Claims
- 1. A polishing apparatus comprising:a first stage including a first mounting member and a first staging member supported on the first mounting member for movement along a first path, a second stage including a second mounting member supported on the first staging member and a second staging member supported on the second mounting member for movement along a second path in angular relation to the first path, a polishing member mounted on the second staging member, and a drive mechanism operable to simultaneously move the first and second staging members along their respective paths so that the polishing member traces a predetermined pattern.
- 2. The apparatus of claim 1,wherein the paths of movement of the first and second staging members are rectilinear.
- 3. The apparatus of claim 1,wherein the first path is an x-axis, and wherein the second path is a y-axis substantially perpendicular to the x-axis.
- 4. The apparatus of claim 3,wherein the speed of movement of the one staging member is a multiple of the speed of movement of the other staging member.
- 5. The apparatus of claim 4,wherein the multiple is 2.
- 6. The apparatus of claim 1,wherein the pattern is a figure eight.
- 7. The apparatus of claim 1,wherein the first mounting member is mounted for movement along a third path.
- 8. The apparatus of claim 1,wherein the movement along said paths is reciprocal.
- 9. The apparatus of claim 1,wherein the drive mechanism includes motors connected to the first and second staging members.
- 10. The apparatus of claim 1,wherein the drive mechanism is computer-controlled.
- 11. A polishing apparatus comprising:a support, a first stage including a first track mounted on the support and a first staging member supported on the track for movement along an x-axis, a second stage including a second track mounted on the first staging member and a second staging member mounted on the second track for movement along a y-axis perpendicular to the x-axis, a polishing member mounted on the second staging member, and a drive mechanism connected to the first and second staging members for moving the staging members along their respective axes so that the polishing member traces a closed arcuate pattern.
- 12. The apparatus of claim 11,wherein the stroke of one of the members is a multiple of the stroke of the second member.
- 13. The apparatus of claim 12,wherein the multiple is 2.
- 14. The apparatus of claim 11,wherein the pattern is a figure eight.
- 15. The apparatus of claim 11,wherein the first track is mounted on the support for movement along a third axis substantially parallel to one of the x- and y-axes.
- 16. The apparatus of claim 11,wherein the drive mechanism includes x and y motors connected to each stage, computer controlled x and y motor drives respectively connected to the motors, and a programmable x-y controller connected to the x-y motor drives.
- 17. The apparatus of claim 11,wherein the movement of the first and second staging member is reciprocal and rectilinear.
- 18. A polishing apparatus comprising:a support, a first stage including a first rectilinear track mounted on the support and a first staging member supported on the track for reciprocal movement along an x-axis, a second stage including a second rectilinear track mounted on the first staging member and a second staging member mounted on the second track reciprocal movement along a y-axis perpendicular to the x-axis, a polishing member mounted on the second staging member, and a drive mechanism including x and y motors having a driving connection to the first and second stages respectively, x and y motor drives respectively connected to the x and y motors, and a programmable x-y controller connected to the x-y motor drives for moving the staging members along their respective axes with the stroke of one of the members being a multiple of the stroke of the second member so that the polishing member traces a closed arcuate pattern.
- 19. The apparatus of claim 18,wherein the multiple is 2.
- 20. The apparatus of claim 19,wherein the pattern is a figure eight.
CROSS REFERENCE TO RELATED APPLICATION
This application is a continuation of my prior copending application Ser. No. 08/922,070, filed Sep. 2, 1997 and entitled Computer-Controlled Method and Apparatus for Polishing, now U.S. Pat. No. 5,947,797 which in turn was based upon my Provisional Application No. 60/025,906, filed on Sep. 11, 1996.
US Referenced Citations (13)
Provisional Applications (1)
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Number |
Date |
Country |
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60/025906 |
Sep 1996 |
US |
Continuations (1)
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Number |
Date |
Country |
Parent |
08/922070 |
Sep 1997 |
US |
Child |
09/390860 |
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US |