Number | Name | Date | Kind |
---|---|---|---|
3767551 | Lang, Jr. et al. | Oct 1973 | |
3897325 | Aoshima et al. | Jul 1975 | |
4013539 | Kuehnle | Mar 1977 | |
4859304 | Cathey et al. | Aug 1989 | |
5171412 | Talieh et al. | Dec 1992 | |
5298687 | Rapoport et al. | Mar 1994 | |
5342471 | Fukasawa et al. | Aug 1994 | |
5372848 | Blackwell et al. | Dec 1994 | |
5427670 | Baggerman et al. | Jun 1995 | |
5509557 | Jimarez et al. | Apr 1996 | |
5525780 | Moslehi | Jun 1996 | |
5595637 | Tench et al. | Jan 1997 | |
5597458 | Sanchez, Jr. et al. | Jan 1997 | |
5602053 | Zheng et al. | Feb 1997 | |
5648125 | Cane | Jul 1997 | |
5658438 | Givens et al. | Aug 1997 |
Entry |
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Shyam P. Murarka et al. “Copper Metallization for USLI and Beyond” Critical Reviews in Solid State and Material Sciences, 20(2); pp. 87-124, 1995. |