Number | Date | Country | Kind |
---|---|---|---|
52375 A/75 | Nov 1975 | IT |
Number | Name | Date | Kind |
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3868271 | Poley et al. | Feb 1975 |
Entry |
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R. T. Tsui et al., "Removal of Polymerized Photoresists by Atomic & Molecular Hydrogen in a Discharge," IBM Tech. Disc. Bull., vol. 9, Feb. 1967, p. 122. |