Number | Date | Country | Kind |
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92-25455 | Dec 1992 | KRX |
Number | Name | Date | Kind |
---|---|---|---|
4171242 | Liu | Oct 1979 | |
5232511 | Bergman | Oct 1993 |
Number | Date | Country |
---|---|---|
4-144131 | May 1992 | JPX |
4-263086 | Sep 1992 | JPX |
Entry |
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"Ultra-Clean Low Temperature SI Processes Under The Assistance Of Energy Controlled Ion Bombardment," 1991 International Conference On Solid State Devices And Materials, pp. 481-483, By T. Ohmi. |