Claims
- 1. A polyhydroxy compound represented by the following formula (I): ##STR16## wherein R represent alkyl having 6 or less carbon atoms.
- 2. A polyhydroxy compound of claim 1 which is represented by the following formula (a) or (b): ##STR17##
- 3. A positive resist composition which comprises an alkali-soluble resin, a quinonediazide sulfonic acid ester, and a polyhydroxy compound represented by the following formula (c): ##STR18##
- 4. A positive resist composition which comprises an alkali-soluble resin, a quinonediazide sulfonic acid ester, and a polyhydroxy compound of claim 1.
- 5. A positive resist composition of claim 3 or 4, wherein the alkali-soluble resin is a novolac resin.
- 6. A positive resist composition of claim 3 or 4, wherein the quinonediazide sulfonic acid ester is a quinonediazide sulfonic acid ester of a phenol compound represented by the following formula (II): ##STR19## wherein R.sub.1, represents hydrogen, halogen, unsubstituted alkyl, substituted alkyl, alkoxy or --OCOR.sub.3 wherein R.sub.3 represents unsubstituted alkyl, substituted alkyl or phenyl,
- Q.sub.1 -Q.sub.6 each independently represent hydrogen, alkyl or phenyl,
- Z.sub.1 and Z.sub.2 each independently represent one of following divalent groups: ##STR20## wherein R.sub.2 represents hydrogen, halogen, unsubstituted alkyl, substituted alkyl, alkoxy or --OCOR.sub.3 wherein R.sub.3 is as defined above, y represents 1, 2 or 3 and p represents 0 or 1, and wherein substituents for the substituted alkyl are selected from the group consisting of t-butyl, isopropyl and cycloalkyl having 5-8 carbon atoms.
- 7. A positive resist composition of claim 3 or 4, wherein the quinonediazide sulfonic acid ester is a quinonediazide sulfonic acid ester of a phenol compound represented by the following formula (III): ##STR21## wherein R.sub.4 -R.sub.12 each independently represent hydrogen, alkyl having 6 or less carbon atoms or cycloalkyl having 6 or less carbon atoms, Z.sub.3 represents oxygen or a direct bond and q and r each independently represent 1, 2 or 3, provided that R.sub.4 together with R.sub.5, and R.sub.7 together with R.sub.8, may form a cyclopentyl ring or cyclohexyl ring in combination by linking their ends.
Priority Claims (2)
Number |
Date |
Country |
Kind |
6-133096 |
Jun 1994 |
JPX |
|
6-175687 |
Jul 1994 |
JPX |
|
Parent Case Info
This application is a continuation of application Ser. No. 08/476,570 filed on Jun. 7, 1995, now abandoned.
US Referenced Citations (5)
Number |
Name |
Date |
Kind |
5059507 |
Uetani et al. |
Oct 1991 |
|
5340686 |
Sakaguchi et al. |
Aug 1994 |
|
5376497 |
Kawata et al. |
Dec 1994 |
|
5407779 |
Uetani et al. |
Apr 1995 |
|
5413895 |
Tomioka et al. |
May 1995 |
|
Continuations (1)
|
Number |
Date |
Country |
Parent |
476570 |
Jun 1995 |
|