Number | Date | Country | Kind |
---|---|---|---|
80 16329 | Jul 1980 | FRX |
Number | Name | Date | Kind |
---|---|---|---|
4263088 | Gorin | Apr 1981 |
Entry |
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Hitchman et al, "A Simple . . . Etching" J. of Vacuum Science Techno., vol. 17, No. 6 (11/80) pp. 1378-1381. |
Poulsen, "Plasma Etching . . . A Review" J. of Vacuum Science Techno., vol. 14, No. 1 (1/77) pp. 266-274. |
Raby, "Mass . . . Etching" J. of Vacuum Science Techno., vol. 15, No. 2 (3/78) pp. 205-208. |