Number | Name | Date | Kind |
---|---|---|---|
3661582 | Broyde | May 1972 | |
4238559 | Feng et al. | Dec 1980 | |
4564584 | Fredericks et al. | Jan 1986 |
Number | Date | Country |
---|---|---|
0211350 | Jul 1986 | EPX |
0036648 | Apr 1981 | JPX |
Entry |
---|
Novolac Resins Used in Positive Resist Systems, T. R. Pampalone, Solide State Technology, Jun. 1984, pp. 115-120. |