical ranges for the substrate temperature, discharging power for preparation of the second layer. However, these factors for layer formation should not be determined separately independently of each other, but it is desirable that the optimum values of respective layer forming factors should be determined based on mutual organic relationships so that the second layer consisting of a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y having desired characteristics may be formed.

The content of nitrogen atoms in the second layer in the photoconductive member of the present invention are important factors for obtaining the desired characteristics to accomplish the objects of the present invention, similarly as the conditions for preparation of the second layer. The content of nitrogen atoms contained in the second layer in the present invention are determined as desired depending on the amorphous material constituting the second layer and its characteristics.

More specifically, the amorphous material represented by the above formula a-(Si.sub.x N.sub.1-x).sub.y (H,X).sub.1-y may be broadly classified into an amorphous material constituted of silicon atoms and nitrogen atoms (hereinafter written as "a-Si.sub.a N.sub.1-a ", where 0<a<1), an amorphous material constituted of silicon atoms, nitrogen atoms and hydrogen atoms (hereinafter written as a-(Si.sub.b N.sub.1-b).sub.c H.sub.1-c, where 0<b, c<1) and an amorphous material constituted of silicon atoms, nitrogen atoms, halogen atoms and optionally hydrogen atoms (hereinafter written as "a-(Si.sub.d N.sub.1-d).sub.e (H,X).sub.1-e ", where 0<d, e<1).

In the present invention, when the second layer is to be constituted of a-Si.sub.a N.sub.1-a, the content of nitrogen atoms in the second layer may generally be 1.times.10.sup.-3 to 60 atomic %, more preferably 1 to 50 atomic %, most preferably 10 to 45 atomic %, namely in terms of representation by a in the above a-Si.sub.a N.sub.1-a, a being preferably 0.4 to 0.99999, more preferably 0.5 to 0.99, most preferably 0.55 to 0.9.

In the present invention, when the second layer is to be constituted of a-(Si.sub.b N.sub.1-b).sub.c H.sub.1-c, the content of nitrogen atoms in the second layer may preferably be 1.times.10.sup.-3 to 55 atomic %, more preferably 1 to 55 atomic %, most preferably 10 to 55 atomic %, the content of hydrogen atoms preferably 1 to 40 atomic %, more preferably 2 to 35 atomic %, most preferably 5 to 30 atomic %, and the photoconductive member formed when the hydrogen content is within these ranges can be sufficiently applicable as excellent one in practical aspect.

That is, in terms of the representation by the above a-(Si.sub.b N.sub.1-b).sub.c H.sub.1-c, b should preferably be 0.45 to 0.99999, more preferably 0.45 to 0.99, most preferably 0.45 to 0.9, and c preferably 0.6 to 0.99, more preferably 0.65 to 0.98, most preferably 0.7 to 0.95.

When the second layer is to be constituted of a-(Si.sub.d N.sub.1-d).sub.e (H,X).sub.1-e, the content of nitrogen atoms in the second layer may preferably be 1.times.10.sup.-3 to 60 atomic %, more preferably 1 to 60 atomic %, most preferably 10 to 55 atomic %, the content of halogen atoms preferably 1 to 20 atomic %, more preferably 1 to 18 atomic %, most preferably 2 to 15 atomic %. When the content of halogen atoms is within these ranges, the photoconductive member prepared is sufficiently applicable in practical aspect. The content of hydrogen atoms optionally contained may preferably be 19 atomic % or less, more preferably 13 atomic % or less.

That is in terms of representation by d and e in the above a-(Si.sub.d N.sub.1-d).sub.e (H,X).sub.1-e, d should preferably be 0.4 to 0.99999, more preferably 0.4 to 0.99, most preferably 0.45 to 0.9, and e preferably 0.8 to 0.99, more preferably 0.82 to 0.99, most preferably 0.85 to 0.98.

The range of the numerical value of layer thickness of the second layer should desirably be determined depending on the intended purpose so as to effectively accomplish the objects of the present invention.

The layer thickness of the second layer is also required to be determined as desired suitably with due considerations about the relationships with the contents of nitrogen atoms, the relationship with the layer thickness of the first layer, as well as other organic relationships with the characteristics required for respective layer regions.

In addition, it is also desirable to have considerations from economical point of view such as productivity or capability of bulk production.

The second layer in the present invention is desired to have a layer thickness preferably of 0.003 to 30.mu., more preferably 0.004 to 20.mu., most preferably 0.005 to 10.mu..

Another preferable example for constituting the second layer is an amorphous material containing silicon atoms (Si) and oxygen atoms (O), optionally together with hydrogen atoms (H) and/or halogen atoms (X) [hereinafter written as "a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y ", wherein 0<x, y<1].

Formation of the second amorphous layer (II) constituted of a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y may be performed according to the glow discharge method, the sputtering method, the ion-implantation method, the ion plating method, the electron beam method, etc. These preparation methods may be suitably selected depending on various factors such as the preparation conditions, the extent of the load for capital investment for installations, the production scale, the desirable characteristics required for the photoconductive member to be prepared, etc. For the advantages of relatively easy control of the preparation conditions for preparing photoconductive members having desired characteristics and easy introduction of oxygen atoms and halogen atoms with silicon atoms (Si) into the second layer (II) to be prepared, there may preferably be employed the glow discharge method or the sputtering method.

Further, in the present invention, the glow discharge method and the sputtering method may be used in combination in the same device system to form the second layer.

For formation of the second layer according to the glow discharge method, starting gases for formation of a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y which may optionally be mixed with a diluting gas at a predetermined mixing ratio, may be introduced into a deposition chamber for vacuum deposition in which a substrate is placed, and glow discharge is excited in said deposition chamber to form the gases introduced into a gas plasma, thereby depositing a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y on the first layer (I) already formed on the substrate.

In the present invention, as starting gases for formation of a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y, there may be employed most of substances containing at least one of silicon atoms (Si), oxygen atoms (O), hydrogen atoms (H) and halogen atoms (X) as constituent atoms which are gaseous or gasified substances of readily gasifiable ones.

For example, it is possible to use a mixture of a starting gas containing Si as constituent atom, a starting gas containing O as constituent atom and optionally a starting gas containing H as constituent atom and/or a starting gas containing X as constituent atom at a desired mixing ratio, or a mixture of a starting gas containing Si as constituent atom and a starting gas containing O and H as constituent atoms and/or a starting gas containing O and X as constituent atoms also at a desired ratio, or a mixture of a starting gas containing Si as constituent atom and a starting gas containing three constituent atoms of Si, O and H or a starting gas containing three constituent atoms of Si, O and X.

Alternatively, it is also possible to use a mixture of a starting gas containing Si and H as constituent atoms with a starting gas containing O as constituent atom or a mixture of a starting gas containing Si and X as constituent atoms and a starting gas containing O as constituent atom.

In the present invention, suitable halogen atoms (X) contained in the second layer are F, Cl, Br and I, particularly preferably F and Cl.

In the present invention, the starting gas which can be effectively used for formation of the second layer may include those which are gaseous under conditions of room temperature and atmospheric pressure or can be readily gasified.

Formation of the second layer according to the sputtering method may be practiced as follows.

In the first place, when a target constituted of Si is subjected to sputtering in an atmosphere of an inert gas such as Ar, He, etc. or a gas mixture based on these gases, a starting gas for introduction of oxygen atoms (O) may be introduced, optionally together with starting gases for introduction of hydrogen atoms (H) and/or halogen atoms (X), into a vacuum deposition chamber for carrying out sputtering.

In the second place, oxygen atoms (O) can be introduced into the second layer formed by the use of a target constituted of SiO.sub.2, or two sheets of a target constituted of Si and a target constituted of SiO.sub.2, or a target constituted of Si and SiO.sub.2. In this case, if the starting gas for introduction of oxygen atoms (O) as mentioned above is used in combination, the amount of oxygen atoms (O) to be incorporated in the second layer can easily be controlled as desired by controlling the flow rate thereof.

The amount of oxygen atoms (O) to be incorporated into the second layer can be controlled as desired by controlling the flow rate of the starting gas for introduction of oxygen atoms (O), adjusting the ratio of oxygen atoms (O) in the target for introduction of oxygen atoms during preparation of the target, or performing both of these.

The starting gas for supplying Si to be used in the present invention may include gaseous or gasifiable hydrogenated silicons (silanes) such as SiH.sub.4, Si.sub.2 H.sub.6, Si.sub.3 H.sub.8, Si.sub.4 H.sub.10 and others as effective materials. In particular, SiH.sub.4 and Si.sub.2 H.sub.6 are preferred with respect to easy handling during layer formation and efficiency for supplying Si.

By the use of these starting materials, H can also be incorporated together with Si in the second layer formed by adequate choice of the layer forming conditions.

As the starting materials effectively used for supplying Si, in addition to the hydrogenated silicons as mentioned above, there may be included silicon compounds containing halogen atoms (X), namely the so called silane derivatives substituted with halogen atoms, including silicon halogenide such as SiF.sub.4, Si.sub.2 F.sub.6, SiCl.sub.4, SiBr.sub.4, SiCl.sub.3 Br, SiCl.sub.2 Br.sub.2, SiClBr.sub.3, SiCl.sub.3 I, etc., as preferable ones.

Further, halides containing hydrogen atoms as one of the constituents, which are gaseous or gasifiable, such as halo-substituted hydrogenated silicon, including SiH.sub.2 F.sub.2, SiH.sub.2 I.sub.2, SiH.sub.2 Cl.sub.2, SiHCl.sub.3, SiH.sub.3 Br, SiH.sub.2 Br.sub.2, SiHBr.sub.3, etc. may also be mentioned as the effective starting materials for supplying Si for formation of the second layer.

Also, in the case of employing a silicon compound containing halogen atoms (X), X can be introduced together with Si in the second layer formed by suitable choice of the layer forming conditions as mentioned above.

Among the starting materials described above, silicon halogenide compounds containing hydrogen atoms are used as preferable starting material for introduction of halogen atoms (X) in the present invention since hydrogen atoms (H), which are extremely effective for controlling electrical or photoelectric characteristics, can be incorporated together with halogen atoms (X) into the layer during the formation of the second layer.

Effective starting materials to be used as the starting gases for introduction of halogen atoms (X) in formation of the second layer in the present invention, there may be included, in addition to those as mentioned above, for example, halogen gases such as fluorine, chlorine, bromine and iodine; interhalogen compounds such as BrF, ClF, ClF.sub.3, BrF.sub.5, BrF.sub.3, IF.sub.3, IF.sub.7, ICl, IBr, etc., and hydrogen halide such as HF, HCl, HBr, HI, etc.

The starting material effectively used as the starting gas for introduction of oxygen atoms (O) to be used during formation of the second layer, it is possible to use compounds containing O as constituent atom or compounds containing N and O as constituent atoms, such as oxygen (O.sub.2), ozone (O.sub.3), nitrogen monooxide (NO), nitrogen dioxide (NO.sub.2), dinitrogen monooxide (N.sub.2 O), dinitrogen trioxide (N.sub.2 O.sub.3), dinitrogen tetraoxide (N.sub.2 O.sub.4), dinitrogen pentaoxide (N.sub.2 O.sub.5), nitrogen trioxide (NO.sub.3), and lower siloxanes containing silicon atoms (Si), oxygen atoms (O) and hydrogen atoms (H) as constituent atoms such as disiloxane (H.sub.3 SiOSiH.sub.3), trisiloxane (H.sub.3 SiOSiH.sub.2 OSiH.sub.3), and the like.

In the present invention, as the diluting gas to be used in formation of the second layer by the glow discharge method or the sputtering method, there may be ihcluded the so called rare gases such as He, Ne and Ar as preferable ones.

The second layer in the present invention should be carefully formed so that the required characteristics may be given exactly as desired.

That is, the above material containing Si and O, optionally together with H and/or X as constituent atoms can take various forms from crystalline to amorphous and show electrical properties from conductive through semi-conductive to insulating and photoconductive properties from photoconductive to non-photoconductive depending on the preparation conditions. Therefore, in the present invention, the preparation conditions are strictly selected as desired so that there may be formed a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y having desired characteristics depending on the purpose. For example, when the second layer is to be provided primarily for the purpose of improvement of dielectric strength, a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y is prepared as an amorphous material having marked electric insulating behaviours under the use environment.

Alternatively, when the primary purpose for provision of the second layer is improvement of continuous repeated use characteristics or environmental use characteristics, the degree of the above electric insulating property may be alleviated to some extent and a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y may be prepared as an amorphous material having sensitivity to some extent to the light irradiated.

In forming the second consisting of a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y on the surface of the first layer, the substrate temperature during layer formation is an important factor having influences on the structure and the characteristics of the layer to be formed, and it is desired in the present invention to control severely the substrate temperature during layer formation so that a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y having intended characteristics may be prepared as desired.

As the substrate temperature in forming the second layer for accomplishing effectively the objects in the present invention, there may be selected suitably the optimum temperature range in conformity with the method for forming the second layer in carrying out formation of the second layer, preferably 20.degree. to 400.degree. C., more preferably 50.degree. to 350.degree. C., most preferably 100.degree. to 300.degree. C. For formation of the second layer, the glow discharge method or the sputtering method may be advantageously adopted, because severe control of the composition ratio of atoms constituting the layer or control of layer thickness can be conducted with relative ease as compared with other methods. In case when the second layer is to be formed according to these layer forming methods, the discharging power during layer formation is one of important factors influencing the characteristics of a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y to be prepared, similarly as the aforesaid substrate temperature.

The discharging power condition for preparing effectively a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y having characteristics for accomplishing the objects of the present invention with good productivity may preferably be 1.0 to 300 W, more preferably 2.0 to 250 W, most preferably 5.0 to 200 W.

The gas pressure in a deposition chamber may preferably be 0.01 to 1 Torr, more preferably 0.1 to 0.5 Torr.

In the present invention, the above numerical ranges may be mentioned as preferable numerical ranges for the substrate temperature, discharging power for preparation of the second layer. However, these factors for layer formation should not be determined separately independently of each other, but it is desirable that the optimum values of respective layer forming factors should be determined based on mutual organic relationships so that a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y having desired characteristics may be formed.

The respective contents of carbon atoms, oxygen atoms or both thereof in the second layer (II) in the photoconductive member of the present invention are important factors for obtaining the desired characteristics to accomplish the objects of the present invention, similarly as the conditions for preparation of the second layer (II). The respective contents of carbon atoms and/or oxygen atoms contained in the second layer (II) in the present invention are determined as desired depending on the amorphous material constituting the second layer (II) and its characteristics.

The amorphous material represented by the above formula a-(Si.sub.x O.sub.1-x).sub.y (H,X).sub.1-y may be broadly classified into an amorphous material constituted of silicon atoms and oxygen atoms (hereinafter written as "a-Si.sub.a O.sub.1-a ", where 0<a<1), an amorphous material constituted of silicon atoms, oxygen atoms and hydrogen atoms [hereinafter written as a-(Si.sub.b O.sub.1-b).sub.c H.sub.1-c, where 0<b, c<1] and an amorphous material constituted of silicon atoms, oxygen atoms, halogen atoms and optionally hydrogen atoms [hereainfter written as "a-(Si.sub.d O.sub.1-d).sub.e (H,X).sub.1-e ", where 0<d, e<1].

In the present invention, when the second layer is to be constituted of a-Si.sub.a O.sub.1-a, the content of oxygen atoms in the second layer may preferably be 0.33 to 0.99999, more preferably 0.5 to 0.99, most preferably 0.6 to 0.9, in terms of a in the above formula a-Si.sub.a O.sub.1-a.

In the present invention, when the second layer is to be constituted of a-(Si.sub.b O.sub.1-b).sub.c H.sub.1-c, the content of oxygen atoms may preferably be such that b in the above formula a-(Si.sub.b O.sub.1-b).sub.c H.sub.1-c may preferably be 0.33 to 0.99999, more preferably be 0.5 to 0.9, most preferably 0.6 to 0.9, and c preferably 0.6 to 0.99, more preferably 0.65 to 0.98, most preferably 0.7 to 0.95.

When the second layer is to be constituted of a-(Si.sub.d O.sub.1-d).sub.e (H,X).sub.1-e, the content of oxygen atoms may preferably be such that d in the above formula a-(Si.sub.d O.sub.1-d).sub.e (H,X).sub.1-e may preferably be 0.33 to 0.99999, more preferably be 0.5 to 0.99, most preferably 0.6 to 0.9, and e preferably 0.8 to 0.99, more preferably 0.82 to 0.99, most preferably 0.85 to 0.98.

The range of the numerical value of layer thickness of the second layer should desirably be determined depending on the intended purpose so as to effectively accomplish the objects of the present invention.

The layer thickness of the second layer is also required to be determined as desired suitably with due considerations about the relationships with the contents of oxygen atoms, the relationship with the layer thickness of the first layer, as well as other organic relationships with the characteristics required for respective layer regions.

In addition, it is also desirable to have considerations from economical point of view such as productivity or capability of bulk production.

The second layer in the present invention is desired to have a layer thickness preferably of 0.003 to 30.mu., more preferably 0.004 to 20.mu., most preferably 0.005 to 10.mu..

The substrate to be used in the present invention may be either electroconductive material or insulating material. As the electroconductive material, there may be mentioned metals such as NiCr, stainless steel, Al, Cr, Mo, Au, Nb, Ta, V, Ti, Pt, Pd, etc. or alloys thereof.

As the insulating material, there may conventionally be used films or sheets of synthetic resins, including polyester, polyethylene, polycarbonate, cellulose acetate, polypropylene, polyvinyl chloride, polyvinylidene chloride, polystyrene, polyamide, etc., glasses, ceramics, papers and so on. These insulating substrates should preferably have at least one surface subjected to electroconductive treatment, and it is desirable to provide other layers on the side at which said electroconductive treatment has been applied.

For example, electroconductive treatment of a glass can be effected by providing a thin film of NiCr, Al, Cr, Mo, Au, Ir, Nb, Ta, V, Ti, Pt, Pd, In.sub.2 O.sub.3, SnO.sub.2, ITO (In.sub.2 O.sub.3 +SnO.sub.2) thereon. Alternatively, a synthetic resin film such as polyester film can be subjected to the electroconductive treatment on its surface by vacuum vapor deposition, electron-beam deposition or sputtering of a metal such as NiCr, Al, Ag, Pb, Zn, Ni, Au, Cr, Mo, Ir, Nb, Ta, V, Ti, Pt, etc. or by laminating treatment with said metal, thereby imparting electroconductivity to the surface. The substrate may be shaped in any form such as cylinders, belts, plates or others, and its form may be determined as desired. For example, when the photoconductive member 100, 200 in FIG. 1 or FIG. 2 is to be used as an image forming member for electrophotography, it may desirably be formed into an endless belt or a cylinder for use in continuous high speed copying. The substrate may have a thickness, which is conveniently determined so that a photoconductive member as desired may be formed. When the photoconductive member is required to have a flexibility, the substrate is made as thin as possible, so far as the function of substrate can be sufficiently exhibited. However, in such a case, the thickness is preferably 10.mu. or more from the points of fabrication and handling of the substrate as well as its mechanical strength.

Next, an example of the process for producing the photoconductive member of this invention is to be briefly described.

FIG. 12 shows one example of a device for producing a photoconductive member.

In the gas bombs 1102-1106 there are hermetically contained starting gases for formation of the photoconductive member of the present invention. For example, 1102 is a bomb containing SiH.sub.4 gas diluted with He (purity: 99.999%, hereinafter abbreviated as "SiH.sub.4 /He"), 1103 is a bomb containing GeH.sub.4 gas diluted with He (purity: 99.999%, hereinafter abbreviated as "GeH.sub.4 /He"), 1104 is a B.sub.2 H.sub.6 gas bomb diluted with He (purity: 99.99%, hereinafter abbreviated as "B.sub.2 H.sub.6 /He", 1105 is a C.sub.2 H.sub.4 gas bomb (purity: 99.999%) and 1106 is a H.sub.2 gas bomb (purity: 99.999%).

For allowing these gases to flow into the reaction chamber 1101, on confirmation of the valves 1122-1126 of the gas bombs 1102-1106 and the leak valve 1135 to be closed, and the inflow valves 1112-1116, the outflow valves 1117-1121 and the auxiliary valves 1132, 1133 to be opened, the main valve 1134 is first opened to evacuate the reaction chamber 1101 and the gas pipelines. As the next step, when the reading on the vacuum indicator 1136 becomes 5.times.10.sup.-6 Torr, the auxiliary valves 132, 1133 and the outflow valves 1117-1121 are closed.

Referring now to an example of forming a light receiving layer on the cylindrical substrate 1137, SiH.sub.4 /He gas from the gas bomb 1102, GeH.sub.4 /He gas from the gas bomb 1103, and optionally B.sub.2 H.sub.6 /He gas from the gas bomb 1104 and C.sub.2 H.sub.4 gas from the gas bomb 1105 are permitted to flow into the mass-flow controllers 1107 to 1110, respectively, by opening the valves 1122 to 1125 and controlling the pressures at the outlet pressure gauges 1127 to 1130 to 1 Kg/cm.sup.2 and opening gradually the inflow valves 1112 to 1115, respectively. Subsequently, the outflow valves 1117 to 1120 and the auxiliary valve 1132 are gradually opened to permit respective gases to flow into the reaction chamber 1101. The outflow valves 1117 to 1120 are controlled so that the flow rate ratio of SiH.sub.4 /He, GeH.sub.4 /He and C.sub.2 H.sub.4 gases may have a desired value, or when boron atoms (B) are to be incorporated in the layer to be formed, the ratio of the flow rate of B.sub.2 H.sub.6 /He gas, in addition to the above gases, may have a desired value and opening of the main valve 1134 is also controlled while watching the reading on the vacuum indicator 1136 so that the pressure in the reaction chamber 1101 may reach a desired value. And, after confirming that the temperature of the substrate 1137 is set at 50.degree.-400.degree. C. by the heater 1138, the power source 1140 is set at a desired power to excite glow discharge in the reaction chamber 1101, and glow discharge is maintained for a desirable period of time in the reaction chamber 1101, whereby a layer region (C) or layer region (B,C) constituted of a-SiGe(H,X) containing carbon atoms (C) or carbon atoms (C) and boron atoms (B).

At the stage when the layer region (C) or the layer region (B,C) is formed to a desired layer thickness, following the same conditions and the procedure, except for closing completely the outflow valve 1118 and either one or both of the outflow valves 1119 and 1120, glow discharge is maintained for a desired period of time to form a layer region (S) constituted of a-Si(H,X) containing no germanium atom (Ge) and containing optionally either one or both of carbon atoms and boron atoms on the layer region (C) or the layer region (B,C).

During formation of the above light receiving layer, by stopping inflow of B.sub.2 H.sub.6 /He gas or C.sub.2 H.sub.4 gas into the deposition chamber at the stage after a desired period time has elapsed after initiation of forming said layer, the respective layer thicknesses of the layer region (B) containing boron atoms and the layer region (C) containing carbon atoms can freely be controlled.

Also, by changing the gas flow rate of C.sub.2 H.sub.4 gas into the deposition chamber 1101 according to a desired change rate curve, the distributed state of carbon atoms contained in the layer region (C) can be formed as desired.

In the case of forming a second layer on the first layer formed as described above, and making these layers, thus combined as the light receiving layer, formation of the second layer may be performed according to the same valve operation as described in formation of the first layer.

During this operation, NH.sub.3 gas bomb or NO gas bomb may be newly provided, or alternatively substituted for the bombs which are not used, and glow discharge is excited according to desired conditions with respective gases of SiH.sub.4 gas, NH.sub.3 gas or SiH.sub.4 gas and NO gas being diluted with a diluting gas such as He, if desired, to form the second layer.

For incorporation of halogen atoms in the second layer, for example, SiF.sub.4 gas and NH.sub.3 gas, or SiF.sub.4 gas and NO gas, or a gas mixture further added with SiH.sub.4 gas, may be used to form the second layer according to the same procedure as described above.

During formation of the respective layer, outflow valves other than those for necessary gases should of course be closed. Also, during formation of respective layers, in order to avoid remaining of the gas employed for formation of the preceding layer in the reaction chamber 1101 and the gas pipe line from the outflow valves 1117 to 1121 to the reaction chamber 1101, the operation of evacuating the system to high vacuum by closing the outflow valves 1117 to 1121, opening the auxiliary valves 1132, 1133 and opening fully the main valve 1134 is conducted, if necessary.

The amount of nitrogen atoms or oxygen atoms can be controlled as desired by, for example, in the case of glow discharge, changing the flow rate ratio of SiH.sub.4 gas to NH.sub.3 gas or SiH.sub.4 gas to NO gas to be introduced into the reaction chamber 1101, or in the case of layer formation according to sputtering, changing the area ratio for sputtering of the silicon wafer to silicon nitride plate or silicon wafer to SiO.sub.2 plate, or molding a target with the use of a mixture of silicon powder with silicon nitride powder or silicon powder with SiO.sub.2 powder at various ratios. The content of halogen atoms (X) contained in the second layer can be controlled by controlling the flow rate of the starting gas for introduction of halogen atoms such as SiF.sub.4 gas when introduced into the reaction chamber 1101.

Also, for uniformization of the layer formation, it is desirable to rotate the substrate 1137 by means of a motor 1139 at a constant speed during layer formation.

The present invention is further described by referring to the following Examples.

EXAMPLE 1

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared on a cylindrical aluminum substrate under the conditions shown in Table A-1.

The image forming member thus obtained was set in a charging-exposure testing device and subjected to corona charging at .crclbar. 5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, .sym. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .crclbar. 5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 2

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 1, except for changing the conditions to those shown in Table A-2.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 1 except for reversing the charging polarity and the charge polarity of the developer, respectively. As the result, very clear image quality was obtained.

EXAMPLE 3

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 1, except for changing the conditions to those shown in Table A-3.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 1. As the result, very clear image was obtained.

EXAMPLE 4

Example 1 was repeated except that the content of germanium atoms contained in the first layer was varied as shown in Table A-4 by varying the gas flow rate ratio of GeH.sub.4 /He gas to SiH.sub.4 /He gas to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 1 to obtain the results as shown in Table A-4.

EXAMPLE 5

Example 1 was repeated except that the layer thickness of the first layer was varied as shown in Table A-5 to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 1 to obtain the results as shown in Table A-5.

EXAMPLE 6

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared on a cylindrical aluminum substrate under the conditions shown in Table A-6.

The image forming member thus obtained was set in a charging-exposure testing device and subjected to corona charging at .crclbar. 5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, .sym. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .crclbar. 5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 7

For the image forming member for electrophotography prepared under the same toner image forming conditions as in Example 1 except for using GaAs type semiconductor laser (10 mW) of 810 nm in place of the tungsten lamp as the light source, image quality evaluation of toner transferred image was performed. As the result, an image of high quality, excellent in resolution and good in gradation reproducibility, could be obtained.

The common layer forming conditions in the above Examples are shown below:

Substrate temperature: Germanium atom (Ge) containing layer . . . about 200.degree. C. Discharging frequency: 13.56 MHz Inner pressure in reaction chamber during the reaction: 0.3 Torr.

EXAMPLE 8

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared on a cylindrical aluminum substrate under the conditions shown in Table B-1.

The image forming member thus obtained was set in a charging-exposure testing device and subjected to corona charging at .sym. 5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, chargeable .crclbar. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .sym. 5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 9

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 8, except for changing the conditions to those shown in Table B-2.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 8 except for reversing the charging polarity and the charge polarity of the developer, respectively. As the result, very clear image quality was obtained. Example 10

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 8, except for changing the conditions to those shown in Table B-3.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 8. As the result, very clear image quality was obtained.

EXAMPLE 11

Example 8 was repeated except that the content of germanium atoms contained in the first layer was varied as shown in Table B-4 by varying the gas flow rate ratio of GeH.sub.4 /He gas to SiH.sub.4 /He gas to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 8 to obtain the results as shown in Table B-4.

EXAMPLE 12

Example 8 was repeated except that the layer thickness of the first layer was varied as shown in Table B-5 to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 8 to obtain the results as shown in Table B-5.

EXAMPLE 13

By means of the device shown in FIG. 12, image forming members for electrophotography were prepared on a cylindrical aluminum substrate under the conditions shown in Tables B-6 to B-8, respectively (Sample Nos. 601, 602 and 603).

Each of the image forming members thus obtained was set in a charging-exposure testing device and subjected to corona charging at .crclbar. 5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux sec.through a transmission type test chart.

Immediately thereafter, .sym. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .crclbar. 5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 14

By means of the device shown in FIG. 12, image forming members for electrophotography were prepared on a cylindrical aluminum substrate in the same manner as in Example 8 except for employing the conditions shown in Tables B-9 and B-10, respectively (Sample Nos. 701 and 702).

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 8. As the result, very clear image quality was obtained.

EXAMPLE 15

By means of the device shown in FIG. 12, image forming members for electrophotography were prepared on a cylindrical aluminum substrate in the same manner as in Example 8 except for employing the conditions shown in Tables B-11 to B-15, respectively (Sample Nos. 801 to 805).

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 8. As the result, very clear image quality was obtained.

EXAMPLE 16

For the image forming member for electrophotography prepared under the same toner image forming conditions as in Example 8 except for using GaAs type semiconductor laser (10 mW) of 810 nm in place of the tungsten lamp as the light source, image quality evaluation of toner transferred image was performed. As the result, an image of high quality, excellent in resolution and good in gradation reproducibility, could be obtained.

The common layer forming conditions in the above Examples of the present invention are shown below:

Substrate temperature: Germanium atom (Ge) containing layer . . . about 200.degree. C. No germanium atom (Ge) containing layer . . . about 250.degree. C. Discharging frequency: 13.56 MHz Inner pressure in reaction chamber during the reaction: 0.3 Torr.

EXAMPLE 17

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared on a cylindrical aluminum substrate under the conditions shown in Table C-1.

The image forming member thus obtained was set in a charging-exposure testing device and subjected to corona charging at .crclbar. 5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, .sym. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .crclbar. 5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 18

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 17, except for changing the conditions to those shown in Table C-2.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 17 except for reversing the charging polarity and the charge polarity of the developer, respectively. As the result, very clear image quality was obtianed.

EXAMPLE 19

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 17, except for changing the conditions to those shown in Table C-3.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 17. As the result, very clear image quality was obtained.

EXAMPLE 20

Example 17 was repeated except that the content of germanium atoms contained in the first layer was varied as shown in Table C-4 by varying the gas flow rate ratio of GeH.sub.4 /He gas to SiH.sub.4 /He gas to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 17 to obtain the results as shown in Table C-4.

EXAMPLE 21

Example 17 was repeated except that the layer thickness of the first layer was varied as shown in Table C-5 to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 17 to obtain the results as shown in Table C-5.

EXAMPLE 22

By means of the device shown in FIG. 12, image forming members for electrophotography were prepared on a cylindrical aluminum substrate under the conditions shown in Table C-6.

Each of the image forming members thus obtained was set in a charging-exposure testing device and subjected to corona charging at .crclbar.5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, .sym. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .crclbar.5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 23

For the image forming member for electrophotography prepared under the same toner image forming conditions as in Example 17 except for using GaAs type semiconductor laser (10 mW) of 810 nm in place of the tungsten lamp as the light source, image quality evaluation of the toner transferred image was performed. As the result, an image of high quality, excellent in resolution and good in gradation reproducibility, could be obtained.

EXAMPLE 24

Following the same conditions and the procedure as in respective Examples 18 to 22, except for changing the conditions for preparation of the second layer (II) to the respective conditions as shown in Table C-7, image forming members for electrophotography were prepared, respectively (40 Samples of Sample No. 12-201 to 12-208, 12-301 to 12-308, . . . , 12-601 to 12-608).

The respective image forming members for electrophotography thus prepared were individually set on a copying device, and corona charging was effected at .crclbar.5.0 KV for 0.2 sec., followed by irradiation of a light image. As the light source, a tungsten lamp was employed at a dosage of 1.0 lux.sec. The latent image was developed with a positively chargeable developer (containing toner and carrier) and transferred onto a plain paper. The transferred image was very good. The toner remaining on the image forming member for electrophotography without being transferred was cleaned with a rubber blade. When such step were repeated for 100,000 times or more, no deterioration of image was observed in every case.

The results of the overall image quality evaluation and evaluation of durability by repeated continuous use for respective samples are shown in Table C-7A.

EXAMPLE 25

Various image forming members were prepared according to the same method as in Example 17, except for varying the content ratio of silicon atoms to nitrogen atoms in the second layer (II) by varying the mixing ratio of Ar to NH.sub.3 and the target area ratio of silicon wafer to silicon nitride during formation of the second layer (II). For each of the image forming members thus obtained, the steps of image formation, developing and cleaning as described in Example 17 were repeated for about 50,000 times, and thereafter image evaluations were conducted to obtain the results as shown in Table C-8.

EXAMPLE 26

Various image forming members were prepared according to the same method as in Example 17, respectively, except for varying the content ratio of silicon atoms to nitrogen atoms in the second layer (II) by varying the flow rate ratio of SiH.sub.4 gas to NH.sub.3 gas during formation of the second layer (II).

For each of the image forming members thus obtained, the steps up to transfer were repeated for about 50,000 times according to the methods as described in Example 17, and thereafter image evaluations were conducted to obtain the results as shown in Table C-9.

EXAMPLE 27

Various image forming members were prepared according to the same method as in Example 17, respectively, except for varying the content ratio of silicon atoms to nitrogen atoms in the second layer (II) by varying the flow rate ratio of SiH.sub.4 gas, SiF.sub.4 gas and NH.sub.3 gas during formation of the second layer (II). For each of the image forming members thus obtained, the steps of image formation, developing and cleaning as described in Example 17 were repeated for about 50,000 times, and thereafter image evaluations were conducted to obtain the results as shown in Table C-10.

EXAMPLE 28

Respective image forming members were prepared in the same manner as in Example 17, except for changing the layer thickness of the second layer (II), and the steps of image formation, developing and cleaning as described in Example 17 were repeated to obtain the results as shown in Table C-11.

The common layer forming conditions in the above Examples are shown below:

Substrate temperature: Germanium atom (Ge) containing layer . . . about 200.degree. C. No germanium atom (Ge) containing layer . . . about 250.degree. C.

Discharging frequency: 13.56 MHz Inner pressure in reaction chamber during the reaction: 0.3 Torr.

EXAMPLE 29

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared on a cylindrical aluminum substrate under the conditions shown in Table D-1.

The image forming member thus obtained was set in a charging-exposure testing device and subjected to corona charging at .sym.5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, .crclbar. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .sym.5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 30

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 29, except for changing the conditions to those shown in Table D-2.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 29 except for reversing the charging polarity and the charge polarity of the developer, respectively. As the result, very clear image quality was obtained.

EXAMPLE 31

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 29, except for changing the conditions to those shown in Table D-3.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 29. As the result, very clear image quality was obtained.

EXAMPLE 32

Example 29 was repeated except that the content of germanium atoms contained in the first layer was varied as shown in Table D-4 by varying the gas flow rate ratio of GeH.sub.4 /He gas to SiH.sub.4 /He gas to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 29 to obtain the results as shown in Table D-4.

EXAMPLE 33

Example 29 was repeated except that the layer thickness of the first layer was varied as shown in Table D-5 to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, image were formed on a transfer paper according to the same conditions and procedure as in Example 29 to obtain the results as shown in Table D-5.

EXAMPLE 34

By means of the device shown in FIG. 12, image forming members for electrophotography were prepared on a cylindrical aluminum substrate under the conditions shown in Tables D-6 to D-8, respectively (Sample Nos. 601, 602 and 603).

Each of the image forming members thus obtained was set in a charging-exposure testing device and subjected to corona charging at .crclbar.5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, .sym. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .crclbar.5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 35

By means of the device shown in FIG. 12, image forming members for electrophotography were prepared on a cylindrical aluminum substrate in the same manner as in Example 29 except for employing the conditions shown in Tables D-9 to D-10, respectively (Sample Nos. 701 and 702).

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 29. As the result, very clear image quality was obtained.

EXAMPLE 36

By means of the device shown in FIG. 12, image forming members for electrophotography were prepared on a cylindrical aluminum substrate in the same manner as in Example 29 except for employing the conditions shown in Tables D-11 to D-15, respectively (Sample Nos. 801 to 805).

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 29. As the result, very clear image quality was obtained.

EXAMPLE 37

For the image forming member for electrophotography prepared under the same toner image forming conditions as in Example 29 except for using GaAs type semiconductor laser (10 mW) of 810 nm in place of the tungsten lamp as the light source, image quality evaluation of toner transferred image was performed. As the result, an image of high quality, excellent in resolution and good in gradation reproducibility, could be obtained.

EXAMPLE 38

Following the same conditions and the procedure as in Examples 30 to 36 except for changing the conditions for preparation of the second layer (II) to the respective conditions as shown in Table D-16, image forming members for electrophotography were prepared, respectively (56 Samples of Sample No. 12-201 to 12-208, 12-301 to 12-308, . . . , 12-801 to 12-808).

The respective image forming members for electrophotography thus prepared were individually set on a copying device, and corona charging was effected at .crclbar.5.0 KV for 0.2 sec., followed by irradiation of a light image. As the light source, a tungsten lamp was employed at a dosage of 1.0 lux.sec. The latent image was developed with a positively chargeable developer (containing toner and carrier) and transferred onto a plain paper. The transferred image was very good. The toner remaining on the image forming member for electrophotography without being transferred was cleaned with a rubber blade. When such step were repeated for 100,000 times or more, no deterioration of image was observed in every case.

The results of the overall image quality evaluation and evaluation of durability by repeated continuous use for respective samples are shown in Table D-16A.

EXAMPLE 39

Various image forming members were prepared according to the same method as in Example 29, except for varying the content ratio of silicon atoms to nitrogen atoms in the second layer (II) by varying the mixing ratio of Ar to NH.sub.3 and the target area ratio of silicon wafer to silicon nitride during formation of the second layer (II). For each of the image forming members thus obtained, the steps of image formation, developing and cleaning as described in Example 29 were repeated for about 50,000 times, and thereafter image evaluations were conducted to obtain the results as shown in Table D-17.

EXAMPLE 40

Various image forming members were prepared according to the same method as in Example 29, respectively, except for varying the content ratio of silicon atoms to nitrogen atoms in the second layer (II) by varying the flow rate ratio of SiH.sub.4 gas to NH.sub.3 gas during formation of the second layer (II).

For each of the image forming members thus obtained, the steps up to transfer were repeated for about 50,000 times according to the methods as described in Example 29, and thereafter image evaluations were conducted to obtain the results as shown in Table D-18.

EXAMPLE 41

Various image forming members were prepared according to the same method as in Example 29, respectively, except for varying the content ratio of silicon atoms to carbon atoms in the second layer (II) by varying the flow rate ratio of SiH.sub.4 gas, SiF.sub.4 gas and NH.sub.3 gas during formation of the second layer (II).

For each of the image forming members thus obtained, the steps of image formation, developing and cleaning as described in Example 29 were repeated for about 50,000 times, and thereafter image evaluations were conducted to obtain the results as shown in Table D-19.

EXAMPLE 42

Respective image forming members were prepared in the same manner as in Example 29, except for changing the layer thickness of the second layer (II), and the steps of image formation, developing and cleaning as described in Example 29 were repeated to obtain the results as shown in Table D-20.

The common layer forming conditions in the respective Examples of the present invention are shown below:

Substrate temperature: Germanium atom (Ge) containing layer . . . about 200.degree. C. No germanium atom (Ge) containing layer . . . about 250.degree. C. Discharging frequency: 13.56 MHz Inner pressure in reaction chamber during the reaction: 0.3 Torr.

EXAMPLE 43

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared on a cylindrical aluminum substrate under the conditions shown in Table E-1.

The image forming member thus obtained was set in a charging-exposure testing device and subjected to corona charging at .crclbar.5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, .sym. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .crclbar.5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 44

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 43, except for changing the conditions to those shown in Table E-2.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 43 except for reversing the charging polarity and the charge polarity of the developer, respectively. As the result, very clear image quality was obtained.

EXAMPLE 45

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 43, except for changing the conditions to those shown in Table E-3.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 43. As the result, very clear image was obtained.

EXAMPLE 46

Example 43 was repeated except that the content of germanium atoms contained in the first layer was varied as shown in Table E-4 by varying the gas flow rate ratio of GeH.sub.4 /He gas to SiH.sub.4 /He gas to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 43 to obtain the results as shown in Table E-4.

EXAMPLE 47

Example 43 was repeated except that the layer thickness of the first layer was varied as shown in Table E-5 to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 43 to obtain the results as shown in Table E-5.

EXAMPLE 48

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared on a cylindrical aluminum substrate under the conditions shown in Table E-6.

The image forming member thus obtained was set in a charging-exposure testing device and subjected to corona charging at .crclbar.5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, .sym. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .crclbar.5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 49

For the image forming member for electrophotography prepared under the same toner image forming conditions as in Example 43 except for using GaAs type semiconductor laser (10 mW) of 810 nm in place of the tungsten lamp as the light source, image quality evaluation of toner transferred image was performed. As the result, an image of high quality, excellent in resolution and good in gradation reproducibility, could be obtained.

EXAMPLE 50

Following the same conditions and the procedure as in respective Examples 44, 45 and 48 except for changing the conditions for preparation of the second layer (II) to the respective conditions as shown in Table E-7, image forming members for electrophotography were prepared, respectively (24 Samples of Sample No. 8-201 to 8-208, 8-301 to 8-308, . . . , 8-601 to 8-608).

The respective image forming members for electrophotography thus prepared were individually set on a copying device, and corona charging was effected at .crclbar.5.0 KV for 0.2 sec., followed by irradiation of a light image. As the light source, a tungsten lamp was employed at a dosate of 1.0 lux.sec. The latent image was developed with a positively chargeable developer (containing toner and carrier) and transferred onto a plain paper. The transferred image was very good. The toner remaining on the image forming member for electrophotography without being transferred was cleaned with a rubber blade. When such step were repeated for 100,000 times or more, no deterioration of image was observed in every case.

The results of the overall image quality evaluation and evaluation of durability by repeated continuous use for respective samples are shown in Table E-7A.

EXAMPLE 51

Various image forming members were prepared according to the same method as in Example 43, except for varying the content ratio of silicon atoms to oxygen atoms in the second layer (II) by varying the mixing ratio of Ar and NO gases and the target area ratio of silicon wafer to SiO.sub.2 during formation of the second layer (II). For each of the image forming members thus obtained, the steps of image formation, developing and cleaning as described in Example 43 were repeated for about 50,000 times, and thereafter image evaluations were conducted to obtain the results as shown in Table E-8.

EXAMPLE 52

Various image forming members were prepared according to the same method as in Example 43, respectively, except for varying the content ratio of silicon atoms to oxygen atoms in the second layer (II) by varying the flow rate ratio of SiH.sub.4 gas to NO gas during formation of the second layer (II).

For each of the image forming members thus obtained, the steps up to transfer were repeated for about 50,000 times according to the methods as described in Example 43, and thereafter image evaluations were conducted to obtain the results as shown in Table E-9.

EXAMPLE 53

Various image forming members were prepared according to the same method as in Example 43, respectively, except for varying the content ratio of silicon atoms to oxygen atoms in the second layer (II) by varying the flow rate ratio of SiH.sub.4 gas, SiF.sub.4 gas and NO gas during formation of the second layer region (II).

For each of the image forming members thus obtained, the steps of image formation, developing and cleaning as described in Example 43 were repeated for about 50,000 times, and thereafter image evaluations were conducted to obtain the results as shown in Table E-10.

EXAMPLE 54

Respective image forming members were prepared in the same manner as in Example 43, except for changing the layer thickness of the second layer (II), and the steps of image formation, developing and cleaning as described in Example 43 were repeated to obtain the results as shown in Table E-11.

The common layer forming conditions in the above Examples are shown below:

Substrate temperature: Germanium atom (Ge) containing layer . . . about 200.degree. C. No germanium atom (Ge) containing layer . . . about 250.degree. C. Discharging frequency: 13.56 MHz Inner pressure in reaction chamber during the reaction: 0.3 Torr.

EXAMPLE 55

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared on a cylindrical aluminum substrate under the conditions shown in Table F-1.

The image forming member thus obtained was set in a charging-exposure testing device and subjected to corona charging at .sym.5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, .crclbar. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .sym.5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 56

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 55, except for changing the conditions to those shown in Table F-2.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 55 except for reversing the charging polarity and the charge polarity of the developer, respectively. As the result, very clear image quality was obtained.

EXAMPLE 57

By means of the device shown in FIG. 12, an image forming member for electrophotography was prepared by conducting layer formation in the same manner as in Example 55, except for changing the conditions to those shown in Table F-3.

For the image forming member thus obtained, an image was formed on a transfer paper according to the same conditions and procedure as in Example 55. As the result, very clear image quality was obtained.

EXAMPLE 58

Example 55 was repeated except that the content of germanium atoms contained in the first layer was varied as shown in Table F-4 by varying the gas flow rate ratio of GeH.sub.4 /He gas to SiH.sub.4 /He gas to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, image were formed on a transfer paper according to the same conditions and procedure as in Example 55 to obtain the results as shown in Table F-4.

EXAMPLE 59

Example 55 was repeated except that the layer thickness of the first layer was varied as shown in Table F-5 to obtain respective image forming members for electrophotography.

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 55 to obtain the results as shown in Table F-5.

EXAMPLE 60

By means of the device shown in FIG. 12, image forming members for electrophotography were prepared on a cylindrical aluminum substrate under the conditions shown in Tables F-6 to F-8, respectively (Sample Nos. 601, 602 and 603).

Each of the image forming members thus obtained was set in a charging-exposure testing device and subjected to corona charging at .crclbar.5.0 KV for 0.3 sec., followed immediately by irradiation of a light image. The light image was irradiated by means of a tungsten lamp light source at a dose of 2 lux.sec through a transmission type test chart.

Immediately thereafter, .sym. chargeable developer (containing toner and carrier) was cascaded on the surface of the image forming member to give a good toner image on the surface of the image forming member. When the toner image was transferred onto a transfer paper by corona charging of .crclbar.5.0 KV, a clear image of high density with excellent resolution and good gradation reproducibility was obtained.

EXAMPLE 61

By means of the device shown in FIG. 12, image forming members for electrophotography were prepared on a cylindrical aluminum substrate in the same manner as in Example 55 except for employing the conditions shown in Tables F-9 and F-10, respectively (Sample Nos. 701 and 702).

For each of the image forming members thus obtained, images were formed on a transfer paper according to the same conditions and procedure as in Example 55. As the result, very clear image quality was obtained.

EXAMPLE 62

By means of the device shown in FIG. 12, image forming members for electrophotography were prepared on a cylindrical aluminum substrate in the same manner as in Example 55 except for employing the conditions shown in Tables F-11 to F-15, respectively (Sample Nos. 801 and 805).

For each of the image forming members thus obtained, images were forned on a transfer paper according to the same conditions and procedure as in Example 55. As the result, very clear image quality was obtained.

EXAMPLE 63

For the image forming member for electrophotography prepared under the same toner image forming conditions as in Example 55 except for using GaAs type semiconductor laser (10 mW) of 810 nm in place of the tungsten lamp as the light source, image quality evaluation of toner transferred image was performed. As the result, an image of high quality, excellent in resolution and good in gradation reproducibility, could be obtained.

EXAMPLE 64

Following the same conditions and the procedure as in respective Examples 56 to 62, except for changing the conditions for preparation of the second layer (II) to the respective conditions as shown in Table F-16, image forming members for electrophotography were prepared, respectively (64 Samples of Sample No. 15-101 to 15-108, 15-201 to 15-208, . . . 15-702-1 to 15-702-8).

The respective image forming members for electrophotography thus prepared were individually set on a copying device, and corona charging was effected at .crclbar.5.0 KV for 0.2 sec., followed by irradiation of a light image. As the light source, a tungsten lamp was employed at a dosage of 1.0 lux.sec. The latent image was developed with a positively chargeable developer (containing toner and carrier) and transferred onto a plain paper. The transferred image was very good. The toner remaining on the image forming member for electrophotography without being transferred was cleaned with a rubber blade. When such step were repeated for 100,000 times or more, no deterioration of image was observed in every case.

The results of the overall image quality evaluation and evaluation of durability by repeated continuous use for respective samples are shown in Table F-16A.

EXAMPLE 65

Various image forming members were prepared according to the same method as in Example 55, except for varying the content ratio of silicon atoms to oxygen atoms in the second layer (II) by varying the target area ratio of silicon wafer to Si0.sub.2 and also the mixing ratio of Ar to NO during formation of the second layer (II).

For each of the image forming members thus obtained, the steps of image formation, developing and cleaning as described in Example 55 were repeated for about 50,000 times, and thereafter image evaluations were conducted to obtain the results as shown in Table F-17.

EXAMPLE 66

Various image forming members were prepared according to the same method as in Example 55, respectively, except for varying the content ratio of silicon atoms to oxygen atoms in the second layer (II) by varying the flow rate ratio of SiH.sub.4 gas to NO gas during formation of the second layer (II).

For each of the image forming members thus obtained, the steps up to transfer were repeated for about 50,000 times according to the methods as described in Example 55, and thereafter image evaluations were conducted to obtain the results as shown in Table F-18.

EXAMPLE 67

Various image forming members were prepared according to the same method as in Example 55, respectively, except for varying the content ratio of silicon atoms to oxygen atoms in the second layer (II) by varying the flow rate ratio of SiH.sub.4 gas, SiF.sub.4 gas and NO gas during formation of the second layer (II).

For each of the image forming members thus obtained, the steps of image formation, developing and cleaning as described in Example 55 were repeated for about 50,000 times, and thereafter image evaluations were conducted to obtain the results as shown in Table F-19.

EXAMPLE 68

Respective image forming members were prepared in the same manner as in Example 55, except for changing the layer thickness of the second layer (II), and the steps of image formation, developing and cleaning as described in Example 55 were repeated to obtain the results as shown in Table F-20.

The common layer forming conditions in the above Examples are shown below:

Substrate temperature: Germanium atom (Ge) containing layer . . . about 200 .degree. C. No germanium atom (Ge) containing layer . . . about 250 .degree. C. Discharging frequency: 13.56 MHz Inner pressure in reaction chamber during the reaction: 0.3 Torr. TABLE A-1__________________________________________________________________________ Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/1 0.18 5 3layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 2/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.05 SiH.sub.4 = 200 0.18 15 15layer__________________________________________________________________________ TABLE A-2__________________________________________________________________________ Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 5layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 3/100.about. 0 (linearly reduced)Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1layer GeH.sub.4 /He = 0.05Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 15layer__________________________________________________________________________ TABLE A-3__________________________________________________________________________ Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 4/10 0.18 5 2layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 2/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 C.sub.2 H.sub.4 /SiH.sub.4 = 2/100 0.18 15 2layer C.sub.2 H.sub.4 B.sub.2 H.sub.6 /SiH.sub.4 = 1/10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 1 .times. 10.sup.-5 0.18 15 5layer B.sub.2 H.sub. 6 /He = 10.sup.-3__________________________________________________________________________ TABLE A-4______________________________________Sample No. 401 402 403 404 405 406 407______________________________________Ge content 1 3 5 10 40 60 90(atom. %)Evaluation .DELTA. .circle. .circleincircle. .circleincircle. .circleincircle. .circle. .DELTA.______________________________________ .circleincircle.: Excellent .circle. : Good .DELTA.: Pratically satisfactory TABLE A-5______________________________________Sample No. 501 502 503 504 505______________________________________Layer thickness (.mu.) 0.1 0.5 1 2 5Evaluation .circle. .circle. .circleincircle. .circleincircle. .circle.______________________________________ .circleincircle.: Excellent .circle. : Good TABLE A-6__________________________________________________________________________ Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 4/10 0.18 5 2layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 2/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 PH.sub.3 /SiH.sub.4 = 1 .times. 10.sup.-7 0.18 15 20layer PH.sub.3 /He = 10.sup.-3__________________________________________________________________________ TABLE B-1__________________________________________________________________________ Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3/10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.05 SiH.sub.4 = 200 0.18 15 20layer__________________________________________________________________________ TABLE B-2__________________________________________________________________________ Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3/10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19layer GeH.sub.4 /He = 0.05Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 5layer__________________________________________________________________________ TABLE B-3__________________________________________________________________________ Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 2layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 5/10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 1/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 2 .times. 10.sup.-4 0.18 15 20layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE B-4______________________________________Sample No. 401 402 403 404 405 406 407 408______________________________________GeH.sub.4 /SiH.sub.4 5/100 1/10 2/10 4/10 5/10 7/10 8/10 1/1(Flow rateratio)Ge content 4.3 8.4 15.4 26.7 32.3 38.9 42 47.6(atom. %)Evaluation .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circle. .circle. .circle.______________________________________ .circleincircle.: Excellent .circle. : Good TABLE B-5______________________________________Sample No. 501 502 503 504 505 506 507 508______________________________________Layer 30.ANG. 500.ANG. 0.1.mu. 0.3.mu. 0.8.mu. 3.mu. 4.mu. 5.mu.thicknessEvaluation .DELTA. .circle. .circleincircle. .circleincircle. .circleincircle. .circle. .circle. .DELTA.______________________________________ .circleincircle.: Excellent .circle. : Good .DELTA.: Practically satisfactory TABLE B-6__________________________________________________________________________(Sample No. 601) Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 5/10 0.18 5 2layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 5 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4 ) = 1/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 PH.sub.3 /SiH.sub.4 = 9/10.sup.-5 0.18 15 20layer PH.sub.3 /He = 10.sup.-3__________________________________________________________________________ TABLE B-7__________________________________________________________________________(Sample No. 602) Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 15layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 8 .times. 10.sup.-4 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 1/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.05 SiH.sub.4 = 200 PH.sub.3 /SiH.sub.4 = 1 .times. 10.sup.-5 0.18 15 5layer PH.sub.3 /He = 10.sup.-3__________________________________________________________________________ TABLE B-8__________________________________________________________________________(Sample No. 603) Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-4 0.18 15 20layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE B-9__________________________________________________________________________(Sample No. 701) Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 =50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10 .sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-4 0.18 15 5layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE B-10__________________________________________________________________________(Sample No. 702) Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100 C.sub.2 H.sub.4Third SiH.sub.4 /He = 0.05 SiH.sub.4 = 200 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100 0.18 15 1layer C.sub.2 H.sub.4 B.sub.2 H.sub.6 /SiH.sub.4 = 1 .times. 10.sup.-4 B.sub.2 H.sub.6 /He = 10.sup.-3Fourth SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 SiH.sub.4 = 1 .times. 10.sup.-4 0.18 15 15layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE B-11__________________________________________________________________________(Sample No. 801) Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 3/100.about. 2.83/100Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 2.83/100.about. 0Third SiH.sub.4 /He = 0.05 SiH.sub.4 = 200 0.18 15 19layer__________________________________________________________________________ The flow rate ratio C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) was reduced linearly. TABLE B-12__________________________________________________________________________(Sample No. 802) Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 0.5layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100.about. 0 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 0.5layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3Third SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19layer GeH.sub.4 /He = 0.05Fourth SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 5layer__________________________________________________________________________ TABLE B-13__________________________________________________________________________(Sample No. 803) Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 5 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 1/100.about.0 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 5 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 2 .times. 10.sup.-4 0.18 15 20layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE B-14__________________________________________________________________________(Sample No. 804) Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100.about.2.83/100 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.05 SiH.sub.4 = 200 C.sub.2 H.sub.4 /SiH.sub.4 = 2.83/100.about.0 0.18 15 20layer C.sub.2 H.sub.4 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-4 B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ The flow rate ratio C.sub.2 H.sub.4 /SiH.sub.4 was reduced linearly. TABLE B-15__________________________________________________________________________(Sample No. 805) Dis- Layer LayerLayer charging formation thick-Consti- Gases Flow rate power rate nesstution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100.about.0 C.sub.2 H.sub.4Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-4 0.18 15 5layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ The flow rate ratio C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) was reduced linearly. TABLE C-1__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/1 0.18 5 3(I) layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 2/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 15 layerLayer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NH.sub.3 = 1/30 0.18 10 0.5 NH.sub.3__________________________________________________________________________ TABLE C-2__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 5(I) layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 3/100.about.0 (linearly reduced) Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1 layer GeH.sub.4 /He = 0.05 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 15 layer__________________________________________________________________________ TABLE C-3__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First GeH.sub.4 /He = 0.5 GeH.sub.4 = 50 C.sub.2 H.sub.4 /GeH.sub.4 = 2/100 0.18 5 2(I) layer C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 C.sub.2 H.sub.4 /SiH.sub.4 = 2/100 0.18 15 2 layer C.sub.2 H.sub.4 B.sub.2 H.sub.6 /SiH.sub.4 = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 1 0.18es. 10.sup.-5 15 15 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE C-4______________________________________Sample No. 401 402 403 404 405 406 407______________________________________Ge content 1 3 5 10 40 60 90(atom. %)Evaluation .DELTA. .circle. .circleincircle. .circleincircle. .circleincircle. .circle. .DELTA.______________________________________ .circleincircle.: Excellent .circle. : Good .DELTA.: Practically satisfactory TABLE C-5______________________________________Sample No. 501 502 503 504 505______________________________________Layer thickness (.mu.) 0.1 0.5 1 2 5Evalulation .circle. .circle. .circleincircle. .circleincircle. .circle.______________________________________ .circleincircle.: Excellent .circle. : Good TABLE C-6__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 4/10 0.18 5 2 -(I) layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 2/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 PH.sub.3 /SiH.sub.4 = 1 .times. 10.sup.-7 0.18 15 20 layer PH.sub.3 /He = 10.sup.-3Layer SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NH.sub.3 = 1/30 0.18 10 0.5(II) NH.sub.3__________________________________________________________________________ TABLE C-7__________________________________________________________________________ Discharging LayerCondi- Gases Flow rate Flow rate ratio power thicknesstions employed (SCCM) or Area ratio (W/cm.sup.2) (.mu.)__________________________________________________________________________12-1 Ar(NH.sub.3 /Ar) 200(1/1) Si Wafer:Silicon nitride = 0.3 0.5 1:3012-2 Ar(NH.sub.3 /Ar) 200(1/1) Si Wafer:Silicon nitride = 0.3 0.3 1:6012-3 Ar(NH.sub.3 /Ar) 200(1/1) Si Wafer:Silicon nitride = 0.3 1.0 6:412-4 SiH.sub.4 /He = 1 SiH.sub.4 = 15 SiH.sub.4 :NH.sub.3 = 1:100 0.18 0.3 NH.sub.312-5 SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 :NH.sub.3 = 1:30 0.18 1.5 NH.sub.312-6 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 150 SiH.sub.4 :SiF.sub.4 :NH.sub.3 = 1:1:60 0.18 0.5 SiF.sub.4 /He = 0.5 NH.sub.312-7 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 15 SiH.sub.4 :SiF.sub.4 :NH.sub.3 = 2:1:90 0.18 0.3 SiF.sub.4 /He = 0.5 NH.sub.312-8 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 150 SiH.sub.4 :SiF.sub.4 :NH.sub.3 = 1:1:20 0.18 1.5 SiF.sub.4 /He = 0.5 NH.sub.3__________________________________________________________________________ TABLE C-7A__________________________________________________________________________Layer (II)formingconditions Sample No./Evaluation__________________________________________________________________________12-1 12-201 12-301 12-401 12-501 12-601 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.12-2 12-202 12-302 12-402 12-502 12-602 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.12-3 12-203 12-303 12-403 12-503 12-603 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.12-4 12-204 12-304 12-404 12-504 12-604 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle.12-5 12-205 12-305 12-405 12-505 12-605 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle.12-6 12-206 12-306 12-406 12-506 12-606 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle.12-7 12-207 12-307 12-407 12-507 12-607 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.12-8 12-208 12-308 12-408 12-508 12-608 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.__________________________________________________________________________Sample No.Overall image Durabilityquality evaluationevaluation Evaluation standard: .circleincircle.. . .Excellent .circle. . . .Good TABLE C-8__________________________________________________________________________Sample No. 901 902 903 904 905 906 907__________________________________________________________________________Si:Si.sub.3 N.sub.4 9:1 6.5:3.5 4:10 2:60 1:100 1:100 1:100Target (0/1) (1/1) (1/1) (1/1) (2/1) (3/1) (4/1)(Area ratio)(NH.sub.3 /Ar)Si:N 9.7:0.3 8.8:1.2 7.3:2.7 5.0:5.0 4.5:5.5 4:6 3:7(Contentratio)Image .DELTA. .circleincircle. .circleincircle. .circle. .circle. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Sufficiently practically usable X: Image defect formed TABLE C-9__________________________________________________________________________Sample No. 1001 1002 1003 1004 1005 1006 1007 1008__________________________________________________________________________SiH.sub.4 :NH.sub.3 9:1 1:3 1:10 1:30 1:100 1:1000 1:5000 1:10000(Flow rateratio)Si:N 9.99:0.01 9.9:0.1 8.5:1.5 7.1:2.9 5:5 4.5:5.5 4:6 3.5:6.5(Contentratio)Image .DELTA. .circleincircle. .circleincircle. .circleincircle. .circle. .DELTA. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Practically satisfactory X: Image defect formed TABLE C-10__________________________________________________________________________Sample No. 1101 1102 1103 1104 1105 1106 1107 1108__________________________________________________________________________SiH.sub.4 :SiF.sub.4 :NH.sub.3 5:4:1 1:1:6 1:1:20 1:1:60 1:2:300 2:1:3000 1:1:10000 1:1:20000(Flow rateratio)Si:N 9.89:0.11 9.8:0.2 8.4:1.6 7.0:3.0 5.1:4.9 4.6:5.4 4.1:5.9 3.6:6.4(Contentratio)Image .DELTA. .circleincircle. .circleincircle. .circleincircle. .circle. .DELTA. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Practically satisfactory X: Image defect formed TABLE C-11______________________________________ Thickness ofSample No. layer (II) (.mu.) Results______________________________________1201 0.001 Image defect liable to occur1202 0.02 No image defect formed up to successive copying for 20,000 times1203 0.05 Stable up to successive copying for 50,000 times or more1204 1 Stable up to successive copying for 200,000 times or more______________________________________ TABLE D-1__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 20 layerLayer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NH.sub.3 = 1/30 0.18 10 0.5 NH.sub.3__________________________________________________________________________ TABLE D-2__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 +SiH.sub.4) = 3/10.sup.-3 B.sub.2 H.sub.6 He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19 layer GeH.sub.4 /He = 0.05 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 5 layer__________________________________________________________________________ TABLE D-3__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First GeH.sub.4 /He = 0.5 GeH.sub.4 = 50 B.sub.2 H.sub.6 /GeH.sub.4 = 5 .times. 10.sup.-3 0.18 5 2(I) layer B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /GeH.sub.4 = 1/100 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 2 .times. 10.sup.-4 0.18 15 20 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE D-4______________________________________Sample No. 401 402 403 404 405 406 407 408______________________________________GeH.sub.4 + 5/100 1/10 2/10 4/10 5/10 7/10 8/10 1/1SiH.sub.4(Flow rateratio)Ge content 4.3 8.4 15.4 26.7 32.3 38.9 42 47.6(atom. %)Evaluation .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circle. .circle. .circle.______________________________________ .circleincircle.: Excellent .circle. : Good TABLE D-5______________________________________Sample No. 501 502 503 504 505 506 507 508______________________________________Layer 30.ANG. 500.ANG. 0.1.mu. 0.3.mu. 0.8.mu. 3.mu. 4.mu. 5.mu.thicknessEvaluation .DELTA. .circle. .circleincircle. .circleincircle. .circleincircle. .circle. .circle. .DELTA.______________________________________ .circleincircle.: Excellent .circle. : Good .DELTA.: Pratically satisfactory TABLE D-6__________________________________________________________________________(Sample No. 601) Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 5/10 0.18 5 2(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = B.sub.2 H.sub.6 /He = 10.sup.-3 5 .times. 10.sup.-3 C.sub.2 H.sub.4 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 1/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 PH.sub.3 /SiH.sub.4 = 9 .times. 10.sup.-5 0.18 15 20 layer PH.sub.3 /He = 10.sup.-3Layer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NH.sub.3 = 1/30 0.18 8 0.5 NH.sub.3__________________________________________________________________________ TABLE D-7__________________________________________________________________________(Sample No. 602) Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 15(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = B.sub.2 H.sub.6 /He = 10.sup.-3 8 .times. 10.sup.-4 C.sub.2 H.sub.4 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 1/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 PH.sub.3 /SiH.sub.4 = 1 .times. 10.sup.-5 0.18 15 5 layer PH.sub.3 /He = 10.sup.-3Layer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NH.sub.3 = 1/30 0.18 7 0.5 NH.sub.3__________________________________________________________________________ TABLE D-8__________________________________________________________________________(Sample No. 603) Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = B.sub.2 H.sub.6 /He = 10.sup.-3 3 .times. 10.sup.-3 C.sub.2 H.sub.4 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-4 0.18 15 20 layer B.sub.2 H.sub.6 /He = 10.sup.-3Layer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NH.sub.3 = 1/30 0.18 10 0.5 NH.sub.3__________________________________________________________________________ TABLE D-9__________________________________________________________________________(Sample No. 701) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub. 4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19 layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-4 0.18 15 5 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE D-10__________________________________________________________________________(Sample No. 702) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1 layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100 C.sub.2 H.sub.4 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100 0.18 15 1 layer C.sub.2 H.sub.4 B.sub.2 H.sub.6 /He = 10.sup.-3 Fourth SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 1 .times. 10.sup.-4 0.18 15 15 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE D-11__________________________________________________________________________(Sample No. 801) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4)= C.sub.2 H.sub.4 3/100.about.2.83/100 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1 layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub. 4)= C.sub.2 H.sub.4 2.83/100.about.0 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 5 19 layer__________________________________________________________________________ The flow rate ratio C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) was reduced linearly TABLE D-12__________________________________________________________________________(Sample No. 802) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 0.5(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100.about.0 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 0.5 layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 Third SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19 layer GeH.sub.4 /He = 0.05 Fourth SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 5 layer__________________________________________________________________________ TABLE D-13__________________________________________________________________________(Sample No. 803) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 +GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 5 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 1/100.about.0 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1 layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 5 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 2 .times. 10.sup.-4 0.18 15 20 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE D-14__________________________________________________________________________(Sample No. 804) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100.about. C.sub.2 H.sub.4 2.83/100 Second SiH.sub.4 /He = 0.05 SiH.sub.4 = 200 C.sub.2 H.sub.4 /SiH.sub.4 = 2.83/100.about.0 0.18 15 20 layer C.sub.2 H.sub.4 B.sub.2 H.sub.6 /He = 10.sup.-3 B.sub.2 H.sub.6 /SiH.sub.4 = 3__________________________________________________________________________ .times. 10.sup.-4 The flow rate ratio C.sub.2 H.sub.4 /SiH.sub.4 was reduced linearly TABLE D-15__________________________________________________________________________(Sample No. 805) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 3/100.about.0 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19 layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub. 4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-4 0.18 15 5 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ The flow rate ratio C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) was reduced linearly. TABLE D-16__________________________________________________________________________ Discharging LayerCondi- Gases Flow rate Flow rate ratio power thicknesstions employed (SCCM) or Area ratio (W/cm.sup.2) (.mu.)__________________________________________________________________________12-1 Ar(NH.sub.3 /Ar) 200(1/1) Si Wafer:Silicon nitride = 0.3 0.5 1:3012-2 Ar(NH.sub.3 /Ar) 200(1/1) Si Wafer:Silicon nitride = 0.3 0.3 1:6012-3 Ar(NH.sub.3 /Ar) 200(1/1) Si Wafer:Silicon nitride = 0.3 1.0 6:412-4 SiH.sub.4 /He = 1 SiH.sub.4 = 15 SiH.sub.4 :NH.sub.3 = 1:100 0.18 0.3 NH.sub.312-5 SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 :NH.sub.3 = 1:30 0.18 1.5 NH.sub.312-6 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 150 SiH.sub.4 :SiF.sub.4 :NH.sub.3 = 1:1:60 0.18 0.5 SiF.sub.4 /He = 0.5 NH.sub.312-7 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 15 SiH.sub.4 :SiF.sub.4 :NH.sub.3 = 2:1:90 0.18 0.3 SiF.sub.4 /He = 0.5 NH.sub.312-8 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 150 SiH.sub.4 :SiF.sub.4 :NH.sub.3 = 1:1:20 0.18 1.5 SiF.sub.4 /He = 0.5 NH.sub.3__________________________________________________________________________ TABLE D-16A__________________________________________________________________________Layer (II)formingconditions Sample No./Evaluation__________________________________________________________________________12-1 12-201 12-301 12-401 12-501 12-601 12-701 12-801 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.12-2 12-202 12-302 12-402 12-502 12-602 12-702 12-802 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.12-3 12-203 12-303 12-403 12-503 12-603 12-703 12-803 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.12-4 12-204 12-304 12-404 12-504 12-604 12-704 12-804 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle.12-5 12-205 12-305 12-405 12-505 12-605 12-705 12-805 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle.12-6 12-206 12-306 12-406 12-506 12-606 12-706 12-806 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle.12-7 12-207 12-307 12-407 12-507 12-607 12-707 12-807 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.12-8 12-208 12-308 12-408 12-508 12-608 12-708 12-808 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.__________________________________________________________________________Sample No.Overall image Durabilityquality evaluationevaluation Evaluation standard: .circleincircle.. . .Excellent .circle. . . .Good TABLE D-17__________________________________________________________________________Sample No. 1401 1402 1403 1404 1405 1406 1407__________________________________________________________________________Si:Si.sub.3 N.sub.4 9:1 6.5:3.5 4:10 2:60 1:100 1:100 1:100Target (0/1) (1/1) (1/1) (1/1) (2/1) (3/1) (4/1)(Area ratio)(NH.sub.3 /Ar)Si:N 9.7:0.3 8.8:1.2 7.3:2.7 5.0:5.0 4.5:5.5 4:6 3:7(Contentratio)Image .DELTA. .circleincircle. .circleincircle. .circle. .circle. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Sufficiently practically usuable X: Image defect formed TABLE D-18__________________________________________________________________________Sample No. 1501 1502 1503 1504 1505 1506 1507 1508__________________________________________________________________________SiH.sub.4 :NH.sub.3 9:1 1:3 1:10 1:30 1:100 1:1000 1:5000 1:10000(Flow rateratio)Si:N 9.99:0.01 9.9:0.1 8.5:1.5 7.1:2.9 5:5 4.5:5.5 4:6 3.5:6.5(Contentratio)Image .DELTA. .circleincircle. .circleincircle. .circleincircle. .circle. .DELTA. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Pratically satisfactory X: Image defect formed TABLE D-19__________________________________________________________________________Sample No. 1601 1602 1603 1604 1605 1606 1607 1608__________________________________________________________________________SiH.sub.4 :SiF.sub.4 :NH.sub.3 5:4:1 1:1:6 1:1:20 1:1:60 1:2:300 2:1:3000 1:1:10000 1:1:20000(Flow rateratio)Si:N 9.89:0.11 9.8:0.2 8.4:1.6 7.0:3.0 5.1:4.9 4.6:5.4 4.1:5.9 3.6:6.4(Contentratio)Image .DELTA. .circleincircle. .circleincircle. .circleincircle. .circle. .DELTA. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Pratically satisfactory X: Image defect formed TABLE D-20______________________________________ ThicknessSample No. layer (II) (.mu.) Results______________________________________1601 0.001 Image defect liable to occur1602 0.02 No image defect formed up to successive copying for 20,000 times1603 0.05 Stable up to successive copying for 50,000 times or more1604 1 Stable up to successive copying for 200,000 times or more______________________________________ TABLE E-1__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/1 0.18 5 3(I) layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4)= C.sub.2 H.sub.4 2/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 15 layerLayer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NO = 1 0.18 10 0.5 NO__________________________________________________________________________ TABLE E-2__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 5(I) layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100.about.0 C.sub.2 H.sub.4 (linearly reduced) Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1 layer GeH.sub.4 /He = 0.05 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 15 layer__________________________________________________________________________ TABLE E-3__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 4/10 0.18 5 2(I) layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 2/100 C.sub.2 H.sub.4 Second SiH.sub.4 /He= 0.5 SiH.sub.4 = 200 C.sub.2 H.sub.4 /SiH.sub.4 = 2/100 0.18 15 2 layer C.sub.2 H.sub.4 B.sub.2 H.sub.6 /SiH.sub.4 = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 1 .times. 10.sup.-5 0.18 15 15 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE E-4______________________________________Sample No. 401 402 403 404 405 406 407______________________________________Ge content 1 3 5 10 40 60 90(atom. %)Evaluation .DELTA. .circle. .circleincircle. .circleincircle. .circleincircle. .circle. .DELTA.______________________________________ .circleincircle.: Excellent .circle. : Good .DELTA.: Pratically satisfactory TABLE E-5______________________________________Sample No. 501 502 503 504 505______________________________________Layer thickness (.mu.) 0.1 0.5 1 2 5Evaluation .circle. .circle. .circleincircle. .circleincircle. .circle.______________________________________ .circleincircle.: Excellent .circle. : Good TABLE E-6__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First GeH.sub.4 /He = 0.05 GeH.sub.4 = 50 C.sub.2 H.sub.4 /GeH.sub.4 = 2/100 0.18 5 2(I) layer C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 PH.sub.3 /SiH.sub.4 = 1 .times. 10.sup.-7 0.18 15 20 layer PH.sub.3 /He = 10.sup.-3Layer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NO = 1 0.18 10 0.5 NO__________________________________________________________________________ TABLE E-7__________________________________________________________________________ Discharging LayerCondi- Gases Flow rate Flow rate ratio power thicknesstions employed (SCCM) or Area ratio (W/cm.sup.2) (.mu.)__________________________________________________________________________8-1 Ar(NO/Ar) 200(1/1) Si Wafer:SiO.sub.2 = 1:30 0.3 0.58-2 Ar(NO/Ar) 200(1/1) Si Wafer:SiO.sub.2 = 1:60 0.3 0.38-3 Ar(NO/Ar) 200(1/1) Si Wafer:SiO.sub.2 = 6:4 0.3 1.08-4 SiH.sub.4 /He = 1 SiH.sub.4 = 15 SiH.sub.4 :NO = 5:1 0.18 0.3 NO8-5 SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 :NO = 1:1 0.18 1.5 NO8-6 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 150 SiH.sub.4 :SiF.sub.4 :NO = 1:1:1 0.18 0.5 SiF.sub.4 /He = 0.5 NO8-7 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 15 SiH.sub.4 :SiF.sub.4 :NO = 2:1:4 0.18 0.3 SiF.sub.4 /He = 0.5 NO8-8 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 150 SiH.sub.4 :SiF.sub.4 :NO = 1:1:3 0.18 1.5 SiF.sub.4 /He = 0.5 NO__________________________________________________________________________ TABLE E-7A______________________________________Layer (II)formingconditions Sample No./Evaluation______________________________________8-1 8-201 8-301 8-601 .circle. .circle. .circle. .circle. .circle.8-2 8-202 8-302 8-602 .circle. .circle. .circle. .circle. .circle.8-3 8-203 8-303 8-603 .circle. .circle. .circle. .circle. .circle.8-4 8-204 8-304 8-604 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle.8-5 8-205 8-305 8-605 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle.8-6 8-206 8-306 8-606 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle.8-7 8-207 8-307 8-607 .circle. .circle. .circle. .circle. .circle.8-8 8-208 8-308 8-608 .circle. .circle. .circle. .circle. .circle.______________________________________Sample No.Overall image Durabilityquality evaluationevaluation Evaluation standard: .circleincircle.. . .Excellent .circle. . . .Good TABLE E-8__________________________________________________________________________Sample No. 901 902 903 904 905 906 907__________________________________________________________________________Si:SiO.sub.2 9:1 6.5:3.5 4:10 2:60 1:100 1:100 1:100Target (0/1) (1/1) (1/1) (1/1) (2/1) (3/1) (4/1)(Area ratio)(NO/Ar)Si:O 9.7:0.3 8.8:1.2 7.3:2.7 5.0:5.0 4.5:5.5 4:6 3:7(Contentratio)Image .DELTA. .circleincircle. .circleincircle. .circle. .circle. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Sufficiently practically usuable X: Image defect formed TABLE E-9__________________________________________________________________________Sample No. 1001 1002 1003 1004 1005 1006 1007__________________________________________________________________________SiH.sub.4 :NO 1000:1 99:1 5:1 1:1 1:2 3:10 1:1000(Flow rateratio)Si:O 9.9999:0.0001 9.9:0.1 9:1 6:4 5:5 3.3:6.7 2:8(Contentratio)Image .DELTA. .circle. .circleincircle. .circleincircle. .circle. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Practically satisfactory X: Image defect formed TABLE E-10__________________________________________________________________________Sample No. 1101 1102 1103 1104 1105 1106 1107__________________________________________________________________________SiH.sub.4 :SiF.sub.4 :NO 500:400:1 50:50:1 5:5:2 5:5:10 1:1:4 3:3:20 1:1:2000(Flow rateratio)Si:O 9.9998:0.0002 9.8:0.2 8.8:1.2 6.3:3.7 5.1:4.9 3.5:6.5 2.3:7.7(Contentratio)Image .DELTA. .circle. .circleincircle. .circleincircle. .circle. X .DELTA.qualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Practically satisfactory X: Image defect formed TABLE E-11______________________________________ Thickness ofSample No. layer (II) (.mu.) Results______________________________________1201 0.001 Image defect liable to occur1202 0.02 No image defect formed up to successive copying for 20,000 times1203 0.05 Stable up to successive copying for 50,000 times1204 1 Stable up to successive copying for 200,000 times______________________________________ TABLE F-1__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = B.sub.2 H.sub.6 /He = 10.sup.-3 3 .times. 10 .sup.-3 C.sub.2 H.sub.4 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 20 layerLayer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NO = 1 0.18 10 0.5 NO__________________________________________________________________________ TABLE F-2__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3/10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19 layer GeH.sub.4 /He = 0.05 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 5 layer__________________________________________________________________________ TABLE F-3__________________________________________________________________________ Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First GeH.sub.4 /He = 0.05 GeH.sub.4 = 50 B.sub.2 H.sub.6 /GeH.sub.4 = 5 .times. 10.sup.-3 0.18 5 2(I) layer B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /GeH.sub.4 = 1/100 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 2 .times. 10.sup.-4 0.18 15 20 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE F-4______________________________________Sample No. 401 402 403 404 405 406 407 408______________________________________GeH.sub.4 /SiH.sub.4 5/100 1/10 2/10 4/10 5/10 7/10 8/10 1/1(Flow rateratio)Ge content 4.3 8.4 15.4 26.7 32.3 38.9 42 47.6(atom. %)Evaluation .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circle. .circle. .circle.______________________________________ .circleincircle.: Excellent .circle. : Good TABLE F-5______________________________________Sample No. 501 502 503 504 505 506 507 508______________________________________Layer 30.ANG. 500.ANG. 0.1.mu. 0.3.mu. 0.8.mu. 3.mu. 4.mu. 5.mu.thicknessEvaluation .DELTA. .circle. .circleincircle. .circleincircle. .circleincircle. .circle. .circle. .DELTA.______________________________________ .circleincircle.: Excellent .circle. : Good .DELTA.: Practically satisfactory TABLE F-6__________________________________________________________________________(Sample No. 601) Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 5/10 0.18 5 2(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = B.sub.2 H.sub.6 /He = 10.sup.-3 5 .times. 10.sup.-3 C.sub.2 H.sub.4 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 1/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 PH.sub.3 /SiH.sub.4 = 9 .times. 10.sup.-5 0.18 15 20 layer PH.sub.3 /He = 10.sup.-3Layer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 =100 SiH.sub.4 /NO = 1 0.18 10 0.5 NO__________________________________________________________________________ TABLE F-7__________________________________________________________________________(Sample No. 602) Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 15(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = B.sub.2 H.sub.6 /He = 10.sup.-3 8 .times. 10.sup.-4 C.sub.2 H.sub.4 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 1/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 PH.sub.3 /SiH.sub.4 = 1 .times. 10.sup.-5 0.18 15 5 layer PH.sub.3 /He = 10.sup.-3Layer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NO = 1 0.18 10 0.5 NO__________________________________________________________________________ TABLE F-8__________________________________________________________________________(Sample No. 603) Dis- Layer Layer charging formation thick-Layer Gases Flow rate Flow rate power rate nessConstitution employed (SCCM) ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = B.sub.2 H.sub.6 /He = 10.sup.-3 3 .times. 10.sup.-3 C.sub.2 H.sub.4 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-4 0.18 15 20 layer B.sub.2 H.sub.6 /He = 10.sup. -3Layer (II) SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 /NO = 1 0.18 10 0.5 NO__________________________________________________________________________ TABLE F-9__________________________________________________________________________(Sample No. 701) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19 layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-4 0.18 15 5 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE F-10__________________________________________________________________________(Sample No. 702) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1 layer GeH.sub.4 /He = 0.05 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100 C.sub.2 H.sub.4 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100 0.18 15 1 layer C.sub.2 H.sub.4 B.sub.2 H.sub.6 /SiH.sub.4 = 1 .times. 10.sup.-4 B.sub.2 H.sub.6 /He = 10.sup.-3 Fourth SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 1 .times. 10.sup.-4 0.18 15 15 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE F-11__________________________________________________________________________(Sample No. 801) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 3/100.about.2.83/100 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1 layer GeH.sub.4 /He = 0.05 C.sub. 2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 2.83/100.about.0 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 19 layer__________________________________________________________________________ The flow rate ratio C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) was reduced linearly. TABLE F-12__________________________________________________________________________(Sample No. 802) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 0.5(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100.about.0 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 0.5 layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 Third SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19 layer GeH.sub.4 /He = 0.05 Fourth SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 0.18 15 5 layer__________________________________________________________________________ TABLE F-13__________________________________________________________________________(Sample No. 803) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 5 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = C.sub.2 H.sub.4 1/100.about.0 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1 layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 5 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 2 .times. 10.sup.-4 0.18 15 20 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ TABLE F-14__________________________________________________________________________(Sample No. 804) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 3/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-3 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /SiH.sub.4 = 3/100.about. C.sub.2 H.sub.4 2.83/100 Second SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 C.sub.2 H.sub.4 /SiH.sub.4 = 2.83/ 0.18 15 20 layer C.sub.2 H.sub.4 100.about.0 B.sub.2 H.sub.6 /He = 10.sup.-3 B.sub.2 H.sub.6 /SiH.sub. 4 = 3 .times. 10.sup.-4__________________________________________________________________________ The flow rate ratio C.sub.2 H.sub.4 /SiH.sub.4 was reduced linearly. TABLE F-15__________________________________________________________________________(Sample No. 805) Dis- Layer Layer charging formation thick-Layer Gases Flow rate power rate nessConstitution employed (SCCM) Flow rate ratio (W/cm.sup.2) (.ANG./sec) (.mu.)__________________________________________________________________________Layer First SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 1(I) layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) = 3/100.about.0 C.sub.2 H.sub.4 Second SiH.sub.4 /He = 0.05 SiH.sub.4 + GeH.sub.4 = 50 GeH.sub.4 /SiH.sub.4 = 1/10 0.18 5 19 layer GeH.sub.4 /He = 0.05 B.sub.2 H.sub.6 /(GeH.sub.4 + SiH.sub.4) = 1 .times. 10.sup.-5 B.sub.2 H.sub.6 /He = 10.sup.-3 Third SiH.sub.4 /He = 0.5 SiH.sub.4 = 200 B.sub.2 H.sub.6 /SiH.sub.4 = 3 .times. 10.sup.-4 0.18 15 5 layer B.sub.2 H.sub.6 /He = 10.sup.-3__________________________________________________________________________ The flow rate ratio C.sub.2 H.sub.4 /(GeH.sub.4 + SiH.sub.4) was reduced linearly. TABLE F-16__________________________________________________________________________ Discharging LayerCondi- Gases Flow rate Flow rate ratio power thicknesstions employed (SCCM) or Area ratio (W/cm.sup.2) (.mu.)__________________________________________________________________________15-1 Ar(NO/Ar) 200(1/1) Si Wafer:SiO.sub.2 = 1:30 0.3 0.515-2 Ar(NO/Ar) 200(1/1) Si Wafer:SiO.sub.2 = 1:60 0.3 0.315-3 Ar(NO/Ar) 200(1/1) Si Wafer:SiO.sub.2 = 6:4 0.3 1.015-4 SiH.sub.4 /He = 1 SiH.sub.4 = 15 SiH.sub.4 :NO = 5:1 0.18 0.3 NO15-5 SiH.sub.4 /He = 0.5 SiH.sub.4 = 100 SiH.sub.4 :NO = 1:1 0.18 1.5 NO15-6 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 150 SiH.sub.4 :SiF.sub.4 :NO = 1:1:1 0.18 0.5 SiF.sub.4 /He = 0.5 NO15-7 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 15 SiH.sub.4 :SiF.sub.4 :NO = 2:1:4 0.18 0.3 SiF.sub.4 /He = 0.5 NO15-8 SiH.sub.4 /He = 0.5 SiH.sub.4 + SiF.sub.4 = 150 SiH.sub.4 :SiF.sub.4 :NO = 1:1:3 0.18 1.5 SiF.sub.4 /He = 0.5 NO__________________________________________________________________________ TABLE F-16A__________________________________________________________________________Layer (II)formingconditions Sample No./Evaluation__________________________________________________________________________15-1 15-101 15-201 15-301 15-601-1 15-602-1 15-603-1 15-701-1 15-702-1 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.15-2 15-102 15-202 15-302 15-601-2 15-602-2 15-603-2 15-701-2 15-702-2 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.15-3 15-103 15-203 15-303 15-601-3 15-602-3 15-603-3 15-701-3 15-702-3 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.15-4 15-104 15-204 15-304 15-601-4 15-602-4 15-603-4 15-701-4 15-702-4 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle . .circleincircle. .circlein circle.15-5 15-105 15-205 15-305 15-601-5 15-602-5 15-603-5 15-701-5 15-702-5 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle . .circleincircle. .circlein circle.15-6 15-106 15-206 15-306 15-601-6 15-602-6 15-603-6 15-701-6 15-702-6 .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle. .circleincircle . .circleincircle. .circlein circle.15-7 15-107 15-207 15-307 15-601-7 15-602-7 15-603-7 15-701-7 15-702-7 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.15-8 15-108 15-208 15-308 15-601-8 15-602-8 15-603-8 15-701-8 15-702-8 .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle. .circle.__________________________________________________________________________Sample No.Overall image Durabilityquality evaluationevaluation Evaluation standard: .circleincircle. . . . Excellent .circle. . . . Good TABLE F-17__________________________________________________________________________Sample No. 1601 1602 1603 1604 1605 1606 1607__________________________________________________________________________Si:SiO.sub.2 9:1 6.5:3.5 4:10 2:60 1:100 1:100 1:100Target (0/1) (1/1) (1/1) (1/1) (2/1) (3/1) (4/1)(Area ratio)(NO/Ar)Si:O 9.7:0.3 8.8:1.2 7.3:2.7 5.0:5.0 4.5:5.5 4:6 3:7(Contentratio)Image .DELTA. .circleincircle. .circleincircle. .circle. .circle. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Sufficiently practically usable X: Image defect formed TABLE F-18__________________________________________________________________________Sample No. 1701 1702 1703 1704 1705 1706 1707__________________________________________________________________________SiH.sub.4 :NO 1000:1 99:1 5:1 1:1 1:2 3:10 1:1000(Flow rateratio)Si:O 9.9999:0.0001 9.9:0.1 9:1 6:4 5:5 3.3:6.7 2:8(Contentratio)Image .DELTA. .circle. .circleincircle. .circleincircle. .circle. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Practically satisfactory X: Image defect formed TABLE F-19__________________________________________________________________________Sample No. 1801 1802 1803 1804 1805 1806 1807__________________________________________________________________________SiH.sub.4 :SiF.sub.4 :NO 500:400:1 50:50:1 5:5:2 5:5:10 1:1:4 3:3:20 1:1:2000(Flow rateratio)Si:O 9.9998:0.0002 9.8:0.2 8.8:1.2 6.3:3.7 5.1:4.9 3.5:6.5 2.3:7.7(Contentratio)Image .DELTA. .circle. .circleincircle. .circleincircle. .circle. .DELTA. Xqualityevaluation__________________________________________________________________________ .circleincircle.: Very good .circle. : Good .DELTA.: Practically satisfactory X: Image defect formed TABLE F-20______________________________________ Thickness ofSample No. layer (II) (.mu.) Results______________________________________1901 0.001 Image defect liable to occur1902 0.02 No image defect formed up to successive copying for 20,000 times1903 0.05 Stable up to successive copying for 50,000 times1904 1 Stable up to successive copying for 200,000 times______________________________________

Claims

1. A photoconductive member comprising a substrate for photoconductive member and a light receiving layer having a layer constitution in which a first layer region (G) comprising an amorphous material containing germanium atoms and at least one of hydrogen or halogen atoms present in amounts from 0.01 to 40 atomic percent and a second layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms and at least one of hydrogen or halogen atoms present in amounts from 0.01 to 40 atomic percent are successively provided from the substrate side, carbon atoms being present in at least said first layer region (G) and wherein the content of germanium atoms in said first layer region (G) is 1 to 10.times.10.sup.-5 atomic ppm based on the total of germanium and silicon.

2. A photoconductive member according to claim 1, wherein hydrogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

3. A photoconductive member according to claim 1, wherein halogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

4. A photoconductive member according to claim 1, wherein hydrogen atoms and halogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

5. A photoconductive member according to claim 1, wherein a substance for controlling conductivity is contained in at least one of the first layer region (G) and the second layer region (S).

6. A photoconductive member according to claim 5, wherein hydrogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

7. A photoconductive member according to claim 5, wherein halogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

8. A photoconductive member according to claim 5, wherein the substance for controlling conductivity is an atom belonging to the group III of the periodic table.

9. A photoconductive member according to claim 5, wherein the substance for controlling conductivity is an atom belonging to the group V of the periodic table.

10. A photoconductive member according to claim 5, wherein hydrogen atoms and halogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

11. A photoconductive member according to claim 1, wherein the content of carbon atoms in the light receiving layer is 0.001 to 50 atomic %.

12. A photoconductive member according to claim 1, wherein 0.01 to 40 atomic % of hydrogen atoms are contained in the first layer region (G).

13. A photoconductive member according to claim 1, wherein 0.01 to 40 atomic % of halogen atoms are contained in the first layer region (G).

14. A photoconductive member according to claim 1, wherein 0.01 to 40 atomic % as the total of hydrogen atoms and halogen atoms are contained in the first layer region (G).

15. A photoconductive member according to claim 1, wherein 1 to 40 atomic % of hydrogen atoms are contained in the second layer region (S).

16. A photoconductive member according to claim 1, wherein 1 to 40 atomic % of halogen atoms are contained in the second layer region (S).

17. A photoconductive member according to claim 1, wherein 1 to 40 atomic % as the total of hydrogen atoms and halogen atoms are contained in the second layer region (S).

18. A photoconductive member according to claim 1, wherein the first layer region (G) has a layer thickness of 30 .ANG. to 50.mu..

19. A photoconductive member according to claim 1, wherein the second layer region (S) has a layer thickness of 0.5 to 90.mu..

20. A photoconductive member according to claim 1, wherein the light receiving layer has a layer thickness of 1 to 100.mu..

21. A photoconductive member according to claim 5, wherein the content of the substance for controlling conductivity is 0.01 to 5.times.10.sup.4 atomic ppm.

22. A photoconductive member according to claim 1, wherein a substance for controlling conductivity is contained in the light receiving layer.

23. A photoconductive member according to claim 1, wherein the light receiving layer has a layer region (PN) containing a substance for controlling conductivity.

24. A photoconductive member according to claim 22, wherein the content of the substance for controlling conductivity is 0.01 to 5.times.10.sup.4 atomic ppm.

25. A photoconductive member according to claim 23, wherein the layer region (Z) at the portion excluding the layer region (PN) contains a substance for controlling conductivity of the polarity different from the polarity for the conductivity of the substance for controlling conductivity contained in the layer region (PN).

26. A photoconductive member according to claim 25, wherein the content of the substance for controlling conductivity contained in the layer region (Z) is smaller than that of the substance for controlling conductivity contained in the layer region (PN).

27. A photoconductive member comprising a substrate for photoconductive member and a light receiving layer comprising a first layer with a layer constitution in which a first layer region (G) comprising an amorphous material containing germanium atoms and at least one of hydrogen and halogen atoms present in amounts from 0.01 to 40 atomic percent and a second layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms and at least one of hydrogen and halogen atoms present in amounts from 0.01 to 40 atomic percent are successively provided from the substrate side and a second layer comprising an amorphous material containing at least one of nitrogen atoms and oxygen atoms in a matrix of silicon atoms, carbon atoms being present in at least said first layer region (G) and wherein the content of germanium atoms in said first layer region (G) is 1 to 10.times.10.sup.5 atomic ppm based on the total of germanium and silicon.

28. A photoconductive member according to claim 27, wherein hydrogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

29. A photoconductive member according to claim 27, wherein halogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

30. A photoconductive member according to claim 27, wherein hydrogen atoms and halogen atoms are contained in at least one of the first layer region (G), and the second layer region (S).

31. A photoconductive member according to claim 27, wherein a substance for controlling conductivity is contained in at least one of the first layer region (G) and the second layer region (S).

32. A photoconductive member according to claim 31, wherein hydrogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

33. A photoconductive member according to claim 31, wherein halogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

34. A photoconductive member according to claim 31, wherein hydrogen atoms and halogen atoms are contained in at least one of the first layer region (G) and the second layer region (S).

35. A photoconductive member according to claim 31, wherein the substance for controlling conductivity is an atom belonging to the group III of the periodic table.

36. A photoconductive member according to claim 31, wherein the substance for controlling conductivity is an atom belonging to the group V of the periodic table.

37. A photoconductive member according to claim 27, wherein 0.01 to 40 atomic % of hydrogen atoms are contained in the first layer region (G).

38. A photoconductive member according to claim 27, wherein 0.01 to 40 atomic % of halogen atoms are contained in the first layer region (G).

39. A photoconductive member according to claim 27, wherein 0.01 to 40 atomic % as the total of hydrogen atoms and halogen atoms are contained in the first layer region (G).

40. A photoconductive member according to claim 27, wherein the content of carbon atoms in the first layer is 0.001 to 50 atomic %.

41. A photoconductive member according to claim 27, wherein 1 to 40 atomic % of hydrogen atoms are contained in the second layer region (S).

42. A photoconductive member according to claim 27, wherein 1 to 40 atomic % of halogen atoms are contained in the second layer region (S).

43. A photoconductive member according to claim 27, wherein 1 to 40 atomic % as the total of hydrogen atoms and halogen atoms are contained in the second layer region (S).

44. A photoconductive member according to claim 27, wherein the first layer region (G) has a layer thickness of 30 .ANG. to 50.mu..

45. A photoconductive member according to claim 27, wherein the second layer region (S) has a layer thickness of 0.5 to 90.mu..

46. A photoconductive member according to claim 27, wherein the first layer has a layer thickness of 1 to 100.mu..

47. A photoconductive member according to claim 31, wherein the content of the substance for controlling conductivity is 0.01 to 5.times.10.sup.4 atomic ppm.

48. A photoconductive member according to claim 27, wherein hydrogen atoms are contained in the second layer.

49. A photoconductive member according to claim 27, wherein halogen atoms are contained in the second layer.

50. A photoconductive member according to claim 27, wherein hydrogen atoms and halogen atoms are contained in the second layer.

51. A photoconductive member according to claim 27, wherein the second layer has a layer thickness of 0.003 to 30.mu..

52. A photoconductive member according to claim 27, wherein a substance for controlling conductivity is contained in the first layer.

53. A photoconductive member according to claim 27, wherein the first layer has a layer region (PN) containing a substance for controlling conductivity.

54. A photoconductive member according to claim 52, wherein the content of the substance for controlling conductivity is 0.01 to 5.times.10.sup.4 atomic ppm.

55. A photoconductive member according to claim 53, wherein the layer region (Z) at the portion excluding the layer region (PN) contains a substance for controlling conductivity of the polarity different from the polarity for the conductivity of the substance for controlling conductivity contained in the layer region (PN).

56. A photoconductive member according to claim 55, wherein the content of the substance for controlling conductivity contained in the layer region (Z) is smaller than that of the substance for controlling conductivity contained in the layer region (PN).

57. A photoconductive member according to claim 55, wherein the content of the substance for controlling conductivity contained in the layer region (PN) is 0.01 to 5.times.10.sup.4 atomic ppm.

58. A photoconductive member according to claim 55, wherein the content of the substance for controlling conductivity contained in the layer region (Z) is 0.001 to 1000 atomic ppm.

59. An electrophotographic process which comprises:

(a) applying a charging treatment to a photoconductive member comprising substrate for photoconductive member and a light receiving layer having a layer constitution in which a first layer region (G) comprising an amorphous material containing germanium atoms and at least one of hydrogen and halogen atoms present in amounts from 0.01 to 40 atomic percent and a second layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms and at least one of hydrogen and halogen atoms present in amounts from 0.01 to 40 atomic percent are successively provided from the substrate side, carbon atoms being present in at least said first layer region (G) and wherein the content of germanium atoms in said first layer gegion (G) is 1 to 10.times.10.sup.5 atomic ppm based on the total of germanium and silicon; and

(b) irradiating said photoconductive member with an electromagnetic wave carrying information thereby forming an electrostatic image.

60. An electrophotographic process which comprises:

(a) applying a charging treatment to photoconductive member and a light receiving layer comprising a first layer with a layer constitution in which a first layer region (G) comprising an amorphous material containing germanium atoms and at least one of hydrogen and halogen atoms present in amounts from 0.01 to 40 atomic percent and a second layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms and at least one of hydrogen and halogen atoms present in amounts from 0.01 to 40 atomic percent are successively provided from the substrate side and a second layer comprising an amorphous material containing at least one of nitrogen atoms and oxygen atoms in a matrix of silicon atoms, carbon atoms being present in at least said first layer region (G) and wherein the content of germanium atoms in said first layer region (G) is 1 to 10.times.10.sup.5 atomic ppm based on the total of germanium and silicon; and

(b) irradiating said photoconductive member with an electromagnetic wave carrying information thereby forming an electrostatic image.