Claims
- 1. A positive-working photosensitive composition containing:
- (a) a polymer having at least 60 mol % structural units represented by formula (3):
- CH.sub.2 =CA--(B).sub.m --SO.sub.2 --NH--SO.sub.2 --R.sub.1( 3)
- wherein A represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 4 carbon atoms; B represents a phenylene group; R.sub.1 represents an alkyl group, a substituted alkyl group (wherein the substituent on the substituted alkyl group is a halogen atom, an aryl group, an amido group, an alkoxy group or an alkoxycarbonyl group), an aromatic group, or a substituted aromatic group (wherein the substituent on the substituted aromatic group is a halogen atom, an alkyl group, an alkoxy group having 1 to 10 carbon atoms, an amido group or an aryl group); and m represents 0 or 1, and
- (b) an o-naphthoquinone diazide.
- 2. The positive-working photosensitive composition of claim 1, wherein R.sub.1 represents an alkyl-substituted phenyl group halogen-substituted phenyl group or alkoxy-substituted phenyl group.
- 3. The positive-working photosensitive composition of claim 1, wherein the polymer has the structural unit represented by formula (3) in an amount of from 80 to 100 mol %.
- 4. The positive-working photosensitive composition of claim 1, wherein the composition contains the polymer in an amount of from 20 to 95 mol %.
- 5. A positive-working photosensitive composition containing:
- (a) a polymer having at least 60 mol % structural units represented by formula (4): ##STR51## wherein A represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 4 carbon atoms and R.sub.1 is an alkyl-substituted, halogen-substituted, phenyl group or alkoxy-substituted phenyl group, and
- (b) an o-naphthoquinone diazide.
- 6. The positive-working photosensitive composition of claim 5, wherein the polymer has the structural units represented by formula (4) in an amount of from 80 to 100 mol %.
- 7. The positive-working photosensitive composition of claim 5, wherein the composition contains the polymer in an amount of from 20 to 95 mol %.
- 8. The positive-working photosensitive composition of claim 5, wherein the polymer is one having 100 mol % structural units represented by ##STR52##
- 9. The positive-working photosensitive composition of claim 5, wherein the polymer is one having 100 mol % structural units represented by
- 10. The positive-working photosensitive composition of claim 5, wherein the polymer is one having 100 mol % structural units represented by
- 11. The positive-working photosensitive composition of claim 5, wherein the polymer is one having 100 mol % structural units represented by
- 12. A positive-working photosensitive composition containing: (a) a polymer having at least 60 mol % structural units represented by formula (2): ##STR53## wherein A represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 4 carbon atoms, and
- (b) an o-naphthoquinone diazide.
- 13. The positive-working photosensitive composition of claim 12, wherein the polymer has the structural unit represented by formula (2) in an amount of from 80 to 100 mol %.
- 14. The positive-working photosensitive composition of claim 12, wherein the composition contains the polymer in an amount of from 20 to 95 mol %.
Priority Claims (1)
Number |
Date |
Country |
Kind |
5-170484 |
Jul 1993 |
JPX |
|
Parent Case Info
This is a continuation of application Ser. No. 08/271,971, filed Jul. 8, 1994 now abandoned.
US Referenced Citations (7)
Foreign Referenced Citations (5)
Number |
Date |
Country |
3742387 A1 |
Jun 1988 |
DEX |
2-39154 |
Feb 1990 |
JPX |
2-167550 |
Jun 1990 |
JPX |
2167550 |
Jun 1990 |
JPX |
3-58049 |
Mar 1991 |
JPX |
Continuations (1)
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Number |
Date |
Country |
Parent |
271971 |
Jul 1994 |
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