Number | Date | Country | Kind |
---|---|---|---|
3923/82 | Jun 1982 | CHX |
Number | Name | Date | Kind |
---|---|---|---|
3614456 | Hamisch | Oct 1971 | |
3682071 | Hosoe | Aug 1972 | |
3689159 | Taniguchi et al. | Sep 1972 | |
3781110 | Leitz et al. | Dec 1973 | |
3902036 | Zaleckas | Aug 1975 | |
3906220 | Delingat | Sep 1975 | |
4074104 | Fulkerson | Feb 1978 | |
4341953 | Sakai et al. | Jul 1982 |
Entry |
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"Optical Profilometer for Monitoring Surface Contours of Si Power Devices", H. P. Kleinknecht and H. Meier, Laboratories RCA Ltd., pp. 266-273. |