The invention relates to a process for manufacturing a nanometric cage of a material able to form a molecular sheet, for example silicon carbide (SiC), and an associated cage.
By “nanometric object” is meant an object of which at least one dimension is of an order of magnitude smaller than a micron. By “cage” is meant a cluster of atoms in which all the chemical bonds are on a surface of which at least one direction is periodic and of which all the dimensions are nanometric.
The exceptional physical and mechanical properties of silicon carbide make it one of the most promising materials for the emerging fields of microelectronics and catalysis, in particular. It is generally considered that silicon carbide is more resistant than carbon to high temperatures and to mechanical stresses.
Silicon carbide has valency properties comparable to those of carbon, owing to the fact that silicon is in the same column of the periodic table as carbon, and that both of these atoms are able to adopt sp2 hybridization or sp3 hybridization and form corresponding bonds with their neighbours.
With reference to
SiC structures in cage form or in tubular shapes are in particular of interest primarily on account of their potential electronic properties.
Multi-wall SiC nanotubes with large inter-wall spacing have been characterized. The wide inter-wall spacing observed is characteristic of a bond of the sp2 type within each wall, which demonstrates the stability of SiC in the sp2 form and therefore opens the route to synthesis of single-wall nanotubes.
As with carbon nanotubes, the orientation of the folding of the sheets with hexagonal lattices leads either to the zigzag shape, i.e. the axis of the cylinder is parallel to two opposite sides of the hexagons, or to a shape of the armchair type, i.e. the axis of the cylinder is perpendicular to two opposite sides of the hexagons.
In experiments it has also been possible to replace 5% of the carbon atoms of a fullerene with silicon atoms, but no more, which means that we do not know how to obtain nanometric cages of stoichiometric silicon carbide or with stoichiometry close to a 1:1 ratio (by which we mean for example between 25 and 75% of silicon or between 30 and 60 or 45 and 55%, the percentages being expressed in number of atoms).
In particular there is no structure equivalent to the carbon C60 fullerene, but with half of the atoms substituted with silicon atoms, as shown in
We do not yet have nanometric cages of stoichiometric or near-stoichiometric silicon carbide in a form offering useful properties under exacting conditions.
Cages of other materials able to form a molecular sheet, in particular of diatomic materials (by diatomic material is meant a material comprising a network in which two atomic species are present in proportions which may or may not be stoichiometric), are also of considerable industrial interest. These are for example cages of boron nitride BN, aluminium nitride AlN, gallium nitride GaN and zinc oxide ZnO. In the particular case of aluminium nitride, the article by Hou et al., Physica E, 27, 2005, 45, discusses the ionization potential of the end of semi-infinite nanotubes. Monatomic materials, such as boron, that are able to form a molecular sheet, are also intended in the context of the invention.
The invention proposes in this context a process for manufacturing a nanometric cage of a material able to form a molecular sheet, comprising a step of formation and conditioning of an object whose general shape is that of a cylinder of revolution, the step of formation and conditioning being adapted in relation to the position of the value of the diameter of the cylinder of revolution relative to a threshold below which folding of the ends of the cylinder is favoured.
Based on this process, a method is provided for manufacturing nanometric cages in a form offering useful properties under exacting conditions.
According to an advantageous feature, the process comprises a step of formation of an object comprising a sheet, said object being suitable for forming, optionally via topological folding, an object whose general shape is that of a cylinder of revolution having a diameter below or alternatively above a threshold below which a reaction of folding of the ends of the cylinder is favoured.
According to an advantageous feature, as said object is suitable for forming a cylinder of revolution via topological folding, the process further comprises a step of thermodynamic activation promoting said topological folding.
According to an advantageous feature, the object comprising a sheet is a nanotube, preferably of “armchair” configuration or of “zigzag” configuration, for example single-wall or multi-wall with wide inter-wall spacing.
According to an advantageous feature, the object having a sheet is a cut element obtained from a sheet.
According to an advantageous feature, said object develops by formation of at least one smoothed polygon from pendant bonds on one of its edges, for example by formation of a polygon with an even, or alternatively odd, number of vertices.
According to an advantageous feature, formation of the object comprises a step of cutting the sheet into at least one cut element and for example cutting comprises a step of ion bombardment or a step of lithography, optionally combined.
According to an advantageous feature, the step of formation and conditioning further comprises a step of placement, on an edge of the object, of an element suitable for causing charge transfer with the cage. This feature is advantageous because it makes it possible to reduce the reactivity of the cage, thus increasing the possible applications.
According to an advantageous feature, the step of formation and conditioning further comprises a step of grafting, on an edge of the object, an element suitable for constraining said edge geometrically, for example a flange. This feature is advantageous because it makes it possible to reduce the reactivity of the cage, thus increasing the possible applications.
In an embodiment, the threshold is equal to 3±2 nm for stoichiometric silicon carbide, the cylinder being of “armchair” configuration.
According to an advantageous feature, the cylinder of revolution has a suitable ratio of diameter to length to minimize the energy per atom of the structure.
According to an advantageous feature, with said cylinder of revolution possessing a stability in a shape different from the shape with minimum energy, the process further comprises a subsequent step of activation, for example thermal activation, promoting development of said cylinder of revolution towards the shape with minimum energy.
For example, the material able to form a molecular sheet is silicon carbide, boron nitride, gallium nitride, aluminium nitride, zinc oxide or boron, and for example stoichiometric or near-stoichiometric silicon carbide or stoichiometric or near-stoichiometric boron nitride.
According to an advantageous feature, the material able to form a molecular sheet is boron used directly in nanotube form.
The invention also relates to the cages obtained by the process thus defined.
According to another general definition of the invention, the latter relates to a nanometric cage of a material able to form a molecular sheet, comprising an object whose general shape is that of a cylinder of revolution, the shape and conditioning of which are adapted as a function of the position of the value of the diameter of the cylinder of revolution relative to a threshold below which folding of the ends of the cylinder is favoured.
According to an advantageous feature, the nanometric cage consists of a cylinder of revolution of diameter below, or alternatively above, a threshold below which folding of the ends of the cylinder is favoured.
In another embodiment the nanometric cage consists of a cylinder of revolution of diameter below a threshold above which folding of the ends of the cylinder is favoured. Its folding is zigzag, armchair or chiral. Its two ends are identical or different.
According to an advantageous feature, the cage is composed of a cylinder of revolution having a ratio of diameter to length suitable for minimizing the energy per atom of the structure.
According to an advantageous feature, the material is silicon carbide, boron nitride, gallium nitride, aluminium nitride, zinc oxide or boron, for example stoichiometric or near-stoichiometric silicon carbide or boron nitride.
The invention also proposes an element of molecular sheet suitable for forming, optionally via topological folding, a cylinder of revolution having a diameter below a threshold below which folding of the ends of the cylinder is favoured.
The invention will now be described in detail, with reference to the attached drawings.
With reference to
During a step E2, the molecular sheet, here of silicon carbide, is cut according to suitable dimensions into cut elements.
During a step E3, the cut elements, having developed to their energy minima, are used industrially.
According to a variant, a step E21 of stabilization of the cut elements is also included, after the cutting step, or simultaneously with the latter.
The set of steps E1, E2, E3 and E21 constitutes a step of formation and conditioning of a nanometric cage.
Details of carrying out the steps thus defined will now be presented. Two general routes are presented, the first using a cylindrical nanotube, and the second a sheet without a periodic dimension.
Regarding step E2, according to a first embodiment, one or more, preferably stoichiometric, silicon carbide nanotubes are used, produced according to a previous step E1. The nanotubes can be arranged in bundles, and the nanotube bundles are lined up. This or these nanotubes are cut out by ion bombardment (with a focused ion beam) for cutting each nanotube into slices.
According to a variant, with reference to
Light appropriate to the resin is applied and a photochemical reaction destroys the resin that is exposed. A proportion of the population of nanotubes is then exposed on the substrate (step F3).
Dry etching, for example by plasma, by ion bombardment or by another technique, is applied on the exposed portions of nanotubes causing cutting thereof (step F4). The ends of nanotubes exposed at the level of the cutting planes, i.e. the surfaces of the mixture to which etching was applied, made bare by the etching, are subjected in certain variants to chemical modifications of functionalization, i.e. grafting by at least one covalent or weaker bond of a chemical group having a function of electrostatic stabilization or of geometric spacing for example or a particular reactivity such as a photosensitive molecule. Finally, the resin residue is washed away and the cut nanotube elements 440 are resuspended (step F5). The functionalization, and the final formulation and presentation, for example in solution or in gas phase, constitute a conditioning process of the nanometric structure. Alternatively, wet etching is used instead of dry etching. The lithography route includes etching.
According to a second embodiment, a graphene sheet of SiC is produced. By this, we mean a molecular sheet of silicon carbide of flat structure. This object being a sheet, the atoms have hybridization of the sp2 type.
Production of this sheet can be carried out for example by treating a wafer (wafer being the English term normally used in industry, equivalent to the French term “tranche”, less commonly used) of SiC at high temperature, or by high-temperature CVD (chemical vapour deposition) of carbon-containing molecules and of silylated molecules such as of ethylene and of silane, respectively, on a surface with <111> crystal geometry of a metal (iridium Ir, nickel Ni, ruthenium Ru, or platinum Pt, for example).
Advantageously, a surface with a hexagonal pattern is used, for example that of a crystal lattice of <111> geometry—face-centred cubic, compatible, in particular with respect to its lattice parameter, with the epitaxial growth of an SiC graphene sheet.
It is possible to use a single gas containing Si and C or a carbon-containing gas (for example ethylene C2H4) and a gas containing silicon (for example silane SiH4), which makes it possible to vary the rates of deposition of the two elements independently of one another.
Employing these techniques on a metallic substrate, oriented <111> to promote the hexagonal pattern, a monolayer of SiC graphene is produced. Alternatively, a sheet of carbon graphene is used, in which silicon atoms are substituted. According to a variant, layers of Si are grown epitaxially on a sheet of graphene or else by transferring a sheet of graphene onto SiO2, then the graphene is reacted with the silicon to obtain SiC graphene.
Optionally, at least a portion of this SiC graphene sheet is transferred onto a flexible substrate for subsequent use. In certain embodiments the flexible substrate is deformed so as to promote transfer. In a variant, the flexible substrate is deformed to promote topological folding of the cut element.
The sheet is then cut into templates, which can be rectangles or parallelograms of suitable size, topological folding of which leads to the formation, spontaneous or thermodynamically activated, of a cage of SiC.
First a slice of the nanotube is formed, which in an embodiment is a nanotube of stoichiometric silicon carbide the atoms of which alternate and the hexagonal network is of “armchair” configuration.
For this, rebonding of two opposite sides of the rectangle is promoted. It is to be noted that in these materials, the thermodynamics and kinetics of the bonding reaction are favourable, in particular owing to the presence of pendant bonds, if the geometry allows the atoms to approach one another in space. Then the reaction E3 of development to minimum energy as mentioned above is allowed to take place, and the latter can be very rapid, or even, under the conditions of observation, instantaneous. In an alternative embodiment, the two steps are reversed or are merged.
In an embodiment, the topological folding reaction can be assisted by temperature or pressure to overcome an energy barrier. In a variant, curvature imparted to the film once it has been transferred onto the flexible substrate is used for promoting folding of the rectangles or parallelograms. In another variant, advantage is taken of the difference in coefficient of thermal expansion between the SiC graphene sheet and the metal, which leads to the creation of folds, etching of these folds promoting the reaction of folding of the rectangles owing to their curvature.
In another variant, with reference to
According to another variant, an SiC graphene sheet is deposited on a metallic support, then a heat source is applied, utilizing the difference in expansion coefficient between the sheet and the metal to create folds, which are hot-etched or are subjected to a stabilization process.
According to another variant, the SiC graphene is deposited using a mask, certain masking-related dimensions of which are nanometric, and masking a metal on which Si and C are deposited in the bare zones. The SiC deposited is therefore directly in the form of rectangles or parallelograms of desired size, which makes it possible to obtain a patterned SiC graphene sheet directly, i.e. having a geometric pattern in its plane, certain dimensions of which are nanometric.
In the embodiment described, a nanometric dimension of the mask is selected so as to obtain the technical effect of folding presented with reference to
Next, the mask is removed and then folding is promoted while the rectangles are on the metallic substrate. According to a variant, folding is promoted after transferring the rectangles onto a flexible substrate.
In another embodiment, with reference to
Moreover, according to step E21, the reactivity of the terminations of the cages obtained is reduced, i.e. the part of the cage, formed with 1, 3 or 5 layers of atoms, which constitutes the free edges of the surface containing the bonds between the atoms. For this, the terminations are functionalized, which prevents the terminations coming close together and possibly reacting to form bonds.
In an embodiment, with reference to
In another embodiment, with reference to
As already mentioned, the functionalization, the formulation (choice of a solvent, of cosolutes, of a preservative or of a stabilizer) and the final presentation, for example in concentrated or dilute solution or in the gas phase, constitute a conditioning process of the nanometric structure.
This conditioning process, as well as the process of formation of the nanometric structure, is adapted in relation to the position of a linear dimension of the structure relative to a threshold value, as noted later with reference to
With reference to
It is to be noted that generally a nanotube is, according to the established notation, similar to a sheet of graphene wound around itself, said sheet of graphene being characterized by two direction vectors, a1 and a2. A vector Ch called chirality vector is perpendicular to the axis about which the graphene is rolled up to form the nanotube. The chirality vector is defined to within a modulo, the modulo being equal to the dimension of the wall in the direction orthogonal to the axis of the tube, and to the diameter of the tube. This vector is decomposed on the basis of the vectors a1 and a2 according to the equality Ch=n a1+m a2. When n=m the tube is of “armchair” configuration, when m=0 the tube is of “zigzag” configuration, and in all other configurations of the pair (n, m) it is called a chiral tube.
The cage 600 comprises 6 layers (numbered and indicated by arrows in
The structure, after cutting of the sheet, develops via formation of m squares and of a polygon with 2 m vertices on the cut edge of the nanotube. In
It is to be noted that the length of the cages obtained in this way with a diatomic material and armchair folding can be variable, with even numbers c of atomic layers perpendicular to the axis of the cylinder, at least equal to c=4, 6 or 8, and whose maximum value is determined solely by the nanometric character of the cage.
In
With reference to
With reference to
The DFT calculations are performed using the BigDFT software, available on the Internet. The number of base functions is selected in such a way that the results for energy per Si—C bond are accurate to within 1 meV. The geometries are considered optimized when the forces between two atoms are less than 0.1 mHa/bohr. The exchange and correlation function used is the PBE functional (J. Perdew, K. Burke and M. Ernzerhof, Phys. Rev. Lett. 77, 3865, 1996). The pseudopotentials are of the form HGH (Hartwigsen et al., Phys. Rev. B 58, 3641, 1998 and Genovese et al., J. Chem. Phys., 125, 074105, 2006), in the Krack variant (Krack, Theor. Chem. Acc., 114, 145, 2005). The calculations are performed at 0 K.
With reference to
The following analytical models are selected respectively for the energy associated with a deformed end and the energy of a slice from the interior: Et(m)=Atm2+Ct and Eb(m)=Ab/m. This choice of model is explained for the first term Et by the fact that the energy of an end comprises the contribution of the energies of the chemical bonds formed, the number of which is proportional to the diameter, conjugated with the energy cost of the curvature of the termination, which itself increases proportionally to the diameter. The conjugation is explained by the fact that the two effects are physically independent of one another. For the second term Eb, the choice of model is explained by the fact that the energy of a slice of a cylinder is proportional to its curvature, which itself is inversely proportional to the diameter.
The values of Eb and Et are determined by analysing the energies of the cages at c=12 and 18 layers (referenced 1110 and 1120), for values of m between 4 and 12. The numerical values determined are: At=208.52, Ct=5888.37, Ab=3974.74 (in meV).
The model thus obtained has been validated with other structures, in particular those with 6, 8 and 24 layers (referenced 1130, 1140 and 1145). A correct optimum diameter is reproduced for each family, as shown by curves 1150 representing the function E (number of layers c, m), referred to the number of bonds of the structure investigated.
Then the energies of the terminations are analysed for these structures with c=6 and c=12, and the model Et(m)=A′t m+C′t. This choice of model is justified by the fact that the energy of the termination in this form is proportional to the number of bonds formed, proportional to the circumference and therefore proportional to the diameter. We then get At=4064.81 and C′t=1473.43 (meV).
For small diameters, the termination with squares and polygon (
With reference to
In addition, this comparison is made including, in the energy values, the energies of the cylindrical body for a given, constant number of layers of atoms. The values of m0 obtained are consistent with those obtained for the terminations alone.
As a function of temperature, the value of m0 varies by the order of a few % or some tens %, up to 20, 40, 60 or 80%.
With reference to
When the diameter of the structure increases, the curvature of the main part of the tube (in particular the part away from the ends) decreases, and the local conformation becomes similar to that of the flat sheet of SiC, with development proportional to the reciprocal of the diameter, favouring cages of large diameter.
The decrease in total energy (including the factor Et and the factor Eb) per SiC pair of the structure is moreover proportional to the length of the latter parallel to its axis.
This mechanism is in competition with the deformation of the folded end, which is increasingly energetically expensive as the diameter increases.
An optimum diameter, corresponding to a minimum energy per SiC pair, is reached when the stabilization induced by the decrease in curvature in the body counterbalances the deformation generated at the end (referenced 1160 in
The following table presents the energy minima 1160 observed. We thus observe a relationship between the diameter and the length of the cages at minimum energy.
Structures whose values of length and of diameter are only a little way away from the values corresponding to the minimum energy also have an energy close to the minimum of the curve shown in
With reference to
The energies of the structures in
According to an alternative embodiment, the material used is boron nitride BN, available in the form of nanotube or sheets. With reference to
According to other embodiments, the material used is boron, aluminium nitride or gallium nitride, zinc oxide, or some other material able to form a molecular sheet. For example, boron available in the form of nanotubes is used.
The values of critical diameter (in nm) corresponding to m0 are greater for gallium nitride and zinc oxide than those found for silicon carbide. A value of about 5 nm, i.e. m0=29, is found for aluminium nitride.
With reference to
Cage 180 comprises c=6 layers, and is of zigzag geometry.
Cage 200 comprises c=6 layers and is of armchair geometry. The number of vertices of the termination polygon can be even or odd.
Cages without folding or constriction (not shown) analogous to cages 180 and 200 constitute conformations with different energies, and there are values of diameter (one value for the zigzag family, one value for the armchair family) for which the energies cross, defining two areas of values of diameter in which the conditioning is adapted differently.
Cage 220 is analogous to a fullerene, comprises 12 pentagons, and constitutes an overall minimum.
Cages 180 and 200 are obtained by the process according to the invention using zigzag or armchair nanotubes, respectively. In the case of boron, thermal activation leads from cage 180 or from cage 200 to cage 220.
In general, the invention is applied to the physics, chemistry and biology of nanostructures, in mechanical, electronic, optical, catalytic or therapeutic functions. For silicon carbide, it is applied in particular in power electronics, heterogeneous catalysis, substrates for materials and electronics.
The invention is not limited to the embodiments described but includes all variants within the scope of a person skilled in the art.
Number | Date | Country | Kind |
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0958327 | Nov 2009 | FR | national |
This application is a nationalization under 35 U.S.C. §371 of PCT Application No. PCT/FR2010/052479, filed Nov. 22, 2010, which claims priority to French Patent Application No. 0958327, filed Nov. 24, 2009, and is incorporated by reference herein.
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/FR2010/052579 | 11/22/2010 | WO | 00 | 9/5/2012 |