Number | Name | Date | Kind |
---|---|---|---|
3582401 | Berilla et al. | Jun 1971 | |
3961992 | Jahnke et al. | Jun 1976 | |
3962108 | Perruccio | Jun 1976 | |
4015986 | Paal et al. | Apr 1977 | |
4020040 | Kattoh et al. | Apr 1977 | |
4051047 | Liston | Sep 1977 | |
4169068 | Harita et al. | Sep 1979 | |
4239661 | Muraoka et al. | Dec 1980 | |
4304681 | Martin et al. | Dec 1981 | |
4395348 | Lee | Jul 1983 | |
4395479 | Ward et al. | Jul 1983 | |
4401747 | Ward, Jr. et al. | Aug 1983 | |
4401748 | Ward, Jr. et al. | Aug 1983 | |
4403029 | Ward, Jr. et al. | Sep 1983 | |
4423159 | Ebra et al. | Dec 1983 | |
4428871 | Ward et al. | Jan 1984 | |
4617251 | Sizensky | Oct 1986 | |
4680133 | Ward | Jul 1987 | |
4770713 | Ward | Sep 1988 | |
4786578 | Neisius et al. | Nov 1988 | |
4791043 | Thomas et al. | Dec 1988 | |
4824762 | Kobayashi et al. | Apr 1989 | |
4824763 | Lee | Apr 1989 | |
4830772 | Van De Mark | May 1989 | |
4844832 | Kobayashi et al. | Jul 1989 | |
4904571 | Miyashita et al. | Feb 1990 | |
4940759 | Yang | Jul 1990 | |
4944893 | Tanaka et al. | Jul 1990 | |
4971715 | Armant et al. | Nov 1990 | |
4992108 | Ward et al. | Feb 1991 | |
4994153 | Piano et al. | Feb 1991 | |
5091103 | Dean et al. | Feb 1992 | |
5102777 | Lin et al. | Apr 1992 | |
5114834 | Nachshon | May 1992 | |
5128230 | Templeton et al. | Jul 1992 | |
5139607 | Ward et al. | Aug 1992 | |
5145717 | Drury | Sep 1992 | |
5174816 | Aoyama et al. | Dec 1992 | |
5185235 | Sato et al. | Feb 1993 | |
5219700 | Nakai et al. | Jun 1993 | |
5234795 | Jeffries, III et al. | Aug 1993 | |
5266440 | Zampini | Nov 1993 | |
5279771 | Lee | Jan 1994 | |
5308745 | Schwartzkopf | May 1994 | |
5334332 | Lee | Aug 1994 | |
5381807 | Lee | Jan 1995 | |
5409800 | Sato et al. | Apr 1995 | |
5417802 | Osbeng | May 1995 | |
5419779 | Ward | May 1995 | |
5419995 | Zampini | May 1995 | |
5446126 | Honda | Aug 1995 | |
5472830 | Honda | Dec 1995 | |
5480585 | Shiotsu et al. | Jan 1996 | |
5482566 | Lee | Jan 1996 | |
5496491 | Ward et al. | Mar 1996 | |
5507978 | Honda | Apr 1996 | |
5561105 | Honda | Oct 1996 | |
5571642 | Wakata et al. | Nov 1996 | |
5571886 | Zampini | Nov 1996 | |
5612304 | Honda et al. | Mar 1997 | |
5648324 | Honda et al. | Jul 1997 | |
5672577 | Lee | Sep 1997 |
Number | Date | Country |
---|---|---|
0 647 884 A1 | Apr 1995 | EPX |
143920 | Sep 1980 | DDX |
143921 | Sep 1980 | DDX |
3821231 | Jan 1989 | DEX |
3828513 | Mar 1990 | DEX |
56-115368 | Feb 1980 | JPX |
63-050838 | Mar 1988 | JPX |
63-208043 | Aug 1988 | JPX |
1-042653 | Feb 1989 | JPX |
1-081950 | Mar 1989 | JPX |
1-081949 | Mar 1989 | JPX |
1-013217 | Mar 1989 | JPX |
1-088548 | Apr 1989 | JPX |
1-133049 | May 1989 | JPX |
1-114846 | May 1989 | JPX |
2-048668 | Feb 1990 | JPX |
2-131239 | May 1990 | JPX |
2-253265 | Oct 1990 | JPX |
4-124668 | Apr 1992 | JPX |
5-045894 | Feb 1993 | JPX |
5-024498 | Apr 1993 | JPX |
4-350660 | Nov 1993 | JPX |
7-028254 | Jan 1995 | JPX |
7-244386 | Sep 1995 | JPX |
7-271056 | Oct 1995 | JPX |
WO 8805813 | Aug 1988 | WOX |
Entry |
---|
"Development Of Advanced Corrosion Free Organic Strippers For ULSI Processing" by A.L.P. Rotondaro, K. Honda, T. Maw, D. Perry, M. Lux, M.M. Heyns. C. Claeys and I. Daraktchiev, appearing at Fourth International Symposium On Cleaning Technology In Semiconductor Device Manufacturing, Oct. 1995, Chicago, Illinois. |
"Investigation Of Advanced Organic Strippers For ULSI Processing" by A.L.P. Rotondaro, R.M. Gluck, M. Meuris, M.M. Heyns C. Claeys, K. Honda and I. Daraktchiev for presentation at INTERFFACE 94, Nov. 1994, San Diego, CA. |
"Thin Film Pitting: Is NMP the Culprit?", by Dr. Franco T. Lee, Dr. David R. Wanlass and B. Walsh, appearing in Semiconductor International, Jun. 1994. |