BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a schematic cross-sectional view to show an outline configuration of a photoelectric conversion device for explaining an embodiment of the invention.
FIG. 2 is a schematic cross-sectional view of one pixel of a solid-state imaging device using a photoelectric conversion device of the configuration as illustrated in FIG. 1 and is a view to show a first configuration example.
FIG. 3 is a schematic cross-sectional view of one pixel of a solid-state imaging device using the photoelectric conversion device of the configuration as illustrated in FIG. 1 and is a view to show a second configuration example.
FIG. 4 is a schematic cross-sectional view of one pixel of a solid-state imaging device using the photoelectric conversion device of the configuration as illustrated in FIG. 1 and is a view to show a third configuration example.
FIG. 5 is a schematic cross-sectional view to show a configuration of the photoelectric conversion device prepared in Comparative Example 1.
FIGS. 6A, 6B and 6C are each a surface SEM image of a photoelectric conversion device prepared in Comparative Example 1.
FIGS. 7A and 7B are each a surface SEM image of a photoelectric conversion device prepared in Example 1.
FIGS. 8A and 8B are each a surface SEM image of a photoelectric conversion device prepared in Example 2.
FIG. 9 is an energy diagram of a photoelectric conversion device prepared in Example 1.
FIG. 10 shows the absorption spectrum of the photoelectric conversion device prepared in Example 1.
FIG. 11 shows the bias voltage dependence of dark current and photocurrent of the photoelectric conversion device prepared in Example 1.
FIG. 12 shows the action spectrum of the photoelectric conversion device prepared in Example 1.
FIG. 13 shows the response speed of the photoelectric conversion device prepared in Example 1.
FIG. 14 is a sectional schematic view to show an outline configuration of the solid-state imaging device prepared in Example 4.
FIG. 15 is a sectional schematic view to show an outline configuration of the solid-state imaging device prepared in Example 4.
FIGS. 16A and 16B show an original image of photographic subject and its image taken by a solid-state imaging device prepared in Example 4, respectively.
FIGS. 17A and 17B show an original image of photographic subject and its image taken by a solid-state imaging device prepared in Example 4, respectively.
FIG. 18 shows an original image of the gray scale chart and its image taken by a solid-state imaging device prepared in Example 4.
FIG. 19 shows an original image of the resolution chart and its image taken by a solid-state imaging device prepared in Example 4.
Patent Application
20070194400
