Number | Name | Date | Kind |
---|---|---|---|
4153201 | Berger et al. | May 1979 | |
4301968 | Berger et al. | Nov 1981 | |
4337896 | Berger et al. | Jul 1982 | |
4352459 | Berger et al. | Oct 1982 | |
4541564 | Berger et al. | Sep 1985 | |
4642581 | Erickson | Feb 1987 | |
4723708 | Berger et al. | Feb 1988 | |
4806455 | LaBianca | Feb 1989 |
Entry |
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K. Shidmore, "Applying Photoresist for Optical Coatings", Semiconductor International, Feb. 1988, pp. 56-62. |