Heating or cooling of the substrates

Industry

CPC
C23C14/541

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/541Heating or cooling of the substrates

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Support body, manufacturing apparatus for support body, and manufac...
- Patent number 12,368,034
- Issue date Jul 22, 2025
- Keio University
- Atsushi Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition processing systems having active temperature control and...
- Patent number 12,359,306
- Issue date Jul 15, 2025
- Technetics Group LLC
- Angus McFadden
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, temperature control method of subst...
- Patent number 12,362,155
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Toshiharu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 12,354,854
- Issue date Jul 8, 2025
- Shibaura Mechatronics Corporation
- Hisashi Nishigaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone heater tuning in substrate heater
- Patent number 12,351,917
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Jun Ma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for depositing target material in deposition chamber with ti...
- Patent number 12,341,042
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Mounting table structure, substrate processing apparatus, and metho...
- Patent number 12,315,707
- Issue date May 27, 2025
- Tokyo Electron Limited
- Motoi Yamagata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for heating a wide bandgap substrate
- Patent number 12,291,773
- Issue date May 6, 2025
- SILANNA UV TECHNOLOGIES PTE LTD
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer chuck structure with holes in upper surface to improve temper...
- Patent number 12,272,585
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bismuth ferrite film material, method for integrally preparing bism...
- Patent number 12,270,098
- Issue date Apr 8, 2025
- QILU UNIVERSITY OF TECHNOLOGY
- Jun Ouyang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrying device and semiconductor processing apparatus
- Patent number 12,252,776
- Issue date Mar 18, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition (PVD) system and method of processing target
- Patent number 12,252,777
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Sheng-Ying Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device and method of manufacturing substrate p...
- Patent number 12,211,706
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Material deposition apparatus, method of depositing material on a s...
- Patent number 12,203,164
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Tamara Heintz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 12,198,927
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded hydrogen-free carbon-based hard material layer coated onto a...
- Patent number 12,163,213
- Issue date Dec 10, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Jürgen Becker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated tool with coating comprising boride-containing diffusion bar...
- Patent number 12,157,939
- Issue date Dec 3, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Hamid Bolvardi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device and method for manufacturing same
- Patent number 12,136,540
- Issue date Nov 5, 2024
- LG Display Co., Ltd.
- Young Gon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 12,106,945
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Siqing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
- Patent number 12,077,880
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plated steel material having excellent adhesion to plating and corr...
- Patent number 12,077,845
- Issue date Sep 3, 2024
- POSCO Co., Ltd
- Seok-Jun Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Roller for transporting a flexible substrate, vacuum processing app...
- Patent number 12,060,634
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with integrated cooling on a rotating drum
- Patent number 12,057,297
- Issue date Aug 6, 2024
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for selective removal of contact oxides
- Patent number 12,057,299
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Tuck Foong Koh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Programmable electrostatic chuck to enhance aluminum film morphology
- Patent number 12,046,460
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Yaoying Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Programmable ESC to enhance aluminum film morphology
- Patent number 12,037,676
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Yaoying Zhong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer holding body
- Patent number 12,033,880
- Issue date Jul 9, 2024
- Sumitomo Electric Industries, Ltd.
- Koichi Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution ceramic heater for deposition chamber
- Patent number 12,016,092
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automated temperature controlled substrate support
- Patent number 11,981,989
- Issue date May 14, 2024
- Applied Materials, Inc.
- Robert Hartwig
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Supplemental energy for low temperature processes
- Patent number 11,981,999
- Issue date May 14, 2024
- Applied Materials, Inc.
- David K. Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE
- Publication number 20250215551
- Publication date Jul 3, 2025
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARRANGEMENT FOR ROTATABLE POSITIONING OF A SUBSTRATE
- Publication number 20250188595
- Publication date Jun 12, 2025
- Scienta Omicron GmbH
- Martin HEISS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
- Publication number 20250146127
- Publication date May 8, 2025
- Japan Display Inc.
- Masanobu IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING OF HIGH-QUALITY SUPERCONDUCTING THIN FILMS
- Publication number 20250129468
- Publication date Apr 24, 2025
- Northrop Grumman Systems Corporation
- THOMAS SCOTT GESKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20250132148
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIAL DEPOSITION APPARATUS, METHOD OF DEPOSITING MATERIAL ON A S...
- Publication number 20250101573
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Tamara HEINTZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS
- Publication number 20250084528
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Arvinder ManmohanSingh Chadha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS
- Publication number 20250084529
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Arvinder ManmohanSingh Chadha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
- Publication number 20250066901
- Publication date Feb 27, 2025
- Japan Display Inc.
- Masanobu IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE LASER-BASED SAMPLE HEATER WITH SAMPLE EXCHANGE TURRET
- Publication number 20250066903
- Publication date Feb 27, 2025
- UT-Battelle, LLC
- CHRISTOPHER ROULEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION
- Publication number 20250066899
- Publication date Feb 27, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Yen LIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...
- Publication number 20250011918
- Publication date Jan 9, 2025
- Seoul National University R&DB Foundation
- Gyu Chul Yi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...
- Publication number 20240424514
- Publication date Dec 26, 2024
- Leybold GmbH
- Maik Burkhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORR...
- Publication number 20240417844
- Publication date Dec 19, 2024
- POSCO CO., LTD.
- Seok-Jun HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES
- Publication number 20240412954
- Publication date Dec 12, 2024
- Dinkesh HUDERI SOMANNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...
- Publication number 20240410050
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION
- Publication number 20240401185
- Publication date Dec 5, 2024
- Li-Metal Corp.
- Maciej JASTRZEBSKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
- Publication number 20240395514
- Publication date Nov 28, 2024
- Prashant AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET
- Publication number 20240376592
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Sheng-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
- Publication number 20240379400
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20240274436
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Shota ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240234109
- Publication date Jul 11, 2024
- LG Display Co., Ltd.
- Young Gon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Programmable ESC to Enhance Aluminum Film Morphology
- Publication number 20240218499
- Publication date Jul 4, 2024
- Yaoying ZHONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240209509
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Naoya FUKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICES AND METHODS FOR SPUTTERING AT LEAST TWO ELEMENTS
- Publication number 20240200183
- Publication date Jun 20, 2024
- TechIFab GmbH
- Heidemarie SCHMIDT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR IN-SITU ETCHING PRIOR TO PHYSICAL VAPOR DEP...
- Publication number 20240167144
- Publication date May 23, 2024
- OEM Group, LLC
- Marc-Andre Lariviere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Apparatus
- Publication number 20240162021
- Publication date May 16, 2024
- Sumitomo Precision Products Co., Ltd.
- Yukitaka YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LI...
- Publication number 20240141478
- Publication date May 2, 2024
- Applied Materials, Inc.
- Timothy KLEINER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240136162
- Publication date Apr 25, 2024
- LG Display Co., Ltd.
- Young Gon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Heating or cooling of the substrates

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Support body, manufacturing apparatus for support body, and manufac...

Deposition processing systems having active temperature control and...

Substrate processing apparatus, temperature control method of subst...

Film formation apparatus

Multi-zone heater tuning in substrate heater

Method for depositing target material in deposition chamber with ti...

Mounting table structure, substrate processing apparatus, and metho...

Methods and systems for heating a wide bandgap substrate

Wafer chuck structure with holes in upper surface to improve temper...

Bismuth ferrite film material, method for integrally preparing bism...

Carrying device and semiconductor processing apparatus

Physical vapor deposition (PVD) system and method of processing target

Substrate processing device and method of manufacturing substrate p...

Material deposition apparatus, method of depositing material on a s...

Deposition system and method

Graded hydrogen-free carbon-based hard material layer coated onto a...

Coated tool with coating comprising boride-containing diffusion bar...

Substrate processing device and method for manufacturing same

Plasma processing apparatus and method of manufacturing semiconduct...

In-situ film growth rate monitoring apparatus, systems, and methods...

Plated steel material having excellent adhesion to plating and corr...

Roller for transporting a flexible substrate, vacuum processing app...

Deposition system with integrated cooling on a rotating drum

Methods for selective removal of contact oxides

Programmable electrostatic chuck to enhance aluminum film morphology

Programmable ESC to enhance aluminum film morphology

Wafer holding body

Gas distribution ceramic heater for deposition chamber

Automated temperature controlled substrate support

Supplemental energy for low temperature processes

Patents Applicationslast 30 patents

METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE

ARRANGEMENT FOR ROTATABLE POSITIONING OF A SUBSTRATE

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...

SPUTTERING OF HIGH-QUALITY SUPERCONDUCTING THIN FILMS

DEPOSITION SYSTEM AND METHOD

MATERIAL DEPOSITION APPARATUS, METHOD OF DEPOSITING MATERIAL ON A S...

HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS

HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...

REMOTE LASER-BASED SAMPLE HEATER WITH SAMPLE EXCHANGE TURRET

METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION

AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...

COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...

PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORR...

PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...

FILM FORMING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME

Programmable ESC to Enhance Aluminum Film Morphology

SUBSTRATE PROCESSING APPARATUS

DEVICES AND METHODS FOR SPUTTERING AT LEAST TWO ELEMENTS

SYSTEMS AND METHODS FOR IN-SITU ETCHING PRIOR TO PHYSICAL VAPOR DEP...

Sputtering Apparatus

WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LI...

SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME