Number | Name | Date | Kind |
---|---|---|---|
3807870 | Kalman | Apr 1974 | A |
3994586 | Sharkins et al. | Nov 1976 | A |
4320967 | Edgar | Mar 1982 | A |
4832490 | Boos et al. | May 1989 | A |
5208645 | Inoue et al. | May 1993 | A |
5282217 | Yamazaki | Jan 1994 | A |
5289265 | Inoue et al. | Feb 1994 | A |
5289266 | Shih et al. | Feb 1994 | A |
5355083 | George et al. | Oct 1994 | A |
5416574 | Fantone | May 1995 | A |
5564830 | Bobel et al. | Oct 1996 | A |
5657124 | Zhang et al. | Aug 1997 | A |
5696583 | Yoon | Dec 1997 | A |
5772861 | Meredith, Jr. et al. | Jun 1998 | A |
5841138 | Prekel et al. | Nov 1998 | A |
6055058 | Kahbichler et al. | Apr 2000 | A |
6128087 | Meredith, Jr. et al. | Oct 2000 | A |
Number | Date | Country |
---|---|---|
198 14 056 | Nov 1999 | DE |
0011723 | Oct 1979 | EP |
2 589 578 | Jul 1987 | FR |
Entry |
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“Measurements of Optical Constants of Thin Films”, O.S. Heavens, Phys. Thin Films, 2 (1964) S. 193-238. |
“Optical monitoring comparison of different monitoring strategies with respect to the resulting reproducibility to the completed layer systems”, A. Zöller, R. Herrmann, W. Klug and W. Zültzke, Thin Film Technologies II, (1985) SPIE vol. 552, 21-26. |