Number | Date | Country | Kind |
---|---|---|---|
62-57282 | Mar 1987 | JPX | |
62-111413 | May 1987 | JPX | |
62-120592 | May 1987 | JPX | |
62-139140 | Jun 1987 | JPX |
This application is a continuation of application Ser. No. 07/508,531, filed on Apr. 12, 1990, now abandoned, which is a continuation of Ser. No. 07/167,107, filed Mar. 11, 1988, now abandoned.
Number | Name | Date | Kind |
---|---|---|---|
3046118 | Schmidt | Jul 1962 | |
3106465 | Neugebauer et al. | Oct 1963 | |
3148983 | Endermann et al. | Sep 1964 | |
3201239 | Neugebauer et al. | Aug 1965 | |
3859099 | Petropoulos et al. | Jan 1975 | |
3868254 | Wemmers | Feb 1975 | |
3890152 | Ruckert et al. | Jun 1975 | |
4009033 | Bakos et al. | Feb 1977 | |
4036644 | Kaplan et al. | Jul 1977 | |
4307173 | Gventer | Dec 1981 | |
4409314 | Buhr et al. | Oct 1983 | |
4442195 | Yamamoto et al. | Apr 1984 | |
4467025 | Goto et al. | Aug 1984 | |
4467027 | Yamamoto et al. | Aug 1984 | |
4719167 | Miura et al. | Jan 1988 | |
4725523 | Miura et al. | Feb 1988 | |
4725526 | Frass et al. | Feb 1988 | |
4731316 | Tomiyasu et al. | Mar 1988 |
Number | Date | Country |
---|---|---|
52-28401 | Jul 1977 | JPX |
60-88942 | May 1985 | JPX |
62-279327 | Dec 1987 | JPX |
Entry |
---|
English Abstract of Japanese Pub. #52-28,401, Published Jul. 26, 1977. |
English Abstract of Japanese Pub. #60-88,942, Published May 18, 1985, (Fuji Photo Film). |
English language Abstract of Jap. Pub. #51-33,620, Published Mar. 22, 1976 (Konishiroka Photo.). |
English language Abstract of Jap. Pub. #77-34,931, Published Sep. 6, 1977. (Konishiroka Photo.). |
J. Kosar: "Light-Sensitive Systems", 1965, John Wiley & Sons, pp. 351 formula 2. |
IBM Technical Disclosure Bullentin, vol. 25, No. 3A, Aug. 1982, pp. 983 A. L. Thayer, Jr., "Contrast enhancement in positive working resist systems". |
Research Disclosure, No. 149, Set. 1976, pp. 27-29, ref No. 14929, "Photoresists containing quinone diazides." |
Number | Date | Country | |
---|---|---|---|
Parent | 508531 | Apr 1990 | |
Parent | 167107 | Mar 1988 |