A complementary metal oxide semiconductor (CMOS) image sensor may include a plurality of pixel sensors. A pixel sensor of the CMOS image sensor may include a transfer transistor, which may include a photodiode configured to convert photons of incident light into a photocurrent of electrons and a transfer gate configured to control the flow of the photocurrent between the photodiode and a drain region. The drain region may be configured to receive the photocurrent such that the photocurrent can be measured and/or transferred to other areas of the CMOS image sensor.
Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
The following disclosure provides many different embodiments, or examples, for implementing different features of the provided subject matter. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
Further, spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
Photodiodes are often separated by trench isolation structures. For example, back-side deep trench isolation (BDTI) structures may electrically and/or optically isolate photodiode regions. However, an etch rate for etching BDTI structures at an X-road (or a cross-road) generally may be greater relative to other areas of the BDTI structures due to increased critical dimensions (CDs) between the photodiode regions. As used herein, “X-road” refers to a location that is between at least four (e.g., four for a 4T metal oxide semiconductor (CMOS) image sensor or more than four for a 5T CMOS image sensor or a 6T CMOS image sensor) of a plurality of photodiode regions. The increased CDs results from greater diagonal spacing at the X-road between photodiode regions relative to lateral spacing between photodiode regions. Increased CDs results in increase trench depth loading. In particular, the etch rate for etching a trench of a BDTI structure may be greater at the X-road than in other regions of the trench due to the increased CD at the X-road. In some cases, a plasma etch may be performed to etch the trench, in which ions in a plasma are used to bombard the trench to remove material to perform the etch. Radicals in the plasma may more easily diffuse into the trench sidewalls and bottom surface due to the increased CD at the X-road, thereby resulting in a greater etch rate and a greater etch depth at the X-road than the other regions of the trench. Accordingly, if a floating diffusion (FD) region associated with a drain for the photodiode regions is located at or near an X-road of the BDTI structure, the FD region may be damaged during etching because of the increased trench depth loading that occurs when the BDTI structures are formed using multiple etching cycles.
Some implementations described herein provide techniques and apparatuses for forming a self-aligned plug layer between BDTI etching cycles. The self-aligned plug layer is used to protect an X-road between photodiodes when etching a trench for a BDTI structure. The self-aligned plug layer enables other areas of the trench to be etched in additional BDTI etching cycles while the X-road is protected. Accordingly, etch depth in areas with large CDs (e.g., at the X-road) is reduced, which prevents trench loading. As a result, an FD region associated with the photodiode regions is not damaged during the BDTI etching cycles. Reduced chances of damage to the FD region improves performance of an image sensor and prevents electrical shorts and failures, which increases yield and conserves time and raw materials used in forming the image sensor. In some implementations, an etch stop layer (ESL) is deposited over a masking layer (also referred to as a “blocking layer”) to prevent etching to the masking layer when the self-aligned plug layer is etched back.
The deposition tool 102 is a semiconductor processing tool that includes a semiconductor processing chamber and one or more devices capable of depositing various types of materials onto a substrate. In some implementations, the deposition tool 102 includes a spin coating tool that is capable of depositing a photoresist layer on a substrate such as a wafer. In some implementations, the deposition tool 102 includes a chemical vapor deposition (CVD) tool such as a plasma-enhanced CVD (PECVD) tool, a low pressure CVD (LPCVD) tool, a high-density plasma CVD (HDP-CVD) tool, a sub-atmospheric CVD (SACVD) tool, an atomic layer deposition (ALD) tool, a plasma-enhanced atomic layer deposition (PEALD) tool, an epitaxy tool, or another type of CVD tool. In some implementations, the deposition tool 102 includes a physical vapor deposition (PVD) tool, such as a sputtering tool or another type of PVD tool. In some implementations, the example environment 100 includes a plurality of types of deposition tools 102.
The exposure tool 104 is a semiconductor processing tool that is capable of exposing a photoresist layer to a radiation source, such as an ultraviolet light (UV) source (e.g., a deep UV light source, an extreme UV light (EUV) source, and/or the like), an x-ray source, an electron beam (e-beam) source, and/or the like. The exposure tool 104 may expose a photoresist layer to the radiation source to transfer a pattern from a photomask to the photoresist layer. The pattern may include one or more semiconductor device layer patterns for forming one or more semiconductor devices, may include a pattern for forming one or more structures of a semiconductor device, may include a pattern for etching various portions of a semiconductor device, and/or the like. In some implementations, the exposure tool 104 includes a scanner, a stepper, or a similar type of exposure tool.
The developer tool 106 is a semiconductor processing tool that is capable of developing a photoresist layer that has been exposed to a radiation source to develop a pattern transferred to the photoresist layer from the exposure tool 104. In some implementations, the developer tool 106 develops a pattern by removing unexposed portions of a photoresist layer. In some implementations, the developer tool 106 develops a pattern by removing exposed portions of a photoresist layer. In some implementations, the developer tool 106 develops a pattern by dissolving exposed or unexposed portions of a photoresist layer through the use of a chemical developer.
The etch tool 108 is a semiconductor processing tool that is capable of etching various types of materials of a substrate, wafer, or semiconductor device. For example, the etch tool 108 may include a wet etch tool, a dry etch tool, and/or the like. In some implementations, the etch tool 108 includes a chamber that is filled with an etchant, and the substrate is placed in the chamber for a particular time period to remove particular amounts of one or more portions of the substrate. In some implementations, the etch tool 108 may etch one or more portions of the substrate using a plasma etch or a plasma-assisted etch, which may involve using an ionized gas to isotropically or directionally etch the one or more portions.
The planarization tool 110 is a semiconductor processing tool that is capable of polishing or planarizing various layers of a wafer or semiconductor device. For example, a planarization tool 110 may include a chemical mechanical planarization (CMP) tool and/or another type of planarization tool that polishes or planarizes a layer or surface of deposited or plated material. The planarization tool 110 may polish or planarize a surface of a semiconductor device with a combination of chemical and mechanical forces (e.g., chemical etching and free abrasive polishing). The planarization tool 110 may utilize an abrasive and corrosive chemical slurry in conjunction with a polishing pad and retaining ring (e.g., typically of a greater diameter than the semiconductor device). The polishing pad and the semiconductor device may be pressed together by a dynamic polishing head and held in place by the retaining ring. The dynamic polishing head may rotate with different axes of rotation to remove material and even out any irregular topography of the semiconductor device, making the semiconductor device flat or planar.
The plating tool 112 is a semiconductor processing tool that is capable of plating a substrate (e.g., a wafer, a semiconductor device, and/or the like) or a portion thereof with one or more metals. For example, the plating tool 112 may include a copper electroplating device, an aluminum electroplating device, a nickel electroplating device, a tin electroplating device, a compound material or alloy (e.g., tin-silver, tin-lead, and/or the like) electroplating device, and/or an electroplating device for one or more other types of conductive materials, metals, and/or similar types of materials.
The ion implantation tool 114 is a semiconductor processing tool that is capable of implanting ions into a substrate. The ion implantation tool 114 may generate ions in an arc chamber from a source material such as a gas or a solid. The source material may be provided into the arc chamber, and an arc voltage is discharged between a cathode and an electrode to produce a plasma containing ions of the source material. One or more extraction electrodes may be used to extract the ions from the plasma in the arc chamber and accelerate the ions to form an ion beam. The ion beam may be directed toward the substrate such that the ions are implanted below the surface of the substrate.
The annealing tool 116 is a semiconductor processing tool that includes a semiconductor processing chamber and one or more devices capable of heating a semiconductor substrate or semiconductor device. For example, the annealing tool 116 may include a rapid thermal annealing (RTA) tool or another type of annealing tool that is capable of heating a semiconductor substrate to cause a reaction between two or more materials or gasses, to cause a material to decompose. As another example, the annealing tool 116 may be configured to heat (e.g., raise or elevate the temperature of) a structure or a layer (or portions thereof) to re-flow the structure or the layer, or to crystallize the structure or the layer, to remove defects such as voids or seams. As another example, the annealing tool 116 may be configured to heat (e.g., raise or elevate the temperature of) a layer (or portions thereof) to enable bonding of two or more semiconductor devices.
The wafer/die transport tool 118 may be included in a cluster tool or another type of tool that includes a plurality of processing chambers, and may be configured to transport substrates and/or semiconductor devices between the plurality of processing chambers, to transport substrates and/or semiconductor devices between a processing chamber and a buffer area, to transport substrates and/or semiconductor devices between a processing chamber and an interface tool such as an equipment front end module (EFEM), and/or to transport substrates and/or semiconductor devices between a processing chamber and a transport carrier (e.g., a front opening unified pod (FOUP)), among other examples. In some implementations, a wafer/die transport tool 118 may be included in a multi-chamber (or cluster) deposition tool 102, which may include a pre-clean processing chamber (e.g., for cleaning or removing oxides, oxidation, and/or other types of contamination or byproducts from a substrate and/or semiconductor device) and a plurality of types of deposition processing chambers (e.g., processing chambers for depositing different types of materials, processing chambers for performing different types of deposition operations).
In some implementations, one or more of the semiconductor processing tools 102-116 and/or the wafer/die transport tool 118 may perform one or more semiconductor processing operations described herein. For example, one or more of the semiconductor processing tools 102-116 and/or the wafer/die transport tool 118 may perform a first etch process to form a portion of a trench, for a deep trench isolation (DTI) structure, between a plurality of photodiodes; may form a plug, in the portion of the trench, that includes comprises an organic compound; may perform a second etch process to remove a portion of the plug; and/or may perform a third etch process to form a remainder of the trench for the DTI structure, among other examples.
As another example, one or more of the semiconductor processing tools 102-116 and/or the wafer/die transport tool 118 may form one or more masking layers over a substrate over a plurality of photodiodes; may form a photoresist layer over the one or more masking layers; may etch a portion of a trench using the photoresist layer; may form a plug, in the portion of the trench, that includes an organic compound; may remove a portion of the plug such that a remainder of the plug is in the portion of the trench that is located between four corners of a subset of the plurality of photodiodes; may etch a remainder of the trench using the one or more masking layers; and/or may form a DTI structure in the trench, among other examples.
The number and arrangement of devices shown in
The pixel sensors 202 may be configured to sense and/or accumulate incident light (e.g., light directed toward the pixel array 200). For example, a pixel sensor 202 may absorb and accumulate photons of the incident light in a photodiode. The accumulation of photons in the photodiode may generate a charge representing the intensity or brightness of the incident light (e.g., a greater amount of charge may correspond to a greater intensity or brightness, and a lower amount of charge may correspond to a lower intensity or brightness).
In some implementations, the size of the pixel sensors 202 (e.g., the width or the diameter) of the pixel sensors 202 is in a range from approximately 0.5 micron to approximately 2 microns. In some implementations, the size of the pixel sensors 202 (e.g., the width or the diameter) of the pixel sensors 202 is less than approximately 1 micron. In these examples, the pixel sensors 202 may be referred to as sub-micron pixel sensors. Sub-micron pixel sensors may decrease the pixel sensor pitch (e.g., the distance between adjacent pixel sensors) in the pixel array 200, which may enable increased pixel sensor density in the pixel array 200 (which can increase the performance of the pixel array 200).
The pixel sensors 202 may be electrically and optically isolated by a DTI structure 208 included in the pixel array 200. The DTI structure 208 may include a plurality of interconnected trenches that are filled with a dielectric material such as an oxide. The trenches of the DTI structure 208 may be included around the perimeters of the pixel sensors 202 such that the DTI structure 208 surrounds the pixel sensors 202 (and the photodiodes and drain regions included therein), as shown in
The pixel array 200 may be electrically connected to a back-end-of-line (BEOL) metallization stack (not shown) of the image sensor. The BEOL metallization stack may electrically connect the pixel array 200 to control circuitry that may be used to measure the accumulation of incident light in the pixel sensors 202 and convert the measurements to an electrical signal. For a BSI CMOS image sensor, the transistor layer may be located between the BEOL metallization stack layers and a lens layer. For a FSI CMOS image sensor, the BEOL metallization stack layers may be located between the transistor layer and the lens layer.
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The pixel sensor 202 may include a photodiode 304 that is included in the substrate 302. The photodiode 304 may include a plurality of regions that are doped with various types of ions to form a p-n junction or a PIN junction (e.g., a junction between a p-type portion, an intrinsic (or undoped) type portion, and an n-type portion). For example, the substrate 302 may be doped with an n-type dopant to form one or more n-type regions of the photodiode 304, and the substrate 302 may be doped with a p-type dopant to form a p-type region of the photodiode 304. The photodiode 304 may be configured to absorb photons of incident light. The absorption of photons causes the photodiode 304 to accumulate a charge (referred to as a photocurrent) due to the photoelectric effect. Photons may bombard the photodiode 304, which causes emission of electrons in the photodiode 304.
The regions included in the photodiode 304 may be stacked and/or vertically arranged. For example, the p-type region may be included over the one or more n-type regions. The p-type region may provide noise isolation for the one or more n-type regions and may facilitate photocurrent generation in the photodiode 304. In some implementations, the p-type region (and thus, the photodiode 304) is spaced away (e.g., downward) from a surface of the substrate 302 to provide noise isolation and/or light-leakage isolation from one or more metallization layers of the pixel sensor 202. The gap between the surface of the substrate 302 and the p-type region may decrease charging of the pixel sensor 202, may decrease the likelihood of plasma damage to the photodiode 304, and/or may reduce the dark current of the pixel sensor 202 and/or the white pixel performance of the pixel sensor 202, among other examples.
The pixel sensor 202 may include a drain extension region 306 and a drain region 308 coupled and/or electrically connected to the drain extension region 306. The drain extension region 306 may be adjacent to the drain region 308. The drain region 308 may include a highly-doped n-type region (e.g., an n+ doped region). The drain extension region 306 may include lightly-doped n-type region(s) that facilitate the transfer of photocurrent from the photodiode 304 to the drain region 308. In some implementations, the drain extension region 306 is spaced away (e.g., downward) from a surface of the substrate 302 to provide noise isolation and/or light-leakage isolation from one or more metallization layers of the pixel sensor 202. The gap between the surface of the substrate 302 and the drain extension region 306 may increase noise isolation for the drain extension region 306, may decrease random noise and/or random telegraph noise in the pixel sensor 202, may decrease the likelihood of plasma damage to the drain extension region 306, and/or may reduce the dark current of the pixel sensor 202 and/or the white pixel performance of the pixel sensor 202, among other examples.
The pixel sensor 202 may include a vertical transfer gate (VTG) 204 to control the transfer of photocurrent between the photodiode 304 and the drain region 308. The vertical transfer gate 204 may be energized by applying a voltage or a current to a gate electrode 310 of the vertical transfer gate 204 to cause a conductive channel to form between the photodiode 304 and the drain extension region 306. The conductive channel may be removed or closed by de-energizing the gate electrode 310 of the vertical transfer gate 204, which blocks and/or prevents the flow of photocurrent between the photodiode 304 and the drain region 308.
The vertical transfer gate 204 may be located below and/or under the photodiode 304, which may reduce the lateral width of the pixel sensor 202 as opposed to locating the photodiode 304 side-by-side with the vertical transfer gate 204. The vertical transfer gate 204 extends into the substrate 302 from a surface of the substrate 302 and is adjacent to the drain extension region 306 and the drain region 308. The vertical transfer gate 204 extending into the substrate 302 increases the depth of the conductive channel that is controlled by the vertical transfer gate 204. The increased depth of the conductive channel enables the photodiode 304 to be located deeper in the pixel sensor 202 and closer to where light enters the pixel sensor 202. This may increase the sensitivity and efficiency of the pixel sensor 202.
The gate electrode 310 may include polysilicon, doped polysilicon (e.g., n-doped polysilicon), a metal gate stack, and/or another suitable material. The gate electrode 310 may include a gate electrode stack that includes an n-doped upper transfer gate electrode region and a lower transfer gate electrode region.
A gate dielectric layer 314 may be included between the gate electrode 310 and the substrate 302 of the pixel sensor 202. The gate electrode 310 may be included over and/or on the gate dielectric layer 314. The gate dielectric layer 314 may also extend along a frontside surface of the substrate 302. The gate dielectric layer 314 may include a dielectric material such as tetraethyl orthosilicate (TEOS) or another type of dielectric material.
The pixel sensor 202 may include a plurality of regions to provide electrical isolation and/or optical isolation between the pixel sensor 202 and adjacent pixel sensors. The pixel sensor 202 may include a deep p-well region (DPW) 316 adjacent to, and at least partially surrounding, the photodiode 304. In some implementations, the pixel sensor 202 further includes a cell p-well region (CPW) above the deep p-well region 316. The deep p-well region 316 (and the cell p-well region, if included) may include a circle or ring shape in a top-down view in the substrate 302. The deep p-well region 316 (and the cell p-well region, if included) may each include a p+ doped silicon material or another p+ doped material.
The DTI structure 208 may be included in the substrate 302 adjacent to the photodiode 304 and the drain region 308. Moreover, the DTI structure 208 may be included above and/or partially in the deep p-well region 316. In some implementations, the DTI structure 208 may be included in a cell p-well region. The DTI structure 208 may include one or more trenches that extend downward into the substrate 302 (e.g., from the backside of the substrate 302), and that are that are adjacent the photodiode 304, the drain extension region 306, and the drain region 308. In a top-down view of the pixel sensor 202, the DTI structure 208 may surround the photodiode 304, the drain extension region 306, and the drain region 308. In other words, the photodiode 304, the drain extension region 306, and the drain region 308 may be included within a perimeter of the DTI structure 208 of the pixel sensor 202. In some implementations, the drain region 308 (or a portion thereof) is located under the DTI structure 208 at an X-road between adjacent pixel sensors 202. The DTI structure 208 may provide optical isolation between the pixel sensor 202 and one or more adjacent pixel sensors to reduce the amount of optical crosstalk between the pixel sensor 202 and the one or more adjacent pixel sensors. In particular, the DTI structure 208 may absorb, refract, and/or reflect photons of incident light, which may reduce the amount of incident light that travels through a pixel sensor 202 into an adjacent pixel sensor and is absorbed by the adjacent pixel sensor.
The DTI structure 208 may include one or more layers 318 between the substrate 302 of the pixel sensor 202 and an oxide layer 320 of the DTI structure 208. The one or more layers 318 may include a passivation layer 318a and a capping layer 318b, among other examples. The passivation layer 318a may be included between the substrate 302 (e.g., the silicon substrate) of the pixel sensor 202 and the capping layer 318b. The capping layer 318b may be included between the passivation layer 318a and the oxide layer 320.
The passivation layer 318a may include a boron (B) material, an amorphous boron (a-B) material, and/or another material. The capping layer 318b may include a silicon (Si) material, an amorphous silicon (a-Si) material, and/or another material. The passivation layer 318a may be included to further decrease optical crosstalk by providing a boron-silicon interface between the passivation layer 318a and the substrate 302. The boron-silicon interface resists, reduces, and/or minimizes penetration and/or diffusion of photons into the sidewall oxide layer 322. The capping layer 318b may be included to protect the passivation layer 318a from damage during one or more semiconductor processing operations for forming the pixel sensor 202. The passivation layer 318a (e.g., an amorphous boron layer) may be included on the back side of the pixel sensor 202 (e.g., on the back side of the substrate), as shown in the example in
The oxide layer 320 may function to reflect incident light toward the photodiode 304 to increase the quantum efficiency of the pixel sensor 202 and to reduce optical crosstalk between the pixel sensor 202 and one or more adjacent pixel sensors. In some implementations, the oxide layer 320 includes an oxide material such as a silicon oxide (SiOx). In some implementations, a silicon nitride (SiNx), a silicon carbide (SiCx), or a mixture thereof, such as a silicon carbon nitride (SiCN), a silicon oxynitride (SiON), or another type of dielectric material is used in place of the oxide layer 320.
A sidewall oxide layer 322 may be included over and/or the gate dielectric layer 314 on the frontside surface of the substrate 302. The sidewall oxide layer 322 may also be included on sidewalls of a portion of the gate electrode 310. The sidewall oxide layer 322 may include an oxide such as silicon oxide (SiOx) or another type of oxide material. A remote plasma oxide (RPO) layer 324 may be included over and/or on the sidewall oxide layer 322 over the frontside surface of the substrate 302. The remote plasma oxide layer 324 may also be included over the sidewall oxide layer 322 on the sidewalls of the portion of the gate electrode 310. A contact etch stop layer (CESL) 326 may be included over and/or on the remote plasma oxide layer 324 over the frontside surface of the substrate 302.
The vertical transfer gate 204 and the drain region 308 may be electrically connected to interconnects 328 and 330, respectively, with respective metallization layers 332 and 334 above the substrate 302. The interconnects 328 and 330, and the metallization layers 332 and 334, may be included in one or more dielectric layers 336. The interconnect 328 may be electrically connected with gate electrode 310 of the vertical transfer gate 204. In some implementations, the dielectric layer(s) 336 surround and/or encapsulate the interconnects 328 and 330, as well as the metallization layers 332 and 334. The dielectric layer(s) 336 may include an inter-metal dielectric (IMD) layer formed of an oxide material such as a silicon oxide (SiOx) (e.g., silicon dioxide (SiO2)), a silicon nitride (SiNx), a silicon carbide (SiCx), a titanium nitride (TiNx), a tantalum nitride (TaNx), a hafnium oxide (HfOx), a tantalum oxide (TaOx), or an aluminum oxide (AlOx), or another type of dielectric material. The interconnects 328 and 330, as well as the metallization layers 332 and 334, may include one or more conductive materials, such as tungsten (W), cobalt (Co), ruthenium (Ru), copper (Cu), and/or another type of conductive material.
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A color filter layer 342 may be included above and/or on the ARC 340. In some implementations, the color filter layer 342 includes a visible light color filter configured to filter a particular wavelength or a particular wavelength range of visible light (e.g., red light, blue light, or green light). In some implementations, the color filter layer 342 includes a near infrared (NIR) filter (e.g., an NIR bandpass filter) configured to permit wavelengths associated with NIR light to pass through the color filter layer 342 and to block other wavelengths of light. In some implementations, the color filter layer 342 includes an NIR cut filter configured to block NIR light from passing through the color filter layer 342. In some implementations, the color filter layer 342 is omitted from the pixel sensor 202 to permit all wavelengths of light to pass through to the photodiode 304. In these examples, the pixel sensor 202 may be configured as a white pixel sensor.
A micro-lens layer 344 may be included above and/or on the color filter layer 342. The micro-lens layer 344 may include a micro-lens for the pixel sensor 202 configured to focus incident light toward the photodiode 304 and/or to reduce optical crosstalk between the pixel sensor 202 and one or more adjacent pixel sensors.
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The trench is both along an X-cut of the pixel array 200 and along a Y-cut of the pixel array 200. Accordingly, the trench is widest and deepest at an X-road of the pixel array 200. The X-road is a zone surrounding a location that is between the four photodiodes 304a, 304b, 304c, and 304d. In other words, the X-road is a zone above the FD region 402.
Additionally, the trench outside the zone 404 may have a width in a range from approximately 0.1 μm to approximately 0.2 μm. Outside the zone 404 may include a location of the DTI structure that is between two adjacent photodiodes of the photodiodes 304a, 304b, 304c, and 304d (e.g., along the X-cut or perpendicular to the X-cut but outside of the X-road). For example, the plug (e.g., as described in connection with
Additionally, the trench in the zones 404a, 404b, 404c, and 404d may have a depth (e.g., represented by d2) in a range from approximately 2.0 μm to approximately 3.5 μm. For example, the plug (e.g., as described in connection with
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In some implementations, the masking layer 502 may be a hard masking layer and therefore may comprise a dielectric material (e.g., an oxide, a nitride, or an oxynitride, among other examples) and/or a silicon material. In some implementations, the masking layer 502 may be deposited to a thickness in a range from approximately 1.3 kiloangstroms (kA) to approximately 2.0 kA. For example, the deposition tool 102 may perform a deposition technique for an amount of time that satisfies a deposition threshold associated with forming the masking layer 502 to a thickness from approximately 1.3 kA to approximately 2.0 kA. By selecting a thickness of at least 1.3 kA, the masking layer 502 protects the photodiodes during DTI etching cycles. By selecting a thickness of no more than 2.0 kA, the masking layer 502 may be etched (e.g., as described in connection with
The blocking layer 504 may be deposited to a thickness in a range from approximately 6.0 kA to approximately 8.0 kA. For example, the deposition tool 102 may perform a deposition technique for an amount of time that satisfies a deposition threshold associated with forming the blocking layer 504 to a thickness from approximately 6.0 kA to approximately 8.0 kA. By selecting a thickness of at least 6.0 kA, the blocking layer 504 protects the masking layer 502 during an initial DTI etch (e.g., as described in connection with
In some implementations, the masking layer 506 may be a hard masking layer and therefore may comprise a dielectric material (e.g., an oxide, a nitride, or an oxynitride, among other examples) and/or a silicon material. In some implementations, the masking layer 506 may be deposited to a thickness in a range from approximately 300 Angstroms (Å) to approximately 500 Å. For example, the deposition tool 102 may perform a deposition technique for an amount of time that satisfies a deposition threshold associated with forming the masking layer 506 to a thickness from approximately 300 Å to approximately 500 Å. By selecting a thickness of at least 300 Å, the blocking layer 504 is not fully etched during an initial DTI etch (e.g., as described in connection with
Alternatively, the masking layers 504 and 506 may comprise a combination of an organic layer and a coating over the organic layer. The deposition tool 102 may form the organic layer by CVD. The organic layer may comprise an aminophenyl fluorescein (APF), amorphous carbon, asterridinone (ARD), or a combination thereof. In some implementations, the organic layer may be deposited to a thickness in a range from approximately 4.0 kA to approximately 8.0 kA. For example, the deposition tool 102 may perform a deposition technique for an amount of time that satisfies a deposition threshold associated with forming the organic layer to a thickness from approximately 4.0 kA to approximately 8.0 kA. By selecting a thickness of at least 4.0 kA, the organic layer protects the FD region (not shown) during a subsequent DTI etch (e.g., as described in connection with
The deposition tool 102 may form the coating using a spin-coating technique, a CVD technique, a PVD technique, an ALD technique, and/or another deposition technique. The coating may comprise a silicon oxynitride. In some implementations, the coating may be deposited to a thickness in a range from approximately 0.3 kA to approximately 1.0 kA. For example, the deposition tool 102 may perform a deposition technique for an amount of time that satisfies a deposition threshold associated with forming the coating to a thickness from approximately 0.3 kA to approximately 1.0 kA. By selecting a thickness of at least 0.3 kA, the coating protects the FD region (not shown) during a subsequent DTI etch (e.g., as described in connection with
Although described with respect to three masking layers, other implementations may use fewer masking layers (e.g., with larger depths so as to protect the photodiodes during etching) or additional masking layers (e.g., with smaller depths to allow for etching the additional masking layers). As further shown in
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The depth of the trench 510 may have a second depth at the X-road that is in a range from approximately 140% to approximately 160% of a first depth of the trench 510 outside of the X-road. In other words, the depth of the trench 510 at the X-road is greater relative to a depth of the trench 510 outside of the X-road. (It is to be noted that the view in
In some implementations, the etch tool 108 may use a deep reactive ion etching (DRIE) to form the trench 510. For example, the etch tool 108 may perform an isotropic plasma etch (e.g., using a sulfur source, such as sulfur hexafluoride (SF6)) in alternation with the deposition tool 102 forming a passivation layer to protect sidewalls of the trench 510 (e.g., where the passivation layer may comprise a polytetrafluoroethylene-based (PTFE-based) composition such that the deposition tool 102 uses an octafluorocyclobutane (C4F8) source). Alternatively, the etch tool 108 may use a non-DRIE etch. For example, the etch tool 108 may perform an isotropic plasma etch (e.g., using a sulfur source, such as sulfur hexafluoride (SF6) or tetrafluoromethane (CF4)) in combination with a polymer gas to protect sidewalls of the trench 510 (e.g., using an oxygen (O2) gas or an octafluorocyclobutane (C4F8) gas).
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Because the plug 512 is deposited as a blanket layer, the plug 512 is also deposited over the photodiodes (e.g., photodiode 304b), as shown in
Additionally, because the plug 512 fill in the trench 510, the plug 512 may have a second depth at the X-road that is in a range from approximately 130% to approximately 150% of a first depth of the plug 512 outside of the X-road. By selecting the second depth to be at least 130% of the first depth, the plug 512 may be etched back such that a remainder of the plug 512 is concentrated at the X-road (e.g., as depicted in
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Because the plug 512 is etched back, the portions of the plug 512 over the photodiodes (e.g., photodiodes 304a and 304b) are removed, as shown in
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In some implementations, trace organic material may remain in the trench 510 on the sidewalls and/or at the bottom surface, particularly at the X-road. In some implementations, the trench 510 may include trace amounts of an organic compound (from the organic layer of the plug 512) in combination with a silicon oxynitride (from the coating of the plug 512). As used herein, “trace amounts” refer to amounts present on less than 50% of the surface area of the trench 510.
Accordingly, as shown in
In some implementations, the trench 510 may be lined with one or more layers (e.g., layer 318a and/or layer 318b, as described herein). The deposition tool 102 may form the layer(s) by conformal deposition such that the layer(s) are formed as thin films that conform to the shape and/or profile of the sidewalls and bottom surface of the trench 510.
As further shown in
As indicated above,
Bus 610 may include one or more components that enable wired and/or wireless communication among the components of device 600. Bus 610 may couple together two or more components of
Memory 630 may include volatile and/or nonvolatile memory. For example, memory 630 may include random access memory (RAM), read only memory (ROM), a hard disk drive, and/or another type of memory (e.g., a flash memory, a magnetic memory, and/or an optical memory). Memory 630 may include internal memory (e.g., RAM, ROM, or a hard disk drive) and/or removable memory (e.g., removable via a universal serial bus connection). Memory 630 may be a non-transitory computer-readable medium. Memory 630 stores information, instructions, and/or software (e.g., one or more software applications) related to the operation of device 600. In some implementations, memory 630 may include one or more memories that are coupled to one or more processors (e.g., processor 620), such as via bus 610.
Input component 640 enables device 600 to receive input, such as user input and/or sensed input. For example, input component 640 may include a touch screen, a keyboard, a keypad, a mouse, a button, a microphone, a switch, a sensor, a global positioning system sensor, an accelerometer, a gyroscope, and/or an actuator. Output component 650 enables device 600 to provide output, such as via a display, a speaker, and/or a light-emitting diode. Communication component 660 enables device 600 to communicate with other devices via a wired connection and/or a wireless connection. For example, communication component 660 may include a receiver, a transmitter, a transceiver, a modem, a network interface card, and/or an antenna.
Device 600 may perform one or more operations or processes described herein. For example, a non-transitory computer-readable medium (e.g., memory 630) may store a set of instructions (e.g., one or more instructions or code) for execution by processor 620. Processor 620 may execute the set of instructions to perform one or more operations or processes described herein. In some implementations, execution of the set of instructions, by one or more processors 620, causes the one or more processors 620 and/or the device 600 to perform one or more operations or processes described herein. In some implementations, hardwired circuitry is used instead of or in combination with the instructions to perform one or more operations or processes described herein. Additionally, or alternatively, processor 620 may be configured to perform one or more operations or processes described herein. Thus, implementations described herein are not limited to any specific combination of hardware circuitry and software.
The number and arrangement of components shown in
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Process 700 may include additional implementations, such as any single implementation or any combination of implementations described below and/or in connection with one or more other processes described elsewhere herein.
In a first implementation, at least a portion of the plug 512 is lower in the substrate 302 than the plurality of photodiodes 304a, 304b, 304c, and/or 304d.
In a second implementation, alone or in combination with the first implementation, the remainder of the plug 512 protects an FD region 402 from etching during etching of the remainder of the trench 510.
In a third implementation, alone or in combination with one or more of the first and second implementations, etching the portion of the trench 510 includes a DRIE.
In a fourth implementation, alone or in combination with one or more of the first through third implementations, removing the portion of the plug 512 includes a fluorine etch.
In a fifth implementation, alone or in combination with one or more of the first through fourth implementations, removing the portion of the plug 512 uses oxygen or nitrogen.
In a sixth implementation, alone or in combination with one or more of the first through fifth implementations, process 700 includes removing a hard mask layer 502 using a wet etch process after forming the remainder of the trench 510.
In a seventh implementation, alone or in combination with one or more of the first through sixth implementations, the hard mask layer 510 has a thickness in a range from approximately 1.3 kA to approximately 2.0 kA.
In an eighth implementation, alone or in combination with one or more of the first through seventh implementations, process 700 includes removing a remainder of the plug 512 using an oxygen plasma after forming the remainder of the trench 510.
In a ninth implementation, alone or in combination with one or more of the first through eighth implementations, forming the plug 512 includes forming a coating.
In a tenth implementation, alone or in combination with one or more of the first through ninth implementations, process 700 includes forming a masking layer 504/506 that comprises a combination of an organic layer 504 and a coating 506, where the organic layer 504 includes an APF, amorphous carbon, ARD, or a combination thereof, and the masking layer 504/506 is reduced during the first etch process and is removed during the second etch process.
In an eleventh implementation, alone or in combination with one or more of the first through tenth implementations, the coating includes a silicon oxynitride.
In a twelfth implementation, alone or in combination with one or more of the first through eleventh implementations, the organic layer has a thickness in a range from approximately 4.0 kA to approximately 8.0 kA.
In a thirteenth implementation, alone or in combination with one or more of the first through twelfth implementations, the coating has a thickness in a range from approximately 0.3 kA to approximately 1.0 kA.
Although
In this way, a self-aligned plug may be formed between DTI etching cycles. Accordingly, etch depth in areas of a pixel sensor with large CDs (e.g., at an X-road) is reduced, which prevents trench loading. As a result, an FD region, associated with photodiodes of the pixel sensor, is not damaged during the DTI etching cycles. Reduced chances of damage to the FD region improves performance of the pixel sensor and prevents electrical shorts and failures, which increases yield and conserves time and raw materials used in forming the pixel sensor.
As described in greater detail above, some implementations described herein provide a semiconductor structure. The semiconductor structure includes a plurality of photodiodes. The semiconductor structure includes a floating diffusion region associated with the plurality of photodiodes. The semiconductor structure includes a deep trench isolation (DTI) structure electrically isolating the plurality of photodiodes and formed above the floating diffusion region. The DTI structure has a micro-topography region with a height, relative to the plurality of photodiodes, in a range from approximately 0.01 micrometers (μm) to approximately 0.2 μm.
As described in greater detail above, some implementations described herein provide a method. The method includes performing a first etch process to form a portion of a trench, for a deep trench isolation (DTI) structure, between a plurality of photodiodes. The method includes forming a plug in the portion of the trench, where the plug includes an organic compound. The method includes performing a second etch process to remove a portion of the plug. The method includes performing a third etch process to form a remainder of the trench for the DTI structure.
As described in greater detail above, some implementations described herein provide a method. The method includes forming one or more masking layers over a substrate over a plurality of photodiodes. The method includes forming a photoresist layer over the one or more masking layers. The method includes etching a portion of a trench using the photoresist layer. The method includes forming a plug in the portion of the trench, where the plug includes an organic compound. The method includes removing a portion of the plug, where a remainder of the plug is in the portion of the trench that is located between four corners of a subset of the plurality of photodiodes. The method includes etching a remainder of the trench using the one or more masking layers. The method includes forming a deep trench isolation structure in the trench.
As used herein, “satisfying a threshold” may, depending on the context, refer to a value being greater than the threshold, greater than or equal to the threshold, less than the threshold, less than or equal to the threshold, equal to the threshold, not equal to the threshold, or the like. The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.
This patent application claims priority to U.S. Provisional Patent Application No. 63/378,736, filed on Oct. 7, 2022, entitled “PIXEL SENSOR ISOLATION STRUCTURES AND METHODS OF FORMING THE SAME,” which is hereby expressly incorporated by reference herein.
Number | Date | Country | |
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63378736 | Oct 2022 | US |