Patent Application
20180371145
The present invention relates to a process for improving the critical dimension uniformity of ordered films of a composition comprising a block copolymer deposited on a surface without degradation of the other critical structuring parameters (kinetics, structuring defects, period, thickness), this being whatever the orientation (perpendicular to the substrate, parallel to the substrate, etc.); this composition having a product Xeffective*N (with Xeffective=Flory-Huggins parameter between the blocks under consideration, and N the total degree of polymerization of these blocks) of between 10.5 and 40, limits included, at the structuring temperature of the composition. N can be linked to the molecular weight at the peak Mp of a block copolymer measured by GPC (“Gel Permeation Chromatography”) by the following relationship: N=Mp/m, where m is the molar mass of the monomer and for several monomers: m=Σ(fi*mi), with fi=mass fraction of the constituent “i” and mi its molar mass.
The invention also relates to the ordered films thus obtained that can be used in particular as masks in the lithography field and also to the masks obtained.
The use of block copolymers to generate lithography masks is now well known. While this technology is promising, it may only be accepted if the levels of defects resulting from the self-organization process are sufficiently low and compatible with the standards established by the ITRS (http://www.itrs.net/). As a result, it thus appears to be necessary to have available block copolymers, the structuring process of which generates the fewest possible defects in a given time in order to facilitate the industrialization of these polymers in applications such as those of microelectronics.
The nanostructuring of a block copolymer of a surface treated by the process of the invention can take the forms such as cylindrical (hexagonal symmetry (primitive hexagonal lattice symmetry “6 mm”) according to the Hermann-Mauguin notation, or tetragonal symmetry (primitive tetragonal lattice symmetry “4 mm”)), spherical (hexagonal symmetry (primitive hexagonal lattice symmetry “6 mm” or “6/mmm”), or tetragonal symmetry (primitive tetragonal lattice symmetry “4 mm”), or cubic symmetry (lattice symmetry “m⅓m”)), lamellar or gyroidal. Preferably, the preferred form which the nanostructuring takes is of the hexagonal cylindrical type.
The process for the structuring of block copolymers on a surface treated according to the invention is governed by thermodynamic laws. When the structuring results in a morphology of cylindrical type, each cylinder is surrounded by 6 equidistant neighbouring cylinders if there is no defect. Several types of defects can thus be identified. The first type is based on the evaluation of the number of neighbours around a cylinder which constitutes the arrangement of the block copolymer, also known as coordination number defects. If five or seven cylinders surround the cylinder under consideration, a coordination number defect will be regarded as being present. The second type of defect considers the mean distance between the cylinders surrounding the cylinder under consideration [W. Li, F. Qiu, Y. Yang and A. C. Shi, Macromolecules, 43, 2644 (2010); K. Aissou, T. Baron, M. Kogelschatz and A. Pascale, Macromol., 40, 5054 (2007); R. A. Segalman, H. Yokoyama and E. J. Kramer, Adv. Matter. 13, 1152 (2003); R. A. Segalman, H. Yokoyama and E. J. Kramer, Adv. Matter. 13, 1152 (2003)]. When this mean distance between two neighbours is greater than two % of the mean distance between two neighbours, a defect will be regarded as being present. In order to determine these two types of defects, use is conventionally made of the associated Voronoi constructions and Delaunay triangulations. After binarization of the image, the centre of each cylinder is identified. The Delaunay triangulation subsequently makes it possible to identify the number of first-order neighbours and to calculate the mean distance between two neighbours. It is thus possible to determine the number of defects.
This counting method is described in the article by X. Chevalier, C. Navarro et al. (J. Vac. Sci. Technol. B 29(6), 1071-1023, 2011).
A final type of defect relates to the angle of cylinders of the block copolymer which is deposited on the surface. When the block copolymer is no longer perpendicular to the surface but lying down parallel to the latter, a defect of orientation will be regarded as having appeared.
In addition to the defects, the critical dimension uniformity (CDU) in an ordered film of block copolymers exhibiting a cylindrical morphology corresponds to the uniformity in size of the diameter of the cylinders. In the ideal case, it is necessary for all the cylinders to exhibit the same diameter, as any variation in this diameter will bring about variations in the performance (conductivity, characteristics of the transfer curves, thermal power discharged, resistance, and the like) for the applications under consideration. For a lamellar morphology, reference will be made to uniformity of distance between the lamellae.
Pure block copolymers (BCPs) which structure themselves into ordered films and which exhibit the best possible regularity of the diameters of the cylinders (or of the lamellare) are difficult to obtain when these BCPs have high molecular weights or high values for parameters of interaction between the blocks (Flory-Huggins parameter (X)).
While the current trend is towards periods much lower than 20 nm, in particular through the use of copolymers which exhibit a high Flory-Huggins (X) parameter, the applicant has noted that, on this scale with such copolymers, it is difficult to obtain films with a CDU that is compatible with industrial applications.
The applicant has noted that, within a range of the product Xeffective*N of between 10.5 and 40, preferably between 15 and 30 and even more preferably between 17 and 25, at the structuring temperature, and characterizing the composition comprising at least one block copolymer, the films obtained exhibit an improved critical dimension uniformity.
The term “structuring” refers to the process of establishing a self-organized phase, either in which the orientation of the structures is entirely homogeneous (for example perpendicular relative to the substrate, or parallel thereto), or which exhibits a mixture of orientations of the structures (perpendicular and parallel), and which has a degree of structuring that can be quantified by any technique known to those skilled in the art. For example, but in a non-limiting manner, in the case of a perpendicular, hexagonal, cylindrical homogeneous phase, this order can be defined by a given amount of coordination number defects or, in a quasi-equivalent manner, a given “grain size” (the “grain” being a quasiperfect monocrystal in which the units exhibit similar periodic or quasiperiodic positional and translational order). In the case where the self-organized phase exhibits a mixture of orientations of its structures, the order may be defined according to amounts of orientation defects and a grain size; it is also considered that this mixed phase is a transient state tending towards a homogeneous phase.
The term “structuring time” refers to the time required for the structuring to reach a defined order state (for example a given amount of defects, or a given grain size), following a self-organization process defined by given conditions (for example thermal annealing performed at a given temperature, for a predetermined period of time).
In addition to the advantages described above, the process of the invention also makes it possible to advantageously reduce interface roughness defects. Indeed, for example but non-exhaustively, in the case of lamellar morphology, a rough interface (denoted LER for “line edge roughness”) can be observed when the structuring is not absolutely completed (which would require, for example, exceeding the time assigned for an industrial process, using annealing for a longer time) for the compositions not included in the invention. This roughness can also be observed if the desired film thicknesses are too large for given compositions, or else for example in the case of thermal annealing if the temperature required to establish the structuring is too high with respect to the heat stability of the composition. The invention makes it possible to overcome this problem given that the compositions described by the invention very rapidly complete their structuring, for large film thicknesses, with few or no defects, and for annealing temperatures that are lower than those required for block copolymers of equivalent dimensions not described by the invention.
The invention relates to a process which makes it possible to improve the critical dimension uniformity of structured films of a composition comprising at least one block copolymer on a surface, and which comprises the following steps:
As regards the composition used in the process in accordance with the invention, any block copolymer, or blend of block copolymers, may be used in the context of the invention, provided that the product Xeffective*N of the composition comprising a block copolymer is between 10.5 and 40, preferably between 15 and 30, and even more preferably between 17 and 25 at the structuring temperature of this composition.
The Xeffective can be calculated by means of the equations of Brinke et al., Macromolecules, 1983, 16, 1827-1832. N is the total number of monomeric entities of the block copolymer.
According to a first preference, the composition comprises a triblock copolymer or a blend of triblock copolymers. According to a second preference, the composition comprises a diblock copolymer or a blend of diblock copolymers. Each block of the triblock or diblock copolymers of the composition may contain between 1 and 3 monomers, which will make it possible to finely adjust the Xeffective*N between 10.5 and 40.
The copolymers used in the composition have a molecular weight at the peak measured by SEC (Size Exclusion Chromatography) of between 100 and 500 000 g/mol and a dispersity of between 1 and 2.5, limits included, and preferably of between 1.05 and 2, limits included.
The block copolymers can be synthesized by any technique known to those skilled in the art, among which may be mentioned polycondensation, ring opening polymerization or anionic, cationic or radical polymerization. When the copolymers are prepared by radical polymerization, the latter can be controlled by any known technique, such as NMP (“Nitroxide Mediated Polymerization”), RAFT (“Reversible Addition and Fragmentation Transfer”), ATRP (“Atom Transfer Radical Polymerization”), INIFERTER (“Initiator-Transfer-Termination”), RITP (“Reverse Iodine Transfer Polymerization”) or ITP (“Iodine Transfer Polymerization”).
According to a preferred form of the invention, the block copolymers are prepared by nitroxide-mediated polymerization.
More particularly, the nitroxides resulting from the alkoxyamines derived from the stable free radical (1) are preferred.
in which the radical RL exhibits a molar mass of greater than 15.0342 g/mol. The radical RL may be a halogen atom such as chlorine, bromine or iodine, a saturated or unsaturated, linear, branched or cyclic, hydrocarbon-based group, such as an alkyl or phenyl radical, or an ester group —COOR or an alkoxyl group —OR or a phosphonate group —PO(OR)2, as long as it has a molar mass greater than 15.0342. The radical RL, which is monovalent, is said to be in the β position with respect to the nitrogen atom of the nitroxide radical. The remaining valencies of the carbon atom and of the nitrogen atom in the formula (1) can be bonded to various radicals, such as a hydrogen atom or a hydrocarbon radical, for instance an alkyl, aryl or arylalkyl radical, comprising from 1 to 10 carbon atoms. It is not out of the question for the carbon atom and the nitrogen atom in the formula (1) to be connected to one another via a divalent radical, so as to form a ring. Preferably however, the remaining valencies of the carbon atom and of the nitrogen atom of the formula (1) are bonded to monovalent radicals. Preferably, the radical RL exhibits a molar mass of greater than 30 g/mol. The radical RL can, for example, have a molar mass of between 40 and 450 g/mol. By way of example, the radical RL can be a radical comprising a phosphoryl group, it being possible for said radical RL to be represented by the formula:
in which R3 and R4, which can be identical or different, can be chosen from alkyl, cycloalkyl, alkoxyl, aryloxyl, aryl, aralkyloxyl, perfluoroalkyl or aralkyl radicals and can comprise from 1 to 20 carbon atoms. R3 and/or R4 can also be a halogen atom, such as a chlorine or bromine or fluorine or iodine atom. The radical RL can also comprise at least one aromatic ring, such as for the phenyl radical or the naphthyl radical, it being possible for the latter to be substituted, for example with an alkyl radical comprising from 1 to 4 carbon atoms.
More particularly, the alkoxyamines derived from the following stable radicals are preferred:
The alkoxyamines used in controlled radical polymerization must allow good control of the linking of the monomers. Thus, they do not all allow good control of certain monomers. For example, the alkoxyamines derived from TEMPO make it possible to control only a limited number of monomers; the same is true for the alkoxyamines derived from 2,2,5-trimethyl-4-phenyl-3-azahexane-3-nitroxide (TIPNO). On the other hand, other alkoxyamines derived from nitroxides corresponding to formula (1), particularly those derived from nitroxides corresponding to formula (2) and even more particularly those derived from N-(tert-butyl)-1-diethylphosphono-2,2-dimethyl propyl nitroxide, make it possible to broaden the controlled radical polymerization of these monomers to a large number of monomers.
In addition, the alkoxyamine opening temperature also influences the economic factor. The use of low temperatures will be preferred in order to minimize industrial difficulties. The alkoxyamines derived from nitroxides corresponding to formula (1), particularly those derived from nitroxides corresponding to formula (2) and even more particularly those derived from N-(tert-butyl)-1-diethylphosphono-2,2-dimethyl propyl nitroxide, will therefore be preferred to those derived from TEMPO or 2,2,5-trimethyl-4-phenyl-3-azahexane-3-nitroxide (TIPNO).
According to a second preferred form of the invention, the block copolymers are prepared by anionic polymerization.
When the polymerization is carried out in controlled radical fashion, the constituent monomers of the block copolymers will be chosen from vinyl, vinylidene, diene, olefinic, allyl or (meth)acrylic monomers. This monomer is more particularly chosen from vinylaromatic monomers, such as styrene or substituted styrenes, in particular α-methylstyrene, silylated styrenes, acrylic monomers, such as acrylic acid or its salts, alkyl, cycloalkyl or aryl acrylates, such as methyl, ethyl, butyl, ethylhexyl or phenyl acrylate, hydroxyalkyl acrylates, such as 2-hydroxyethyl acrylate, ether alkyl acrylates, such as 2-methoxyethyl acrylate, alkoxy- or aryloxypolyalkylene glycol acrylates, such as methoxypolyethylene glycol acrylates, ethoxypolyethylene glycol acrylates, methoxypolypropylene glycol acrylates, methoxypolyethylene glycol-polypropylene glycol acrylates or mixtures thereof, aminoalkyl acrylates, such as 2-(dimethylamino)ethyl acrylate (ADAME), fluoroacrylates, silylated acrylates, phosphorus-comprising acrylates, such as alkylene glycol acrylate phosphates, glycidyl acrylate or dicyclopentenyloxyethyl acrylate, methacrylic monomers, such as methacrylic acid or its salts, alkyl, cycloalkyl, alkenyl or aryl methacrylates, such as methyl (MMA), lauryl, cyclohexyl, allyl, phenyl or naphthyl methacrylate, hydroxyalkyl methacrylates, such as 2-hydroxyethyl methacrylate or 2-hydroxypropyl methacrylate, ether alkyl methacrylates, such as 2-ethoxyethyl methacrylate, alkoxy- or aryloxypolyalkylene glycol methacrylates, such as methoxypolyethylene glycol methacrylates, ethoxypolyethylene glycol methacrylates, methoxypolypropylene glycol methacrylates, methoxypolyethylene glycol-polypropylene glycol methacrylates or mixtures thereof, aminoalkyl methacrylates, such as 2-(dimethylamino)ethyl methacrylate (MADAME), fluoromethacrylates, such as 2,2,2-trifluoroethyl methacrylate, silylated methacrylates, such as 3-methacryloyloxypropyltrimethylsilane, phosphorus-comprising methacrylates, such as alkylene glycol methacrylate phosphates, hydroxyethylimidazolidone methacrylate, hydroxyethylimidazolidinone methacrylate or 2-(2-oxo-1-imidazolidinyl)ethyl methacrylate, acrylonitrile, acrylamide or substituted acrylamides, 4-acryloylmorpholine, N-methylolacrylamide, methacrylamide or substituted methacrylamides, N-methylolmethacrylamide, methacrylamidopropyltrimethylammonium chloride (MAPTAC), glycidyl methacrylate, dicyclopentenyloxyethyl methacrylate, itaconic acid, maleic acid or its salts, maleic anhydride, alkyl or alkoxy- or aryloxypolyalkylene glycol maleates or hemimaleates, vinylpyridine, vinylpyrrolidinone, (alkoxy)poly(alkylene glycol) vinyl ethers or divinyl ethers, such as methoxypoly(ethylene glycol) vinyl ether or poly(ethylene glycol) divinyl ether, olefinic monomers, among which may be mentioned ethylene, butene, hexene and 1-octene, 1,1-diphenylethylene, diene monomers, including butadiene or isoprene, as well as fluoroolefinic monomers and vinylidene monomers, among which may be mentioned vinylidene fluoride, alone or as a mixture of at least two abovementioned monomers.
Indeed, while wishing to maintain a value of the product Xeffective*N in the range of between 10.5 and 40, preferably between 15 and 30 and even more preferably between 17 and 25, it is sometimes necessary to use several monomers, typically 2 or 3, in one or more blocks when particular periods are targeted.
The term “period” is intended to mean the mean minimum distance separating two neighbouring domains having the same chemical composition, separated by a domain having a different chemical composition.
Typically, in the case of a diblock copolymer prepared by controlled or non-controlled radical polymerization, which is a preference in the context of the process that is the subject of the invention, it will be possible for example to consider a structure A-b-(B-co-C) wherein the block A consists of a single monomer A and the block B/C itself consists of two monomers B and C, C possibly being A. In the latter case, the structure of the diblock copolymer will be expressed A-b-(B-co-A).
In considering the reactivity ratios rb and rc respectively of the monomers B and C (C possibly being A), it will be possible to distinguish several configurations corresponding to particular advantages when the polymerization is carried out batchwise, that is to say that the monomers B and C are introduced entirely at the beginning of the polymerization of the (B-co-C) block. These configurations are known from the literature, see for example the book by Gnanou and Fontanille, Organic and physical chemistry of polymers, Wiley, ISBN 978-0-471-72543-5. The composition diagram of page 298 of this book is reproduced in
According to a first preference, rb will be greater than 1 and rc less than 1. This will result in a block (B-co-C), the composition of which will be a gradient beginning with a composition rich in monomer B and low in monomer C and finishing with a composition rich in C and low in B.
According to a second preference, rb will be between 0.95 and 1.05 and rc will be between 0.95 and 1.05. This will result in a block (B-co-C), the composition of which will be random.
According to a third preference, rb will be less than 1 and rc less than 1. This will result in a block (B-co-C), the composition of which will have a marked tendency towards the alternating of the monomers B and C.
According to a fourth preference, rb will be less than 1 and rc greater than 1. This will result in a block (B-co-C), the composition of which will be a gradient beginning with a composition rich in monomer C and low in monomer B and finishing with a composition rich in B and low in C.
According to a fifth preference and depending on the type of monomers B and C used, to counteract the effects relating to the reactivity ratios, it will be possible to carry out a continuous injection of both or of one of the two monomers B and C. This makes it possible either to dispense with the composition drift related to the reactivity ratios or to force this composition drift.
According to a sixth preference, a combination of preferences one to four with the preference five may be used, that is to say that a portion of the block (B-co-C) may be prepared in a first step according to preference one to four, and another portion may be prepared in a second step according to the same preference one to four or preference five.
According to a seventh preference, the synthesis of the (B-co-C) block will be carried out in two steps corresponding to two feedstocks of monomers B and C, optionally of equivalent composition, the second feedstock being added to the reaction mixture once the first feedstock has been converted or partially converted, the monomers not converted in the first step being removed before the introduction of the second feedstock, this being regardless of the values of rb and rc.
Preferably, A is a styrene compound, more particularly styrene, and B is a (meth)acrylic compound, more particularly methyl methacrylate. This preferred choice makes it possible to maintain the same chemical stability as a function of the temperature, compared with a PS-b-PMMA block copolymer and also enables the use of the same sublayers as for a PS-b-PMMA, these sublayers consisting of random styrene/methyl methacrylate copolymers.
When the polymerization is carried out by the anionic route, the monomers will be chosen, in a non-limiting manner, from the following monomers:
at least one vinyl, vinylidene, diene, olefinic, allyl or (meth)acrylic monomer. These monomers are more particularly chosen from vinylaromatic monomers, such as styrene or substituted styrenes, in particular α-methylstyrene, acrylic monomers, such as alkyl, cycloalkyl or aryl acrylates, such as methyl, ethyl, butyl, ethylhexyl or phenyl acrylate, ether alkyl acrylates, such as 2-methoxyethyl acrylate, alkoxy- or aryloxypolyalkylene glycol acrylates, such as methoxypolyethylene glycol acrylates, ethoxypolyethylene glycol acrylates, methoxypolypropylene glycol acrylates, methoxypolyethylene glycol-polypropylene glycol acrylates or mixtures thereof, aminoalkyl acrylates, such as 2-(dimethylamino)ethyl acrylate (ADAME), fluoroacrylates, silylated acrylates, phosphorus-comprising acrylates, such as alkylene glycol acrylate phosphates, glycidyl acrylate or dicyclopentenyloxyethyl acrylate, alkyl, cycloalkyl, alkenyl or aryl methacrylates, such as methyl (MMA), lauryl, cyclohexyl, allyl, phenyl or naphthyl methacrylate, ether alkyl methacrylates, such as 2-ethoxyethyl methacrylate, alkoxy- or aryloxypolyalkylene glycol methacrylates, such as methoxypolyethylene glycol methacrylates, ethoxypolyethylene glycol methacrylates, methoxypolypropylene glycol methacrylates, methoxypolyethylene glycol-polypropylene glycol methacrylates or mixtures thereof, aminoalkyl methacrylates, such as 2-(dimethylamino)ethyl methacrylate (MADAME), fluoromethacrylates, such as 2,2,2-trifluoroethyl methacrylate, silylated methacrylates, such as 3-methacryloyloxypropyltrimethylsilane, phosphorus-comprising methacrylates, such as alkylene glycol methacrylate phosphates, hydroxyethylimidazolidone methacrylate, hydroxyethylimidazolidinone methacrylate or 2-(2-oxo-1-imidazolidinyl)ethyl methacrylate, acrylonitrile, acrylamide or substituted acrylamides, 4-acryloylmorpholine, N-methylolacrylamide, methacrylamide or substituted methacrylamides, N-methylolmethacrylamide, methacrylamidopropyltrimethylammonium chloride (MAPTAC), glycidyl methacrylate, dicyclopentenyloxyethyl methacrylate, maleic anhydride, alkyl or alkoxy- or aryloxypolyalkylene glycol maleates or hemimaleates, vinylpyridine, vinylpyrrolidinone, (alkoxy)poly(alkylene glycol) vinyl ethers or divinyl ethers, such as methoxypoly(ethylene glycol) vinyl ether or poly(ethylene glycol) divinyl ether, olefinic monomers, among which may be mentioned ethylene, butene, hexene and 1-octene, 1,1-diphenylethylene, diene monomers, including butadiene or isoprene, as well as fluoroolefinic monomers and vinylidene monomers, among which may be mentioned vinylidene fluoride, alone or as a mixture.
Indeed, while wishing to maintain a value of the product Xeffective*N in the range of between 10.5 and 40, preferably between 15 and 30 and even more preferably between 17 and 25, it is sometimes necessary to use several monomers, typically two, in one or more blocks when particular periods are targeted.
The term “period” is intended to mean the mean minimum distance separating two neighbouring domains having the same chemical composition, separated by a domain having a different chemical composition.
Typically, in the case of a diblock copolymer which is a preference in the context of the process that is the subject of the invention, it will be possible for example to consider a structure A-b-(B-co-C) wherein the block A consists of a single monomer A and the block B-co-C itself consists of two monomers B and C, C possibly being A. In the latter case, the structure of the diblock copolymer will be expressed A-b-(B-co-A).
Preferably, A is a styrene compound, more particularly styrene, and B is a (meth)acrylic compound, more particularly methyl methacrylate. C is preferably a styrene derivative, and preferably styrene, an aryl (meth)acrylate or a vinylaryl derivative.
Preferably, and in order to incorporate the monomers into the (B-co-C) block as successfully as possible, the reactive species of the monomers B and C will exhibit a difference in pKa of less than or equal to 2.
This rule is described in Advance in Polymer Science, Vol. 153, Springer-Verlag 2000, p. 79: The rule specifies that, for a given type of monomer, the initiator will have to have the same structure and the same reactivity as the propagating anionic species; in other words, the pKa of the conjugated acid of the anion that is propagating will have to correspond closely to the pKa of the conjugated acid of the species that is initiating. If the initiator is too reactive, side reactions between the initiator and the monomer may take place; if the initiator is not reactive enough, the initiating reaction will be slow and inefficient or may not take place.
The ordered film obtained with a composition comprising a block copolymer, this composition having a product between the Flory-Huggins chi parameter and the total degree of polymerization N, Xeffective*N, of between 10.5 and 40 will be able to contain additional compounds which are not block copolymers provided that this composition in the presence of these additional compounds has a product Xeffective*N, at the structuring temperature, typically between 10.5 and 40, preferably between 15 and 30 and even more preferably between 17 and 25. They can in particular be plasticizers, among which may be mentioned, without implied limitation, branched or linear phthalates, such as di(n-octyl), dibutyl, di(2-ethylhexyl), di(ethylhexyl), diisononyl, diisodecyl, benzyl butyl, diethyl, dicyclohexyl, dimethyl, di(linear undecyl) or di(linear tridecyl) phthalate, chlorinated paraffins, branched or linear trimellitates, in particular di(ethylhexyl) trimellitate, aliphatic esters or polymeric esters, epoxides, adipates, citrates, benzoates, fillers, among which may be mentioned inorganic fillers, such as carbon black, carbon or non-carbon nanotubes, ground or unground fibres, (light, in particular UV, and heat) stabilizing agents, dyes, photosensitive inorganic or organic pigments, such as, for example, porphyrins, photoinitiators, that is to say compounds capable of generating radicals under irradiation, polymeric or non-polymeric ionic compounds, taken alone or as a mixture.
The process of the invention allows an ordered film to be deposited on a surface such as silicon, the silicon exhibiting a native or thermal oxide layer, germanium, platinum, tungsten, gold, titanium nitrides, graphenes, BARC (“Bottom Anti-Reflective Coating”) or any other organic or inorganic anti-reflective layer used in lithography. Sometimes, it may be necessary to prepare the surface. Among the known possibilities, a random copolymer, the monomers of which can be identical in all or part to those used in the composition of block copolymer and/or of the compound which it is desired to deposit, is deposited on the surface. In a pioneering article, Mansky et al. (Science, Vol. 275, pages 1458-1460, 1997) give a good description of this technology, now well known to those skilled in the art. In a manner entirely similar to that described by Mansky et al., the surface may be modified with any other polymer (for example, a homopolymer of the block copolymer described in the context of this invention) or a copolymer that it will be judged appropriate to use.
The surfaces can be said to be “free” (flat and homogeneous surface, both from a topographical and from a chemical viewpoint) or can exhibit structures for guidance of the block copolymer “pattern”, whether this guidance is of the chemical guidance type (known as “guidance by chemical epitaxy”) or physical/topographical guidance type (known as “guidance by graphoepitaxy”).
In order to manufacture the ordered film, a solution of the block copolymer composition is deposited on the surface and then the solvent is evaporated according to techniques known to those skilled in the art, such as, for example, the spin coating, doctor blade, knife system or slot die system technique, but any other technique can be used, such as dry deposition, that is to say deposition without involving a predissolution.
A heat treatment or treatment by solvent vapour, a combination of the two treatments, or any other treatment known to those skilled in the art which makes it possible for the block copolymer composition to become correctly organized while becoming nanostructured, and thus to establish the ordered film, is subsequently carried out. In the preferred context of the invention, the curing is carried out thermally, for times of less than 24 h, preferably less than 1 h, and even more preferentially less than 5 minutes, at temperatures below 400° C., preferably below 300° C. and even more preferably below 270° C., but above the Tg of the copolymer(s) constituting the composition, this Tg being measured by differential scanning calorimetry (DSC).
The nanostructuring of a composition of the invention resulting in the ordered film can take the forms such as cylindrical (hexagonal symmetry (primitive hexagonal lattice symmetry “6 mm”) according to the Hermann-Mauguin notation, or tetragonal symmetry (primitive tetragonal lattice symmetry “4 mm”)), spherical (hexagonal symmetry (primitive hexagonal lattice symmetry “6 mm” or “6/mmm”), or tetragonal symmetry (primitive tetragonal lattice symmetry “4 mm”), or cubic symmetry (lattice symmetry “m⅓m”)), lamellar or gyroidal. Preferably, the preferred forms taken by the nanostructurings are of hexagonal cylindrical or lamellar type.
This nanostructuring may exhibit an orientation parallel or perpendicular to the substrate. Preferably, the orientation will be perpendicular to the substrate.
The images of the ordered BCP films are taken on a CD-SEM H9300 from Hitachi. The CD measurements are determined from the SEM images with the imageJ software developed by the National Institutes of Health (http://imagej.nih.gov) following specific processing, although other image processing software may also be used to achieve the same result. The image processing is carried out in four different steps: 1/“thresholding” the image in order to delimit the circumference of the perpendicular cylinders (determination of the detection threshold for the various levels of grey), 2/determining the area and diameter of the cylinders thus defined (these are put into the same category as ellipsoids), 3/distributing the diameters of the cylinders of the image according to a Gaussian distribution, 4/extracting the best parameters characterizing the Gaussian curve, including the appropriate “sigma” (standard deviation) of the latter giving the value of the CDU.
For a given image, the apparent diameter of the cylinders is closely dependent on the thresholding value of the image: when the threshold is too low, the number of cylinders detected is correct and close to its maximum value, but their diameter is underestimated; consequently, the sigma of the Gaussian curve is also underestimated. When the value of the threshold is correct, the correct number of cylinders is detected, and their diameter is close to its maximum value, without, however, being certain that the apparent diameter is the correct one. Finally, when the value of the threshold is too high, the apparent diameter is very close to its maximum value but via a higher value (the value of the sigma is thus possibly overestimated in this case), but a large number of cylinders are no longer detected since there is no longer any possible differentiation between the level of grey of the holes and the matrix. This effect of the value is illustrated in
Moreover, for a given thresholding level, the best parameters for adjusting the Gaussian curve depend on the “step” of the latter: if the step is too small, some frequency values will be zero even if located in the middle of the range of the diameter of the cylinders. Conversely, if the step is too large, the adjustment according to a Gaussian curve no longer makes sense because all the values will take a single value. It is thus necessary to determine the parameters for adjusting the Gaussian distribution for various values of the step of the curve (
Eventually, a single image is processed according to three different threshold values, and the Gaussian curve obtained for each of these three values is itself processed according to three different step values. There are thus 9 CDU values for a given image, the true value of the CDU being located between the minimum and maximum values of the CDU range obtained.
The invention also relates to the ordered films thus obtained that can be used in particular as masks in the lithography field and also to the masks obtained.
All the block copolymers were synthezied according to WO2015/011035.
PS-b-PMMA BCPs:
The X parameter for PS-b-PMMA system was measured experimentally in Y. Zhao & al., Macromolecules, 2008, 41 (24), pp 9948-9951, its value is given by the equation (1):
X
SM=0.0282+(4.46/T), (1)
where <<T>> is the self-assembly process temperature. thus at 225° C. for instance, XSM˜0.03715.
PS-b-P(MMA-co-S) BCPs:
From G. ten Brinke & al., Macromolecules, 1983, 16, 1827-1832, for a diblock copolymer where only one of the block is constituted of two different comonomers, written as “A-b-(B-co-C)”, the Flory-Huggins parameter of this system, written as “Xeff”, can be determined by the formula (2):
X
eff
=b
2
X
BC
+b(XAB−XAC−XBC)+XAC (2)
where:
Xeff=b2XAB. (3)
Since the relation
b=(1−c) (4)
is true, then equation (3) turns also to:
X
eff=(1−c)2XAB (5)
Thus in this particular case the Xeff parameter is a function of only the volumic fraction of the added co-monomer <<C>> in the modified block, in the notation <<A-b-(B-co-C)>> as compared to the simplest <<A-b-B>> one, and the initial X parameter between monomers “A” and “B”.
By analogy to the system of interest noted <<PS-b-P(MMA-co-S)>>, the relation (5) becomes:
X
eff=(1−s)2XSM (6)
Where <<S>> is the volumic fraction of styrene monomer introduced in the initial PMMA block, and XSM is the classical Flory-Huggins interaction parameter between styrene and methylmethacrylate blocks.
By progressively varying the styrenic fraction in the MMA block, and combining the relations (1) and (6), the Xeff parameter is known for each value of the self-assembly temperature. The following table (Table 1) gathers these as-calculated values of Xeff for each point of interest in the styrene fraction versus self-assembly temperature matrix.
From the Table 1, the variation of the Xeff parameter as function of the styrene volumic fraction and for a specific temperature can be plotted on a graph as shown on
This example illustrate how the invention can be used to tailor an “initial” X*N product of given BCPs (i.e. the ones of references BCPs “A” and “B”) toward a range of more appropriated values selected as regard to the associated dimension (period) of the system.
Underlayer powder of appropriate composition and constitution is dissolved in a good solvent, for instance propylene glycol monomethylether acetate (PGMEA), in order to get a 2% by mass solution. The solution is then coated to dryness on a cleaned substrate (i.e. silicon) with an appropriate technique (spin coating, blade coating . . . known in the state of the art) in order to get a film thickness of around 50 nm to 70 nm. The substrate is then baked under an appropriate couple of temperature and time (i.e. 200° C. during 75 seconds, or 220° C. during 10 minutes) in order to ensure the chemical grafting of the underlayer material onto the substrate; the non-grafted material is then washed away from the substrate by a rinse-step in a good solvent, and the functionalized the substrate is blown-dried under a nitrogen (or another inert gaz) stream. In the next step, the BCP solution (typically 1% or 2% by mass in PGMEA) is coated on the as-prepared substrate by spin coating (or any other technique known in the state of the art) in order to get a dry film of desired thickness (typically few tens of nanometer). The BCP film is then baked under an appropriate set of temperature and time conditions (for instance 220° C. during 5 minutes, or any of the other temperatures reported in the Table 2, or by using any other technique or combination of techniques known in the state of the art) in order to promote the self-assembly of the BCP. Optionally, the as-prepared substrate can be immersed in glacial acetic acid during few minutes, then rinsed with deionized water, and then submitted to a mild oxygen plasma during few seconds, in order to enhance the contrast of the nanometric features for SEM characterizations.
One can notice that in the following experiments and examples, the underlayer material is selected so as to be “neutral” for the studied block copolymer (i.e. so that it is able to balance the interfacial interaction between the substrate and the different blocks of the BCP material, to get a non-preferential substrate as regard to the different blocks chemistries) in order to get a perpendicular orientation of the BCP features.
In the following examples, the BCP films are characterized through SEM-imaging experiments with a CD-SEM (Critical Dimensions Scanning Electron Microscope) tool “H-9300” from Hitachi. Pictures are taken at constant magnification (appropriated for the dedicated experiment: for instance defectivity experiments are performed at magn. *100 000 to get enough statistics, whereas critical dimensions (CD) ones are performed at magn. *200 000 or magn. *300 000 to get a better precision in the measured dimensions) in order to allow a careful comparison of the different BCP materials.
For the comparative study, various samples for each BCP were generated under their best self-assembly known process. Their respective SEM characterizations are reported in the Table 4 below:
The various SEM images acquired for each BCP were treated with appropriate softwares already well described in the existing literature, in order to extract their corresponding dimension (period, CD) and dimension uniformity (CDU) of interest in the frame of the present invention. The results are gathered in the following Table 4:
Graphical representation of the CDU variations observed across the different samples reported in the Table 4 are shown in
The results gathered in the Table 4 or its graphical representation in
When the
| Number | Date | Country | Kind |
|---|---|---|---|
| 15.62779 | Dec 2015 | FR | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/EP2016/081386 | 12/16/2016 | WO | 00 |
