Membership
Tour
Register
Log in
Heating or cooling of the substrates
Follow
Industry
CPC
C23C14/541
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C14/00
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Current Industry
C23C14/541
Heating or cooling of the substrates
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
Support body, manufacturing apparatus for support body, and manufac...
Patent number
12,368,034
Issue date
Jul 22, 2025
Keio University
Atsushi Nakajima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition processing systems having active temperature control and...
Patent number
12,359,306
Issue date
Jul 15, 2025
Technetics Group LLC
Angus McFadden
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, temperature control method of subst...
Patent number
12,362,155
Issue date
Jul 15, 2025
Tokyo Electron Limited
Toshiharu Hirata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film formation apparatus
Patent number
12,354,854
Issue date
Jul 8, 2025
Shibaura Mechatronics Corporation
Hisashi Nishigaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-zone heater tuning in substrate heater
Patent number
12,351,917
Issue date
Jul 8, 2025
Applied Materials, Inc.
Jun Ma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for depositing target material in deposition chamber with ti...
Patent number
12,341,042
Issue date
Jun 24, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Hsuan-Chih Chu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Mounting table structure, substrate processing apparatus, and metho...
Patent number
12,315,707
Issue date
May 27, 2025
Tokyo Electron Limited
Motoi Yamagata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and systems for heating a wide bandgap substrate
Patent number
12,291,773
Issue date
May 6, 2025
SILANNA UV TECHNOLOGIES PTE LTD
Petar Atanackovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer chuck structure with holes in upper surface to improve temper...
Patent number
12,272,585
Issue date
Apr 8, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Jung Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Bismuth ferrite film material, method for integrally preparing bism...
Patent number
12,270,098
Issue date
Apr 8, 2025
QILU UNIVERSITY OF TECHNOLOGY
Jun Ouyang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Carrying device and semiconductor processing apparatus
Patent number
12,252,776
Issue date
Mar 18, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qing Chang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Physical vapor deposition (PVD) system and method of processing target
Patent number
12,252,777
Issue date
Mar 18, 2025
Taiwan Semiconductor Manufacturing Company Limited
Sheng-Ying Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing device and method of manufacturing substrate p...
Patent number
12,211,706
Issue date
Jan 28, 2025
Tokyo Electron Limited
Manabu Nakagawasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Material deposition apparatus, method of depositing material on a s...
Patent number
12,203,164
Issue date
Jan 21, 2025
Applied Materials, Inc.
Tamara Heintz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition system and method
Patent number
12,198,927
Issue date
Jan 14, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Hsi Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Graded hydrogen-free carbon-based hard material layer coated onto a...
Patent number
12,163,213
Issue date
Dec 10, 2024
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
Jürgen Becker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Coated tool with coating comprising boride-containing diffusion bar...
Patent number
12,157,939
Issue date
Dec 3, 2024
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
Hamid Bolvardi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing device and method for manufacturing same
Patent number
12,136,540
Issue date
Nov 5, 2024
LG Display Co., Ltd.
Young Gon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
Patent number
12,106,945
Issue date
Oct 1, 2024
Samsung Electronics Co., Ltd.
Siqing Lu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
Patent number
12,077,880
Issue date
Sep 3, 2024
Applied Materials, Inc.
Zhepeng Cong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plated steel material having excellent adhesion to plating and corr...
Patent number
12,077,845
Issue date
Sep 3, 2024
POSCO Co., Ltd
Seok-Jun Hong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Roller for transporting a flexible substrate, vacuum processing app...
Patent number
12,060,634
Issue date
Aug 13, 2024
Applied Materials, Inc.
Stefan Bangert
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition system with integrated cooling on a rotating drum
Patent number
12,057,297
Issue date
Aug 6, 2024
Richard DeVito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for selective removal of contact oxides
Patent number
12,057,299
Issue date
Aug 6, 2024
Applied Materials, Inc.
Tuck Foong Koh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Programmable electrostatic chuck to enhance aluminum film morphology
Patent number
12,046,460
Issue date
Jul 23, 2024
Applied Materials, Inc.
Yaoying Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Programmable ESC to enhance aluminum film morphology
Patent number
12,037,676
Issue date
Jul 16, 2024
Applied Materials, Inc.
Yaoying Zhong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer holding body
Patent number
12,033,880
Issue date
Jul 9, 2024
Sumitomo Electric Industries, Ltd.
Koichi Kimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas distribution ceramic heater for deposition chamber
Patent number
12,016,092
Issue date
Jun 18, 2024
Applied Materials, Inc.
Pingyan Lei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Automated temperature controlled substrate support
Patent number
11,981,989
Issue date
May 14, 2024
Applied Materials, Inc.
Robert Hartwig
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Supplemental energy for low temperature processes
Patent number
11,981,999
Issue date
May 14, 2024
Applied Materials, Inc.
David K. Carlson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE
Publication number
20250215551
Publication date
Jul 3, 2025
Silanna UV Technologies Pte Ltd
Petar Atanackovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ARRANGEMENT FOR ROTATABLE POSITIONING OF A SUBSTRATE
Publication number
20250188595
Publication date
Jun 12, 2025
Scienta Omicron GmbH
Martin HEISS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
Publication number
20250146127
Publication date
May 8, 2025
Japan Display Inc.
Masanobu IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPUTTERING OF HIGH-QUALITY SUPERCONDUCTING THIN FILMS
Publication number
20250129468
Publication date
Apr 24, 2025
Northrop Grumman Systems Corporation
THOMAS SCOTT GESKE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION SYSTEM AND METHOD
Publication number
20250132148
Publication date
Apr 24, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Hsi WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MATERIAL DEPOSITION APPARATUS, METHOD OF DEPOSITING MATERIAL ON A S...
Publication number
20250101573
Publication date
Mar 27, 2025
Applied Materials, Inc.
Tamara HEINTZ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS
Publication number
20250084528
Publication date
Mar 13, 2025
Applied Materials, Inc.
Arvinder ManmohanSingh Chadha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS
Publication number
20250084529
Publication date
Mar 13, 2025
Applied Materials, Inc.
Arvinder ManmohanSingh Chadha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
Publication number
20250066901
Publication date
Feb 27, 2025
Japan Display Inc.
Masanobu IKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REMOTE LASER-BASED SAMPLE HEATER WITH SAMPLE EXCHANGE TURRET
Publication number
20250066903
Publication date
Feb 27, 2025
UT-Battelle, LLC
CHRISTOPHER ROULEAU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION
Publication number
20250066899
Publication date
Feb 27, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Yen LIAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...
Publication number
20250011918
Publication date
Jan 9, 2025
Seoul National University R&DB Foundation
Gyu Chul Yi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...
Publication number
20240424514
Publication date
Dec 26, 2024
Leybold GmbH
Maik Burkhardt
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORR...
Publication number
20240417844
Publication date
Dec 19, 2024
POSCO CO., LTD.
Seok-Jun HONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...
Publication number
20240410050
Publication date
Dec 12, 2024
TOKYO ELECTRON LIMITED
Naoki WATANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES
Publication number
20240412954
Publication date
Dec 12, 2024
Dinkesh HUDERI SOMANNA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
Publication number
20240410078
Publication date
Dec 12, 2024
Applied Materials, Inc.
Zhepeng CONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION
Publication number
20240401185
Publication date
Dec 5, 2024
Li-Metal Corp.
Maciej JASTRZEBSKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
Publication number
20240395514
Publication date
Nov 28, 2024
Prashant AGARWAL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET
Publication number
20240376592
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company Limited
Sheng-Ying WU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
Publication number
20240379400
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20240274436
Publication date
Aug 15, 2024
TOKYO ELECTRON LIMITED
Shota ISHIBASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
Publication number
20240234109
Publication date
Jul 11, 2024
LG Display Co., Ltd.
Young Gon KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Programmable ESC to Enhance Aluminum Film Morphology
Publication number
20240218499
Publication date
Jul 4, 2024
Yaoying ZHONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240209509
Publication date
Jun 27, 2024
TOKYO ELECTRON LIMITED
Naoya FUKUDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICES AND METHODS FOR SPUTTERING AT LEAST TWO ELEMENTS
Publication number
20240200183
Publication date
Jun 20, 2024
TechIFab GmbH
Heidemarie SCHMIDT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR IN-SITU ETCHING PRIOR TO PHYSICAL VAPOR DEP...
Publication number
20240167144
Publication date
May 23, 2024
OEM Group, LLC
Marc-Andre Lariviere
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Sputtering Apparatus
Publication number
20240162021
Publication date
May 16, 2024
Sumitomo Precision Products Co., Ltd.
Yukitaka YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LI...
Publication number
20240141478
Publication date
May 2, 2024
Applied Materials, Inc.
Timothy KLEINER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
Publication number
20240136162
Publication date
Apr 25, 2024
LG Display Co., Ltd.
Young Gon KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...