Number | Name | Date | Kind |
---|---|---|---|
4635401 | Nakaji | Jan 1987 | |
5099614 | Arai et al. | Mar 1992 | |
5109631 | Biebesheimer et al. | May 1992 | |
5121572 | Hilscher | Jun 1992 | |
5274960 | Karlsrud | Jan 1994 |
Number | Date | Country |
---|---|---|
507939 | Dec 1954 | CAX |
Entry |
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"Speedfam.RTM. Double Sided Machines", 16 page brochure, Speedfam Corporaion, Des Plaines, IL, .COPYRGT. Copyright 1990. |