Heating or cooling of the substrates

Industry

CPC
C23C14/541

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/541Heating or cooling of the substrates

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing device and method of manufacturing substrate p...
- Patent number 12,211,706
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Material deposition apparatus, method of depositing material on a s...
- Patent number 12,203,164
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Tamara Heintz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 12,198,927
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded hydrogen-free carbon-based hard material layer coated onto a...
- Patent number 12,163,213
- Issue date Dec 10, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Jürgen Becker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated tool with coating comprising boride-containing diffusion bar...
- Patent number 12,157,939
- Issue date Dec 3, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Hamid Bolvardi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device and method for manufacturing same
- Patent number 12,136,540
- Issue date Nov 5, 2024
- LG Display Co., Ltd.
- Young Gon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 12,106,945
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Siqing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
- Patent number 12,077,880
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plated steel material having excellent adhesion to plating and corr...
- Patent number 12,077,845
- Issue date Sep 3, 2024
- POSCO Co., Ltd
- Seok-Jun Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Roller for transporting a flexible substrate, vacuum processing app...
- Patent number 12,060,634
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with integrated cooling on a rotating drum
- Patent number 12,057,297
- Issue date Aug 6, 2024
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for selective removal of contact oxides
- Patent number 12,057,299
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Tuck Foong Koh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Programmable electrostatic chuck to enhance aluminum film morphology
- Patent number 12,046,460
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Yaoying Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Programmable ESC to enhance aluminum film morphology
- Patent number 12,037,676
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Yaoying Zhong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer holding body
- Patent number 12,033,880
- Issue date Jul 9, 2024
- Sumitomo Electric Industries, Ltd.
- Koichi Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution ceramic heater for deposition chamber
- Patent number 12,016,092
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automated temperature controlled substrate support
- Patent number 11,981,989
- Issue date May 14, 2024
- Applied Materials, Inc.
- Robert Hartwig
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Supplemental energy for low temperature processes
- Patent number 11,981,999
- Issue date May 14, 2024
- Applied Materials, Inc.
- David K. Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Al-rich AlTin-based films
- Patent number 11,965,234
- Issue date Apr 23, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering reaction chamber and process assembly of sputtering reac...
- Patent number 11,952,653
- Issue date Apr 9, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Liren Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer temperature measurement in an ion implantation system
- Patent number 11,942,343
- Issue date Mar 26, 2024
- Advanced Ion Beam Technology, Inc.
- Chien-Li Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Material deposition apparatus having at least one heating assembly...
- Patent number 11,905,589
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Andreas Lopp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and method of fabricating magnetic memory devi...
- Patent number 11,834,738
- Issue date Dec 5, 2023
- Samsung Electronics Co., Ltd.
- Joonmyoung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and a method for forming patterns on a surface of a subst...
- Patent number 11,827,968
- Issue date Nov 28, 2023
- VOLFRAMI OY LTD
- Jukka Vuoristo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing glass article and method for heating thin...
- Patent number 11,814,729
- Issue date Nov 14, 2023
- Nippon Electric Glass Co., Ltd.
- Takayoshi Saitoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous thin film of a metal chalcogenide
- Patent number 11,804,253
- Issue date Oct 31, 2023
- National University of Singapore
- Kian Ping Loh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC single crystal manufacturing apparatus
- Patent number 11,761,113
- Issue date Sep 19, 2023
- Resonac Corporation
- Kotaro Ishita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus heating substrate
- Patent number 11,746,410
- Issue date Sep 5, 2023
- SCREEN Holdings Co., Ltd.
- Yasuaki Kondo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Movable wafer holder for film deposition chamber having six degrees...
- Patent number 11,742,231
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method, system and apparatus for cooling a substrate
- Patent number 11,725,272
- Issue date Aug 15, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...
- Publication number 20250011918
- Publication date Jan 9, 2025
- Seoul National University R&DB Foundation
- Gyu Chul Yi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...
- Publication number 20240424514
- Publication date Dec 26, 2024
- Leybold GmbH
- Maik Burkhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORR...
- Publication number 20240417844
- Publication date Dec 19, 2024
- POSCO CO., LTD.
- Seok-Jun HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...
- Publication number 20240410050
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES
- Publication number 20240412954
- Publication date Dec 12, 2024
- Dinkesh HUDERI SOMANNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION
- Publication number 20240401185
- Publication date Dec 5, 2024
- Li-Metal Corp.
- Maciej JASTRZEBSKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
- Publication number 20240395514
- Publication date Nov 28, 2024
- Prashant AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET
- Publication number 20240376592
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Sheng-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
- Publication number 20240379400
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20240274436
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Shota ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240234109
- Publication date Jul 11, 2024
- LG Display Co., Ltd.
- Young Gon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Programmable ESC to Enhance Aluminum Film Morphology
- Publication number 20240218499
- Publication date Jul 4, 2024
- Yaoying ZHONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240209509
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Naoya FUKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICES AND METHODS FOR SPUTTERING AT LEAST TWO ELEMENTS
- Publication number 20240200183
- Publication date Jun 20, 2024
- TechIFab GmbH
- Heidemarie SCHMIDT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR IN-SITU ETCHING PRIOR TO PHYSICAL VAPOR DEP...
- Publication number 20240167144
- Publication date May 23, 2024
- OEM Group, LLC
- Marc-Andre Lariviere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Apparatus
- Publication number 20240162021
- Publication date May 16, 2024
- Sumitomo Precision Products Co., Ltd.
- Yukitaka YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LI...
- Publication number 20240141478
- Publication date May 2, 2024
- Applied Materials, Inc.
- Timothy KLEINER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240136162
- Publication date Apr 25, 2024
- LG Display Co., Ltd.
- Young Gon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL MATERIAL AND METHOD FOR PRODUCING THE SAME
- Publication number 20240076773
- Publication date Mar 7, 2024
- City University of Hong Kong Shenzhen Futian Research Institute
- Sida Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, DEVICE, AND SYSTEM FOR MANUFACTURING COMPOSITE METAL FOIL
- Publication number 20240052479
- Publication date Feb 15, 2024
- Chongqing JIMAT New Material Technology Co., Ltd.
- Shiwei ZANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Al-RICH AlTiN-BASED FILMS
- Publication number 20240043985
- Publication date Feb 8, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Denis KURAPOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS
- Publication number 20230407458
- Publication date Dec 21, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Yoji TAKIZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENS...
- Publication number 20230279537
- Publication date Sep 7, 2023
- SCHNEIDER GMBH & CO. KG
- Gunter SCHNEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...
- Publication number 20230257869
- Publication date Aug 17, 2023
- QORVO BIOTECHNOLOGIES, LLC
- Derya Deniz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR FABRICATING PVD PEROVSKITE FILMS
- Publication number 20230257868
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Zihao YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230212735
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Nagabhushana NANJUNDAPPA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOADED BODY, APPARATUS FOR PRODUCINGLOADED BODY AND METHOD FOR PROD...
- Publication number 20230203642
- Publication date Jun 29, 2023
- Atsushi NAKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE
- Publication number 20230203643
- Publication date Jun 29, 2023
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM CHAMBER, VACUUM SYSTEM AND METHOD FOR VACUUM PROCESSING
- Publication number 20230193455
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Wolfgang MUTLU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Heating or cooling of the substrates

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing device and method of manufacturing substrate p...

Material deposition apparatus, method of depositing material on a s...

Deposition system and method

Graded hydrogen-free carbon-based hard material layer coated onto a...

Coated tool with coating comprising boride-containing diffusion bar...

Substrate processing device and method for manufacturing same

Plasma processing apparatus and method of manufacturing semiconduct...

In-situ film growth rate monitoring apparatus, systems, and methods...

Plated steel material having excellent adhesion to plating and corr...

Roller for transporting a flexible substrate, vacuum processing app...

Deposition system with integrated cooling on a rotating drum

Methods for selective removal of contact oxides

Programmable electrostatic chuck to enhance aluminum film morphology

Programmable ESC to enhance aluminum film morphology

Wafer holding body

Gas distribution ceramic heater for deposition chamber

Automated temperature controlled substrate support

Supplemental energy for low temperature processes

Al-rich AlTin-based films

Sputtering reaction chamber and process assembly of sputtering reac...

Wafer temperature measurement in an ion implantation system

Material deposition apparatus having at least one heating assembly...

Sputtering apparatus and method of fabricating magnetic memory devi...

Apparatus and a method for forming patterns on a surface of a subst...

Method for manufacturing glass article and method for heating thin...

Continuous thin film of a metal chalcogenide

SiC single crystal manufacturing apparatus

Heat treatment apparatus heating substrate

Movable wafer holder for film deposition chamber having six degrees...

Method, system and apparatus for cooling a substrate

Patents Applicationslast 30 patents

AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...

COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...

PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORR...

STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...

PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...

FILM FORMING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME

Programmable ESC to Enhance Aluminum Film Morphology

SUBSTRATE PROCESSING APPARATUS

DEVICES AND METHODS FOR SPUTTERING AT LEAST TWO ELEMENTS

SYSTEMS AND METHODS FOR IN-SITU ETCHING PRIOR TO PHYSICAL VAPOR DEP...

Sputtering Apparatus

WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LI...

SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME

METAL MATERIAL AND METHOD FOR PRODUCING THE SAME

METHOD, DEVICE, AND SYSTEM FOR MANUFACTURING COMPOSITE METAL FOIL

Al-RICH AlTiN-BASED FILMS

FILM FORMATION APPARATUS

COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENS...

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...

APPARATUS AND METHOD FOR FABRICATING PVD PEROVSKITE FILMS

SUBSTRATE PROCESSING SYSTEM

LOADED BODY, APPARATUS FOR PRODUCINGLOADED BODY AND METHOD FOR PROD...

METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE

VACUUM CHAMBER, VACUUM SYSTEM AND METHOD FOR VACUUM PROCESSING