Claims
- 1. A process for producing a micro Fresnel lens comprising the following steps:
- applying a photoresist layer to a smooth surfaced substrate;
- exposing the photoresist layer to concentric rings of actinic radiation;
- developing the exposed photoresist layer to form a photoresist pattern duplicating concentric rings for the desired micro fresnel lens;
- forming an electrode element on said resist pattern by depositing a conductive metal;
- depositing a nickel layer on said conductive metal electrode element through electroforming wherein the pattern of the concentric rings is transferred onto said nickel layer with said conductive metal being used as an electrode;
- peeling said nickel layer from both the electrode and the substrate to form a nickel stamper;
- applying a liquid polymer on the grooved surface of said nickel stamper to form a photopolymer layer;
- pressing a highly flat plate, substantially transparent to UV radiation, against the photopolymer layer;
- curing said photopolymer layer by illumination with UV radiation that is propagated through said flat plate; and
- peeling said cured polymer layer from said nickel stamper.
- 2. The process of claim 1, wherein said smooth-surfaced substrate includes glass.
- 3. The process of claim 1, wherein said smooth-surfaced substrate includes plastic.
- 4. The process of claim 1, wherein said smooth-surfaced substrate includes metal.
- 5. The process of claim 1, wherein said actinic radiation comprises electron beam.
- 6. The process of claim 1, wherein said actinic radiation comprises laser beam.
- 7. The process of claim 1, wherein said actinic radiation comprises UV rays.
- 8. The process of claim 1, wherein said conductive metal is one selected from the group consisting of silver and nickel.
- 9. The process of claim 1, wherein the step of forming and depositing the nickel layer comprises depositing metallic nickel by sputtering.
- 10. The process of claim 1, wherein the step of forming and depositing the nickel layer comprises depositing nickel compound by sputtering.
- 11. The process of claim 1, wherein the step of forming and depositing the nickel layer comprises depositing metallic nickel by evaporation.
- 12. The process of claim 1, wherein the step of forming and depositing the nickel layer comprises depositing nickel compound by evaporation.
- 13. The process of claim 1, wherein the step of applying the liquid photopolymer comprises dripping the photopolymer on the grooved surface of the nickel stamper.
Priority Claims (1)
Number |
Date |
Country |
Kind |
58-210763 |
Nov 1983 |
JPX |
|
Parent Case Info
This application is a continuation, of application Ser. No. 669,793, filed Nov. 9, 1984, abandoned.
US Referenced Citations (9)
Foreign Referenced Citations (2)
Number |
Date |
Country |
60-103307 |
Jun 1985 |
JPX |
60-103308 |
Jun 1985 |
JPX |
Continuations (1)
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Number |
Date |
Country |
Parent |
669793 |
Nov 1984 |
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