Number | Name | Date | Kind |
---|---|---|---|
4579623 | Suzuki | Apr 1986 | |
4602981 | Chen | Jul 1986 | |
4615761 | Tada et al. | Oct 1986 | |
4664769 | Cuomo | May 1987 | |
4675072 | Bennett et al. | Jun 1987 | |
4687930 | Tamura | Aug 1987 |
Number | Date | Country |
---|---|---|
686529 | May 1964 | CAX |
0061036 | Apr 1984 | JPX |
Entry |
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IBM TDB vol. 20, No. 2 Jul. 1977, Geipel-End-Point Detection for Reactive Ion Etching. |