Claims
- 1. A positive photoresist composition comprising a polyamide comprising the following recurring structure in the polymer chain: ##STR9## wherein: (1) R is a tetravalent aromatic moiety of the formula: ##STR10## (2) R' is a monovalent moiety independently selected from: ##STR11## X is hydrogen or a substituent independently selected from: substituted or unsubstituted lower alkyl of 1 to 8 carbons and substituted or unsubstituted phenyl; Z is independently selected from chloro, bromo, fluoro, iodo and lower alkyl of 1 to 6 carbons; n is independently 0 or 1; and
- (3) R" is selected from a substituted or unsubstituted alkylene, alicyclic or arylene moiety, said composition further containing a radiation sensitizer.
- 2. The composition of claim 1 wherein at least one R' is hydrogen.
- 3. The composition of claim 2 wherein n is 0.
- 4. The composition of claim 3 wherein R is the amide condensation residuum of the amine: 4,4'-Bis[2-(3-amino-4-hydroxyphenyl)-hexafluoroisopropyl] diphenyl ether.
- 5. The composition of claim 4 further including the amide condensation residuum of 2,2-hexafluoro-bis-(3-amino-4-hydroxyphenyl)propane in the polymer structure.
- 6. The composition of claim 1 which is based on the amide condensation residuum of one or a mixture of acid halides having the formula: ##STR12## wherein R" represents a divalent alkylene, alicyclic or aromatic moiety, and halo represents halogen.
- 7. The composition of claim 6 wherein the acid halide is selected from the group consisting of isophthaloyl chloride, terephthaloyl chloride, 2,2-hexafluoro-bis-(4-chlorocarbonylphenyl) propane, 4,4'-bis[2-(4-chlorocarbonylphenyl) hexafluoroisopropyl]diphenyl ether, 4,4' para-diphenyl ether dibenzoyl chloride, 4,4'-para-phenylenedioxy dibenzoyl chloride, 2,6-naphthalene diacid chloride, and mixtures thereof.
- 8. The composition of claim 7 wherein the acid halide is a mixture of isophthaloyl chloride and terephthaloyl chloride.
- 9. The composition of claim 7 wherein the acid halide consists of isophthaloyl chloride.
- 10. The composition of claim 7 wherein the acid halide consists of terephthaloyl chloride.
- 11. The composition of claim 1 dissolved in organic solvent.
Parent Case Info
This is a continuation of copending application Ser. No. 07/327,761 filed on Mar. 23, 1989.
US Referenced Citations (5)
Divisions (1)
|
Number |
Date |
Country |
Parent |
327761 |
Mar 1989 |
|