1. Field of the Invention
Embodiments of the invention generally relate to a test system for testing electronic devices on flat panel substrates. More specifically, to a method and apparatus for determining proper operability of the test system.
2. Description of the Related Art
Active matrix liquid crystal displays (LCDs) are commonly used for applications such as computer and television monitors, cell phone displays, personal digital assistants (PDAs), and an increasing number of other devices. Generally, an active matrix LCD comprises two glass plates having a layer of liquid crystal materials sandwiched therebetween. One of the glass plates typically includes a conductive film disposed thereon. The other glass plate typically includes an array of thin film transistors (TFTs) coupled to an electrical power source. Power is applied to each TFT to generate an electrical field between a TFT and the conductive film. The electrical field changes the orientation of the liquid crystal material, creating a pattern on the LCD.
In order to provide quality control for thin film transistors on a large area glass substrate, it is desirable to conduct a liquid crystal display or pixel array test which allows a TFT LCD manufacturer to monitor and correct defects in the pixels during processing. One known method of testing pixels is known as electron beam testing (EBT) where each pixel electrode on a substrate is sequentially positioned under an electron beam. One such device is an electron beam array test system available from AKT, Inc., a subsidiary of Applied Materials, Inc. located in Santa Clara, Calif.
In order for the LCD array test to be conducted, a prober is used. A typical prober consists of a frame that places a substrate with a flat panel display or multiple displays under investigation in electrical communication with a power source. The perimeter of the display (or multiple displays) on the substrate has a plurality of contact pads that are in electrical communication with individual TFT's and corresponding pixel electrodes. The frame has a plurality of electrical contact pins at locations which correspond to the contact pads of the substrate.
In operation, the substrate contacts the prober and the contact pads of the display or displays are placed into contact with the electrical pins of the prober. The contact pads, in turn, are in electrical communication with a pre-defined set of the thin film transistors, or pixels. An electrical current is delivered through the pins to the contact pads. The current travels to and electrically excites the corresponding pixels. An electron beam is directed at the pixel and secondary electrons emitted from the pixels are sensed with a detector in order to confirm operability of the pixels. The operability of the individual pixels by the electron beam is typically conducted on a simple “pass” “no-pass” basis whereby the display may be repaired and could be scrapped if a predetermined number or percentage of pixels are judged inoperable or “no-pass”.
A problem using this type of testing system has been encountered in the past and has been isolated to the electrical continuity of prober pins. The electrical current supplied to the pin and used to energize the TFT's will not be translated to the contact pad on the substrate, and ultimately, the individual pixel or LCD array being tested. This results in a pixel that is not. electrically excited and may induce “no-pass” detection by the electron beam method since there is no electrical current supplied to it. This “no-pass” indication may be false if the pixel or LCD array is properly operable but for the application of the electrical current.
Another problem deals with the proper alignment of prober pins on the prober bars. In order for the pins to energize the contact pads on the substrate, the pins should be substantially perpendicular to the prober bar and in a spaced apart relation to each other. The prober pins, disposed on the bars, are typically not protected from accidental contact with parts of the machine when handling. If the prober frame is mishandled, the orientation of the prober pins may be disturbed and cause one or more adjacent pins to come into contact with each other. This contact will translate into a “short” in the circuit and will affect the current supplied to one or more contact pads on the substrate, thereby rendering a pixel or LCD array inoperable.
In the past, performing tests of the electrical continuity of individual prober pins, if performed at all, has been time consuming and expensive. The sheer number of prober pins mounted on a prober bar, with each pin having a respective fine wire path through cables and connectors, makes isolating the pin circuit very difficult. Also, the small size and number of prober pins makes inspection of the orientation of the pins very difficult. While performing these tests and checks are not impossible and may be performed manually, it requires significant man-hours that will translate into higher production costs of flat panel displays. On the other hand, if these tests are not performed, production costs are negatively impacted by needless repair or scrapping of displays that otherwise may be operable if one or more prober pins were properly operable and oriented correctly.
Due to these considerations for testing prober pins and assuring realistic pixel testing, there is a need in the art for a prober test system and apparatus that is capable of performing continuity checks on a plurality of individual prober pins that is simple, reliable and minimizes the number of man-hours required for performance. There is also a need for an apparatus that can sufficiently protect and maintain the orientation of a plurality of prober pins to minimize shorts in the prober test system.
The invention generally provides an improved method and apparatus for testing prober pins with a test device. The novel test system will be adapted to mount on a prober bar or probe head disposed on a prober frame and enable testing of individual prober pins and their respective fine wire connections. The invention enables isolation of individual prober pins and, in one embodiment is an attachment of a printed circuit board that is adapted to provide contact points for a plurality of individual prober pins. The individual contact points are adapted to detect, receive and transmit an electrical current from an individual prober pin to a device that receives and records the test current, thereby providing continuity information.
In another embodiment, a prober pin test system is described via the attachment of a contact test pad assembly configured to detachably connect to a plurality of prober pins, a controller, and a prober pin test circuit in communication with the contact test pad assembly and the controller.
In another embodiment, a continuity test apparatus is described having a contact test pad assembly, configured to detachably connect to a prober pin arrangement, a controller, and a prober pin test circuit connected to the contact test pad, the prober pin test circuit comprising, a voltage divider, an input buffer, an open drain driver, a prober pin, a shift register, and a pull-up resistor.
In another embodiment a continuity test method is described having the steps of positioning a prober bar with a plurality of prober pins disposed thereon in communication with a contact test pad assembly, applying a first voltage to a first contact point on the contact test pad assembly, sensing a second voltage on a prober pin under test corresponding to the first contact point and determining whether or not there is continuity between the first contact point and the prober pin under test based on the second voltage.
So that the manner in which the above recited features of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.
The invention generally provides an apparatus and system for testing an individual prober pin within a plurality of prober pins disposed on a prober bar that is part of an electronic device test system. For purposes of this disclosure, the term “test system” means any system that may be used to test electronic devices on a substrate. Such a test system may include optical inspection systems, electron beam test systems, systems that detect color changes, and others.
As indicated, a substrate 150 is shown supported by plate 140 below the prober assembly 110. The illustrative substrate 150 is a large area glass, polymer, or other suitable substrate that has a plurality of conductive electronic devices formed thereon, such as a plurality of thin film transistors (TFT's).
Where the test system 100 is an electron beam test system, the system may include a prober transfer assembly, a transfer apparatus, a load lock chamber, a testing chamber and, optionally, a prober storage assembly. The testing chamber will have electron beam columns for directing electron beams down onto the pixels under inspection. Details of an exemplary electron beam test system containing such features are disclosed in the pending U.S. patent application Ser. No. 10/778,982 entitled “Electron Beam Test System with Integrated Substrate Transfer Module”, filed on Feb. 12, 2004, which is incorporated herein by reference.
The prober assembly 110 has a polygonal frame 160 having four sides (only three are seen in
The prober frame 160 has a plurality of electrical connection blocks 172, which are adapted to place the prober frame 160 and its respective prober pins in electrical communication with a pixel test controller 124 via electrical mating blocks 128 mounted on the “x” plate 130 of the prober assembly 110. In
As previously mentioned, the prober assembly 110 has a plurality of electrical contact pins mounted to the prober bars 125, referred to as prober pins 220. One type of prober pin 220 is a pogo pin. The prober pins 220 are adapted to snap-fit in place along each of the prober bars 125 of the prober frame 160 and are in electrical communication with the electrical connection blocks 172 via appropriate cables and connections. As will be explained in greater detail below, the prober pins 220 are positioned and oriented such that each of the prober pins 220 will make electrical contact with a corresponding contact point adjacent or disposed on a flat panel substrate.
As discussed above, the prober pins 220 are configured to place the controller 124 in electrical communication with selected pixels or TFT's (or other devices) formed on the substrate 150. The controller 124 controls application of a voltage to a selected pixel and/or monitor(s) each pixel for changes in attributes, such as voltage, during testing by the exemplary method of sequential contact with at least one electron beam from a suitable electron beam column (not shown) onto the pixel. The prober pins 220 may extend radially from the prober bars 125, or may extend below the bars 125. In the embodiment shown in
The test pad assembly 405 of the pin test assembly 408 may be detachably connected to the prober bars 125 or probe heads 310 by a frame or housing 420 with appropriate fasteners such as screws. The frame 420 may have at least one alignment device 430 adjacent to at least one fastener hole 440 that is adapted to receive a fastener, such as a screw. The alignment device 430 may be a pin or dowel attached to the pad 400 that will be appropriately received by the opening 203 in a prober bar 125 or probe head 310. Alternatively, the alignment device may be a suitable bore in the test pad assembly 405 adapted to receive a pin or dowel mounted to a prober bar 125 or probe head 310. When appropriately joined by the alignment device 430, the contact points 410 of the test pad assembly 405 are assumed to be in contact with each respective prober pin 220 on the prober bar 125 or probe head 310, and the test pad may then be fastened. However, various factors may induce a misalignment between one or more of the plurality of prober pins 220. In order to reduce this possibility, the test pad assembly 405 may have more than one contact point 410 for each prober pin 220, for example, the exemplary test pad assembly 405 shown in
The test pad assembly 405 of the pin test assembly 408 may further be configured to have more contact points 410 than the number of prober pins 220 in a patterned prober pin arrangement 305 to be tested. For example, the contact pad assembly 405 may have 100 contact points 410, the 100 points adapted to test 50 prober pins 220 (i.e. 2:1 ratio) if there are 50 pins 220 in the patterned prober pin arrangement 305 available for testing. However, the patterned prober pin arrangement 305 on the prober bar 125 or probe head 310 may only have 20 pins 220 available for testing. In this case, the invention allows testing of the 20 pins 220, i.e., the testing is based on the number of prober pins 220 that are on the prober bar 125 or probe head 310, not on the number of contact points 410 on the contact test pad assembly 405. This will allow a contact test pad assembly 405 to be designed that will adapt to many patterned prober pin arrangements 305 that may have a ratio of points 410 to pins 220 that is greater than 2:1.
The contact test pad assembly 405 may be a commercially available printed circuit board (PCB), or custom built PCB per user specific prober frame 160 or flat panel contact pad 152 configurations. Alternatively, the prober frame 160 manufacturer may include test pads assemblies 405 that compliment the particular prober frame 160. In this case, the test pad assemblies 405 may be attached to the prober frame 160 as described above to protect the prober pins 220 from damage during shipping or handling.
As will be described in greater detail below, the logical “1” may be applied to an input of an open drain driver (ODD) in the stage 4251, thereby connecting an output 4151 of the stage 4251 to ground. If there is continuity between the prober pin 2201 and one or both of the contact test points 4101, a path to ground via the switched ODD will result in a known continuity logic signal provided to the pin test controller 404 via a suitable output cable. Further, by observing the output signals for other prober pins 220N (other than prober pin 2201 under test), prober pins shorted to the pin 2201, under test, may be detected. For example, by testing only one pin 220N at a time, with logical “0”'s shifted into the other stages 425, only a continuity logic signal for the prober pin under test should be observed. Observation of a continuity logic signal from another prober pin 220 may be indicative of a short between that pin and the pin under test.
Operation of the prober pin test circuit 500 may be described with reference to
On the other hand, if there is not continuity between the prober pin 220 and the contact test point 410 as illustrated in
Similarly, as illustrated in
Decision step 660 involves a determination as to whether there a more prober pins 220 in the patterned prober pin arrangement 305 to test. If all prober pins 220 have been tested, the testing is complete. If there are more prober pins 220 to test, the method proceeds to step 620 and another prober pin is selected for testing.
Referring to
If a low voltage, defined as any voltage less than 1, is sensed from the pin 220 under test, the logic proceeds to block 740B that will confirm a lack of continuity between the contact point 410N and the prober pin 220N. The block 740B may prompt a technician to two possible problems and a method to repair 750. The user may then alternatively realign the suspect prober pin 220N or replace the pin 220N and retest by following line 760. The software employed by the test system may use a windows type program in the controller 404 that will translate a high or low voltage as a “pass” or “no pass” signal. The system may also provide a user notification protocol that will provide text denoting results, problems and possible repair strategies.
While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof. The scope of the inventions is determined by the claims that follow.