Claims
- 1. A liquid polymer composition suitable for use as a photo resist comprising:
- (a) liquid polymer wherein the polymer consists eventually of a polymer having a single terminal alkene unsaturation at one end, a terminal carboxyl group at the other end, said carboxyl group and alkene unsaturation being in a ratio of about 1 to 1 a molecular weight of about 250 to 10,000, and an acid content of about 0.1 to 4.0 mille-equivalents/gram; and
- (b) an additive to control the viscosity of said liquid polymer and to enhance the alkaline stripability of the cured liquid polymer.
- 2. A liquid polymer composition suitable for use as a photo resist as in claim 1 wherein said polymer has the structure: ##STR7## wherein R.sub.1 is hydrogen, methyl or ethyl, R.sub.2 is alkyl of from 1 to 6 carbon atoms, R.sub.3 is alkyl, aryl or alkylaryl, (PE) is selected from the group consisting of polyethers, polyesters and mixtures thereof, x is an integer of from 2 to 50 and R.sub.4 is alkyl, alkene, aryl or alicyclic.
- 3. A liquid polymer composition as in claim 2 wherein said additive has the structure: ##STR8## wherein R.sub.4 is hydrogen, methyl or ethyl, R.sub.6 is alkyl of from 1 to 6 carbon atoms and R.sub.6 is alkyl, alkene, aryl or alicyclic.
- 4. A liquid polymer composition as in claim 2 suitable for use as a photo resist which includes a photoinitiator for promoting free radical generation.
- 5. A liquid polymer composition as in claim 4 suitable for use as a photo resist wherein said photoinitiator is selected from the group consisting of benzophenone, acetophenone, acenaphthenequinone, o-methoxy-benzophenone, dibenzosuberone, anthroquinone hexanophenone and 2,2-dimethoxy-2,2 phenyl acetophenone.
- 6. A liquid polymer composition as in claim 4 suitable for use as a photo resist which includes chain bridging agents selected from the group consisting of multifunctional acrylates and thiols.
- 7. A liquid polymer composition as in claim 6 suitable for use as a photo resist wherein said acrylate is hexanediol diacrylate and said thiol is pentaerythritoltetra-kis-(B mercaptopropionate).
- 8. A liquid polymer composition as in claim 4 suitable for use as a photo resist wherein R.sub.3 is aryl and R.sub.4 is ethylene.
- 9. A liquid polymer composition as in claim 4 suitable for use as a photo resist wherein in the structure of said additive R.sub.6 is ethylene.
Parent Case Info
This application is a division of application Ser. No. 225,809 filed Jan. 16, 1981 now U.S. Pat. No. 4,422,914.
US Referenced Citations (16)
Foreign Referenced Citations (7)
Number |
Date |
Country |
1289075 |
Sep 1972 |
GBX |
1489425 |
Oct 1977 |
GBX |
1507808 |
Apr 1978 |
GBX |
1519013 |
Jul 1978 |
GBX |
2002531 |
Feb 1979 |
GBX |
2034492 |
Jun 1980 |
GBX |
2070634 |
Sep 1981 |
GBX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
225809 |
Jan 1981 |
|