Number | Date | Country | Kind |
---|---|---|---|
3107914 | Mar 1981 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4308126 | Wright | Dec 1981 | |
4354910 | Rordorf | Oct 1982 |
Entry |
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S. Maniv et al., "Discharge Characteristics for Magnetron Sputtering of Al In Ar and Ar/O.sub.2 Mixtures," J. Vac. Sci. Technol., vol. 17, pp. 743-751 (1980). |