Number | Name | Date | Kind |
---|---|---|---|
4398335 | Lehrer | Aug 1983 | |
4562640 | Widmann et al. | Jan 1986 | |
4581623 | Wang | Apr 1986 | |
4617071 | Vora | Oct 1986 | |
4677735 | Malhi | Jul 1987 | |
4714685 | Schubert | Dec 1987 | |
4849344 | Desbiens et al. | Jul 1989 | |
4870033 | Hotta et al. | Sep 1989 | |
4874719 | Kurosawa | Oct 1989 | |
4948747 | Pfiester | Aug 1990 |
Entry |
---|
Wolf, Stanley, Silicon Processing for the VLSI Era, vol. 2, Lattice Press, Sunset Beach, Calif. (1990), Chapters 3 & 4. |