Membership
Tour
Register
Log in
Plasma etching Reactive-ion etching
Follow
Industry
CPC
H01L21/3065
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/3065
Plasma etching Reactive-ion etching
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
Polycrystalline SiC compact and method for manufacturing the same
Patent number
12,368,026
Issue date
Jul 22, 2025
Tokai Carbon Co., Ltd.
Yohei Harada
B24 - GRINDING POLISHING
Information
Patent Grant
Electrostatic discharge prevention in ion beam system
Patent number
12,368,117
Issue date
Jul 22, 2025
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
12,368,031
Issue date
Jul 22, 2025
HITACHI HIGH-TECH CORPORATION
Kosa Hirota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Protective film agent and processing method of workpiece
Patent number
12,368,049
Issue date
Jul 22, 2025
Disco Corporation
Sho Osawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Increasing source/drain dopant concentration to reduced resistance
Patent number
12,369,342
Issue date
Jul 22, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Jing Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Epitaxial layers in source/drain contacts and methods of forming th...
Patent number
12,369,386
Issue date
Jul 22, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Ding-Kang Shih
C30 - CRYSTAL GROWTH
Information
Patent Grant
Electron extraction type free-wheeling diode device and preparation...
Patent number
12,363,930
Issue date
Jul 15, 2025
JSAB TECHNOLOGIES (SHENZHEN) LTD.
Hao Feng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching apparatus and method
Patent number
12,362,152
Issue date
Jul 15, 2025
SPTS Technologies Limited
Maxime Varvara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam etching chamber with etching by-product redistributor
Patent number
12,362,154
Issue date
Jul 15, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Te-Hsien Hsieh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and devices related to radio frequency devices
Patent number
12,362,191
Issue date
Jul 15, 2025
Infineon Technologies Dresden GmbH & Co. KG
Hans Taddiken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Formation of gate all around device
Patent number
12,363,948
Issue date
Jul 15, 2025
Applied Materials, Inc.
Myungsun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method
Patent number
12,363,959
Issue date
Jul 15, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Chuan Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Field effect transistor with negative capacitance dielectric struct...
Patent number
12,363,978
Issue date
Jul 15, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chansyun David Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection method and etching system
Patent number
12,362,208
Issue date
Jul 15, 2025
Tokyo Electron Limited
Takeshi Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical image capturing system, image capturing device and electron...
Patent number
12,352,932
Issue date
Jul 8, 2025
LARGAN PRECISION CO., LTD
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical integrated circuit structure including edge coupling protec...
Patent number
12,353,034
Issue date
Jul 8, 2025
Taiwan Semiconductor Manufacturing Company Limited
Chen-Hao Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fin height and STI depth for performance improvement in semiconduct...
Patent number
12,356,710
Issue date
Jul 8, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Kun-Yu Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing semiconductor device structure including bevel...
Patent number
12,353,129
Issue date
Jul 8, 2025
NANYA TECHNOLOGY CORPORATION
Sheng-Hui Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
12,347,656
Issue date
Jul 1, 2025
HITACHI HIGH-TECH CORPORATION
Yasushi Sonoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical device having a protrusion source
Patent number
12,349,435
Issue date
Jul 1, 2025
Taiwan Semiconductor Manufacturing Company Limited
De-Fang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and manufacturing method of semiconductor...
Patent number
12,347,693
Issue date
Jul 1, 2025
HITACHI HIGH-TECH CORPORATION
Yu Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Directional selective deposition
Patent number
12,347,674
Issue date
Jul 1, 2025
Applied Materials, Inc.
Bhargav S. Citla
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
12,347,645
Issue date
Jul 1, 2025
Tokyo Electron Limited
Shinya Morikita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
12,347,646
Issue date
Jul 1, 2025
Tokyo Electron Limited
Bongseong Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
End point detection method and apparatus for anisotropic etching us...
Patent number
12,347,663
Issue date
Jul 1, 2025
SanDisk Technologies, Inc.
Shoichi Murakami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching methods with alternating non-plasma and plasma etching proc...
Patent number
12,341,017
Issue date
Jun 24, 2025
American Air Liquide, Inc.
Xiangyu Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and plasma processing apparatus
Patent number
12,334,331
Issue date
Jun 17, 2025
Tokyo Electron Limited
Takayuki Katsunuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of optimizing film deposition process in semiconductor fabri...
Patent number
12,334,335
Issue date
Jun 17, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Rei-Lin Chu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for plasma etching
Patent number
12,334,353
Issue date
Jun 17, 2025
SPTS Technologies Limited
Weikang Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressure control device
Patent number
12,334,355
Issue date
Jun 17, 2025
Fujikin Incorporated
Kaoru Hirata
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HIGH ASPECT RATIO CARBON LAYER ETCH WITH IMPROVED THROUGHPUT AND PR...
Publication number
20250232981
Publication date
Jul 17, 2025
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20250234581
Publication date
Jul 17, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Jiun-Ming Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING NANOSHEET TRANSISTOR AND METHODS OF FAB...
Publication number
20250234592
Publication date
Jul 17, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Bo Wei LAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OXIDATION BASED ATOMIC LAYER ETCHING
Publication number
20250232982
Publication date
Jul 17, 2025
TOKYO ELECTRON LIMITED
Kangyi LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOUBLE PATTERNING TECHNIQUES FOR FORMING A DEEP TRENCH ISOLATION ST...
Publication number
20250233013
Publication date
Jul 17, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chao CHIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR PROTECTING A PERIPHERAL EDGE AND BACKSIDE OF A SEMICOND...
Publication number
20250226208
Publication date
Jul 10, 2025
TOKYO ELECTRON LIMITED
Shan Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE INCLUDING DISCHARGE STRUCTURES AND METHOD F...
Publication number
20250226231
Publication date
Jul 10, 2025
Taiwan Semiconductor Manufacturing company Ltd.
YAO-JEN TSAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA TREATMENT DEVICE AND ETCHING METHOD
Publication number
20250226183
Publication date
Jul 10, 2025
TOKYO ELECTRON LIMITED
Natsumi TORII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHER WITH EDGE RING AND METHOD OF PROCESSING SEMICONDUCTOR...
Publication number
20250226188
Publication date
Jul 10, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIATIVE HEAT WINDOWS AND WAFER SUPPORT PADS IN VAPOR ETCH REACTORS
Publication number
20250218819
Publication date
Jul 3, 2025
LAM RESEARCH CORPORATION
Ilia Kalinovski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, REC...
Publication number
20250218786
Publication date
Jul 3, 2025
Kokusai Electric Corporation
Masato KAWANISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20250221027
Publication date
Jul 3, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuo-Pi TSENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20250215320
Publication date
Jul 3, 2025
TOKYO ELECTRON LIMITED
Ryo MATSUBARA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20250218785
Publication date
Jul 3, 2025
TES CO., LTD.
Bongsoo KWON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
Publication number
20250220941
Publication date
Jul 3, 2025
ENKRIS SEMICONDUCTOR, INC.
Kai CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multiple State Pulsing for High Aspect Ratio Etch
Publication number
20250210364
Publication date
Jun 26, 2025
LAM RESEARCH CORPORATION
Aniruddha Joi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PACKAGING SEMICONDUCTOR DIES
Publication number
20250210376
Publication date
Jun 26, 2025
SPTS TECHNOLOGIES LIMITED
Liam Andrew John CHARD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAULT ISOLATION FOR SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20250208061
Publication date
Jun 26, 2025
Intel Corporation
Megan KNAPP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20250210416
Publication date
Jun 26, 2025
Kabushiki Kaisha Toshiba
Etsuo HAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF TREATING A SEMICONDUCTOR SUBSTRATE AND APPARATUS
Publication number
20250210362
Publication date
Jun 26, 2025
SPTS TECHNOLOGIES LIMITED
Eloise BOND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAST ATOMIC LAYER ETCH
Publication number
20250210363
Publication date
Jun 26, 2025
LAM RESEARCH CORPORATION
Wenbing YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
Publication number
20250210415
Publication date
Jun 26, 2025
WINBOND ELECTRONICS CORP.
Shih-Han Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron-Stimulated Etching of Silicon
Publication number
20250210361
Publication date
Jun 26, 2025
Applied Materials, Inc.
Sonam Dorje SHERPA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE WITH REDUCED LOADING EFFECT
Publication number
20250212497
Publication date
Jun 26, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Lun Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Formation Of Gate All Around Device
Publication number
20250203942
Publication date
Jun 19, 2025
Applied Materials, Inc.
Myungsun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TANTALUM ELECTRODE WITH TANTALUM NITRIDE LINER AS RIE DIFFUSION BAR...
Publication number
20250201716
Publication date
Jun 19, 2025
International Business Machines Corporation
Luxherta Buzi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND CHEMICAL VAPOR DEPOSITION APPARATUS FOR MANUFACTURING SE...
Publication number
20250201568
Publication date
Jun 19, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsz-Mei KWOK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD
Publication number
20250201592
Publication date
Jun 19, 2025
HUAYING RESEARCH CO., LTD
Sophia Ziying WEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A FINFET WITH MERGED EXPITAXIAL SOURCE/DRAI...
Publication number
20250203917
Publication date
Jun 19, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Min LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING SUBSTRATES USING VAPOR ADSORPTION
Publication number
20250201569
Publication date
Jun 19, 2025
Applied Materials, Inc.
Sonam Dorje Sherpa
H01 - BASIC ELECTRIC ELEMENTS