TREA

Via connections in a multilevel interconnection structure

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Industry

  • CPC
  • H01L23/5226
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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L23/00Details of semiconductor or other solid state devices

Current Industry

H01L23/5226Via connections in a multilevel interconnection structure
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