Number | Date | Country | Kind |
---|---|---|---|
4-134556 | May 1992 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4728528 | Ishihara | Mar 1988 | |
4894332 | Lane | Jan 1990 | |
5215787 | Homma | Jun 1993 |
Number | Date | Country |
---|---|---|
57-100748 | Jun 1982 | JPX |
Entry |
---|
Homma, Yamaguchi, Murao, "Room-Temperature Chemical vapor deposition silicon oxide fluoride film formation technology for the interlayer in submicron multilevel interconnections" J. Electrochem. Soc., 140(3) 1993 pp. 687-692. |
Vines & Gupta, "Interlevel Dielectric Planarization with Spin-on Glass-Films" IEEE, Jun. 9, 1986 pp. 506-515. |
Chen, Chao, Lin, Tsai & Tseng "Spin-on Glasses: Characterization and Application," Jun. 1988 IEEE, pp. 306-312. |