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Thin Solid Films, vol. 124, pp. 55-58, 1985, "Sputter Deposition of Dielectric Films . . . ", M. N. Khan. |
CIP 85, 5th Internation Colloquium On Plasmas And Sputtering, 1985, pp. 285-288, "Depot Du Quartz En Pulverisation Cathodique", D. Hinson et al. |
Applied Optics, vol. 23, No. 4, pp. 552-559, 1984, "Ion Assisted Deposition Of Optical Films . . . ", J. R. McNeil et al. |
IBM Tech. Disc. Bul., vol. 27, No. 10A, 1985, pp. 5649-5650, "Process For Fabrication Of Sharply Defined Multilayer Thin Film". |
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