Patent Application
20140266278
1. Field of the Invention
The present invention relates to a probe needle, in particular, to a semiconductor testing probe needle used for circuit inspection.
2. Description of Related Art
Probe cards are commonly used as a means for circuit inspection in the semiconductor manufacturing process, which mostly consist of arrays of probe needles. The arrangement of the probe needles are configured corresponding to the circuit layout on the circuit board to be inspected with the probe card. Typically, the probe card is positioned on an inspection machinery and the circuit board for inspection is pressed onto the probe needles by a fixture clamp. Therefore, each one of the probe needles is electrically connected to the circuit board for inspection and the circuitry on the circuit board being inspected can be tested to determine its proper functioning and connections.
Known structure of a probe needle mostly comprises a sleeve having two electrodes with a spring connected between the two electrodes. One of the electrodes is fixed onto the inspection machinery and is electrically connected thereto; whereas the other electrode is moveably arranged inside the sleeve and is provided to be electrically connected to the circuit board for inspection. When a wafer touches the probe needle, the spring is compressed and exerts a force onto the moveable electrode such that the electrode is ensured to be in contact with the circuit board and is electrically connected thereto. Alternatively, the probe needle may comprise one movable electrode only and the spring can be used for providing an electrical connecting electrode with the inspection machinery. The probe needle is a tiny component and is often with a complex structure, which poses difficulties to the manufacturing of the parts and the assembly thereof.
In view of the above, the inventor seeks to overcome the aforementioned drawbacks of known arts and provides an improvement after extensive research and development as one of the objectives of the present invention.
An objective of the present invention is to provide a probe needle with a simplified structure.
To achieve the aforementioned objective, the present invention provides a probe needle provided in a testing apparatus and electrically connected to the testing apparatus and to a circuit board for inspection; wherein the testing apparatus comprises an inspection main board. The probe needle of the present invention comprises a conductive shaft and an elastic conductive rod. The conductive shaft includes two ends of a connection end and an inspection end for contacting with the circuit board for inspection. The elastic conductive rod is axially connected to the conductive shaft and includes two ends of a free end connected to the connection end and a fixed end abutting the inspection main board.
Preferably, according to the aforementioned probe needle, the elastic conductive rod is a soft rod comprising a plurality of metal particles embedded therein.
Preferably, according to the aforementioned probe needle, the elastic conductive rod is a soft rod comprising a metal wire embedded therein.
Preferably, according to the aforementioned probe needle, the elastic conductive rod covers the conductive shaft.
Preferably, according to the aforementioned probe needle, the conductive shaft comprises at least one anti-slip portion; the anti-slip portion extends from a lateral side of the conductive shaft; and the free end of the elastic conductive rod covers the anti-slip portion.
Preferably, according to the aforementioned probe needle, the conductive shaft comprises a restricting portion; the restricting portion extends from a lateral side of the conducive shaft and the restricting portion rests against an inner side of the probe needle to restrict a movement schedule of the conductive shaft.
Preferably, the aforementioned probe needle further comprises a spring column sleeved externally onto the elastic conductive rod.
Preferably, according to the aforementioned probe needle, the spring column abuts the restricting portion.
The probe needle of the present invention utilizes an elastic conducive rod in replacement of the structure of a spring with a sleeve column adapted by known arts such that the drawbacks of the known arts having a complicated structure that poses difficulties to the manufacturing of the parts and the assembly thereof can be advantageously overcome.
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The conductive shaft 100 is preferably made of a metal material. Two ends of the conductive shaft 100 are a connection end 110 and an inspection end 120. In addition, the conductive shaft 100 further comprises an anti-slip portion 130 and a restricting portion 140. The connection end 110 is used for connecting with the elastic conductive rod 200, and an end portion of the inspection end 120 comprises a conductive contact 121. The conductive contact 121 can be either of a cut-out slot or an arched-surface protrusion shape but the present invention is not limited to such shapes. The anti-slip portion 130 is arranged between the connection end 110 and the inspection end 120 and extends outward from the mid-section of the side wall of the conductive shaft 100, and preferably, it extends outward in a shape of a circumferential rib. The restricting portion 140 extends outward from the lateral side of the conductive shaft 100, and the restricting portion 110 is preferably of a shape of a round column. In this embodiment, the anti-slip portion 130 is arranged to be adjacent to the connection end 110 whereas the restricting portion 140 is arranged to be adjacent to the inspection end 120 but the present invention is not limited to such arrangements only.
In this embodiment, the elastic conductive rod 200 is a soft rod and is preferably made of a silicon or rubber. In addition, the elastic conductive rod 200 comprises a plurality of metal particles embedded therein; for example, it can be made via solidification of silicon or rubber liquids mixed with metal powders, but the present invention is not limited to such configuration. The elastic conductive rod 200 is axially connected to the conductive rod 100. Two ends of the elastic conductive rod 200 are a free end 210 and a fixed end 220. The free end 210 is fixedly connected to the connection end 110 of the conductive shaft 100 whereas the fixed end 220 extends toward an inspection main board 20. The free end 210 of the elastic conductive rod 200 covers the connection end 110 of the conductive shaft 100 and, preferably, it covers the anti-slip portion 130 such that the elastic conductive rod 200 can be prevented from slipping off the conductive shaft 100. The elastic conductive rod 200 is further provided with a mounting hole 211 along an axis of the free end 210 for mounting onto the connection end 110 of the conductive shaft 100. Alternatively, the elastic conductive rod 200 can be formed by injection molding to cover the connection end 110 of the conductive shaft but the present invention is not limited to such configurations.
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The probe needle of the present invention utilizes the elastic conductive rod 200 in replacement of the structure of a spring with a sleeve adapted by known arts. As a result, the probe needle of the present invention is of a simplified structure facilitating the manufacturing of parts and assembly thereof in light of overcoming the drawbacks of the known arts.
It can be understood that the preferred embodiments of the present invention are provided for illustrative purposes only, which shall not be used to limit the scope of the present invention. Any other modifications and variations in relation to the spirit of the present invention and capable of generating substantially equivalent outcomes shall all be considered to be within the scope of the present invention.
