This application is a continuation of Application Ser. No. 09/119,453, filed on Jul. 21, 1998, now U.S. Pat. No. 6,214,089, which is a continuation of Application Ser. No. 08/665,142, filed on Jun. 14, 1996 (now U.S. Pat. No. 5,785,741), which is a continuation-in-part of Application Ser. No. 08/503,325, filed on Jul. 15, 1995 (now abandoned).
Number | Name | Date | Kind |
---|---|---|---|
2947687 | Lee | Aug 1960 | A |
2953502 | Binning et al. | Sep 1960 | A |
2960462 | Lee et al. | Nov 1960 | A |
2970106 | Binning et al. | Jan 1961 | A |
3508994 | Nyrop | Apr 1970 | A |
3616607 | Klass et al. | Nov 1971 | A |
3648845 | Riley | Mar 1972 | A |
4086310 | Bottenbruch et al. | Apr 1978 | A |
4113628 | Alegranti | Sep 1978 | A |
4119417 | Heki et al. | Oct 1978 | A |
4132824 | Kimura et al. | Jan 1979 | A |
4155793 | Salemme et al. | May 1979 | A |
4156597 | Browall | May 1979 | A |
4178224 | Porter | Dec 1979 | A |
4192824 | Robinson et al. | Mar 1980 | A |
4378324 | Makino et al. | Mar 1983 | A |
4424067 | Tarasenko et al. | Jan 1984 | A |
4460526 | Makino et al. | Jul 1984 | A |
4474662 | Makino et al. | Oct 1984 | A |
4485056 | Makino et al. | Nov 1984 | A |
4512893 | Makino et al. | Apr 1985 | A |
4553983 | Baker | Nov 1985 | A |
4602922 | Cabasso et al. | Jul 1986 | A |
4664669 | Ohyabu et al. | May 1987 | A |
4689267 | Takamizawa et al. | Aug 1987 | A |
4701187 | Choe et al. | Oct 1987 | A |
4713292 | Takemura et al. | Dec 1987 | A |
4714481 | Matsuura et al. | Dec 1987 | A |
4717394 | Hayes | Jan 1988 | A |
4741829 | Takemura et al. | May 1988 | A |
4743435 | Kitahara et al. | May 1988 | A |
4756932 | Puri | Jul 1988 | A |
4784837 | Kitayama et al. | Nov 1988 | A |
4826599 | Bikson et al. | May 1989 | A |
4880441 | Kesting et al. | Nov 1989 | A |
4881953 | Prasad et al. | Nov 1989 | A |
4910001 | Kitahara et al. | Mar 1990 | A |
4941893 | Hsieh et al. | Jul 1990 | A |
4957513 | St. Hilaire | Sep 1990 | A |
4988371 | Jeanes et al. | Jan 1991 | A |
4996030 | Kitahara et al. | Feb 1991 | A |
5009869 | Weinberg et al. | Apr 1991 | A |
5051114 | Nemser et al. | Sep 1991 | A |
5064447 | Lee | Nov 1991 | A |
5085676 | Ekiner et al. | Feb 1992 | A |
5182088 | Leondaridis et al. | Jan 1993 | A |
5196616 | Lee et al. | Mar 1993 | A |
5226932 | Prasad | Jul 1993 | A |
5240471 | Barbe et al. | Aug 1993 | A |
5256295 | Baker et al. | Oct 1993 | A |
5256296 | Baker et al. | Oct 1993 | A |
5281253 | Thompson | Jan 1994 | A |
5281255 | Toy et al. | Jan 1994 | A |
5282964 | Young et al. | Feb 1994 | A |
5282969 | Xu | Feb 1994 | A |
5288304 | Koros et al. | Feb 1994 | A |
5290341 | Barbe | Mar 1994 | A |
5378439 | Delobel et al. | Jan 1995 | A |
5383956 | Prasad et al. | Jan 1995 | A |
5383957 | Barbe et al. | Jan 1995 | A |
5429662 | Fillet | Jul 1995 | A |
5538536 | Fuentes et al. | Jul 1996 | A |
5618332 | Ekiner et al. | Apr 1997 | A |
5730779 | Chernyakov et al. | Mar 1998 | A |
5759237 | Li et al. | Jun 1998 | A |
5779763 | Pinnau et al. | Jul 1998 | A |
5785741 | Li et al. | Jul 1998 | A |
5814127 | Li | Sep 1998 | A |
5843208 | Anumakonda et al. | Dec 1998 | A |
5855647 | Li et al. | Jan 1999 | A |
5858065 | Li et al. | Jan 1999 | A |
5858066 | O'Brien et al. | Jan 1999 | A |
5919285 | Li et al. | Jul 1999 | A |
5976222 | Yang et al. | Nov 1999 | A |
6032484 | Chernyakov et al. | Mar 2000 | A |
6214089 | Li et al. | Apr 2001 | B1 |
Number | Date | Country |
---|---|---|
0 171 879 | Feb 1986 | EP |
0 239 190 | Sep 1987 | EP |
0 358 915 | Mar 1990 | EP |
0 389 126 | Sep 1990 | EP |
0 521 784 | Jan 1993 | EP |
61-187918 | Aug 1986 | JP |
63-126522 | May 1988 | JP |
4-322716 | Nov 1991 | JP |
3 -284335 | Dec 1991 | JP |
4-016213 | Jan 1992 | JP |
6-254367 | Sep 1994 | JP |
9015662 | Dec 1990 | WO |
Entry |
---|
Michael T. Mocella, “Perfluorocompound Emission Reduction from Semiconductor Processing Tools: An Overview of Options and Strategies,” Global Warming Symposium, Dallas, TX, Jun. 7-8, 1994. |
Larry Anderson, “Vector Technology's Phoenix Combustor,” Global Warming Symposium, Dallas, TX, Jun. 7-8, 1994. |
AT&T, Microelectronics and Novapure Corp., “PFC Concentration and Recycle,” Global Warming Symposium, Dallas, TX, Jun. 7-8, 1994. |
Air Liquide America Corporation, “Solval™ Solvent Condensation and Recovery, System,” Technical Bulletin, 1994. |
Shan-Tao Hsieh and George E. Keller, II, “Separation of Hydrogen From Silan Via Membranes: A Step in the Production of Ultra-High-Purity Silicon,” Journal of Membrane Science, 70 (1992) pp. 143-152. |
Japanese Abstract Only JP60022902, from the European Patent Office Abstract 85-066277. |
William M. Carson; Kimberly A. Christian; Eugene C. Crossland; Thomas H. Hsiung; Robert G. Ridgeway; and James H. Yang, “large Scale PFC Capture System,” (Air Products and Chemicals, Inc.) presented at Semicon Southwest, Austin, TX, Oct. 13, 1997. |
V. Stannett and J.L. Williams, “The Permeability of Poly(ethyl Methacrylate) to Gases and Water Vapor” Journal of Polymer Science: Part C, No. 10, pp. 45-49, (1965). |
Francis J. Norton, “Gas Permeation through Lexan Polycarbonate Resin,” Journal of Applied Polymer Science, vol. 7, pp. 1649-1659, (1963). |
Polymeric Gas Separation Membranes, edited by D.R. Paul and Yuri P. Yampol'skii, CRC Press, Inc., 1994, pp. 186-189, 202, 206, 364, 365, 397. |
Chemical Mechanical Technology 41, “New Development of High-Level Separation,” edited by Kagaku Kogaku Kai, published by San-ei Shuppan, May 20, 1989 (partial translation provided), pp. 276-281. |
R. Rautenbach and K. Welsch, “Treatment of landfill gas by gas permeation—pilot plant results and comparison to alternatives,” published by Elsevier Science Publishers B.V., Desalination, 90 (1993), pp. 193-197. |
JSME Mechanical Engineers' Handbook, edited by Nihon Kikai Gakkai, Apr. 15, 1987, pp. 114-117. |
Basic Principles of Membrane Technology, Marcel Mulder, Kluwer Academic Publishers, 1991, pp. 318-324. |
Latest Membrane Treatment Technology and Application Thereof, edited by Hiroshi Shimizu and Masato Nisihmura (supervisors), published by Fuji Technosystem, Aug. 1, 1984, pp. 275-279 (partial translation provided). |
Number | Date | Country | |
---|---|---|---|
Parent | 09/119453 | Jul 1998 | US |
Child | 09/768262 | US | |
Parent | 08/665142 | Jun 1996 | US |
Child | 09/119453 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 08/503325 | Jul 1995 | US |
Child | 08/665142 | US |