Number | Name | Date | Kind |
---|---|---|---|
2375796 | Krejci | May 1945 | |
2796331 | Kauffman et al. | Jun 1957 | |
4328151 | Robinson | May 1982 | |
4474906 | Nakama et al. | Oct 1984 | |
4490201 | Leeds | Dec 1984 | |
4684336 | Brotz | Aug 1987 | |
4855091 | Geus et al. | Aug 1989 | |
4855122 | Kitamura et al. | Aug 1989 | |
4859493 | Lemelson | Aug 1989 | |
4915925 | Chung | Apr 1990 | |
4940015 | Kobashi et al. | Jul 1990 | |
4999244 | Morimoto | Mar 1991 | |
5024818 | Tibbetts et al. | Jun 1991 | |
5171489 | Hirao et al. | Dec 1992 | |
5374415 | Alig et al. | Dec 1994 | |
5389400 | Ting et al. | Feb 1995 | |
5413773 | Tibbetts et al. | May 1995 | |
5433906 | Dasch et al. | Jul 1995 | |
5594060 | Alig et al. | Jan 1997 |
Number | Date | Country |
---|---|---|
0 646 544 | Apr 1995 | EPX |
41 03 981 | Aug 1992 | DEX |
42 08 719 | Sep 1993 | DEX |
197 40 389 | Mar 1999 | DEX |
Entry |
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A.R. Badzian et al., "Crystallization of Diamond Crystals and Films by Microwave Assisted CVD (Part II)" Mat. Res. Bull., vol. 23, pp. 531-548, 1988. |
Chang et al., "Diamond Crystal Growth by Plasma Chemical Vapor Deposition" J. Appl. Phys. 63(5), Mar. 1, 1988. |
A.R. Badzian et al., "Diamond Thin Films Prepared by Plasma Chemical Vapor Deposition Processes" Mat. Research Soc. Meeting, Jun. 1987, vol. 15, pp. 63-77, Les Addition de Physique, Paris. |